CN208076920U - 光刻机投影物镜像方视场的在线测量装置 - Google Patents
光刻机投影物镜像方视场的在线测量装置 Download PDFInfo
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CN108508709A (zh) * | 2018-05-03 | 2018-09-07 | 中国科学院光电研究院 | 光刻机投影物镜像方视场的在线测量装置及测量方法 |
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CN108508709A (zh) * | 2018-05-03 | 2018-09-07 | 中国科学院光电研究院 | 光刻机投影物镜像方视场的在线测量装置及测量方法 |
CN108508709B (zh) * | 2018-05-03 | 2024-04-02 | 中国科学院光电研究院 | 光刻机投影物镜像方视场的在线测量装置及测量方法 |
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Effective date of registration: 20200826 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 100094, No. 9 Deng Nan Road, Beijing, Haidian District Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences Effective date of registration: 20200826 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences |