CN208104523U - Microscope carrier mechanism and evaporated device - Google Patents
Microscope carrier mechanism and evaporated device Download PDFInfo
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- CN208104523U CN208104523U CN201820658535.1U CN201820658535U CN208104523U CN 208104523 U CN208104523 U CN 208104523U CN 201820658535 U CN201820658535 U CN 201820658535U CN 208104523 U CN208104523 U CN 208104523U
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Abstract
The utility model belongs to evaporation coating technique field, and in particular to a kind of microscope carrier mechanism and evaporated device.The microscope carrier mechanism includes the regulating device for adjusting the depth of parallelism of the upper microscope carrier being oppositely arranged, download desk, and regulating device includes detection module, control module and servo-actuated module, wherein：Detection module is set in microscope carrier or download desk, is sent to control module for detecting the distance between upper microscope carrier and download desk, and by the distance of the position in different direction quadrant；Control module controls the movement of servo-actuated module for receiving the distance of the position in different direction quadrant, and according to the difference of the distance of different direction and pre-determined distance；Multiple groups are servo-actuated module, and every group of servo-actuated module is set to the corresponding position of microscope carrier and download desk, for adjust upper microscope carrier between download desk in the position at a distance from.The microscope carrier mechanism solves the problems, such as microscope carrier and download desk can not monitor the depth of parallelism in real time, depth of parallelism adjust automatically is realized, without artificially measuring.
Description
Technical field
The utility model belongs to evaporation coating technique field, and in particular to a kind of microscope carrier mechanism and evaporated device.
Background technique
The vacuum evaporation of vacuum evaporatation abbreviation (Evaporation) method is to pass through evaporation source in vacuum evaporation room
Evaporation material is heated, make evaporation material atom or molecule from its surface gasification evolution form steam stream, be incident on to
Substrate surface is deposited, condenses the method for forming solid film.Vacuum vapour deposition has been widely used for the production of display device
Journey, for example, organic electroluminescence device (Organic Light-Emitting Diode, abbreviation OLED) display panel cathode,
Anode and each organic layer including luminescent material between cathode and anode.
Existing evaporation coating device includes vacuum evaporation room, since metal mask plate is placed on mask plate carrier, outside mask plate
Frame in transport and collide with there are corner in or mask plate carrier on there are evaporation material and foreign materials away mask plate with it is cold
But the depth of parallelism of support plate and substrate to be deposited causes mask plate and substrate-parallel degree to be deposited not good enough, and then causes in cooling
There are unbalance stress when support plate compacting mask plate and substrate to be deposited, situations such as substrate damage to be deposited occur.
Current regulative mode is usually artificial measurement, adjusts, and error is larger.How to guarantee to be deposited substrate and mask plate it
Between the depth of parallelism, become technical problem urgently to be resolved in current evaporation process.
Summary of the invention
Technical problem to be solved in the utility model is to provide a kind of microscope carrier mechanism for above-mentioned deficiency in the prior art
And evaporated device, it solves the problems, such as that vapor deposition substrate and mask plate can not monitor the depth of parallelism in real time, realizes depth of parallelism adjust automatically.
Solving technical solution used by the utility model technical problem is the microscope carrier mechanism, including for adjusting opposite set
The regulating device of the depth of parallelism of the upper microscope carrier, download desk set, the regulating device include detection module, control module and with dynamic model
Block, wherein：
The detection module is set in the upper microscope carrier or the download desk, for detect the upper microscope carrier with it is described
The distance between download desk, and the distance of the position in different direction quadrant is sent to the control module；
The control module, for receiving the distance of the position in different direction quadrant, and according to the distance of different direction
With the difference of pre-determined distance, the movement of the servo-actuated module is controlled；
Module is servo-actuated described in multiple groups, every group of servo-actuated module is set to the corresponding position of the upper microscope carrier and the download desk,
For adjust the upper microscope carrier between the download desk in the position at a distance from.
Preferably, the detection module includes at least three range sensors, wherein there is at least three range sensors
Not point-blank, the range sensor is uniformly arranged in different direction quadrant.
Preferably, the upper microscope carrier or the download desk are rectangular, and the detection module includes four range sensors,
Four range sensors are set to the quadrangle of the upper microscope carrier or the download desk.
Preferably, the servo-actuated module includes servo motor, fixing seat, screw rod and feed screw nut, wherein：
The upper microscope carrier offers first through hole, and the fixing seat is set to the upper microscope carrier and corresponds to the first through hole
Top；
The servo motor is set to the top of the fixing seat, is fixed by the fixing seat and the upper microscope carrier；
The download desk offers the second through-hole, and the feed screw nut is set in second through-hole；
The screw rod, one end pass through the output axis connection of the first through hole and the servo motor, and the other end passes through
The feed screw nut connect with the download desk, and the servo motor is for driving the screw rod to rotate.
Preferably, the servo-actuated module further includes encoder and servo amplifier, and the revolving speed of the servo motor is through institute
Encoder coding is stated, and after servo amplifier amplification, is sent to the control module.
Preferably, the upper microscope carrier and the download desk are rectangular, module is servo-actuated described in four groups respectively corresponds and is set to
The quadrangle of the upper microscope carrier and the download desk.
Preferably, the regulating device further includes multiple groups locating module, and the locating module includes aligning device and positioning
It is stupefied, wherein：
The aligning device is set in second through-hole, positioned at the outside of the screw rod；
The positioning is stupefied, is set in second through-hole, positioned at the outside of the aligning device, is used for the aligning device
It is fixed in second through-hole.
Preferably, the stupefied positioning in locating module described in every group is four, and the stupefied difference of positioning is arranged two-by-two
In the symmetric position of mutually perpendicular two axial lines.
Preferably, the aligning device is with the round table-like of the through-hole along axis.
Preferably, sealing flange is additionally provided in the stupefied at least side of the aligning device and the positioning.
Preferably, the control module is programmable logic controller (PLC).
Preferably, the regulating device further includes transceiver module, for carrying out information exchange with human-computer interaction interface.
A kind of evaporated device, including above-mentioned microscope carrier mechanism.
Preferably, the upper microscope carrier includes absorption support plate, and the absorption support plate is fixed on by fixed structure close to institute
The side of download desk is stated, the absorption support plate is set on the absorption support plate；
Also, the center of the absorption support plate and the center of the download desk are on same vertical line.
Preferably, the substrate that is on one side provided with for carry vapor deposition substrate of the absorption support plate towards the download desk
Supporting region, the mask plate supporting region that is on one side provided with for carry mask plate of the download desk towards the absorption support plate, institute
The projected area for stating base plate carrying area is not less than the projected area of the mask plate supporting region.
The utility model has the beneficial effects that：
The microscope carrier mechanism solves the problems, such as microscope carrier and download desk can not monitor the depth of parallelism in real time, realizes that the depth of parallelism is automatic
Adjustment, without artificially measuring；
Evaporation coating device including the microscope carrier mechanism, the depth of parallelism can not be monitored in real time by solving metal mask plate and absorption support plate
The problem of, depth of parallelism adjust automatically is realized, without artificially measuring；Also solve only monitoring download desk and absorption support plate it
Between depth of parallelism problem,
Metal mask plate frame is prevented to cause metal mask plate and the absorption support plate depth of parallelism to be asked because of foreign matter or tilting of colliding with
Topic, prevents that substrate fragments are deposited.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of microscope carrier mechanism in the utility model embodiment 1；
Fig. 2 is the working principle block diagram of microscope carrier mechanism in the utility model embodiment 1；
Fig. 3 A, Fig. 3 B are respectively the longitudinal section view and sectional elevation of aligning device and the stupefied assembling of positioning；
Fig. 4 A and Fig. 4 B are respectively installation and the aligning movement schematic diagram of aligning device；
Fig. 5 A and Fig. 5 B are respectively scheme of installation of the sealing flange in upper mounting surface and lower mounting surface；
Fig. 6 is the indoor partial structural diagram of vacuum evaporation of evaporated device in the utility model embodiment 2；
In attached drawing mark：
The upper microscope carrier of 1-；11- adsorbs support plate；12-Z structure；
2- download desk；
3- detection module；31- range sensor；
4- is servo-actuated module；41- servo motor；42- fixing seat；43- screw rod；44- feed screw nut；45- encoder；46- is watched
Take amplifier；
5- locating module；51- aligning device；52- positioning is stupefied；53- sealing flange；
6- control module；61- programmable logic controller (PLC)；
7- substrate to be deposited；
8- metal mask plate；
9- evaporation source.
