CN208005428U - A kind of stainless steel CMP devices with Fluid pressure test function - Google Patents
A kind of stainless steel CMP devices with Fluid pressure test function Download PDFInfo
- Publication number
- CN208005428U CN208005428U CN201721820159.3U CN201721820159U CN208005428U CN 208005428 U CN208005428 U CN 208005428U CN 201721820159 U CN201721820159 U CN 201721820159U CN 208005428 U CN208005428 U CN 208005428U
- Authority
- CN
- China
- Prior art keywords
- polishing
- fluid pressure
- stainless steel
- rack
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model discloses a kind of stainless steel CMP devices with Fluid pressure test function, it is related to chemical Mechanical Polishing Technique field, it includes polishing roller motor, polishing roll, rectangle polishing fluid nozzle, motor support plate, track, hollow polished band, hydraulic lift, leading screw, shaft coupling, spindle motor, fluid pressure sensor；The utility model can be with the Fluid pressure of real-time testing stainless steel band different location, it can also individually test under different polish pressures simultaneously, Fluid pressure when different polishing velocities and different flow polishing fluid, polishing solution delivery device uses rectangle bilateral nozzle, ensure that the polishing fluid amount of feeding on the polishing roll of both sides is identical, improve the efficiency of polishing, from the aspect of saving space, polishing machine rack uses Vertical Rack, space availability ratio is high, it ensure that quality of finish simultaneously, substantially reduce processing cost, to meet the basic demand of people, with good practical value.
Description
Technical field
The utility model is related to chemically-mechanicapolish polish, especially a kind of stainless steel CMP dresses with Fluid pressure test function
It sets.
Background technology
Currently, in our countries, with the arrival in intelligent epoch, smart mobile phone, tablet, the electronical displays such as LCD TV set
Standby to be seen everywhere, the stainless steel as display flexible substrate material is higher and higher to the roughness and flatness requirement on surface.
A kind of mode as polishing stainless steel surface of chemically mechanical polishing, material of the Fluid pressure present in polishing process to polishing
The surface roughness affect of removal rate and workpiece is larger, and Fluid pressure is excessive or too small can all reduce quality of finish.
Invention content
The purpose of this utility model is to provide for a kind of stainless steel CMP devices with Fluid pressure test function.
In order to achieve the above objectives, the utility model is implemented according to following technical scheme：A kind of band Fluid pressure test
The stainless steel CMP devices of function, including rack, there are two parallel track, the rails for fixed setting on the bottom plate of the rack
Road top is provided with leading screw, and one end of the leading screw is connected with spindle motor by shaft coupling, and the other end of the leading screw passes through
Bearing is mounted on bearing base, and the bearing base is fixed on the bottom plate of the rack, and the spindle motor is fixed on institute
It states on the bottom plate of rack, the leading screw is perforative to be connected with sliding block, and the sliding block is movably coupled on the track, described
Sliding block top is installed with hydraulic lift, and the hydraulic lift top is fixedly connected with sand belt, the polishing
It takes and multiple fluid pressure sensors is installed, there are two polishing roll, described two throwings between the two side walls of the rack
Smooth roll operates counterclockwise, and described two polishing rolls are driven by being fixed on the polishing roller motor of the frame side wall, the throwing
Smooth roll motor is fixed on outside the side wall of the rack, and described two polishing rolls are arranged on the top of the sand belt, described
Two polishing rolls between slidably connect polishing fluid nozzle, the polishing fluid nozzle is fixed on the rack by supporting rack
On side wall.
Further, the sand belt is hollow polished band.
Further, the hollow polished band is stainless steel band.
Further, the polishing roller motor is fixed on outside frame side wall by the motor support plate of triangle.
Further, the polishing fluid nozzle is rectangle bilateral nozzle.
Further, the hydraulic lift is fixed on by bolt or paraffin on the sliding block.
Compared with prior art, a kind of stainless steel CMP devices with Fluid pressure test function of the utility model, structure
Reasonable design, it is convenient to install and use, and fluid pressure sensor is provided on sand belt, can be with real-time testing stainless steel band difference position
The Fluid pressure set, while can also individually test under different polish pressures, different polishing velocity and different flow polishing fluid
When Fluid pressure, hydraulic lift adjusts the height of oscilaltion according to different Fluid pressure, thrown with reaching
The higher product of light quality, polishing solution delivery device use rectangle bilateral nozzle, ensure polishing fluid on the polishing roll of both sides into
It is identical to measuring, the efficiency of polishing is improved, from the aspect of saving space, polishing machine rack uses Vertical Rack, space profit
It is high with rate, while ensure that quality of finish, processing cost is substantially reduced, to meet the basic demand of people, is had real well
With value.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model.
Reference numeral：1, roller motor is polished；2, polishing roll；3, rectangle polishing fluid nozzle；4, motor support plate；5, track；
6, hollow polished band；7, hydraulic lift；8, leading screw；9, shaft coupling；10, spindle motor；11, rack；12, sliding block.
