CN208132211U - Local laser scoring device - Google Patents

Abstract

The utility model provides a kind of local laser scoring device, including：To prepare thin-film solar cells, the vacuum chamber of substrate is placed；And the outside of the vacuum chamber is set, the laser scribing device that the substrate placed in the vacuum chamber is delineated using laser.Local laser scoring device provided by the utility model is when manufacturing copper-indium-gallium-selenium (Cu-In-Ga-Se) solar battery cell, for the P1 (back electrode in battery unit manufacturing technology steps：Mo), P2 (light absorbing layer：CIGS), P3 (transparent conductive film：ZnO) technique, from it is original from be moved out in vacuum chamber under atmospheric condition processed instead of keep processed under vacuum conditions, saved process, improved production efficiency；The local laser scoring device of the utility model simplifies thin-film solar cells manufacturing process, shortens manufacturing time.

Description

Local laser scoring device

Technical field

The utility model relates to laser grooving and scribing fields, and in particular, to a kind of local laser scoring device.

Background technique

The compound film that CIGS thin film type solar battery is made of four kinds of copper, indium, gallium, selenium elements, having will too Positive energy hot-cast socket is the pn mixing junction structure and the distinctive integrated morphology of thin-film solar cells of electric current.As shown in Figure 1, CIGS solar battery is made of glass substrate/MO layers/cigs layer/CdS/TCO transparent electrode layer (ZnO, ITO).

As shown in Fig. 2, CIGS thin film solar battery is once to form multiple unit solar energy on a large substrate The overall structure of battery unit, it is different from the existing solar battery manufactured using silicon wafer, product modular can be made Necessary process is simplified, and can substantially reduce batch production cost.Overall structure is according to structure shown in figure glass base The MO/CIGS/CdS/ZnO layer formed on plate, by using the composition scribing process of laser and needle by solar battery cell string Connection is connected and is formed.

CIGS thin film solar battery is manufactured by technique shown in Fig. 3.Firstly, wet-cleaned glass substrate, by splashing It penetrates deposition and forms Mo layers.Then, composition is formed by laser scribing technique, and CIGS is deposited by heat deposition technology on it Layer.Then, after making CdS layer growth film forming by CSD (chemical surface deposition) technology, then mechanical needle drawing technique is executed.Later, Transparent electrode layer is deposited using sputter-deposition technology, and manufacture CIGS solar battery is completed by mechanical needle drawing technique Panel.The manufacturing process of high-purity CIGS solar battery mainly carries out in 10,000 grades of toilets.

Diode pumping solid laser due to its high quality laser activity and be widely used in micro Process.As solid The general structure of the high power D PSS laser of laser is with active laser medium Nd：Centered on YAG stick, diode array will It is surrounded and pump energy.Photon is moved and is amplified between optical resonantor, so that energy passes through as partially reflecting mirror OC (Output Coupler) outward export.Nd：YAG laser is especially widely used in P1 (the back electricity of thin-film solar cells Pole：Mo delineation).In addition, Nd：YAG laser, Nd：YLF Lasers and Nd：YVO4 laser is applied to be modified photomask, special Not, green laser is applied to the delineation of thin-film solar cells P2 and P3 at present.

Traditional Laser scribing techniques first pass through in vacuum chamber in CIGS thin film type solar battery manufacturing process DC sputtering sedimentation Mo (back electrode), then again to carrying out laser grooving and scribing under atmospheric condition, therefore technique is cumbersome, each unit The problems such as manufacturing time extends, and production development rate reduces and generates particle.

Utility model content

For the defects in the prior art, the purpose of the utility model is to provide a kind of local laser scoring devices.

According to a kind of local laser scoring device provided by the utility model, including：

To prepare thin-film solar cells, the vacuum chamber of substrate is placed；And

The outside of the vacuum chamber is set, the laser delineated using laser to the substrate placed in the vacuum chamber Scoring device.

Preferably, further include being located above the vacuum chamber, will be used to be inscribed on the upside of radiating laser beams to the substrate The Laser Driven portion of the substrate handled in the vacuum chamber；

Positioned at the top in the Laser Driven portion, output sends out the Laser Driven portion for being directed at the visual signal of position The laser penetrated has the vision portion of rectilinear propagation；And

Below the vacuum chamber, receives the visual signal of the vision portion output and be directed at the laser driver position The aligned portions set.