Specific embodiment
It is with reference to the accompanying drawing and specific real to make those skilled in the art more fully understand the technical solution of the utility model
Mode is applied to be described in further detail the utility model microscope carrier mechanism and evaporated device.
Embodiment 1：
The present embodiment provides a kind of microscope carrier mechanisms of depth of parallelism adjust automatically, by increasing regulating device, so that microscope carrier machine
Structure realizes that auto-paralleling degree is adjusted, and realizes the depth of parallelism adjust automatically of the upper microscope carrier being oppositely arranged and download desk.
As shown in Figure 1 and Figure 2, which includes the depth of parallelism for adjusting the upper microscope carrier 1 being oppositely arranged, download desk 2
Regulating device, regulating device includes detection module 3, control module 6 and servo-actuated module 4, wherein：
Detection module 3 is set in microscope carrier 1 or download desk 2, for detect between upper microscope carrier 1 and download desk 2 away from
From, and the distance of the position in different direction quadrant is sent to control module 6；
Control module 6, for receiving the distance of the position in different direction quadrant, and according to the distance of different direction and in advance
If the difference of distance, the movement of servo-actuated module 4 is controlled；
Multiple groups are servo-actuated module 4, and every group of servo-actuated module 4 is set to the corresponding position of microscope carrier 1 Yu download desk 2, for adjusting
Upper microscope carrier 1 between download desk 2 in the position at a distance from.
In order to obtain the depth of parallelism of upper microscope carrier 1 and download desk 2, the microscope carrier mechanism of the present embodiment is in different direction quadrant
The distance of position compares.Here orientation quadrant refer to above microscope carrier 1 with the center of download desk 2 as origin, will be upper
Space uniform between microscope carrier 1 and download desk 2 is divided into four quadrants, i.e., every 90 ° are used as an orientation quadrant.Detection module 3
In detection when the distance between microscope carrier 1 and download desk 2, the position of test point is preferably distributed in different direction quadrant.
Wherein, detection module 3 automatically obtains range information more crucial in depth of parallelism setting.Detection module 3 includes at least
Three range sensors 31, wherein there is at least three range sensors 31, not point-blank range sensor 31 is uniformly set
It sets in different direction quadrant.For example, range sensor 31 is uniformly arranged on the edge in 1 different direction quadrant of microscope carrier, or
Person, range sensor 31 is uniformly arranged on the edge in 2 different direction quadrant of download desk, alternatively, the signal of range sensor 31
Edge of the emitting portion in a wherein microscope carrier different direction quadrant, signal receiving portion is in another microscope carrier corresponding position.It is logical
Three range sensors 31 not point-blank are crossed, can determine a face, to obtain upper microscope carrier 1 and download desk 2
Between different direction distance.
Preferably, upper microscope carrier 1 or download desk 2 are rectangular, and detection module 3 includes four range sensors 31, four away from
From the quadrangle that sensor 31 is set to upper microscope carrier 1 or download desk 2.It is automatically obtained by range sensor 31 each in detection module 3
The independent distance of different direction between upper microscope carrier 1 and download desk 2.
Wherein, it is servo-actuated module 4 and the structure basis for realizing that the depth of parallelism is arranged automatically is provided, every group of servo-actuated module 4 is set to
The corresponding position of microscope carrier 1 and download desk 2, i.e., the upper microscope carrier 1 of each position for needing adjustable range and the corresponding points of download desk 2 are respectively set
One group of servo-actuated module 4 is set, upper microscope carrier 1 and download desk 2 are connected by servo-actuated module 4.Every group of servo-actuated module 4 includes servo motor
41, fixing seat 42, screw rod 43 and feed screw nut 44, wherein：
Upper microscope carrier 1 offers first through hole, and fixing seat 42 is set to the top that microscope carrier 1 corresponds to first through hole；
Servo motor 41 is set to the top of fixing seat 42, fixed by fixing seat 42 and upper microscope carrier 1；
Download desk 2 offers the second through-hole, and feed screw nut 44 is set in the second through-hole；
Screw rod 43, one end pass through the output axis connection of first through hole and servo motor 41, and the other end passes through feed screw nut
44 connect with download desk 2, and servo motor 41 is for driving screw rod 43 to rotate.
