CN208013025U - A kind of makeup of surface tension testing standard is set - Google Patents
A kind of makeup of surface tension testing standard is set Download PDFInfo
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- CN208013025U CN208013025U CN201721789925.4U CN201721789925U CN208013025U CN 208013025 U CN208013025 U CN 208013025U CN 201721789925 U CN201721789925 U CN 201721789925U CN 208013025 U CN208013025 U CN 208013025U
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- test
- workbench
- surface tension
- leveling device
- testing standard
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Abstract
A kind of surface tension testing standard makeup of the utility model offer is set, including pedestal and the workbench being disposed there above, one side of leveling device workbench is provided with camera, opposite another party of leveling device workbench is provided with test chassis, light source is installed in leveling device test chassis, leveling device light source face workbench, the top of leveling device test chassis is equipped with test droplets amount motor, leveling device test droplets amount motor top drives test fluid pipe by the gear of a pair of meshing, needle tubing is equipped with by needle tubing lifting motor below leveling device test liquid pipe, leveling device needle tubing lifting motor is mounted on the side of test chassis.The utility model is simple in structure, and whether the cleanliness factor of simple and fast detection plasma cleaning is up to standard, and shortest time discovery is bad, and prevents bad, raising product quality.
Description
Technical field
The utility model relates generally to semiconductor applications more particularly to a kind of makeup of surface tension testing standard is set.
Background technology
After present situation plasma cleaning, the cleanliness factor measurement standard of product is inaccurate.Pass through the mark tested surface tension
Standard melts hair, and whether the cleanliness factor of simple and fast detection plasma cleaning is up to standard.
Chinese utility model patent, application number CN201720150578.4, patent name are disclosed：A kind of mobile phone display screen
Water droplet angle tester, the applying date：20170220, it discloses a kind of water droplet angle tester of mobile phone display screen, including bottom plate,
Column, crossbeam, injection device, workbench, camera, it is characterised in that：The bottom plate is fixedly installed on the bottom of column, described vertical
The top of column is fixed with crossbeam, is slided on the crossbeam and is equipped with mobile station, and the leading flank of the mobile station is equipped with telescopic rod,
Injection device is equipped on the free end of the telescopic rod, the injection device includes lifting column, water droplet syringe, adjusts hand
Handle.The utility model is reasonable for structure, easy to use, and injection device can be achieved by the effect of mobile station, telescopic rod and lifting column
In the movement of three-dimensional so that injection device is more flexible, and the utility model is easy to operate, convenient for promoting.
Utility model content
A kind of surface tension testing standard makeup of the utility model offer is set, special for the drawbacks described above of the prior art
Sign is to include pedestal 1 and the workbench being disposed there above 2, and a side of the workbench 2 is provided with camera 3, the work
Opposite another party of platform 2 is provided with test chassis 4, and light source 5, the work of 5 face of the light source are equipped in the test chassis 4
The top of platform 2, the test chassis 4 is equipped with test droplets amount motor 6, and 6 top of test droplets amount motor passes through a pair
Meshed gears drives test liquid pipe 7,7 lower section of the test liquid pipe to be equipped with needle tubing 9, the needle by needle tubing lifting motor 8
Pipe lifting motor 8 is mounted on the side of test chassis 4.
Preferably, 3 lower section of the camera is provided with height adjuster 10.
Preferably, 1 top of the pedestal is equipped with X-axis moving track 11, and the X-axis moving track 11 is by being equipped with
Sliding shoe 12 connect with workbench 2.
Preferably, 1 lower section of the pedestal is equipped with X-axis mobile motor 13, and the X-axis mobile motor 13 is by being arranged work
The transmission belt 14 of 2 top of platform is driven sliding shoe 12.
Preferably, 1 lower section setting of the pedestal has been connected through a screw thread leveling device 15.
Preferably, there are four the settings of the leveling device 15.
Preferably, the dropping liquid amount of the test liquid pipe 7 is every time 0.4 μ L.
The beneficial effects of the utility model：Whether the cleanliness factor of simple and fast detection plasma cleaning is up to standard, shortest
Time discovery is bad, and prevents bad, raising product quality.
Description of the drawings
Fig. 1 is the structure chart of the utility model；
In figure,
1, pedestal；2, workbench；3, camera；4, test chassis；5, light source；6, test droplets amount motor；7, liquid pipe is tested；
8, needle tubing lifting motor；9, needle tubing；10, height adjuster；11, X-axis moving track；12, sliding shoe；13, X-axis movement electricity
Machine；14, transmission belt；15, leveling device.
Specific implementation mode
As shown in Figure 1 it is found that the utility model includes：Pedestal 1 and the workbench 2 being disposed there above, the work
One side of platform 2 is provided with camera 3, and opposite another party of the workbench 2 is provided with test chassis 4, in the test chassis 4
Light source 5 is installed, the top of 5 face workbench 2 of the light source, the test chassis 4 is equipped with test droplets amount motor 6, institute
State 6 top of test droplets amount motor drives test fluid pipe 7,7 lower section of the test liquid pipe to pass through needle by the gear of a pair of meshing
Pipe lifting motor 8 is equipped with needle tubing 9, and the needle tubing lifting motor 8 is mounted on the side of test chassis 4；Wherein light source 5 uses
LED light.
