CN204155034U - Air floating platform and automatic optical checking equipment - Google Patents
Air floating platform and automatic optical checking equipment Download PDFInfo
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- CN204155034U CN204155034U CN201420614208.8U CN201420614208U CN204155034U CN 204155034 U CN204155034 U CN 204155034U CN 201420614208 U CN201420614208 U CN 201420614208U CN 204155034 U CN204155034 U CN 204155034U
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- air supporting
- supporting band
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- floating platform
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Abstract
The utility model provides a kind of air floating platform; comprise some spaced air supporting bands and support the bracing or strutting arrangement of described air supporting band; described air supporting band is provided with some pores towards the side of carrier; wherein; the both sides of at least part of air supporting band are provided with protective device, and the end face of described protective device is higher than the surface of described air supporting band towards described carrier.If any abnormal conditions, first glass substrate comes in contact with the protective device of air supporting band both sides, and itself and air supporting band can be avoided mutually to adsorb and cause the damage of glass substrate or air supporting band.
Description
Technical field
The utility model belongs to Light Electrical technical field, is specifically related to a kind of air floating platform and comprises the automatic optical checking equipment of described air floating platform.
Background technology
The array base palte of Thin Film Transistor-LCD (TFT-LCD) is through complicated technological process manufacture, the substrate appearance of a street of reaching the standard grade easily forms open circuit and short circuit phenomenon, detect the open circuit of circuit on substrate and short circuit and carry out keeping in repair the yield that can improve product, the detection speed accelerating equipment and the hardware configuration reducing equipment can reach and improve detection efficiency and cost-saving object.
Automatic visual inspection (Automated Optical Inspection, AOI) equipment is widely used in display screen production industry as the instrument detecting base board defect.Usually, AOI equipment adopts air floating platform to carry out carrying and the transport of glass substrate, adopts the mode of air floating platform to achieve non-contact transmission, alleviates distortion and the stress of sized rectangular glass substrate, improve production efficiency.
Specifically as depicted in figs. 1 and 2, existing air floating platform comprises air supporting band 1 and supports the bracing or strutting arrangement 2 of this air supporting band 1.In order to save equipment development cost, air supporting band 1 is usually designed to the list structure of hollow, and some air supporting band 1 array arrangements, arrange a bracing or strutting arrangement 2 below each air supporting band 1, some air supporting band 1 common support glass substrates 3.Discharge air by pore on air supporting band 1, make air supporting band 1 and carrier as formed air film 5 between glass substrate 3, glass substrate 3 is floated, reach noncontact carrying with without rubbing the object transmitted.
But, find in actual use, when air floating platform carrying large-sized glass substrate 3, in the gap of vacancy section that is between two air supporting bands 1, glass substrate 3 has certain bending, and own glass substrate 3 very little apart from the height of air floating platform (being generally 50 μm ~ 150 μm), be easy to because there is steam etc. at electrostatic or other problems such as glass back, glass substrate 3 and air floating platform is caused mutually to adsorb, thus cause the scuffing to glass substrate 3 and pollution, seriously, directly cause glass substrate 3 fragmentation or air floating platform damage, have a strong impact on the quality of product and yield rate and production efficiency.
Utility model content
The purpose of this utility model is to solve the air supporting band of existing air floating platform and carrier and causes carrier or the impaired problem of air floating platform as glass substrate adsorbs mutually.
For solving the problem; the utility model provides a kind of air floating platform; comprise some spaced air supporting bands and support the bracing or strutting arrangement of described air supporting band; described air supporting band is provided with some pores towards the side of carrier; wherein; the both sides of at least part of air supporting band are provided with protective device, and the end face of described protective device is higher than the surface of described air supporting band towards described carrier.
Optionally, in described air floating platform, described protective device comprises support and is arranged at the passive roller be connected on described support and with described holder pivots.
Optionally, in described air floating platform, described support is fixed on described air supporting band.