In Fig. 1, four servo motors 41 are fixed to the position at upper 1 four angles of microscope carrier, servo motor 41 by fixing seat 42
Connection wire rod 43, feed screw nut 44 are fixed on download desk 2, and screw rod 43 passes through feed screw nut 44, and the rotation of servo motor 41 drives silk
Bar 43, and then feed screw nut 44 and download desk 2 is driven to move, each servo motor 41 can be controlled separately rotation amount, under realization
2 four jiaos of microscope carrier of high low adjustment, to reach the depth of parallelism adjusted between download desk 2 and upper microscope carrier 1.
Preferably, being servo-actuated module 4 further includes encoder 45 and servo amplifier 46, and the revolving speed of servo motor 41 is encoded
Device 45 encodes, and after the amplification of servo amplifier 46, is sent to control module 6.Encoder 45 and servo amplifier 46 as with
The supplementary structure of dynamic model block 4 can guarantee that servo-actuated module 4 provides accurately automatic setting.Preferably, four groups of servo-actuated modules 4 are divided
It is not correspondingly arranged in the quadrangle of microscope carrier 1 Yu download desk 2.
In the microscope carrier mechanism of the present embodiment, regulating device further includes multiple groups locating module 5, by locating module 5 realize with
The movement of dynamic model block 4 and download desk 2 separates, and screw rod 43 and download desk 2 is avoided to rotate synchronously.As shown in Figure 3A and Figure 3B, it positions
Module 5 includes aligning device 51 and positioning stupefied 52, wherein：
Aligning device 51 is set in the second through-hole, positioned at the outside of screw rod 43；
Stupefied 52 are positioned, is set in the second through-hole, positioned at the outside of aligning device 51, for aligning device 51 to be fixed on second
In through-hole.
Preferably, the positioning stupefied 52 in each locating module 5 is four, and four positioning stupefied 52 are set to mutually two-by-two respectively
The symmetric position of perpendicular two axial lines.The screw rod 43 of each group of the stupefied 52 pairs of specific positions of positioning carries out independence, automated location
It is fixed.
Wherein, aligning device 51 is with the round table-like of the through-hole along axis, preferably to fix the position of screw rod 43.
During the motion due to screw rod 43, download desk 2 and screw rod 43 can generate certain angle for the microscope carrier mechanism of the present embodiment
Degree, as shown in Figure 3A and Figure 3B, by offering through-hole, circle along axis in download desk 2 and the setting of 44 junction of feed screw nut
The aligning device 51 of mesa-shaped, and the positioning stupefied 52 of rotation is prevented in four direction setting, it prevents that synchronous turn occurs when lead screw rotates
Dynamic, middle through-hole installation 44 blending bolt of feed screw nut is fixed.
It may further be preferable that being additionally provided with sealing flange 53 in at least side of aligning device 51 and positioning stupefied 52.Such as figure
Shown in 4A, download desk 2 is installed and is installed at feed screw nut 44 for the round table-like aligning device 51 of cooperation；As shown in Figure 4 B, aligning device 51
Aligning movement.Preferably, mountable sealing flange 53, Fig. 5 A show mounting surface at upper mounting surface and lower mounting surface
Sealing flange 53 is as shown in Figure 5 B the sealing flange 53 of lower mounting surface, and sealing flange 53 can increase the cleanliness of positioning, under
The distance between sealing flange 53 and screw rod 43 of the lower mounting surface of microscope carrier 2 prevent from colliding during adjustment there are surplus.
In the microscope carrier mechanism of the present embodiment, control module 6 realizes automated data analysis and automatic motor control, control module
6 be programmable logic controller (PLC) 61 (Programmable Logic Controller, abbreviation PLC).Programmable logic controller (PLC)
61 for the customized predeterminated position data of user, such as carry out predeterminated position data setting, predeterminated position number by man-machine interface
According to without specific fixed value, can rule of thumb set.The position for the different direction that programmable logic controller (PLC) 61 obtains detection module 3
It sets repeatedly calculate with the difference of predeterminated position and compare, and feedback control is carried out to servo-actuated module 4, wanted until reaching the depth of parallelism
It asks.
It being monitored for the ease of staff, regulating device further includes transceiver module (not specifically illustrated in Fig. 1, Fig. 2),
For carrying out information exchange with human-computer interaction interface.Transceiver module can send depth of parallelism information to human-computer interaction interface, man-machine
Interactive interface may be mobile terminal, so that staff realizes automatic, real-time depth of parallelism monitoring.
Microscope carrier mechanism in the present embodiment solves the problems, such as that microscope carrier and download desk can not monitor the depth of parallelism in real time, real
Existing depth of parallelism adjust automatically, without artificially measuring.
Embodiment 2：
The present embodiment is technology key for the depth of parallelism between download desk upper in evaporation coating device, but be all at present every
A period of time manually adjusts, it is difficult to which the moment is kept for the problem of being substantially parallel, and it is automatic to provide a kind of depth of parallelism using embodiment 1
The evaporated device of the microscope carrier mechanism of adjustment realizes that auto-paralleling degree is adjusted, and solves metal mask plate and is put into after deposited chamber and steaming
The absorption support plate of coating apparatus and the depth of parallelism adjust automatically problem that substrate is deposited.
The evaporated device includes the microscope carrier mechanism in embodiment 1, as shown in fig. 6, being arranged between upper microscope carrier 1 and download desk 2
There are absorption support plate 11, the absorption support plate 11 of specially cooling magnetic suck mode.Absorption support plate 11 closely connects with substrate 7 to be deposited
Touching, plays heat spreading function.
Specifically, evaporation coating device includes vacuum evaporation room, evaporation source 9 is provided in vacuum evaporation room, mask plate carrier (is set
Set in download desk 2), absorption support plate 11 and base board carrier (setting absorption support plate 11 on), substrate 7 to be deposited is mounted on substrate
On carrier, metal mask plate 8 (usually having frame) is mounted on mask plate carrier, metal mask plate 8,7 and of substrate to be deposited
Absorption support plate 11 is sequentially laminated on top and the keeping parallelism of evaporation source 9.It is to be deposited when substrate 7 to be deposited is deposited
Substrate 7 is mounted generally horizontally on base board carrier, and is adsorbed support plate 11 and be bonded substrate 7 to be deposited with mask plate compacting.
Upper microscope carrier 1 includes absorption support plate 11, and absorption support plate 11 is fixed on by fixed structure close to the side of download desk 2,
Absorption support plate 11 is set on absorption support plate 11；Also, the center at the center and download desk 2 of adsorbing support plate 11 is in same vertical
On line.Specifically, absorption support plate 11 is fixedly connected by Z structure 12 with upper microscope carrier 1, Z structure 12 is on the one hand fixed to adsorb support plate
11, it fixes absorption support plate 11 in Z-direction position, can be rotated when needing；On the other hand upper microscope carrier 1 is connected, thus
Upper microscope carrier 1, download desk 2 can be driven by screw rod connection while being moved up and down.Realize upper microscope carrier 1 under by Z structure 12
When 2 position of microscope carrier is adjusted, download desk 2 can be realized and adsorb the relative position adjusting of support plate 11.
Wherein, the base plate carrying that is on one side provided with for carry to be deposited substrate 7 of the support plate 11 towards download desk 2 is adsorbed
Area, download desk 2 towards absorption support plate 11 the mask plate supporting region being provided on one side for carrying mask plate, base plate carrying area
Projected area is not less than the projected area of mask plate supporting region.In this way, base plate carrying area and mask plate are held in setting evaporated device
The corresponding position for carrying area, realizes the correspondence of substrate 7 and metal mask plate 8 to be deposited, so as to real using above-mentioned regulating device
Existing auto-paralleling degree is adjusted.
