CN208098847U - A kind of integrated pneumatic fixture - Google Patents
A kind of integrated pneumatic fixture Download PDFInfo
- Publication number
- CN208098847U CN208098847U CN201820036686.3U CN201820036686U CN208098847U CN 208098847 U CN208098847 U CN 208098847U CN 201820036686 U CN201820036686 U CN 201820036686U CN 208098847 U CN208098847 U CN 208098847U
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- China
- Prior art keywords
- mold
- straight tube
- air
- additionally provided
- inlet pipe
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- Expired - Fee Related
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Abstract
The utility model discloses a kind of integrated pneumatic fixtures, including mounting base, bottom plate, mold, sealing shroud, slide draw frame machine, air intake duct, air inlet pipe, silicon wafer is placed directly in the locating slot being arranged on mold, straight tube is pumped into negative pressure through air-breathing sebific duct, silicon wafer is drawn so that drawing block, it is clamped to complete positioning, when needing silicon chip extracting, compressed air is pumped into air intake duct through air inlet pipe, compressed air enters in sliding cavity, to which the straight tube for pushing promotion to be connected with piston moves up, and then the silicon wafer for drawing block absorption is driven to move up, operator can be by silicon chip extracting, then, stop being pumped into compressed air to air inlet pipe, spring reset, to drive absorption block to fall into escape groove.The apparatus structure is simple, can be positioned, be sucked to silicon wafer, automatic material jacking, designed by integrated form, manufacturing cost is effectively reduced.
Description
Technical field
The utility model relates to a kind of mechanical device more particularly to a kind of integrated pneumatic fixtures.
Background technique
Silicon wafer must be cleaned strictly in semiconductor devices production, and micropollution also results in component failure, the purpose of cleaning
It is to remove surface contamination impurity, the method for removing pollution has physical cleaning and chemical cleaning, and physical cleaning is mainly using brush
The method washed or cleaned removes impurities on surface of silicon chip, needs to be positioned silicon wafer in the process of cleaning, clamp, meanwhile, it is
Be additionally provided with ejecting mechanism convenient for silicon chip extracting, since positioning, clamping, ejecting mechanism are independently arranged more, not only structure is complicated and
And manufacturing cost is high.In view of disadvantages described above, it is really necessary to design a kind of integrated pneumatic fixture.
Utility model content
The purpose of this utility model is to provide a kind of integrated pneumatic fixture, the integrated pneumatic fixture can to silicon wafer into
Row position, suck, automatic material jacking, designed by integrated form, manufacturing cost be effectively reduced.
In order to solve the above technical problems, the technical solution of the utility model is：A kind of integrated pneumatic fixture, including installation
Seat, bottom plate, mold, sealing shroud, sliding draw frame machine, air intake duct, air inlet pipe, the bottom plate is located at mounting base upper end, described
Bottom plate be connected with mounting base by bolt, the mold is located at bottom plate upper end, and the mold passes through bolt phase with bottom plate
Even, the sealing shroud runs through bottom plate, and the sealing shroud is connected with base thread, and the sliding draw frame machine runs through mold
And running through sealing shroud, the sliding draw frame machine can be slided up and down along mold, and the mold is additionally provided with air intake duct, described
Air intake duct is not through die main body, and the air inlet pipe is located on the outside of mold, and the air inlet pipe is connected with mold screw thread, described
The cavity intercommunication of the cavity and air intake duct of air inlet pipe；
The sliding draw frame machine further includes straight tube, piston, spring, draws block, rubber pad, and the straight tube runs through mould
Has and runs through sealing shroud, the piston is located on the outside of straight tube, and the piston is connected with straight pipe thread, and the spring is located at
On the outside of straight tube and it is located at piston upper end, the absorption block is located at straight tube upper end, and the absorption block is connected with straight pipe thread, institute
The rubber pad stated, which is located at, draws block upper end, and the rubber pad is Nian Jie with block is drawn to be connected.
The utility model further improves as follows：
Further, the mold is additionally provided with locating slot, and the locating slot is located at die top, the locating slot
Not through die main body.
Further, the mold is additionally provided with sliding cavity, the cavity intercommunication of the cavity and air intake duct of the sliding cavity.
Further, the mold is additionally provided with escape groove, and the escape groove is located at die top, the escape groove
Not through die main body.
Further, the sealing shroud is additionally provided with sealing ring, and the sealing ring is located on the inside of sealing shroud, and sealing ring has
Effect sealing straight tube and sealing shroud 4 contact surfaces, prevent gas leakage.
Further, the straight tube is additionally provided with air-breathing sebific duct, and the air-breathing sebific duct is located at straight tube lower end, the suction
Gas sebific duct is connected with straight tube close-fitting.
Further, the absorption block is additionally provided with several suckers, and the sucker is used through block main body, rubber pad is drawn
In sealing, when so that being evacuated through sucker, silicon wafer can be sucked.
Compared with prior art, the integrated pneumatic fixture when work, silicon wafer is placed directly within to be arranged on mold and is determined
In the slot of position, straight tube is pumped into negative pressure through air-breathing sebific duct, draws silicon wafer so that drawing block, is clamped to complete positioning, works as needs
When by silicon chip extracting, compressed air is pumped into air intake duct through air inlet pipe, compressed air enters in sliding cavity, to push promotion
The straight tube being connected with piston moves up, and then drives and draw the silicon wafer that block is drawn and move up, operator can by silicon chip extracting, with
Afterwards, stop being pumped into compressed air, spring reset to air inlet pipe, be fallen into escape groove to drive and draw block.Apparatus structure letter
It is single, silicon wafer can be positioned, be sucked, automatic material jacking, being designed by integrated form, manufacturing cost is effectively reduced.
Detailed description of the invention
Fig. 1 shows the utility model main view
Fig. 2 shows the utility model to slide draw frame machine structural schematic diagram
Fig. 3 shows the utility model and draws block top view
In figure：Mounting base 1, bottom plate 2, mold 3, sealing shroud 4, sliding draw frame machine 5, air intake duct 6, air inlet pipe 7, locating slot
301, sliding cavity 302, escape groove 303, sealing ring 401, straight tube 501, piston 502, spring 503, absorption block 504, rubber pad
505, air-breathing sebific duct 506, sucker 507.
Specific embodiment
As shown in Figure 1, Figure 2, Figure 3 shows, a kind of integrated pneumatic fixture, including mounting base 1, bottom plate 2, mold 3, sealing shroud 4,
Draw frame machine 5, air intake duct 6, air inlet pipe 7 are slided, the bottom plate 2 is located at 1 upper end of mounting base, the bottom plate 2 and mounting base 1
It is connected by bolt, the mold 3 is located at 2 upper end of bottom plate, and the mold 3 is connected with bottom plate 2 by bolt, and described is close
Big envelope 4 runs through bottom plate 2, and the sealing shroud 4 is connected with 2 screw thread of bottom plate, and the sliding draw frame machine 5 is through mold 3 and passes through
Sealing shroud 4 is worn, the sliding draw frame machine 5 can be slided up and down along mold 3, and the mold 3 is additionally provided with air intake duct 6, described
Air intake duct 6 not through 3 main body of mold, the air inlet pipe 7 is located at the outside of mold 3, the air inlet pipe 7 and 3 screw thread of mold
It is connected, the cavity intercommunication of the cavity and air intake duct 6 of the air inlet pipe 7, the sliding draw frame machine 5 further includes straight tube 501, lives
Plug 502, spring 503 draw block 504, rubber pad 505, and the straight tube 501 is through mold 3 and runs through sealing shroud 4, described
Piston 502 is located at 501 outside of straight tube, and the piston 502 is connected with 501 screw thread of straight tube, and the spring 503 is located at straight tube
On the outside of 501 and it is located at 502 upper end of piston, the absorption block 504 is located at 501 upper end of straight tube, the absorption block 504 and straight tube
501 screw threads are connected, and the rubber pad 505, which is located at, draws 504 upper end of block, the rubber pad 505 phase Nian Jie with block 504 is drawn
Even, the mold 3 is additionally provided with locating slot 301, and the locating slot 301 is located at 3 top of mold, and the locating slot 301 is not
Through 3 main body of mold, the mold 3 is additionally provided with sliding cavity 302, and the cavity of the cavity and air intake duct 6 of the sliding cavity 302 is mutual
Logical, the mold 3 is additionally provided with escape groove 303, and the escape groove 303 is located at 3 top of mold, and the escape groove 303 is not
Through 3 main body of mold, the sealing shroud 4 is additionally provided with sealing ring 401, and the sealing ring 401 is located at 4 inside of sealing shroud, close
The effectively sealing straight tube 501 of seal 401 and sealing shroud 4 contact surfaces, prevent gas leakage, the straight tube 501 is additionally provided with air-breathing glue
Pipe 506, the air-breathing sebific duct 506 are located at 501 lower end of straight tube, and the air-breathing sebific duct 506 is connected with 501 close-fitting of straight tube, institute
The absorption block 504 stated is additionally provided with several suckers 507, and the sucker 507 is through 504 main body of block is drawn, and rubber pad 505 is for close
Envelope can suck silicon wafer, the integrated pneumatic fixture when so that being evacuated through sucker 507, when work, silicon wafer is placed directly within and is set
It sets in the locating slot 301 on mold 3, straight tube 501 is pumped into negative pressure through air-breathing sebific duct 506, inhale silicon wafer so that drawing block 504
It takes, is clamped to complete positioning, when needing silicon chip extracting, be pumped into compressed air into air intake duct 6 through air inlet pipe 7, compressed
Air enters in sliding cavity 302, so that the straight tube 501 for pushing promotion to be connected with piston 502 moves up, and then drives and draws block 504
The silicon wafer of absorption moves up, and operator can stop being pumped into compressed air, spring 503 to air inlet pipe 7 by silicon chip extracting, then
It resets, is fallen into escape groove 303 to drive and draw block 504.The apparatus structure is simple, can be positioned, be sucked to silicon wafer, certainly
Dynamic liftout, is designed by integrated form, manufacturing cost is effectively reduced.
The utility model is not limited to above-mentioned specific embodiment, and those skilled in the art visualize from above-mentioned
Hair, without creative labor, the various transformation made are all fallen within the protection scope of the utility model.
Claims (7)
1. a kind of integrated pneumatic fixture, it is characterised in that including mounting base, bottom plate, mold, sealing shroud, sliding draw frame machine,
Air intake duct, air inlet pipe, the bottom plate are located at mounting base upper end, and the bottom plate is connected with mounting base by bolt, described
Mold is located at bottom plate upper end, and the mold is connected with bottom plate by bolt, and the sealing shroud runs through bottom plate, the sealing
Set is connected with base thread, and the sliding draw frame machine is through mold and runs through sealing shroud, and the sliding draw frame machine can
It is slided up and down along mold, the mold is additionally provided with air intake duct, and the air intake duct is not through die main body, the air inlet pipe
On the outside of mold, the air inlet pipe is connected with mold screw thread, the cavity intercommunication of the cavity and air intake duct of the air inlet pipe；
The sliding draw frame machine further includes straight tube, piston, spring, draws block, rubber pad, the straight tube through mold and
Through sealing shroud, the piston is located on the outside of straight tube, and the piston is connected with straight pipe thread, and the spring is located at straight tube
Outside and it is located at piston upper end, the absorption block is located at straight tube upper end, and the absorption block is connected with straight pipe thread, described
Rubber pad, which is located at, draws block upper end, and the rubber pad is Nian Jie with block is drawn to be connected.
2. integrated pneumatic fixture as described in claim 1, it is characterised in that the mold is additionally provided with locating slot, described
Locating slot is located at die top, and the locating slot is not through die main body.
3. integrated pneumatic fixture as described in claim 1, it is characterised in that the mold is additionally provided with sliding cavity, the cunning
The cavity intercommunication of the cavity and air intake duct of dynamic chamber.
4. integrated pneumatic fixture as described in claim 1, it is characterised in that the mold is additionally provided with escape groove, described
Escape groove is located at die top, and the escape groove is not through die main body.
5. integrated pneumatic fixture as described in claim 1, it is characterised in that the sealing shroud is additionally provided with sealing ring, described
Sealing ring be located on the inside of sealing shroud.
6. integrated pneumatic fixture as described in claim 1, it is characterised in that the straight tube is additionally provided with air-breathing sebific duct, described
Air-breathing sebific duct be located at straight tube lower end, the air-breathing sebific duct is connected with straight tube close-fitting.
7. integrated pneumatic fixture as described in claim 1, it is characterised in that the absorption block is additionally provided with several suckers, institute
The sucker stated is through absorption block main body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820036686.3U CN208098847U (en) | 2018-01-10 | 2018-01-10 | A kind of integrated pneumatic fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820036686.3U CN208098847U (en) | 2018-01-10 | 2018-01-10 | A kind of integrated pneumatic fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208098847U true CN208098847U (en) | 2018-11-16 |
Family
ID=64129138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820036686.3U Expired - Fee Related CN208098847U (en) | 2018-01-10 | 2018-01-10 | A kind of integrated pneumatic fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208098847U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108015077A (en) * | 2018-01-10 | 2018-05-11 | 苏州聚晶科技有限公司 | A kind of integrated pneumatic fixture |
-
2018
- 2018-01-10 CN CN201820036686.3U patent/CN208098847U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108015077A (en) * | 2018-01-10 | 2018-05-11 | 苏州聚晶科技有限公司 | A kind of integrated pneumatic fixture |
| CN108015077B (en) * | 2018-01-10 | 2024-06-11 | 池州市琼琚信息技术服务有限公司 | Integrated pneumatic clamp |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181116 Termination date: 20220110 |