Optionally, in described air floating platform, described support is fixed on described bracing or strutting arrangement.
Optionally, in described air floating platform, described air supporting band is strip hollow structure, arranges a bracing or strutting arrangement below each air supporting band, described some air supporting band array arrangements.
Optionally, in described air floating platform, described some air supporting bands arrangement is rectangular array, and the side that the air supporting band at rectangular array edge is only close to rectangular array center is provided with protective device, and the both sides of all the other air supporting bands are provided with described protective device.
Optionally, in described air floating platform, a side of described air supporting band is provided with compressed air inlet.
Optionally, in described air floating platform, described air floating platform also comprises a pneumatic element, and described pneumatic element is communicated with described air supporting band by the compressed air inlet of described air supporting band.
Optionally, in described air floating platform, described carrier is glass substrate.
According to another side of the present utility model, also provide a kind of automatic optical checking equipment, comprise air floating platform as above.
Compared with prior art, the utility model adds protective device in the some or all of air supporting band both sides of air floating platform, and the end face of described protective device is higher than the surface of described air supporting band towards described carrier.If any abnormal conditions; carrier as glass substrate bend towards air supporting band direction time; first glass substrate comes in contact with the protective device of air supporting band both sides; glass substrate and air supporting band can be avoided mutually to adsorb and cause the damage of glass substrate or air supporting band, be conducive to improving the quality of product and yield rate and production efficiency.
Accompanying drawing explanation
Fig. 1 is the three-dimensional structure diagram of existing air floating platform;
Fig. 2 is the longitudinal sectional drawing in local of existing air floating platform;
Fig. 3 is the longitudinal sectional drawing in local of the utility model air floating platform.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts the form simplified very much, only in order to object that is convenient, aid illustration the utility model embodiment lucidly.
As shown in Figure 3; the utility model provides a kind of air floating platform; described air floating platform comprises some spaced air supporting bands 10 and the bracing or strutting arrangement 20 in order to support described air supporting band 10; described air supporting band 10 is provided with some pores towards the side of carrier; described all or part of air supporting band 10 both sides are provided with protective device 40, and the end face of described protective device 40 is higher than the surface of described air supporting band 10 towards carrier side.
Adopt air floating platform of the present utility model, air is discharged by the pore on air supporting band 10, make air supporting band 10 and carrier as formed air film 50 between glass substrate 30, glass substrate 30 is floated, reach noncontact carrying with without to rub the object transmitted, that is, under normal circumstances, rely on suitable air pressure upwards that glass substrate 30 is not contacted with air supporting band 10.Occur if any abnormal conditions; such as, when Electrostatic Absorption, glass back remain the situations such as steam; when glass substrate 30 bends towards air supporting band 10 direction; first glass substrate 30 comes in contact with the protective device 40 of air supporting band 10 both sides; itself and air supporting band 10 can be avoided mutually adsorb and cause the damage of glass substrate 30 or air supporting band 10, being conducive to the quality of raising product and yield rate and production efficiency.
In preferred embodiment, described protective device 40 comprises support 41 and to be arranged on described support 41 and the passive roller 42 be rotationally connected with described support 41.Described support 41 is fixed on described air supporting band 10 or bracing or strutting arrangement 20, known fixed form can be adopted to fix described support 41, such as support 41 is adhered on described air supporting band 10, or, by jig, support 41 is fixed on air supporting band 10, again or, be fixed on bracing or strutting arrangement 20 by jig by support 41, the utility model will not limit.Described passive roller 42 and described support 41 are rotationally connected, if carrier as glass substrate 30 move time, described passive roller 42 can rotate thereupon, farthest can reduce the friction force of carrier and passive roller 42.