It preferably, further include the transport unit that the Laser Driven portion can be made mobile according to predetermined pattern.

Preferably, the substrate includes back electrode layer, light absorbing layer and transparent conductive film layer,

The laser scribing device further includes control unit, makes it to each of the substrate for controlling the Laser Driven portion Delineated to layer-selective.

Compared with prior art, the utility model has following beneficial effect：

1, local laser scoring device provided by the utility model is in manufacture copper-indium-gallium-selenium (Cu-In-Ga-Se) sun When energy battery unit, for the P1 (back electrode in battery unit manufacturing technology steps：Mo), P2 (light absorbing layer：CIGS),P3 (transparent conductive film：ZnO) technique is processed instead of being maintained at true from original from being moved out under atmospheric condition in vacuum chamber It is processed under dummy status, has saved process, improve production efficiency；

2, the local laser scoring device of the utility model simplifies thin-film solar cells manufacturing process, shortens manufacture Time.

Detailed description of the invention

Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other spies of the utility model Sign, objects and advantages will become more apparent upon：

Fig. 1 is the structural schematic diagram of CIGS thin film type solar battery.

Fig. 2 is the overall structure diagram of CIGS thin film.

Fig. 3 is the schematic diagram for illustrating CIGS solar cell fabrication process.

Fig. 4 is the structural schematic diagram of the local laser scoring device of this utility model.

Fig. 5 is the schematic cross-section of Fig. 4.

Fig. 6 is the schematic diagram for illustrating the vacuum chamber suitable for Fig. 4.

Specific embodiment

The utility model is described in detail combined with specific embodiments below.Following embodiment will be helpful to this field Technical staff further understands the utility model, but does not limit the utility model in any form.It should be pointed out that ability For the those of ordinary skill in domain, without departing from the concept of the premise utility, several changes and improvements can also be made. These are all within the protection scope of the present invention.

As shown in figure 4, local laser scoring device of the invention, including in order to prepare thin-film solar cells, place base The vacuum chamber 130 of plate and the outside that the vacuum chamber 130 is set, using laser to the substrate placed in the vacuum chamber 130 The laser scribing device delineated.

The laser scribing device includes being located at 130 top of vacuum chamber, by radiating laser beams to the substrate 160 For being inscribed in the Laser Driven portion 120 of the substrate 160 handled in vacuum chamber 130 on the upside of (Fig. 6)；Swash positioned at described The top in optical drive portion 120, the laser that exporting emits the Laser Driven portion 120 for being directed at the visual signal of position have The vision portion 110 of rectilinear propagation；And it is located at 130 lower section of vacuum chamber, visual signal is received from the vision portion 110 and is aligned The aligned portions 140 of 120 position of Laser Driven portion；It can make the transmission that the Laser Driven portion 120 is mobile according to predetermined pattern Portion；Control the control unit that the Laser Driven portion 120 delineates it to each layer-selective of the substrate 160.

The aligned portions 140 are located at the upside of support frame 150.

The substrate 160 is made of back electrode layer, light absorbing layer and transparent conductive film layer, the control of the laser scribing device Portion processed can be achieved to be inscribed into that desired layer to each layer of the substrate.Certainly, the information for the layer to be scored need to pass through Operator's input and setting.

The effect of the local laser scoring device of the structure is as follows.

Firstly, as shown in fig. 6, the substrate 160 for being used to prepare thin-film solar cells is placed in vacuum chamber 130, very Its internal conversion is enabled substrate 160 equably to be planarized by cavity 130 at vacuum state, is then handled again.That is, It is sputtered in vacuum chamber 130 by DC and Mo (back electrode) is deposited on substrate 160.

As described above, control unit controls vision portion 110 after substrate 160 deposits Mo (back electrode) in vacuum chamber 130, make It exports visual signal to aligned portions 140, and the position for being directed at the laser emitted from the Laser Driven portion 120 makes it have Rectilinear propagation, aligned portions 140 are directed at Laser Driven portion 120 according to the visual signal, so that being emitted by Laser Driven portion 120 Laser to substrate 160 have rectilinear propagation.