Specific implementation mode
The utility model will be further described below with reference to the accompanying drawings and specific embodiments, in the signal of this utility model
Property embodiment and explanation be used for explaining the utility model, but be not intended to limit the scope of the present invention.
A kind of stainless steel CMP devices with Fluid pressure test function as shown in Figure 1, including rack 11, the rack
There are two parallel tracks 5 for fixed setting on 11 bottom plate, and 5 top of the track is provided with leading screw 8, one end of the leading screw 8
It is connected with spindle motor 10 by shaft coupling 9, the other end of the leading screw 8 is mounted on by bearing on bearing base, the axis
It holds pedestal to be fixed on the bottom plate of the rack 11, the spindle motor 10 is fixed on the bottom plate of the rack 11, the silk
Thick stick 8 is perforative to be connected with sliding block 12, and the sliding block 12 is movably coupled on the track 5, and 12 top of the sliding block is fixed
Hydraulic lift 7 is installed, 7 top of the hydraulic lift is fixedly connected with hollow polished band 6, the hollow polished band
Multiple fluid pressure sensors are installed on 6, there are two polishing roll 2 between the two side walls of the rack 11, described two
Polishing roll 2 operates counterclockwise, and described two polishing rolls 2 are driven by being fixed on the polishing roller motor 1 of 11 side wall of the rack,
The polishing roller motor 1 is fixed on by the motor support plate of triangle outside the side wall of rack 11, described two throwings
Smooth roll 2 is arranged slidably connects polishing fluid nozzle 3 between the top of the sand belt 6, described two polishing rolls 2, described
Polishing fluid nozzle 3 is fixed on by supporting rack on the side wall of the rack 11.
The principles of the present invention：The utility model is set for 304 stainless steel Roll-to-Roll chemically mechanical polishings
Meter, which includes mainly lead screw transmission and hydraulic drive, and the concrete operating principle of the device is as follows, the dress
The lead screw transmission set is exactly linear modular structure, drives the sliding block 12 coordinated with leading screw 8 to do translation fortune by the rotation of leading screw 8
It is dynamic；In view of the stationarity of movement when design, use is combined using two sets of linear modules；Hydraulic lift 7 is fixed
On the sliding block 12 of linear module, 304 stainless steel bands are fixed on hydraulic lifting dress with glutinous viscous or other fixed forms of paraffin
It sets on 7.When the device works, it is mounted on the polishing roller motor 1 outside 11 side wall of rack and polishing roll 2 is driven with certain speed
It is rotated, leading screw 8 is transported to stainless steel band translation with movable slider the underface of polishing roll 2, then by hydraulic lift 7
It is responsible for being raised to stainless steel band to contact with polishing roll 2 being polished, then steel band is applied by hydraulic lift 7 different
Polish pressure, 3 timing of rectangle polishing fluid nozzle spray polishing fluid to polishing roll 2, ensure the normal operation of polishing；Stainless steel
It takes different location and is all disposed with fluid pressure sensor, it can be with the Fluid pressure of real-time testing stainless steel band different location, together
When can also individually test under different polish pressures, the fluid pressure when different polishing velocity and different flow polishing fluid
Power；Polishing roller motor 1 in view of providing power for the rotation of polishing roll 2 cannot suspend in mid air, although polishing roller motor 1 itself
Weight is little, but is suspended in and makes polishing machine totality discontinuity in the air, influences being normally carried out for polishing, then devises one kind three
Angular support plate fixes polishing roller motor 1 using the stability of triangle.
The technical solution of the utility model is not limited to the limitation of above-mentioned specific embodiment, every skill according to the present utility model
The technology deformation that art scheme is made, each falls within the scope of protection of the utility model.
Claims (6)
1. a kind of stainless steel CMP devices with Fluid pressure test function, including rack, it is characterised in that：The bottom of the rack
There are two parallel tracks, the rail superior portion to be provided with leading screw for fixed setting on plate, and one end of the leading screw passes through shaft coupling
It is connected with spindle motor, the other end of the leading screw is mounted on by bearing on bearing base, and the bearing base is fixed on institute
It states on the bottom plate of rack, the spindle motor is fixed on the bottom plate of the rack, and the leading screw is perforative to be connected with sliding block, institute
It states sliding block to be movably coupled on the track, the sliding block top is installed with hydraulic lift, the hydraulic pressure liter
Falling unit top is fixedly connected with sand belt, is equipped with multiple fluid pressure sensors on the sand belt, and the two of the rack
There are two polishing rolls, described two polishing rolls to operate counterclockwise between a side wall, and described two polishing rolls are by being fixed on
The polishing roller motor of the frame side wall drives, and the polishing roller motor is fixed on outside the side wall of the rack, and described two
A polishing roll is arranged slidably connects polishing fluid nozzle between the top of the sand belt, described two polishing rolls, described
Polishing fluid nozzle is fixed on by supporting rack on the side wall of the rack.