As shown in Figure 3, described air supporting band 10 is strip hollow structure, and some air supporting band 10 array arrangements, arrange a bracing or strutting arrangement 20 below each air supporting band 10, some air supporting band 10 common support glass substrates 30.Preferably; described some air supporting bands 10 are arranged as rectangular array; the air supporting band 10 at rectangular array edge is only that the side being close to rectangular array center is provided with protective device 40; and the both sides of all the other air supporting bands 10 are provided with described protective device 40, so can more comprehensive support bearing thing.Certainly, the shape of described air supporting band 10 is not limited to bar shaped, and it also can be square or make special shape according to carrier shape.
In addition, the region that also can only easily bend at glass substrate 30 arranges protective device 40, and does not need all to arrange in all air supporting band 10 both sides protective device 40, so can save cost.In addition, this air floating platform can be assembled into air floating platform according to the some air supporting bands 10 of the large young pathbreaker of glass substrate 30 breadth, and can the air supporting band 10 of different accuracy grade be designed according to different purposes or adopt different types of air supporting band 10, the shape that some air supporting bands 10 arrange also according to the shape conversion of carrier, such as, can be arranged in square, circle or other shape.Determining by floating the calculating of the size of carrier as glass substrate 30, weight and float-amount of pore opening on air supporting band 10.
Further, described air floating platform also comprises a pneumatic element (not shown), the compressed air inlet that described pneumatic element is offered by air supporting band 10 side is communicated with the cavity of air supporting band 10, pneumatic element is for providing clean pressurized air, and compressed-air actuated flow velocity, flow can be controlled, with good support bearing thing.Preferably, can also be provided with some air supporting blocks in the cavity of described air supporting band 10, pneumatic element access cavity is its air feed, then gives each air supporting block by cavity air feed, makes each air supporting block air pressure, flow consistent, can ensure glass substrate 30 uniform force.
Continue with reference to figure 3, described bracing or strutting arrangement 20 is for supporting the height of air supporting band 10 and adjustment air floating platform.Bracing or strutting arrangement 20 is provided with lifting screw and trip bolt (not shown), by regulating the height of lifting screw adjustable air floating platform entirety, the upper surface of several air supporting bands 10 of air floating platform is adjusted to same plane, trip bolt can be used for entirety fastening.
It should be noted that, although be the function that glass substrate 30 describes air floating platform in detail with carrier above, but, described air floating platform not only may be used for carrying and the transport of flat pannel display industry and solar cell industry glass substrate 30, can also be used for carrying and the transport of other areas or thinner comparatively large easily bending phenomenon occurs the carrier that needs are supported of size.
According to another side of the present utility model, also provide a kind of automatic visual inspection (Automated OpticalInspection, AOI) equipment, described in comprise automatic optical checking equipment and adopt air floating platform as above.Under normal circumstances; in glass substrate 30 motion process; rely on suitable air pressure upwards that glass substrate 30 is not contacted with air supporting band 10 and passive roller 42; if any abnormal generation; such as Electrostatic Absorption, glass back remain steam etc.; when glass substrate 30 bends towards air supporting band 10 direction, first it come in contact with the protective device 40 of air supporting band 10 both sides, and itself and air supporting band 10 can be avoided mutually to adsorb and cause the damage of glass substrate 30 or air supporting band 10.
Described automatic optical checking equipment also comprises light supply apparatus and Image sensor apparatus, and light supply apparatus is in order to produce light to irradiate the surface to be checked in carrier, and the reflection ray that Image sensor apparatus receives this carrier detects image to produce.The utility model does not relate to the improvement of above-mentioned conventional partial, repeats no more herein.
Obviously, those skilled in the art can carry out various change and modification to utility model and not depart from spirit and scope of the present utility model.Like this, if these amendments of the present utility model and modification belong within the scope of the utility model claim and equivalent technologies thereof, then the utility model is also intended to comprise these change and modification.
Claims (10)
1. an air floating platform; comprise some spaced air supporting bands and support the bracing or strutting arrangement of described air supporting band; described air supporting band is provided with some pores towards the side of carrier; it is characterized in that; the both sides of at least part of air supporting band are provided with protective device, and the end face of described protective device is higher than the surface of described air supporting band towards described carrier.