Four range sensors 31 are installed on corner location on absorption support plate 11, when mask plate is put into download desk 2, Z knot
Structure 12 drives upper microscope carrier 1 to move up simultaneously with download desk 2, the stop motion after mask plate is bonded with substrate 7 to be deposited, away from
Absorption the distance between support plate 11 and mask plate, which are fed back, from sensor 31 arrives programmable logic controller (PLC) 61, Programmable logical controller
Device 61 compared with setting value Z, obtains corresponding adjustment amount, and then send respective corners for the corresponding adjustment amount of each axis by four data
Servo motor 41 acted, carry out rising or falling adjustment, feed back quadrangle range data after adjustment again, until four it is anti-
Data are presented within the scope of allowable error, then it is assumed that depth of parallelism adjustment finishes, can real-time perfoming depth of parallelism tune by this regulating device
It is whole,
In four data Z1, Z2, Z3, Z4 that programmable logic controller (PLC) 61 obtains, compare with setting value Z, due to
Following variable quantity can occur for prolonged exercise：
Δ Z1=Z1-Z
Δ Z2=Z2-Z
Δ Z3=Z3-Z
Δ Z4=Z4-Z
According to the above variable quantity, programmable logic controller (PLC) 61 gives servo motor variation delta movement instruction, after adjustment
Quadrangle range data is fed back again, until four feedback data are within the scope of allowable error, such as makes Δ Z value in SPC (50-
100 μm) in, then depth of parallelism adjustment finishes.
The evaporation coating device solves metal mask plate and absorption support plate can not be real-time using the microscope carrier mechanism in embodiment 1
The problem of monitoring the depth of parallelism realizes depth of parallelism adjust automatically, without artificially measuring；Also solve only monitoring download desk with
Adsorb depth of parallelism problem between support plate, it is therefore prevented that metal mask plate frame causes metal mask plate and suction because of foreign matter or tilting of colliding with
Appendix plate depth of parallelism problem, prevents that substrate fragments are deposited.
It is understood that embodiment of above is merely to illustrate that the principles of the present invention and uses exemplary
Embodiment, however the utility model is not limited thereto.For those skilled in the art, this is not being departed from
In the case where the spirit and essence of utility model, various changes and modifications can be made therein, these variations and modifications are also considered as this reality
With novel protection scope.
Claims (15)
1. a kind of microscope carrier mechanism, which is characterized in that the tune including the depth of parallelism for adjusting the upper microscope carrier being oppositely arranged, download desk
Regulating device, the regulating device include detection module, control module and servo-actuated module, wherein：
The detection module is set in the upper microscope carrier or the download desk, for detecting the upper microscope carrier and the downloading
The distance between platform, and the distance of the position in different direction quadrant is sent to the control module；
The control module, for receiving the distance of the position in different direction quadrant, and according to the distance of different direction and in advance
If the difference of distance, the movement of the servo-actuated module is controlled；
Module is servo-actuated described in multiple groups, every group of servo-actuated module is set to the corresponding position of the upper microscope carrier and the download desk, is used for
Adjust the upper microscope carrier between the download desk in the position at a distance from.
2. microscope carrier mechanism according to claim 1, which is characterized in that the detection module includes at least three Distance-sensings
Device, wherein have at least three range sensors not point-blank, the range sensor be uniformly arranged on different direction as
In limit.
3. microscope carrier mechanism according to claim 2, which is characterized in that the upper microscope carrier or the download desk are rectangular, institute
Stating detection module includes four range sensors, and four range sensors are set to the upper microscope carrier or the download desk
Quadrangle.
4. microscope carrier mechanism according to claim 1, which is characterized in that the servo-actuated module include servo motor, fixing seat,
Screw rod and feed screw nut, wherein：
The upper microscope carrier offers first through hole, and the fixing seat is set to the upper microscope carrier and corresponds to the upper of the first through hole
Side；
The servo motor is set to the top of the fixing seat, is fixed by the fixing seat and the upper microscope carrier；
The download desk offers the second through-hole, and the feed screw nut is set in second through-hole；
The screw rod, one end pass through the output axis connection of the first through hole and the servo motor, and the other end passes through described
Feed screw nut connect with the download desk, and the servo motor is for driving the screw rod to rotate.