At this point, the Laser Driven portion 120 is by transport unit according to predetermined pattern movement, the transmission composition of the transport unit It is stored in the internal storage of control unit or is connected in the external memory of control unit, the transport unit is read by control unit The transmission for the transmission composition for taking and exporting controls signal to control.

The vision portion 110 identifies the alignment mark being shown on substrate 160 and is sent to control unit as image (not shown), after analyzing image, aligned portions 140 play the location point and substrate 160 Laser Driven portion 120 The effect of alignment mark alignment.The position and initially setting that aligned portions 140 are used to be aligned the substrate 160 provided by vision portion 110 Laser Driven portion 120 position, control unit (not shown) plays the role of mutually linking it.

The vision portion 110 is fixed on the top of vacuum chamber 130, and aligned portions 140 are located at the vacuum chamber for placing substrate 160 130 interior lower ends are moved as unit of micron along X-axis, Y-axis, θ axis, up/down.

The Laser Driven portion 120 is installed in linear motion motor (not shown) portion, and the linear motion motor section can Laser Driven portion 120 is moved in X-axis and Y-axis in the error range less than 5 microns.

As described above, the position for the substrate 160 that aligned portions 140 provide vision portion 110 and the position in Laser Driven portion 120 It is aligned in 3 micron ranges.The Laser Driven portion 120 being mounted in linear motion motor section executes delineation behaviour according to predetermined pattern Make.

The Laser Driven portion 120 determines the intensity of the laser beam of transmitting according to the control of control unit (not shown), and And laser beam is inscribed into the random layer on the substrate with multiple layers.The Laser Driven portion 120 (does not show according to control unit Control out) is delineated according to predetermined pattern, and the type and intensity of laser beam are determined according to the material being scored.

After depositing Mo (back electrode) on the substrate 160, laser is made to pass through substrate 160, when laser contact Mo (back electricity Pole) layer when, Mo (back electrode) is deteriorated with the width of laser beam, and is scored according to scheduled composition.

When the alignment mark information in the aligned portions 140 that substrate 160 is placed on vacuum chamber 130, and on substrate 160 from When visual unit 110 is sent to control unit (not shown), aligned portions 140 are according to alignment mark information and Laser Driven portion 120 Initial position be directed at its initial position, then by user create composition be input into control unit (not shown), control unit edge X-axis and Y-axis transmission be mounted on the laser drive part 120 on linear motion motor, and execute scoring operation.

Present invention could apply to thin film solar cell unit making equipment (a-si, CdTe, CIGS), large area to have The crystallizers such as machine EL manufacturing equipment, LTPS (low temperature polycrystalline silicon).

Specific embodiment of the utility model is described above.It is to be appreciated that the utility model not office It is limited to above-mentioned particular implementation, those skilled in the art can make a variety of changes or modify within the scope of the claims, This has no effect on the substantive content of the utility model.In the absence of conflict, the spy in embodiments herein and embodiment Sign can be arbitrarily combined with each other.

Claims (4)

1. a kind of local laser scoring device, which is characterized in that including：

To prepare thin-film solar cells, the vacuum chamber of substrate is placed；And

The outside of the vacuum chamber is set, the laser grooving and scribing delineated using laser to the substrate placed in the vacuum chamber Device.

2. local laser scoring device according to claim 1, which is characterized in that further include being located on the vacuum chamber Side will be used to be inscribed in the Laser Driven of the substrate handled in the vacuum chamber on the upside of radiating laser beams to the substrate Portion；

Positioned at the top in the Laser Driven portion, exporting makes the Laser Driven portion transmitting for being directed at the visual signal of position Laser has the vision portion of rectilinear propagation；And

Below the vacuum chamber, receives the visual signal of the vision portion output and be directed at Laser Driven portion position Aligned portions.

3. local laser scoring device according to claim 2, which is characterized in that further include that can make the Laser Driven portion According to the mobile transport unit of predetermined pattern.

4. local laser scoring device according to claim 2, which is characterized in that

The substrate includes back electrode layer, light absorbing layer and transparent conductive film layer,

The laser scribing device further includes control unit, each layer choosing for making it to the substrate for controlling the Laser Driven portion Delineated to selecting property.