2. air floating platform as claimed in claim 1, it is characterized in that, described protective device comprises support and is arranged at the passive roller be connected on described support and with described holder pivots.
3. air floating platform as claimed in claim 2, it is characterized in that, described support is fixed on described air supporting band.
4. air floating platform as claimed in claim 2, it is characterized in that, described support is fixed on described bracing or strutting arrangement.
5. air floating platform as claimed in claim 1, it is characterized in that, described air supporting band is strip hollow structure, and described some air supporting band array arrangements, arrange a bracing or strutting arrangement below each air supporting band.
6. air floating platform as claimed in claim 5; it is characterized in that; described some air supporting band arrangements are rectangular array; the side that the air supporting band of rectangular array fringe region is only close to rectangular array center is provided with protective device, and the both sides of the air supporting band of rectangular array central area are provided with described protective device.
7. air floating platform as claimed in claim 1, is characterized in that, a side of described air supporting band is provided with compressed air inlet.
8. air floating platform as claimed in claim 7, it is characterized in that, described air floating platform also comprises a pneumatic element, and described pneumatic element is communicated with described air supporting band by the compressed air inlet of described air supporting band.
9. air floating platform as claimed in any of claims 1 to 8 in one of claims, it is characterized in that, described carrier is glass substrate.
10. an automatic optical checking equipment, is characterized in that, comprises air floating platform as claimed in any one of claims 1-9 wherein.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420614208.8U CN204155034U (en) | 2014-10-22 | 2014-10-22 | Air floating platform and automatic optical checking equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420614208.8U CN204155034U (en) | 2014-10-22 | 2014-10-22 | Air floating platform and automatic optical checking equipment |
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| Publication Number | Publication Date |
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| CN204155034U true CN204155034U (en) | 2015-02-11 |
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| CN201420614208.8U Active CN204155034U (en) | 2014-10-22 | 2014-10-22 | Air floating platform and automatic optical checking equipment |
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| CN (1) | CN204155034U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105588843A (en) * | 2016-03-18 | 2016-05-18 | 武汉华星光电技术有限公司 | Optical inspection device and conveying device in TFT-LCD display panel manufacturing |
| CN109514780A (en) * | 2018-12-11 | 2019-03-26 | 苏州天裕塑胶有限公司 | Vacuum plastic expects pipe air bearing molding machine |
| CN110487512A (en) * | 2019-07-29 | 2019-11-22 | 深圳市华星光电半导体显示技术有限公司 | Air floating platform and automatic optical checking equipment |
| CN110672629A (en) * | 2019-11-07 | 2020-01-10 | 江苏上达电子有限公司 | Method for preventing COF product from generating back scratch during appearance inspection |
-
2014
- 2014-10-22 CN CN201420614208.8U patent/CN204155034U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105588843A (en) * | 2016-03-18 | 2016-05-18 | 武汉华星光电技术有限公司 | Optical inspection device and conveying device in TFT-LCD display panel manufacturing |
| CN105588843B (en) * | 2016-03-18 | 2019-05-03 | 武汉华星光电技术有限公司 | Optical detection device and its transmission device in the manufacture of TFT-LCD display panel |
| CN109514780A (en) * | 2018-12-11 | 2019-03-26 | 苏州天裕塑胶有限公司 | Vacuum plastic expects pipe air bearing molding machine |
| CN109514780B (en) * | 2018-12-11 | 2021-02-05 | 苏州天裕塑胶有限公司 | Vacuum plastic pipe air-float forming device |
| CN110487512A (en) * | 2019-07-29 | 2019-11-22 | 深圳市华星光电半导体显示技术有限公司 | Air floating platform and automatic optical checking equipment |
| CN110672629A (en) * | 2019-11-07 | 2020-01-10 | 江苏上达电子有限公司 | Method for preventing COF product from generating back scratch during appearance inspection |
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