CN208238995U - A kind of ceramic resistance type pressure sensor - Google Patents
A kind of ceramic resistance type pressure sensor Download PDFInfo
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- CN208238995U CN208238995U CN201820803616.6U CN201820803616U CN208238995U CN 208238995 U CN208238995 U CN 208238995U CN 201820803616 U CN201820803616 U CN 201820803616U CN 208238995 U CN208238995 U CN 208238995U
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Abstract
The utility model discloses a kind of ceramic resistance type pressure sensors, including generating the ceramic diaphragm of micro-displacement for sensing measured medium pressure, cooperating the base of ceramic of cavity that is fixed and forming predetermined thickness with ceramic diaphragm and the thick film circuit on the inside of ceramic diaphragm for detecting micro-displacement and being converted to corresponding canonical measure signal being arranged in.The utility model is using capacitance type structure and resistance-type principle, the pressure of measured medium directly acts on ceramic diaphragm, so that ceramic diaphragm is generated the micro-displacement directly proportional to pressure medium, and then the micro-displacement is detected by the varistor of thick film circuit and this displacement is converted into the canonical measure signal corresponding to this pressure.Ceramic diaphragm is directly attached on firm base of ceramic when superpressure, and then ensure that ceramic diaphragm will not generate excessive modification from structure, has very strong shock resistance and anti-overload ability, and stability is high, and measurement accuracy is high.
Description
Technical field
The utility model relates to pressure sensor technique field more particularly to a kind of ceramic resistance type pressure sensors.
Background technique
Pressure sensor is one of the important technology of modern surveying and automated system, is widely used in various industrial automatic controls
Environment, have the advantages that small in size, light-weight, high sensitivity, it is reliable and stable, convenient for integrated, can be widely applied to pressure, height
The measurement and control of degree, acceleration, flow velocity, pressure.In numerous pressure sensor materials, ceramics are a kind of generally acknowledged high-elastic
Property, anticorrosive, wear-resistant, shock resistance and vibration material.
Existing ceramic capacitive pressure sensor, the effect of ceramic condenser compression power, diaphragm occur bending and deformation, capacitance
It changes, pressure acts directly on ceramic diaphragm, the variation and pressure of the capacitance between base electrode and membrance electrode
Proportional relationship, pressure pass through pressure size known to measurement capacity to proportional relationship.Capacitor is exported small signal by control circuit
It amplifies, the rear output format according to configuration of calibrated linear etc. is supplied to the use of rear class system.
But pressure measurement range of the presently commercially available above-mentioned ceramic pressure sensor major applications in middle high range, example
As between (0.2Mpa-50Mpa), being rarely used in the measurement range of lower range (lower than 5Kpa), and its impact resistance pressure is only
There is 2-3 times (representative value is 2.5 times) of its maximum range.Agricultural unmanned plane level gauging, city ponding level gauging and
In the application scenarios such as the hygiene-types level gauging such as food, medicine, it is often necessary to which the pressure that can incude ultra low pressure variation passes
Sensor, the liquid level for measuring ultralow range change.To solve the above problems, it is necessory to provide a kind of ceramic resistor of innovation
Formula pressure sensor, to overcome the defect in the prior art.
Utility model content
The technical problem to be solved by the present invention is in view of the above drawbacks of the prior art, provide a kind of ceramic electrical
Resistance pressure transducer.
The technical scheme adopted by the utility model to solve the technical problem is as follows: one side according to the present utility model, mentions
For a kind of ceramic resistance type pressure sensor, including for sense measured medium pressure and generate micro-displacement ceramic diaphragm, with
Ceramic diaphragm cooperation is fixed and forms the base of ceramic of the cavity of predetermined thickness and is arranged on the inside of ceramic diaphragm for detecting
Micro-displacement and the thick film circuit for being converted to corresponding canonical measure signal.
Preferably, the ceramic diaphragm is sintered together to form cavity by glass paste and base of ceramic.
Preferably, the predetermined thickness of the cavity is 70-80um.
Preferably, the center of the base of ceramic be provided with one for ventilation ventilation through-hole.
Preferably, the base of ceramic further includes 6 electrode through-holes.
Preferably, the marginal position of the base of ceramic is provided with a location hole used for positioning.
Preferably, the thick film circuit includes Wheatstone bridge；The Wheatstone bridge includes varistor R1, pressure-sensitive electricity
Hinder R2, varistor R3 and varistor R4.
Preferably, the Wheatstone bridge is full-bridge differential circuit.
It preferably, further include being arranged on the inside of base of ceramic for trimming circuit to thick film circuit progress laser trimming.
Preferably, the circuit that trims includes zero compensation resistance R5 and zero compensation resistance R6；The zero compensation electricity
Resistance R5 connects with varistor R1, and zero compensation resistance R6 connects with varistor R2.
Implement the utility model ceramic resistance type pressure sensor technical solution, have the following advantages that or the utility model has the advantages that
For the utility model ceramic resistance type pressure sensor using capacitance type structure and resistance-type principle, the pressure of measured medium is straight
It connects and acts on ceramic diaphragm, so that ceramic diaphragm is generated the micro-displacement directly proportional to pressure medium, and then pass through thick film circuit
Varistor detects the micro-displacement, i.e., this displacement is converted into the canonical measure signal corresponding to this pressure.When superpressure
Ceramic diaphragm is directly attached on firm base of ceramic, and then ensure that ceramic diaphragm will not generate excessive modification from structure,
Since ceramic diaphragm uses high performance industrial ceramics, thus make sensor that there is very strong shock resistance and anti-overload ability, surely
Qualitative height, measurement accuracy is high, is suitable for different ranges.
Detailed description of the invention
It, below will be to required in embodiment description in order to illustrate more clearly of the technical solution of the utility model embodiment
The attached drawing used is briefly described, it is therefore apparent that and the drawings in the following description are merely some embodiments of the present invention,
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings
Other attached drawings, in attached drawing:
Fig. 1 is the first state schematic diagram of the utility model ceramic resistance type pressure sensor embodiment；
Fig. 2 is the second status diagram of the utility model ceramic resistance type pressure sensor embodiment；
Fig. 3 is the third state schematic diagram of the utility model ceramic resistance type pressure sensor embodiment.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, what be will be described below is various
Embodiment will refer to corresponding attached drawing, these attached drawings constitute a part of embodiment, and which describe realize that this is practical new
The various embodiments that type may use.It should be appreciated that other embodiments also can be used, or embodiment enumerated herein is carried out
Modification structurally and functionally, without departing from the scope of the utility model and essence.
As shown in Figure 1-3, the utility model provides a kind of ceramic resistance type pressure sensor embodiment, including for sensing
Measured medium pressure and the pottery for generating the ceramic diaphragm 10 of micro-displacement, cavity fixed with ceramic diaphragm 10 and forming predetermined thickness
Porcelain pedestal 20 and it is arranged on the inside of ceramic diaphragm 10 for detecting micro-displacement and being converted to the thickness of corresponding canonical measure signal
Film circuit (not shown go out).Specifically, ceramic diaphragm 10 has when by measured medium (can be liquid, gas etc.) pressure
Micro-displacement (slight deformation), thick film circuit detection are converted into corresponding canonical measure signal after recognizing the micro-displacement, and
Range, the volume of measured medium etc. number are provided by control device (figure is not shown) progress signal amplification, analysis, calculating
According to.
In the present embodiment, the ceramic diaphragm 10 is sintered together by glass paste with base of ceramic 20, and then is made
The cavity of predetermined thickness is formed before obtaining ceramic diaphragm 10 and base of ceramic 20, the predetermined thickness of the cavity is preferably 70-80um.
Specifically, ceramic diaphragm 10 can be replaced according to the requirement of different ranges, that is, pass through the thickness and ceramic diaphragm of change ceramic diaphragm
Spacing between base of ceramic is applicable to the pressure measurement of different ranges, and then covers different application scenarios.Use scope
Extensively, being resistant to surge (burst pressure) is 10 times or more of its range, and overload capacity is strong, and substantially increase sensor can
By property.
As shown in Fig. 2, in the present embodiment, the center (such as center location) of the base of ceramic 20 is provided with one
A ventilation through-hole 21 for ventilation, the ventilation through-hole 21 make base of ceramic 20 can be adapted for the measurement without atmospheric pressure
Environment, such as Eastern China, western part of China will not cause the generation of ceramic diaphragm 10 to be slightly variable because ambient atmosphere pressure changes
Shape influences measurement accuracy or even ceramic diaphragm explosion because of the variation of atmospheric pressure, plays to ceramic diaphragm 10 extraordinary
Protective effect.Base of ceramic 20 further includes 6 electrode through-holes 22,23,24,25,25 and 27, this 6 electrode through-holes are just the same,
It is used to electrode connection, position, which is specifically arranged, to be arranged as the case may be, and then extraneous electrode wires can be with thick film electricity
Road is attached.Meanwhile a location hole 28 used for positioning is provided at the marginal position of the base of ceramic 20, it is right with this
It answers, ceramic diaphragm has same location hole 11, for base of ceramic 20 to be fixed on the positioning, so that base of ceramic
20 will not arbitrarily rotate.
It in the present embodiment, further include being arranged on the inside of base of ceramic 20 to repair for carrying out laser trimming to thick film circuit
It adjusts circuit (not shown go out), the thick film circuit setting can be used for detecting ceramic diaphragm because of quilt in 10 inside of ceramic diaphragm
It surveys pressure medium and the micro-displacement that generates and is converted into corresponding canonical measure signal.More specifically, thick film circuit is logical
Cross electrode through-hole and be attached with circuit and control circuit (not shown go out) is trimmed, so trim circuit can to thick film circuit into
Row laser resistor trimming, and the canonical measure signal that thick film circuit measures is sent to control circuit and is analyzed and processed.
More specifically, the thick film circuit includes Wheatstone bridge, and the circuit that trims includes zero compensation resistance R5
With zero compensation resistance R6, wherein zero compensation resistance R5 connects with varistor R1, zero compensation resistance R6 and varistor
R2 series connection.Wherein, Wheatstone bridge includes varistor R1, varistor R2, varistor R3 and varistor R4, wherein 4
A varistor is just the same, and placement location and effect are different at least in physical circuit.More specifically, the favour this
Energization bridge is full-bridge differential circuit.The zero compensation resistance R6 and varistor R2 be can laser resistor trimming pressure-sensitive electricity
Resistance.It at normal temperature, is set by laser resistor trimming in later period calibration process for exporting progress zero compensation to Wheatstone bridge
It is standby that zero compensation resistance R5 and R6 are adjusted, so that offset output is reached given specification.
The design and process route of the application ceramic resistance type pressure sensor are as follows:
Material selection: ceramic diaphragm 10 uses the Al2O3 ceramics elastomer of 90%-99%, it is desirable that flexible sheet is smooth, thick
Degree is uniformly, internal stress is small, easy processing, at low cost；Base of ceramic 20 equally uses the Al2O3 ceramics elastomer of 90%-99%,
Ask size accurate.Ceramic material (aluminium oxide Al 2O3 or zirconium oxide ZrO3) has high insulation, and corrosion-resistant, high elastic modulus is low slow
Stagnant feature is very suitable for making pressure-strain device.
According to sensor application feature, conductive strips use Ag/Pd slurry, and wherein Pd content is 8% or more, good conductivity,
It is tightly combined with diaphragm.The varistor of thick film circuit uses ruthenate thick-film resistor paste, takes low temperature to float, Large strain coefficient
The pressure-sensitive slurry of (GF > 12) carries out silk-screen printing, be ruthenate thick-film resistor paste (PbRuO3, RuO2, SIO2 glass, it is organic
Solvent, the materials such as dispersing agent), it is suitble to silk-screen and sintering, for silk-screen film thickness in 20-30uM, sintering temperature is 850 DEG C, is burnt out
Thick film circuit thickness about 10-15um, be worth about 10K ± 3K, temperature coefficient (TCR) is lower than 100PPM, with ceramic close knot
It closes, film thickness and material are suitble to laser trimming, and can satisfy -40 DEG C~125 DEG C requirements.
Structure design: ceramic diaphragm is made according to different measuring ranges, and passes through technology controlling and process diaphragm deformation range.Ceramics
The predetermined thickness (H) of cavity between diaphragm and base of ceramic cannot be too big, because when ceramic elastomer (ceramic diaphragm) is overloaded
When pressure, on the one hand, ceramic diaphragm cracks before not in contact with base of ceramic, and then loses protection and damage, another party
Face, overload can be such that the linear relationship of sensor piezoresistive effect destroys, and the varistor of thick film circuit changes no longer with pressure at just
Than linear and stability also has a great impact, and using ceramic diaphragm, in linear deformation range, (practical ranges are low as far as possible
In 0.1mm).Can not be too small, too small that sensor deformation quantity will be made to be limited, the range ability of measurement is too small, and design is not achieved
Purpose.
Technical process: by thick film screen printing by Ag/Pb conductive strips and thick film circuit (varistor) mask graph according to
It is secondary to be transferred on periphery fixed ceramic diaphragm, it is formed through high temperature sintering；Then, print burning trims circuit (zero point on base of ceramic
Compensate resistance), finally, ceramic diaphragm and base of ceramic low-temperature sintering with ceramic ring are consolidated at periphery using low temperature glass slurry
The measurement sensor of branch.
Detailed process:
(1) design structure figure designs thick film circuit figure, makes printing screen；
(2) ceramic diaphragm laser scribing, ceramic diaphragm are made by the tape casting, and high temperature sintering forms, and thickness is uniform and smooth, root
According to different ranges, the different ranges such as 0.1mm/0.15mm/0.2mm/0.3mm/0.5mm/0.635mm/ .../1.1mm is selected to want
Seek the ceramic diaphragm of corresponding different-thickness；
(3) base of ceramic dry powder is pressed and molded, high temperature sintering, the pottery having a size of different-diameters such as D=21mm, D=32mm
Porcelain pedestal, base of ceramic diameter is bigger, better to the susceptibility of lower range.
(4) it successively prints conductive strips respectively on ceramic diaphragm, is sintered, print thick film circuit (varistor), be sintered, print
Brush glass, sintering republish outer ring glass, control ceramic diaphragm thickness in 20um ± 5um；Specifically, utilizing Large strain coefficient
The thick film strain material of (GF > 12), ceramic diaphragm (0.1- of the direct silk-screen in ultra-thin aluminium oxide Al 2O3 or zirconium oxide ZrO3
0.3mm), four sensitive resistances and circuit are produced in ceramic diaphragm, shape paired pressure is quick by thick film print technology on it
The Wheatstone bridge of sense；
(5) conductive strips to be printed on base of ceramic, are sintered, printing trims circuit, it is sintered, printing protection glass, sintering, then
Outer ring glass is printed, controls the thickness of base of ceramic in 20um ± 5um；
(6) low-temperature adhesion glass is printed again in base of ceramic outer ring, the ceramic diaphragm printed is fitted in ceramic base
On seat, light pressure guarantees that fitting is close, is sintered again, guarantees that glass sintering is secured between ceramic diaphragm and base of ceramic, and control viscous
Connecing thickness of glass is about 30-40um, the above 3 circle total 70-80um of glass sintering thickness controls ceramic diaphragm and base of ceramic
Spacing between 70-80um, it is ensured that product reaches the requirement of design；
(7) through-hole carries out via metal using low temperature silver paste, by the thickness for trimming circuit and ceramic diaphragm of base of ceramic
Film circuit carries out electrical communication, and then guarantees the integrality of circuit；
(8) laser trimming carries out laser trimming to thick film circuit using laser trimming equipment, guarantees sensor zero point voltage
Output is within 0-5mV, convenient for the amplification, filtering and range designation of subsequent control circuit；
(9) it assembles, is assemblied according to customer requirement on the bracket of unstressed influence, by control circuit and software to sensing
Device is demarcated, and the ceramic resistance type pressure sensor that can measure the lower range of 0-5Kpa is finally produced.
The pressure sensor that can incude ultralow pressure change finally is produced, the liquid level for measuring ultralow range becomes
Change, be mainly used for agricultural unmanned plane level gauging, city ponding level gauging and surveyed with hygiene-types liquid levels such as food, medicine
The application scenarios such as amount.The micro- fusion pressure force sensor technologies of alternative part MEMS glass and sputtered thin film pressure transducer technology, and
Cost is greatly lowered, there is high cost performance.
It is strong that ceramic resistance type pressure sensor uses the sensor of periphery fixed round ceramic elastomer both to increase structure
Degree, and can be reduced the influence of sensor encapsulation stress, improve sensor long-time stability.Ceramic resistance type pressure sensor by
In the case where pressure, when the one side of ceramic diaphragm is acted on by pressure P, ceramic diaphragm deforms, and prints and burns on ceramic diaphragm
By thick film circuit (i.e. the Wheatstone bridge that 4 varistors form), because of piezoresistive effect principle, Wheatstone bridge is exported with pressure
P value changes linearly, and voltage signal improves outputting standard measuring signal by amplifying circuit.
The utility model ceramic resistance type pressure sensor is using capacitance type structure and resistance-type principle, measured medium
Pressure directly act on the ceramic diaphragm of sensor, so that ceramic diaphragm is generated the microbit directly proportional to measured medium pressure
It moves, and then the micro-displacement is detected by the varistor of thick film circuit, i.e., this displacement is converted into corresponding to this pressure
Canonical measure signal.Ceramic diaphragm is directly attached on firm base of ceramic when superpressure, due to ceramic diaphragm and base of ceramic
Cavity thickness be 70-80um, therefore the maximum displacement of ceramic diaphragm can only be 70-80um when overloading, and then protect from structure
Excessive modification will not be generated by having demonstrate,proved ceramic diaphragm, since ceramic diaphragm uses high performance industrial ceramics, thus make to sense utensil
There are very strong shock resistance and anti-overload ability, stability is high, and measurement accuracy is high, is suitable for different ranges.Can be widely used for agricultural,
Many industrial circles such as petroleum, chemical industry, electric power, metallurgy, pharmacy, food are suitable for the various occasions and medium of commercial measurement.
The above is only the preferred embodiment of the utility model only, and those skilled in the art know, is not departing from this
In the case where the spirit and scope of utility model, various changes or equivalent replacement can be carried out to these features and embodiment.Separately
Outside, it under the introduction of the utility model, can modify to these features and embodiment to adapt to particular situation and material
Without departing from the spirit and scope of the utility model.Therefore, the utility model is not by specific embodiment disclosed herein
It limits, the embodiment within the scope of fallen with claims hereof belongs to the protection scope of the utility model.
Claims (10)
1. a kind of ceramic resistance type pressure sensor, which is characterized in that including generating microbit for sensing measured medium pressure
The ceramic diaphragm (10) of shifting, the base of ceramic for cooperating cavity that is fixed and forming predetermined thickness with the ceramic diaphragm (10)
(20) and setting is believed on the inside of the ceramic diaphragm (10) for detecting the micro-displacement and being converted to corresponding canonical measure
Number thick film circuit.
2. ceramic resistance type pressure sensor according to claim 1, which is characterized in that the ceramic diaphragm (10) passes through
Glass paste and the base of ceramic (20) are sintered together to form the cavity.
3. ceramic resistance type pressure sensor according to claim 2, which is characterized in that the predetermined thickness of the cavity is
70-80um。
4. ceramic resistance type pressure sensor according to claim 1, which is characterized in that in the base of ceramic (20)
Heart position be provided with one for ventilation ventilation through-hole (21).
5. ceramic resistance type pressure sensor according to claim 4, which is characterized in that the base of ceramic (20) is also wrapped
Include 6 electrode through-holes (22,23,24,25,26,27).
6. ceramic resistance type pressure sensor according to claim 5, which is characterized in that the side of the base of ceramic (20)
Edge position is provided with a location hole (28) used for positioning.
7. ceramic resistance type pressure sensor according to claim 1, which is characterized in that the thick film circuit include favour this
Energization bridge；
The Wheatstone bridge includes varistor R1, varistor R2, varistor R3 and varistor R4.
8. ceramic resistance type pressure sensor according to claim 7, which is characterized in that the Wheatstone bridge is full-bridge
Differential circuit.
9. ceramic resistance type pressure sensor according to claim 7, which is characterized in that further include being arranged in the ceramics
For trimming circuit to thick film circuit progress laser trimming on the inside of pedestal (20).
10. ceramic resistance type pressure sensor according to claim 9, which is characterized in that the circuit that trims includes zero
Point compensation resistance R5 and zero compensation resistance R6；
The zero compensation resistance R5 connects with the varistor R1, the zero compensation resistance R6 and the varistor R2
Series connection.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201820803616.6U CN208238995U (en) | 2018-05-28 | 2018-05-28 | A kind of ceramic resistance type pressure sensor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108444621A (en) * | 2018-05-28 | 2018-08-24 | 深圳研勤达科技有限公司 | A kind of ceramic resistance type pressure sensor |
| CN109029826A (en) * | 2018-08-27 | 2018-12-18 | 广州西博臣科技有限公司 | A kind of anti high overload bellow-type ceramic resistive type pressure sensor |
| CN110529125A (en) * | 2019-09-05 | 2019-12-03 | 中铁工程装备集团有限公司 | A kind of series connection pressure sensor applied to shield machine shield tail sealing system |
| CN115855327A (en) * | 2023-02-22 | 2023-03-28 | 成都凯天电子股份有限公司 | Adjustable resistance ceramic substrate applied to silicon piezoresistive pressure sensor and manufacturing method thereof |
-
2018
- 2018-05-28 CN CN201820803616.6U patent/CN208238995U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108444621A (en) * | 2018-05-28 | 2018-08-24 | 深圳研勤达科技有限公司 | A kind of ceramic resistance type pressure sensor |
| CN109029826A (en) * | 2018-08-27 | 2018-12-18 | 广州西博臣科技有限公司 | A kind of anti high overload bellow-type ceramic resistive type pressure sensor |
| CN110529125A (en) * | 2019-09-05 | 2019-12-03 | 中铁工程装备集团有限公司 | A kind of series connection pressure sensor applied to shield machine shield tail sealing system |
| CN115855327A (en) * | 2023-02-22 | 2023-03-28 | 成都凯天电子股份有限公司 | Adjustable resistance ceramic substrate applied to silicon piezoresistive pressure sensor and manufacturing method thereof |
| CN115855327B (en) * | 2023-02-22 | 2023-06-09 | 成都凯天电子股份有限公司 | Adjustable resistance ceramic substrate applied to silicon piezoresistive pressure sensor and manufacturing method thereof |
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