2. a kind of stainless steel CMP devices with Fluid pressure test function according to claim 1, it is characterised in that：Institute
The sand belt stated is hollow polished band.
3. a kind of stainless steel CMP devices with Fluid pressure test function according to claim 2, it is characterised in that：Institute
The hollow polished band stated is stainless steel band.
4. a kind of stainless steel CMP devices with Fluid pressure test function according to claim 1, it is characterised in that：Institute
The polishing roller motor stated is fixed on outside frame side wall by the motor support plate of triangle.
5. a kind of stainless steel CMP devices with Fluid pressure test function according to claim 1, it is characterised in that：Institute
The polishing fluid nozzle stated is rectangle bilateral nozzle.
6. a kind of stainless steel CMP devices with Fluid pressure test function according to claim 1, it is characterised in that：Institute
The hydraulic lift stated is fixed on by bolt or paraffin on the sliding block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721820159.3U CN208005428U (en) | 2017-12-20 | 2017-12-20 | A kind of stainless steel CMP devices with Fluid pressure test function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721820159.3U CN208005428U (en) | 2017-12-20 | 2017-12-20 | A kind of stainless steel CMP devices with Fluid pressure test function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208005428U true CN208005428U (en) | 2018-10-26 |
Family
ID=63881743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721820159.3U Expired - Fee Related CN208005428U (en) | 2017-12-20 | 2017-12-20 | A kind of stainless steel CMP devices with Fluid pressure test function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208005428U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110052909A (en) * | 2019-03-25 | 2019-07-26 | 东阳市恒业钢带有限公司 | A kind of steel band dust-free environmental protection type burnishing device |
| CN113199384A (en) * | 2021-06-08 | 2021-08-03 | 浙江工业大学 | Polishing tool using spherical polishing roller with grooved structural units |
-
2017
- 2017-12-20 CN CN201721820159.3U patent/CN208005428U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110052909A (en) * | 2019-03-25 | 2019-07-26 | 东阳市恒业钢带有限公司 | A kind of steel band dust-free environmental protection type burnishing device |
| CN110052909B (en) * | 2019-03-25 | 2020-08-04 | 东阳市恒业钢带有限公司 | Steel band dustless environment-friendly burnishing device |
| CN113199384A (en) * | 2021-06-08 | 2021-08-03 | 浙江工业大学 | Polishing tool using spherical polishing roller with grooved structural units |
| CN113199384B (en) * | 2021-06-08 | 2024-05-17 | 浙江工业大学 | Polishing tool using ball-type polishing roller with grooved structure unit |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN208005428U (en) | A kind of stainless steel CMP devices with Fluid pressure test function | |
| CN107214585A (en) | A kind of efficient sanding apparatus of T-rail | |
| CN208560948U (en) | A kind of underpass type photovoltaic glass Automatic Conveying Wiring device | |
| CN208544844U (en) | Formula photovoltaic glass Automatic Conveying Wiring device is worn in one kind | |
| CN105731035A (en) | Adhesive residue auto-wiping machine | |
| TWM509098U (en) | Fine polishing equipment for ultra-thin electronic glass | |
| CN104924189B (en) | Polishing machine for chemically-mechanically polishing ultrathin flexible display substrate | |
| CN209256524U (en) | A kind of PS plate production batch grinding device | |
| CN104019785A (en) | Measuring instrument for measuring circularity of large-size bearing assembly | |
| CN204155034U (en) | Air floating platform and automatic optical checking equipment | |
| CN205309984U (en) | Building the sheet surface burnishing machine | |
| CN207534527U (en) | Fiberboard plate face grinding device | |
| CN208488148U (en) | A kind of mobile weighing device for logistics | |
| CN201235490Y (en) | Crank swing grinding bench apparatus | |
| CN207289726U (en) | A kind of air bag polishing machine of achievable automatic feeding function | |
| CN108972305A (en) | A kind of reel-to-reel high-efficiency and continuous chemistry mechanical polisher | |
| CN206358732U (en) | A kind of automatic transmission platform of SIP wallboards | |
| CN202862179U (en) | Rotatable workbench used for top suction machine seamless panel finishing | |
| CN206013627U (en) | A kind of hybrid transporter of roller air supporting | |
| CN205998218U (en) | A kind of reverse film sticking equipment | |
| CN108946007A (en) | A kind of producing line workpiece buffer memory device | |
| CN210790522U (en) | Grinding mechanism for liquid crystal panel | |
| CN208759292U (en) | A kind of reel-to-reel high-efficiency and continuous chemistry mechanical polisher | |
| CN111331482A (en) | Automatic belt polarizer grinding device | |
| CN210704119U (en) | High-performance copper alloy strip grinding device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181026 Termination date: 20201220 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |