CN207992391U - A kind of wafer tester - Google Patents

Abstract

The utility model provides a kind of wafer tester, including Y-axis pedestal, Y-axis guide rail slide block mechanism, Y-axis ball-screw vice mechanism, Z axis motion, workbench bottom plate, Z axis rotating mechanism, X-axis pedestal, X-axis roller bearing lead screw vice mechanism, X-axis guide rail slide block mechanism, Y-axis driving servo motor, X-axis driving servo motor, thimble lifting control mechanism, thimble, testboard, CCD camera.The utility model realizes that wafer is automatically aligned on testboard, positioned, tested, and not only improves working efficiency, reduces wafer possibility damaged in transfer process, and reduce the pollution to wafer, improves the reliability of wafer work.

Description

A wafer testing device

technical field

The utility model relates to the technical field of wafer testing, in particular to a wafer testing device.

Background technique

With the development of the semiconductor industry in recent years, wafers, as the basic material of semiconductor devices, are more and more widely used. Wafer testing is essential in the chip manufacturing and packaging process. The wafer probe test bench is an intermediate test equipment on the semiconductor process line. After connecting with the tester, it can automatically complete the test of the parameters and functions of integrated circuits and various transistor cores.

Because the wafer is very thin (0.3-0.87WM), the diameter is large (4-18/inch), and the texture is very brittle, it is extremely easy to break; and the polished surface of the wafer is extremely susceptible to contamination and wear. During the test process, the traditional manual alignment, positioning, and testing of the wafer not only has low work efficiency, but also has a high possibility of damage to the wafer during the transfer process, which is easy to pollute the wafer and reduces the wafer work. reliability.

Utility model content

(1) Solved technical problems

The utility model provides a wafer test device for the above-mentioned defect problem of manual processing of wafer transfer. The wafer is automatically aligned, positioned, and tested on the test bench, which not only improves work efficiency, but also reduces the cost of wafer transfer during the transfer process. The possibility of damage, and reduce the pollution of the wafer, improve the reliability of the wafer work.

(2) Technical solution

In order to achieve the above object, the utility model is realized through the following technical solutions:

A wafer testing device, comprising a Y-axis base, a Y-axis guide rail slider mechanism, a Y-axis ball screw mechanism, a Z-axis motion mechanism, a workbench bottom plate, a Z-axis rotation mechanism, an X-axis base, and an X-axis roller Axis screw auxiliary mechanism, X-axis guide rail slider mechanism, Y-axis drive servo motor, X-axis drive servo motor, thimble lifting control mechanism, thimble, test bench, CCD camera; Y-axis guide rail slider mechanism is fixed on the Y-axis base At both ends of the seat, the Y-axis ball screw mechanism is installed between the two Y-axis guide rail slider mechanisms and fixed on the Y-axis base. The Y-axis drives the servo motor through the coupling and the Y-axis ball screw mechanism. Connected; the X-axis base is respectively connected with the Y-axis guide rail slider mechanism and the Y-axis ball screw mechanism. The two ends of the X-axis base are respectively equipped with the X-axis guide rail slider mechanism and the X-axis roller screw mechanism. Installed between two X-axis guide rail slider mechanisms and fixed on the X-axis base, the X-axis driving servo motor is connected with the X-axis roller screw mechanism through a coupling; the workbench bottom plate is connected with the X-axis roller wire The rod pair mechanism and the X-axis guide rail slider mechanism are movably connected. The Z-axis movement mechanism, the Z-axis rotation mechanism, and the thimble lifting control mechanism are fixedly installed on the bottom plate of the workbench; the test bench is installed on the top of the thimble lifting control mechanism, and the thimble is installed on the test bench. , The CCD camera is installed above the test bench through a bracket.

According to an embodiment of the present invention, the X-axis driving servo motor and the Y-axis driving servo motor are 3273N126E21 servo motors.

According to an embodiment of the utility model, the Z-axis motion mechanism includes a support shaft, a ball screw pair, a connecting fixed plate, a driven wheel, a synchronous toothed belt, a driving wheel, and a motor; the motor is connected with the driving wheel and drives the driving wheel Rotate, the driving wheel is connected with the driven wheel through the synchronous toothed belt, the driven wheel is connected with the ball screw pair through the connection fixing plate, and the ball screw pair is fixedly connected with the supporting shaft.

According to an embodiment of the utility model, the motor is a PH566H-A-A30 stepping motor.

According to an embodiment of the present invention, the Z-axis rotating mechanism includes a fixed base plate, a rotating shaft, an arc matching rotating mechanism, a guide rail slider mechanism, a screw nut mechanism, and a motor; the motor is fixedly connected to the screw nut mechanism, and the wire The rod nut mechanism is connected with the arc-cooperating rotating mechanism through the guide rail slider mechanism, and the arc-cooperating rotating mechanism is movably connected with the rotating shaft, and the rotating shaft is fixedly installed on the fixed base plate.

(3) Beneficial effects

The beneficial effects of the utility model: a wafer test device, the wafer is automatically aligned, positioned, and tested on the test bench, which not only improves the work efficiency, reduces the possibility of wafer damage during the transfer process, but also reduces damage to the wafer. Round contamination, improve the reliability of wafer work.

Description of drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description These are only some embodiments of the utility model, and those skilled in the art can also obtain other drawings based on these drawings without creative work.

Fig. 1 is a structural diagram of the utility model testing device;

Fig. 2 is a structural diagram of the Z-axis motion mechanism;

Figure 3 is a structural diagram of the Z-axis rotation mechanism.

Explanation of reference signs:

1. Y-axis base; 2. Y-axis guide rail slider mechanism; 3. Y-axis ball screw mechanism; 4. Z-axis movement mechanism; 5. Workbench bottom plate; 6. Z-axis rotation mechanism; 7. X-axis Base; 8. X-axis roller screw mechanism; 9. X-axis guide rail slider mechanism; 10. Y-axis drive servo motor; 11. X-axis drive servo motor; 12. Ejector lifting control mechanism; 13. Ejector; 14. Test bench; 15. CCD camera; 16. Support shaft; 17. Ball screw pair; 18. Connection fixed plate; 19. Driven wheel; 20. Synchronous toothed belt; 21. Driving wheel; 22. Motor; 23 , fixed bottom plate; 24, rotating shaft; 25, arc coordinates rotating mechanism; 26, guide rail slider mechanism; 27, screw nut mechanism; 28, motor.

Detailed ways

In order to make the purpose, technical solutions and advantages of the embodiments of the utility model more clear, the technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the utility model. Obviously, the described The embodiments are some embodiments of the present utility model, but not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of the present utility model.

Referring to Fig. 1, a wafer test device includes a Y-axis base 1, a Y-axis guide rail slider mechanism 2, a Y-axis ball screw mechanism 3, a Z-axis movement mechanism 4, a workbench bottom plate 5, and a Z-axis rotation mechanism 6. X-axis base 7, X-axis roller screw auxiliary mechanism 8, X-axis guide rail slider mechanism 9, Y-axis drive servo motor 10, X-axis drive servo motor 11, thimble lifting control mechanism 12, thimble 13, test Taiwan 14, CCD camera 15.

The Y-axis guide rail slider mechanism 2 is fixedly installed on both ends of the Y-axis base 1, and the Y-axis ball screw auxiliary mechanism 3 is installed between the two Y-axis guide rail slider mechanisms 2 and fixed on the Y-axis base 1. The Y-axis driving servo motor 10 is connected with the Y-axis ball screw auxiliary mechanism 3 through a coupling. The X-axis base 7 is movably connected with the Y-axis guide rail slider mechanism 2 and the Y-axis ball screw sub-mechanism 3 respectively. The rod sub-mechanism 8 is installed between the two X-axis guide rail slider mechanisms 9 and fixed on the X-axis base 7, and the X-axis driving servo motor 11 is connected with the X-axis roller screw sub-mechanism 8 through a coupling. The workbench bottom plate 5 is movably connected with the X-axis roller screw screw mechanism 8 and the X-axis guide rail slider mechanism 9 . A Z-axis motion mechanism 4 , a Z-axis rotation mechanism 6 , and a thimble lifting control mechanism 12 are fixedly installed on the workbench bottom plate 5 . The test stand 14 is installed on the top of the thimble lifting control mechanism 12 , and the thimble 13 is installed on the test stand 14 . The CCD camera 15 is installed above the test bench 14 through a bracket.

The high-precision control of the X and Y axes is the basis for ensuring the accurate testing of the wafer. The X and Y workbenches of the utility model adopt the full-closed control mode of the grating scale to control the servo motor to work. The Y-axis drives the servo motor 10 to drive the X-axis base 7 to move, and the X-axis drives the servo motor 11 to drive the workbench bottom plate 5 to move. The grating of each axis records the moving distance, and after moving to the specified position, the servo motor stops rotating. The model of the X-axis ball screw pair is GZ20x5-2.5-3/672x652; the model of the Y-axis ball screw pair is GZ20x5-2.5-3/458x445; the X and Y-axis drive servo motors are 3273N126E21 servo motors and motors from TAMAGAWA Company The highest speed is 3000r/min.

Referring to FIG. 2 , the Z-axis motion mechanism 4 includes a support shaft 16 , a ball screw pair 17 , a connecting fixed plate 18 , a driven wheel 19 , a synchronous toothed belt 20 , a driving wheel 21 , and a motor 22 . The motor 22 is connected with the driving wheel 21 and drives the driving wheel to rotate. The driving wheel 21 is connected with the driven wheel 19 through the synchronous toothed belt 20. The driven wheel 19 is connected with the ball screw pair 17 by connecting the fixed plate 18. The ball screw pair 17 is connected with the The support shaft 16 is fixedly connected. When the motor 22 is working, it drives the driving wheel 21 to rotate, and the driving wheel 21 transmits the power of the motor to the ball screw pair 17 through the synchronous toothed belt 20 and the driven wheel 19, and the ball screw pair 17 moves up and down, thereby driving the support shaft 16 in the Do linear motion in Z axis direction. Wherein the test bench is directly installed on the upper end of the support shaft, and the left and right movement of the protruding rod on the support shaft is restricted by the corresponding structure, so that it cannot rotate, but can only move up and down. Motor 22 selects PH566H-A-A30 model stepper motor for use.

Referring to FIG. 3 , the Z-axis rotating mechanism 6 includes a fixed base plate 23 , a rotating shaft 24 , an arc matching rotating mechanism 25 , a guide rail slider mechanism 26 , a screw nut mechanism 27 , and a motor 28 . The motor 28 is fixedly connected with the screw nut mechanism 27, and the screw nut mechanism 27 is connected with the arc-cooperating rotating mechanism 25 through the guide rail slider mechanism 26. The circular arc coordinates the rotating mechanism 25 to be flexibly connected with the rotating shaft 24 , and the rotating shaft 24 is fixedly mounted on the fixed base plate 23 . When the motor 28 rotates, it drives the lead screw and nut mechanism 27 to work, and the rotation of the lead screw is converted into the linear motion of the nut, realizing the linear motion of the circular arc to cooperate with the rotary mechanism 25, and the circular arc to cooperate with the rotary mechanism 25 to rotate around the center of the rotating shaft 24 to drive the rotation. The rotation of the shaft 24 realizes the rotation in the Z-axis direction.

In summary, the embodiment of the utility model, the wafer testing device, the wafer is automatically aligned, positioned, and tested on the test bench, which not only improves work efficiency, reduces the possibility of wafer damage during the transfer process, but also reduces Contamination of the wafer improves the reliability of the wafer work.

The above embodiments are only used to illustrate the technical solutions of the present utility model, and are not intended to limit it; although the utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: it can still be applied to the foregoing embodiments The technical solutions described in the examples are modified, or some of the technical features are equivalently replaced; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims (5)

1. a kind of wafer tester, it is characterised in that：Including Y-axis pedestal, Y-axis guide rail slide block mechanism, Y-axis ball-screw slave Structure, Z axis motion, workbench bottom plate, Z axis rotating mechanism, X-axis pedestal, X-axis roller bearing lead screw vice mechanism, X-axis guide rail sliding block machine Structure, Y-axis driving servo motor, X-axis driving servo motor, thimble lifting control mechanism, thimble, testboard, CCD camera；Y-axis Guide rail slide block mechanism is fixedly mounted on the both ends of Y-axis pedestal, and Y-axis ball-screw vice mechanism is mounted on two Y-axis guide rail sliding block machines It between structure and is fixed on Y-axis pedestal, Y-axis driving servo motor is connected by shaft coupling with Y-axis ball-screw vice mechanism；X-axis Pedestal is flexibly connected with Y-axis guide rail slide block mechanism, Y-axis ball-screw vice mechanism respectively, and the both ends of X-axis pedestal are separately installed with X Axis rail slide block mechanism, X-axis roller bearing lead screw vice mechanism are mounted between two X-axis guide rail slide block mechanisms and are fixed on X-axis pedestal On, X-axis driving servo motor is connected by shaft coupling with X-axis roller bearing lead screw vice mechanism；Workbench bottom plate and X-axis roller bearing screw pair Mechanism, X-axis guide rail slide block mechanism are flexibly connected, and Z axis motion, Z axis rotating mechanism, top are installed on workbench bottom plate Needle lifting control mechanism；Testboard is mounted at the top of thimble lifting control mechanism, and thimble is mounted on testboard, CCD camera The top of testboard is mounted on by holder.

2. a kind of wafer tester as described in claim 1, which is characterized in that the X-axis driving servo motor, Y-axis are driven Dynamic servo motor is 3273N126E21 model servo motors.

3. a kind of wafer tester as described in claim 1, which is characterized in that the Z axis motion include support shaft, Ball screw assembly, is connected and fixed plate, driven wheel, synchronous toothed belt, driving wheel, motor；Motor connect with driving wheel and drives master Wheel rotation, driving wheel are connect by synchronous toothed belt with driven wheel, and driven wheel is by being connected and fixed plate and ball screw assembly, phase Even, ball screw assembly, is fixedly connected with support shaft.

4. a kind of wafer tester as claimed in claim 3, which is characterized in that the motor is PH566H-A-A30 models Stepper motor.

5. a kind of wafer tester as described in claim 1, which is characterized in that the Z axis rotating mechanism includes fixed bottom Plate, rotation axis, circular arc cooperation rotating mechanism, guide rail slide block mechanism, leading screw and nut mechanism, motor；Motor and leading screw and nut mechanism It is fixedly connected, leading screw and nut mechanism coordinates rotating mechanism to be connected by guide rail slide block mechanism with circular arc, and circular arc coordinates rotating mechanism It is flexibly connected with rotation axis, rotation axis is fixedly mounted on fixed bottom plate.