CN208008872U - A kind of tooling for chip plated film - Google Patents
A kind of tooling for chip plated film Download PDFInfo
- Publication number
- CN208008872U CN208008872U CN201820427242.2U CN201820427242U CN208008872U CN 208008872 U CN208008872 U CN 208008872U CN 201820427242 U CN201820427242 U CN 201820427242U CN 208008872 U CN208008872 U CN 208008872U
- Authority
- CN
- China
- Prior art keywords
- plated film
- mask plate
- carrier
- edges
- slot position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of toolings for chip plated film, including mask plate and carrier, slot position there are three being set on the carrier, former and later two notch edges of slot position are equipped with locating piece, locating piece is equipped with adjusting bolt, mask plate is set in carrier, it is fixed by adjusting bolt, the mask plate is equipped with 500 wafer slots, magnetite slot is equidistantly equipped on the four edges of its working face respectively, location hole is equipped at four edges center, the utility model is by way of increasing mask plate station and reducing carrier slot position, so that a plated film quantity reaches 1500pcs, plated film improved efficiency 47%.The layout of new 500 station mask plate wafer slots is compacter, reasonable, and the reachable ± 500ppm of plated film frequency scattered error degree, was ± 1000ppm originally.Plated film frequency scattered error is smaller to be more conducive to rear road fine tuning procedures, and the qualification rate and qualitative reliability of product have a distinct increment.
Description
Technical field
The utility model is related to a kind of toolings for chip plated film, and especially design is a kind of produces for quartz-crystal resonator
The mask plate and carrier of product chip plated film.
Background technology
Plated film is one of the important procedure of quartz-crystal resonator production, and the lower process of automation.It acts as
Cr, Ag are plated on chip two sides, forms electrode.Since manual operation content is more herein, in crystal oscillator industry plated film production capacity
The always bottleneck production capacity of production line.The pattern progress plated film that it is 204*5 that Today, most producer, which uses, is as shown in Figs. 1-2,
I.e. a plated film amount is 1020pcs.Current plated film mode operating efficiency is relatively low, cannot be satisfied the demand of rear road point glue process.Make
Industry efficiency is low but also product time for resting on filming process is longer, the risk of particle contamination generation is increased, to final
Influence the qualification rate and qualitative reliability of product.
Utility model content
The purpose of this utility model is to provide a kind of toolings for chip plated film, to solve to carry in above-mentioned background technology
The problem of going out.
To achieve the above object, the utility model provides the following technical solutions：A kind of tooling for chip plated film, including
Mask plate and carrier are set on the carrier there are three slot position, former and later two notch edges of slot position are equipped with locating piece, positioning
Block is equipped with adjusting bolt, and mask plate is set in carrier, is fixed by adjusting bolt, and the mask plate is equipped with 500 crystalline substances
Film trap is equidistantly equipped with magnetite slot on the four edges of working face, location hole is equipped at four edges center respectively.
Preferably, the slot bit width is 92mm.
Preferably, the height of the carrier base is 45mm.
Preferably, the length and width of the mask plate are 100mm*91mm.
Compared with prior art, the utility model has the beneficial effects that：The utility model by increase mask plate station and
Reduce the mode of carrier slot position so that one time plated film quantity reaches 1500pcs, plated film improved efficiency 47%.New 500 station mask plate
The layout of wafer slots is compacter, reasonable, and the reachable ± 500ppm of plated film frequency scattered error degree, was ± 1000ppm originally.Plated film frequency dissipates
Difference is smaller to be more conducive to rear road fine tuning procedures, and the qualification rate and qualitative reliability of product have a distinct increment.
Description of the drawings
Fig. 1 is original vector configuration diagram.
Fig. 2 is the structural schematic diagram of former mask plate.
Fig. 3 is the structural schematic diagram of the utility model carrier.
Fig. 4 is the structural schematic diagram of the utility model mask plate
In figure：1 carrier, 2 locating pieces, 3 slot positions, 4 adjusting bolts, 5 mask plates, 6 wafer slots, 7 magnetite slots, 8 location holes.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
The every other embodiment obtained, shall fall within the protection scope of the present invention.