Preferred in this embodiment, 3 lower section of the camera is provided with height adjuster 10；Wherein the height of camera 3 by
Height adjuster 10 adjusts, and the speed of orientation of camera 3 is 60image/ seconds, and resolution is 640*480pixel.
Preferred in this embodiment, 1 top of the pedestal is equipped with X-axis moving track 11, and the X-axis moving track 11 is logical
The sliding shoe 12 being equipped with is crossed to connect with workbench 2.
Preferred in this embodiment, 1 lower section of the pedestal is equipped with X-axis mobile motor 13, and the X-axis mobile motor 13 is logical
The transmission belt 14 for crossing 2 top of setting workbench is driven sliding shoe 12.
Preferred in this embodiment, 1 lower section setting of the pedestal has been connected through a screw thread leveling device 15.
Preferred in this embodiment, there are four the settings of the leveling device 15；It is used for the level of adjusting apparatus.
Preferred in this embodiment, the dropping liquid amount of the test liquid pipe 7 is every time 0.4 μ L.
In use, the height 9 of needle tubing is adjusted by needle tubing lifting motor 8, tests the infusion volume of liquid pipe 7 by test droplets amount
Motor 6 controls, and the position that workbench 2 is adjusted by X-axis mobile motor 13 is coordinated, to the production after plasma cleaning
On product upper DI Water (deionized water) are dripped with needle tubing；When deionized water drops on product surface, phase is quickly taken by camera 3
The angle of record test water droplet radian and plane, and it is transferred to computer, image procossing obtains test value later, is tested by DOE
The reference range of setting matches, and whether the effect to judge plasma cleaning is up to standard.
The device of the utility model can be used for：
1. the front and back surface tension optimal criteria range of testing plasma cleaning.
2. being tested by surface tension value, plasma cleaning equipment parameter optimization is debugged.
3. judging surface tension situation by water droplet test angle.
The principles and effects of present patent application are only illustrated in above-described embodiment, not for limitation this patent Shen
Please.Any person skilled in the art can all carry out above-described embodiment under the spirit and scope without prejudice to present patent application
Modifications and changes.Therefore, such as those of ordinary skill in the art without departing from the revealed essence of present patent application
It is refreshing to be covered with all equivalent modifications completed under technological thought or change, the claim that asked by this patent.
Claims (7)
1. a kind of surface tension testing standard makeup is set, which is characterized in that including workbench pedestal (1) and be disposed there above
(2), a side of the workbench (2) is provided with camera (3), and opposite another party of the workbench (2) is provided with test machine
Frame (4), the test chassis (4) is interior to be equipped with light source (5), light source (5) the face workbench (2), the test chassis (4)
Top test droplets amount motor (6) is installed, the gear that the test droplets amount motor (6) top passes through a pair of meshing drives
Liquid pipe (7) is tested, test liquid pipe (7) lower section is equipped with needle tubing (9), the needle tubing lifting by needle tubing lifting motor (8)
Motor (8) is mounted on the side of test chassis (4).
2. a kind of surface tension testing standard makeup according to claim 1 is set, it is characterised in that：Under the camera (3)
Side is provided with height adjuster (10).
3. a kind of surface tension testing standard makeup according to claim 2 is set, it is characterised in that：On the pedestal (1)
Side is equipped with X-axis moving track (11), and the X-axis moving track (11) passes through the sliding shoe (12) and workbench that are equipped with
(2) it connects.
4. a kind of surface tension testing standard makeup according to claim 3 is set, it is characterised in that：Under the pedestal (1)
Side is equipped with X-axis mobile motor (13), and the X-axis mobile motor (13) is by being arranged the transmission belt (14) above workbench (2)
It is driven sliding shoe (12).
5. a kind of surface tension testing standard makeup according to claim 1 is set, it is characterised in that：Under the pedestal (1)
Side's setting has been connected through a screw thread leveling device (15).
6. a kind of surface tension testing standard makeup according to claim 5 is set, it is characterised in that：The horizontal adjustment dress
It sets there are four (15) settings.
7. a kind of surface tension testing standard makeup according to claim 1 is set, it is characterised in that：The test liquid pipe
(7) dropping liquid amount is every time 0.4 μ L.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721789925.4U CN208013025U (en) | 2017-12-20 | 2017-12-20 | A kind of makeup of surface tension testing standard is set |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721789925.4U CN208013025U (en) | 2017-12-20 | 2017-12-20 | A kind of makeup of surface tension testing standard is set |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208013025U true CN208013025U (en) | 2018-10-26 |
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ID=63881804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721789925.4U Active CN208013025U (en) | 2017-12-20 | 2017-12-20 | A kind of makeup of surface tension testing standard is set |
Country Status (1)
| Country | Link |
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| CN (1) | CN208013025U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114354452A (en) * | 2022-01-04 | 2022-04-15 | 四川大学 | Method for measuring surface tension coefficient by dropping liquid drops on needle tube |
-
2017
- 2017-12-20 CN CN201721789925.4U patent/CN208013025U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114354452A (en) * | 2022-01-04 | 2022-04-15 | 四川大学 | Method for measuring surface tension coefficient by dropping liquid drops on needle tube |
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