5. microscope carrier mechanism according to claim 4, which is characterized in that the servo-actuated module further includes that encoder and servo are put
The revolving speed of big device, the servo motor is encoded through the encoder, and after servo amplifier amplification, is sent to the control
Molding block.
6. microscope carrier mechanism according to claim 4, which is characterized in that the upper microscope carrier and the download desk be it is rectangular, four
The group servo-actuated module respectively corresponds the quadrangle for being set to the upper microscope carrier and the download desk.
7. microscope carrier mechanism according to claim 4, which is characterized in that the regulating device further includes multiple groups locating module,
The locating module include aligning device and position it is stupefied, wherein：
The aligning device is set in second through-hole, positioned at the outside of the screw rod；
The positioning is stupefied, is set in second through-hole, positioned at the outside of the aligning device, for fixing the aligning device
In second through-hole.
8. microscope carrier mechanism according to claim 7, which is characterized in that the positioning in locating module described in every group is stupefied to be
Four, the stupefied symmetric position for being set to mutually perpendicular two axial lines two-by-two respectively of positioning.
9. microscope carrier mechanism according to claim 7, which is characterized in that the aligning device is round table-like, and the aligning device
Through-hole is offered along axis.
10. microscope carrier mechanism according to claim 7, which is characterized in that stupefied at least in the aligning device and the positioning
Side is additionally provided with sealing flange.
11. -10 described in any item microscope carrier mechanisms according to claim 1, which is characterized in that the control module is programmable patrols
Collect controller.
12. -10 described in any item microscope carrier mechanisms according to claim 1, which is characterized in that the regulating device further includes transmitting-receiving
Module, for carrying out information exchange with human-computer interaction interface.
13. a kind of evaporated device, which is characterized in that including the described in any item microscope carrier mechanisms of claim 1-12.
14. evaporated device according to claim 13, which is characterized in that the upper microscope carrier includes absorption support plate, the suction
Appendix plate is fixed on by fixed structure close to the side of the download desk, and the absorption support plate is set to the absorption support plate
On；
Also, the center of the absorption support plate and the center of the download desk are on same vertical line.
15. evaporated device according to claim 14, which is characterized in that the absorption support plate is towards the one of the download desk
Face is provided with the base plate carrying area for carrying vapor deposition substrate, and the one side setting of the download desk towards the absorption support plate is useful
In the mask plate supporting region of carrying mask plate, the projected area in the base plate carrying area is not less than the throwing of the mask plate supporting region
Shadow area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820658535.1U CN208104523U (en) | 2018-05-04 | 2018-05-04 | Microscope carrier mechanism and evaporated device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820658535.1U CN208104523U (en) | 2018-05-04 | 2018-05-04 | Microscope carrier mechanism and evaporated device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108950484A (en) * | 2018-07-06 | 2018-12-07 | 武汉华星光电半导体显示技术有限公司 | Evaporation coating device |
| CN109972088A (en) * | 2019-05-07 | 2019-07-05 | 深圳市华星光电半导体显示技术有限公司 | Vapor deposition exposure mask panel assembly and its operating method |
| CN112981329A (en) * | 2021-02-07 | 2021-06-18 | 京东方科技集团股份有限公司 | Adjusting device, evaporator and adjusting method |
-
2018
- 2018-05-04 CN CN201820658535.1U patent/CN208104523U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108950484A (en) * | 2018-07-06 | 2018-12-07 | 武汉华星光电半导体显示技术有限公司 | Evaporation coating device |
| CN108950484B (en) * | 2018-07-06 | 2020-06-30 | 武汉华星光电半导体显示技术有限公司 | Evaporation plating device |
| CN109972088A (en) * | 2019-05-07 | 2019-07-05 | 深圳市华星光电半导体显示技术有限公司 | Vapor deposition exposure mask panel assembly and its operating method |
| CN112981329A (en) * | 2021-02-07 | 2021-06-18 | 京东方科技集团股份有限公司 | Adjusting device, evaporator and adjusting method |
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