- 2 are please referred to Fig.1, the operation principle of sputter coating machine is travelling plated film, i.e., plated film starts the injection of rear chamber two sides
Silver-colored mist, the tooling for being loaded with chip are at the uniform velocity advanced in intracavitary, control output frequency by adjusting travelling speed, former plated film station is
204, the length and width of mask plate are 93mm*54mm, and one time plated film amount is 1020pcs, and current plated film mode operating efficiency is relatively low, nothing
After method meets the needs of road point glue process.
Fig. 3-4 is please referred to, the utility model provides a kind of technical solution：A kind of tooling for chip plated film, including cover
Diaphragm plate 5 and carrier 1 are set on carrier 1 there are three slot position 3, former and later two notch edges of slot position 3 are equipped with locating piece 2, locating piece
2 are equipped with adjusting bolt 4, and mask plate 5 is set in carrier 1, is fixed by adjusting bolt 4, and the mask plate 5 is equipped with 500
A wafer slots 6 are equidistantly equipped with magnetite slot 7 on the four edges of working face, location hole 8 are equipped at four edges center respectively.Mask
The length and width of plate 5 are changed to 100mm*91mm by 93mm*54mm, and the layout of internal wafer slot is more concentrated, and slot position is reduced to by 5
3, since new mask plate height increases, to ensure that traveling center and the sputtering center of plated film cavity are still consistent, slot position bottom
Height of the portion away from carrier bottom lowers 7mm.
Novel mask plate 5 is 500 stations, and the more former 204 station mask plate of interior layout is compacter, the scattered error of plated film frequency
Smaller.After mask plate is loaded chip, operation can be started by being inserted into plated film carrier slot position 3, and a year-on-year plated film quantity is reachable
1500pcs improves 47% plated film production efficiency.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is appreciated that can these embodiments be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaiied
Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.
Claims (4)
1. a kind of tooling for chip plated film, including mask plate（5）And carrier（1）, it is characterized in that：The carrier（1）On
If there are three slot positions（3）, slot position（3）Former and later two notch edges be equipped with locating piece（2）, locating piece（2）It is equipped with and adjusts
Bolt（4）, mask plate（5）Set on carrier（1）It is interior, pass through adjusting bolt（4）Fixed, described mask plate（5）It is equipped with 500
Wafer slots（6）, magnetite slot is equidistantly equipped on the four edges of working face respectively（7）, location hole is equipped at four edges center（8）.
2. a kind of tooling for chip plated film according to claim 1, it is characterized in that：The slot position（3）Width is
92mm。
3. a kind of tooling for chip plated film according to claim 1, it is characterized in that：The carrier（1）Bottom
Height is 45mm.
4. a kind of tooling for chip plated film according to claim 1, it is characterized in that：The mask plate（5）Length
Width is 100mm*91mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820427242.2U CN208008872U (en) | 2018-03-28 | 2018-03-28 | A kind of tooling for chip plated film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820427242.2U CN208008872U (en) | 2018-03-28 | 2018-03-28 | A kind of tooling for chip plated film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208008872U true CN208008872U (en) | 2018-10-26 |
Family
ID=63891064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820427242.2U Expired - Fee Related CN208008872U (en) | 2018-03-28 | 2018-03-28 | A kind of tooling for chip plated film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208008872U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109280897A (en) * | 2018-11-30 | 2019-01-29 | 广州晶优电子科技有限公司 | Quartz wafer film coating jig |
| CN109326551A (en) * | 2018-11-02 | 2019-02-12 | 江苏海德频率科技有限公司 | A kind of coating clamp and its carrier strip and production method |
-
2018
- 2018-03-28 CN CN201820427242.2U patent/CN208008872U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109326551A (en) * | 2018-11-02 | 2019-02-12 | 江苏海德频率科技有限公司 | A kind of coating clamp and its carrier strip and production method |
| CN109280897A (en) * | 2018-11-30 | 2019-01-29 | 广州晶优电子科技有限公司 | Quartz wafer film coating jig |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181026 Termination date: 20200328 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |