CN208043543U - A kind of scanning electron microscope home position Compression and Expansion device - Google Patents

A kind of scanning electron microscope home position Compression and Expansion device Download PDF

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Publication number
CN208043543U
CN208043543U CN201820618311.8U CN201820618311U CN208043543U CN 208043543 U CN208043543 U CN 208043543U CN 201820618311 U CN201820618311 U CN 201820618311U CN 208043543 U CN208043543 U CN 208043543U
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CN
China
Prior art keywords
scanning electron
electron microscope
arm
home position
expansion device
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201820618311.8U
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Chinese (zh)
Inventor
李继军
刘飞
张伟光
侯小虎
杨诗婷
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Inner Mongolia University of Technology
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Inner Mongolia University of Technology
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Priority to CN201820618311.8U priority Critical patent/CN208043543U/en
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Publication of CN208043543U publication Critical patent/CN208043543U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of scanning electron microscope home position Compression and Expansion devices comprising:Bottom supporting block;It is fixedly mounted on the driving motor of bottom supporting block one end;The Bidirectional-screw that one end is sequentially connected with driving motor, and the feed screw nut there are two out movement is set on Bidirectional-screw;The two opposite grippers being fixedly mounted on two feed screw nuts.Each gripper includes:The babinet that is fixed on feed screw nut, one end are fixedly mounted on the servo motor of box house one side, the line slide rail that one end couples with servo motor shaft, the first arm being connect across babinet and with the sliding shoe on line slide rail, the driving wheel being fixedly connected with the first arm, the driven wheel engaged with sprocket gear, the second arm being fixedly connected with driven wheel.The utility model realizes the realtime dynamic observation that various shapes sample stretches under scanning electron microscope and compresses microscopic pattern.

Description

A kind of scanning electron microscope home position Compression and Expansion device
Technical field
The utility model is related to scanning electron microscope field more particularly to scanning electron microscope home position loading device fields, especially relate to And a kind of scanning electron microscope home position Compression and Expansion device.
Background technology
Either functional material or structural material, it is to determine material to form the microstructure of these materials and composition information Expect the deciding factor of physical property and mechanical property expression behaviour.However, for a long time, material mechanical performance measures and micro- Structure and composition distribution characterization always independently carries out.Even if there is a small number of experiments of machanics can be in X-ray, synchrotron radiation Etc. carry out under diffraction conditions, also lack it is in situ, in real time, the high-resolution microstructure image information of the real space.And it to understand in depth It is formed between corresponding microstructure, component distributing feature and material property in material preparation process and different machining processes Relationship, just have to by three characterize and test organically combine.Scanning electron microscope is Fine Texture of Material knot One of the main tool of structure test, scanning electron microscope can carry out macroscopic view to microcosmic or even nano-scale material micro- Across the scale measurement of structure is seen, is to disclose material microcosmic multistage institutional framework (such as crystallite dimension, distributed mutually, interface feature, impurity point Cloth etc.) such as crystallite dimension, distributed mutually, interface feature, Impurity Distribution etc.) important means.
Some loading devices are placed in scanning electron microscope sample chamber gradually to grow up, and material can drawn The Characteristics of Evolution for stretching/compressing the lower microstructure of iso-stress alternating load effect carries out on-spot study, utilizes these scanning electron microscope original Position drawing stand, people's microstructure Changeement under the service state of bearing stress to material achieve many important grind Study carefully achievement.Currently, the loading device in situ of a general scanning electron microscope, only can observe the sample of specific shape, this It requires that sample must be processed into the shape before the experiments, which greatly increases the processes of experiment, waste manpower wealth Power, and the sample of some special substances is not easy to be processed, and this is even more to significantly limit scanning electron microscope home position load The application of device.
Utility model content
In view of the problems of the existing technology, the utility model provides a kind of scanning electron microscope home position Compression and Expansion device, Solve limitation of the current scanline Electronic Speculum original position loading device to sample shape, can be general to the sample of most of shapes, Only needing to carry out simple sample treatment can realize that various shapes sample stretches and compression microscopic pattern under scanning electron microscope Realtime dynamic observation.
The utility model is realized using following technical scheme:A kind of scanning electron microscope home position Compression and Expansion device, including:
Bottom supporting block;
Driving motor is fixedly mounted on bottom supporting block one end;
Bidirectional-screw, one end are sequentially connected with driving motor, and the lead screw there are two out movement is set on Bidirectional-screw Nut;
Two grippers, are relatively fixed respectively on two feed screw nuts, and each gripper includes:It is fixed on silk Babinet, one end on stem nut are fixedly mounted on the servo motor of box house one side, one end couples with servo motor shaft Line slide rail, the first arm being connect across babinet and with the sliding shoe on line slide rail, the master being fixedly connected with the first arm Driving wheel, the driven wheel engaged with sprocket gear, the second arm being fixedly connected with driven wheel.
As being further improved for said program, a grating scale is horizontally mounted between two driving motors.
Further, grating scale includes the scale grating being mounted in the supporting block of bottom and is separately mounted on two babinets Two grating reading heads;Scale grating and two grating reading heads are located at the same of the scanning electron microscope home position Compression and Expansion device Side.
As being further improved for said program, the first arm and the second arm are in symmetrical arc, are curved inwardly.
Further, the one end of the first arm far from driving wheel is tip, and tip is equipped with matched convex with sample cell Play structure.
Further, the one end of the second arm far from driven wheel is tip, and tip is equipped with matched convex with sample cell Play structure.
Further, bulge-structure is used with corresponding arm and is threadedly coupled.
Further, tip scope of activities is -90 ° -+90 °.
As being further improved for said program, Bidirectional-screw is sequentially connected by shaft coupling and driving motor.
As being further improved for said program, the first arm is connect with the sliding shoe on line slide rail by axis pin.
The utility model uses the design of gripper, sample is fixed, it is only necessary to simple positioning is opened on sample Slot requires the shape of sample without specific.Greatly reduce in this way needed for experimental procedure and processed sample when Between, and the sample being machined, such as fragile material are difficult to for some, material mechanical process is also avoided to sample Damage.It is realized under scanning electron microscope and dynamic observation in real time is carried out to the original position stretching and compression process of sample.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of scanning electron microscope home position Compression and Expansion device of the utility model.
Fig. 2 is 5 internal structure vertical view of Fig. 1 middle cases.
Symbol description
Specific implementation mode
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, with reference to embodiments, to this Utility model is further elaborated.It should be appreciated that specific embodiment described herein is only explaining that this practicality is new Type is not used to limit the utility model.
Also referring to Fig. 1 and Fig. 2, the utility model provides a kind of scanning electron microscope home position Compression and Expansion device, packet It includes:Bottom supporting block 1, driving motor 2, Bidirectional-screw 3, feed screw nut 4, two grippers, grating scales.
Driving motor 2 is fixedly mounted on 1 one end of bottom supporting block.One end of Bidirectional-screw 3 passes through shaft coupling and driving electricity Machine 2 connects, and the feed screw nut 4 there are two out movement is set on Bidirectional-screw 3.
Two grippers are relatively fixed on two feed screw nuts 4, and each gripper includes:It is fixed on feed screw nut Babinet 5 on 4, one end are fixedly mounted on the servo motor 6 in 5 interior side face of babinet, one end couple with 6 axis of servo motor it is straight Line sliding rail 7, the first arm 8 being connect across babinet and with 14 axis pin of sliding shoe on line slide rail 7 are fixed with the first arm 8 The driving wheel 9 of connection, the driven wheel 10 engaged with 9 gear of driving wheel, the second arm 11 being fixedly connected with driven wheel 10.
Wherein, the first arm 8 and the second arm 11 curve inwardly in symmetrical arc, the first arm 8 far from driving wheel 9 one It holds, second one end of arm 11 far from driven wheel 10, referred to as tip 15, is respectively equipped on two tips 15 and sample cell matches The bulge-structure 16 of conjunction.
Two bulge-structures 16 use spiral shell with the tip 15 of corresponding first arm 8 and the tip 15 of the second arm 11 respectively Line connects, can dismounting and change at any time.The scope of activities at the tip 15 of two arms can be 0-± 90 ° i.e.-90 ° -+90 °.
The both ends of grating scale are respectively and fixedly installed on two driving motors 2, include the mark in bottom supporting block 1 Ruler grating 12 and two grating reading heads 13 being separately mounted on two babinets 5;Scale grating 12 and two grating reading heads 13 are located at the same side of the scanning electron microscope home position Compression and Expansion device.
Before scanning electron microscopic observation sample, two opposite grooves are processed in two opposite faces of sample, the groove with Corresponding two bulge-structures 16 at 11 two tips 15 of the first arm 8 and the second arm match, and form clamping structure, servo Motor 6 drives the sliding shoe 14 on line slide rail 7 to move, to drive two protrusion knots of the first arm 8 and the second arm 11 Structure 16 and sample groove clamping, play the role of fixed sample.
When work, driving motor 2 drives the feed screw nut 4 on Bidirectional-screw 3 respectively to two movement outsides, solid to drive The gripper on feed screw nut 4 is scheduled on to two movement outsides, realizes the stretching of sample.Driving motor 2 drives on Bidirectional-screw 3 Feed screw nut 4 realizes to two medial motions to drive the gripper being fixed on feed screw nut 4 to two medial motions respectively The compression of sample.Two processes can be done directly under scanning electron microscope, realize that sample stretches and compression process microstructure Realtime dynamic observation.It is phase by grating scale it is observed that sample stretches and the deformation quantity of compression process in experimentation The calculating of pass provides important parameter.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this All any modification, equivalent and improvement etc., should be included in the utility model made by within the spirit and principle of utility model Protection domain within.

Claims (10)

1. a kind of scanning electron microscope home position Compression and Expansion device, which is characterized in that it includes:
Bottom supporting block (1);
Driving motor (2) is fixedly mounted on bottom supporting block (1) one end;
Bidirectional-screw (3), one end and driving motor (2) are sequentially connected, and set that there are two out movements on Bidirectional-screw (3) Feed screw nut (4);
Two grippers are relatively fixed respectively on two feed screw nuts (4), and each gripper includes:It is fixed on silk Babinet (5) on stem nut (4), one end are fixedly mounted on servo motor (6), one end and the servo in babinet (5) interior side face The line slide rail (7) of motor (6) axis connection, first for passing through babinet (5) and being connect with the sliding shoe (14) on line slide rail (7) Arm (8), the driving wheel (9) being fixedly connected with the first arm (8), the driven wheel (10) engaged with driving wheel (9) gear, with from The second arm (11) that driving wheel (10) is fixedly connected.
2. a kind of scanning electron microscope home position Compression and Expansion device as described in claim 1, which is characterized in that in two driving motors (2) grating scale is horizontally mounted between.
3. a kind of scanning electron microscope home position Compression and Expansion device as claimed in claim 2, which is characterized in that grating scale includes installation Scale grating (12) in bottom supporting block (1) and two grating reading heads (13) being separately mounted on two babinets (5); Scale grating (12) and two grating reading heads (13) are located at the same side of the scanning electron microscope home position Compression and Expansion device.
4. a kind of scanning electron microscope home position Compression and Expansion device as described in claim 1, which is characterized in that the first arm (8) and Second arm (11) is in symmetrical arc, is curved inwardly.
5. a kind of scanning electron microscope home position Compression and Expansion device as claimed in claim 4, which is characterized in that the first arm (8) is remote One end from driving wheel (9) is tip (15), and tip (15) are equipped with and the matched bulge-structure of sample cell (16).
6. a kind of scanning electron microscope home position Compression and Expansion device as claimed in claim 4, which is characterized in that the second arm (11) is remote One end from driven wheel (10) is tip (15), and tip (15) are equipped with and the matched bulge-structure of sample cell (16).
7. such as a kind of scanning electron microscope home position Compression and Expansion device described in claim 5 or 6, which is characterized in that bulge-structure (16) it uses and is threadedly coupled with corresponding arm.
8. such as a kind of scanning electron microscope home position Compression and Expansion device described in claim 5 or 6, which is characterized in that tip (15) are living It is ranging from -90 ° -+90 ° dynamic.
9. a kind of scanning electron microscope home position Compression and Expansion device as described in claim 1, which is characterized in that Bidirectional-screw (3) is logical Shaft coupling is crossed to be sequentially connected with driving motor (2).
10. a kind of scanning electron microscope home position Compression and Expansion device as described in claim 1, which is characterized in that the first arm (8) with Sliding shoe (14) on line slide rail (7) is connected by axis pin.
CN201820618311.8U 2018-04-24 2018-04-24 A kind of scanning electron microscope home position Compression and Expansion device Expired - Fee Related CN208043543U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820618311.8U CN208043543U (en) 2018-04-24 2018-04-24 A kind of scanning electron microscope home position Compression and Expansion device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820618311.8U CN208043543U (en) 2018-04-24 2018-04-24 A kind of scanning electron microscope home position Compression and Expansion device

Publications (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109900553A (en) * 2019-03-14 2019-06-18 中铁六局集团呼和浩特铁路建设有限公司 A kind of building concrete compressive strength test detection device and its operating method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109900553A (en) * 2019-03-14 2019-06-18 中铁六局集团呼和浩特铁路建设有限公司 A kind of building concrete compressive strength test detection device and its operating method
CN109900553B (en) * 2019-03-14 2021-08-31 中铁六局集团呼和浩特铁路建设有限公司 Building concrete compressive strength test detection device and operation method thereof

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20181102

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