CN207992391U - A kind of wafer tester - Google Patents
A kind of wafer tester Download PDFInfo
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- CN207992391U CN207992391U CN201820406482.4U CN201820406482U CN207992391U CN 207992391 U CN207992391 U CN 207992391U CN 201820406482 U CN201820406482 U CN 201820406482U CN 207992391 U CN207992391 U CN 207992391U
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Abstract
The utility model provides a kind of wafer tester, including Y-axis pedestal, Y-axis guide rail slide block mechanism, Y-axis ball-screw vice mechanism, Z axis motion, workbench bottom plate, Z axis rotating mechanism, X-axis pedestal, X-axis roller bearing lead screw vice mechanism, X-axis guide rail slide block mechanism, Y-axis driving servo motor, X-axis driving servo motor, thimble lifting control mechanism, thimble, testboard, CCD camera.The utility model realizes that wafer is automatically aligned on testboard, positioned, tested, and not only improves working efficiency, reduces wafer possibility damaged in transfer process, and reduce the pollution to wafer, improves the reliability of wafer work.
Description
Technical field
The utility model is related to wafer test technical fields, and in particular to a kind of wafer tester.
Background technology
The development of semicon industry in recent years, basic material of the wafer as semiconductor devices, application are more and more extensive.It is brilliant
Circle test is essential in chip manufacturing and encapsulation process.Wafer probe testboard is the centre in semiconductor process line
Test equipment after being connect with tester, can be automatically performed the test to integrated circuit and various crystal tube core electrical parameters and function.
Since wafer is very thin (0.3-0.87WM), it is relatively large in diameter (4-18/inch), and quality is very crisp, be extremely easily broken；
And the burnishing surface of wafer is easily contaminated and wears.During the test, traditional-handwork is directed at wafer, is positioned, is surveyed
Examination, not only working efficiency is relatively low, and wafer it is damaged in transfer process possibility it is larger, be easy pollution to wafer, drop
The low reliability of wafer work.
Utility model content
(1) the technical issues of solving
The utility model provides a kind of wafer tester for the above-mentioned defect problem for handling wafer transfer by hand,
Wafer is automatically aligned on testboard, is positioned, is tested, and working efficiency is not only improved, and is reduced wafer and is broken in transfer process
The possibility of damage, and the pollution to wafer is reduced, improve the reliability of wafer work.
(2) technical solution
In order to achieve the above object, the utility model is achieved by the following technical programs：
A kind of wafer tester, including Y-axis pedestal, Y-axis guide rail slide block mechanism, Y-axis ball-screw vice mechanism, Z axis fortune
Motivation structure, workbench bottom plate, Z axis rotating mechanism, X-axis pedestal, X-axis roller bearing lead screw vice mechanism, X-axis guide rail slide block mechanism, Y-axis are driven
Dynamic servo motor, X-axis driving servo motor, thimble lifting control mechanism, thimble, testboard, CCD camera；Y-axis guide rail sliding block
Mechanism is fixedly mounted on the both ends of Y-axis pedestal, and Y-axis ball-screw vice mechanism is mounted between two Y-axis guide rail slide block mechanisms simultaneously
It is fixed on Y-axis pedestal, Y-axis driving servo motor is connected by shaft coupling with Y-axis ball-screw vice mechanism；X-axis pedestal is distinguished
It is flexibly connected with Y-axis guide rail slide block mechanism, Y-axis ball-screw vice mechanism, the both ends of X-axis pedestal are separately installed with X-axis guide rail cunning
Block mechanism, X-axis roller bearing lead screw vice mechanism are mounted between two X-axis guide rail slide block mechanisms and are fixed on X-axis pedestal, and X-axis is driven
Dynamic servo motor is connected by shaft coupling with X-axis roller bearing lead screw vice mechanism；Workbench bottom plate and X-axis roller bearing lead screw vice mechanism, X-axis
Guide rail slide block mechanism is flexibly connected, and Z axis motion, Z axis rotating mechanism, thimble lifting control are installed on workbench bottom plate
Mechanism processed；Testboard is mounted at the top of thimble lifting control mechanism, and thimble is mounted on testboard, and CCD camera is pacified by holder
Mounted in the top of testboard.
An embodiment according to the present utility model, the X-axis driving servo motor, Y-axis driving servo motor are
3273N126E21 model servo motors.
An embodiment according to the present utility model, the Z axis motion include support shaft, ball screw assembly, connect admittedly
Fixed board, driven wheel, synchronous toothed belt, driving wheel, motor；Motor connect with driving wheel and driving wheel is driven to rotate, and driving wheel is logical
It crosses synchronous toothed belt to connect with driven wheel, driven wheel is connected by being connected and fixed plate with ball screw assembly, ball screw assembly, and branch
Support axis is fixedly connected.
An embodiment according to the present utility model, the motor are PH566H-A-A30 model stepper motors.
An embodiment according to the present utility model, the Z axis rotating mechanism include fixed bottom plate, rotation axis, circular arc cooperation
Rotating mechanism, guide rail slide block mechanism, leading screw and nut mechanism, motor；Motor is fixedly connected with leading screw and nut mechanism, feed screw nut's machine
Structure coordinates rotating mechanism to be connected by guide rail slide block mechanism with circular arc, and circular arc cooperation rotating mechanism is flexibly connected with rotation axis, is turned
Moving axis is fixedly mounted on fixed bottom plate.
(3) advantageous effect
The beneficial effects of the utility model：A kind of wafer tester, wafer are automatically aligned on testboard, are fixed
Position, test, not only improve working efficiency, reduce wafer possibility damaged in transfer process, and reduce the dirt to wafer
Dye, improves the reliability of wafer work.
Description of the drawings
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, other drawings may also be obtained based on these drawings.
Fig. 1 is the utility model test device structure chart；
Fig. 2 is Z axis motion structure chart；
Fig. 3 is Z axis rotating mechanism structure chart.
Reference sign：
1, Y-axis pedestal；2, Y-axis guide rail slide block mechanism；3, Y-axis ball-screw vice mechanism；4, Z axis motion；5, it works
Platform bottom plate；6, Z axis rotating mechanism；7, X-axis pedestal；8, X-axis roller bearing lead screw vice mechanism；9, X-axis guide rail slide block mechanism；10, Y-axis is driven
Dynamic servo motor；11, X-axis drives servo motor；12, thimble lifting control mechanism；13, thimble；14, testboard；15, CCD takes the photograph
As head；16, support shaft；17, ball screw assembly,；18, it is connected and fixed plate；19, driven wheel；20, synchronous toothed belt；21, driving wheel；
22, motor；23, fixed bottom plate；24, rotation axis；25, circular arc coordinates rotating mechanism；26, guide rail slide block mechanism；27, feed screw nut
Mechanism；28, motor.
Specific implementation mode
It is new below in conjunction with this practicality to keep the purpose, technical scheme and advantage of the utility model embodiment clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Based on the implementation in the utility model
Example, the every other embodiment that those of ordinary skill in the art are obtained without creative efforts belong to
The range of the utility model protection.
In conjunction with Fig. 1, a kind of wafer tester, including Y-axis pedestal 1, Y-axis guide rail slide block mechanism 2, Y-axis ball screw assembly,
Mechanism 3, Z axis motion 4, workbench bottom plate 5, Z axis rotating mechanism 6, X-axis pedestal 7, X-axis roller bearing lead screw vice mechanism 8, X-axis are led
Rail slide block mechanism 9, X-axis driving servo motor 11, thimble lifting control mechanism 12, thimble 13, is surveyed Y-axis driving servo motor 10
Test stand 14, CCD camera 15.
Y-axis guide rail slide block mechanism 2 is fixedly mounted on the both ends of Y-axis pedestal 1, and Y-axis ball-screw vice mechanism 3 is mounted on two
It between Y-axis guide rail slide block mechanism 2 and is fixed on Y-axis pedestal 1, Y-axis driving servo motor 10 passes through shaft coupling and Y-axis ball wire
Thick stick vice mechanism 3 is connected.X-axis pedestal 7 is flexibly connected with Y-axis guide rail slide block mechanism 2, Y-axis ball-screw vice mechanism 3 respectively, X-axis base
The both ends of seat 7 are separately installed with X-axis guide rail slide block mechanism 9, and X-axis roller bearing lead screw vice mechanism 8 is mounted on two X-axis guide rail sliding block machines
It between structure 9 and is fixed on X-axis pedestal 7, X-axis driving servo motor 11 passes through shaft coupling and 8 phase of X-axis roller bearing lead screw vice mechanism
Even.Workbench bottom plate 5 is flexibly connected with X-axis roller bearing lead screw vice mechanism 8, X-axis guide rail slide block mechanism 9.It is fixed on workbench bottom plate 5
Z axis motion 4, Z axis rotating mechanism 6, thimble lifting control mechanism 12 are installed.Testboard 14 is mounted on thimble elevating control
12 top of mechanism, thimble 13 are mounted on testboard 14.CCD camera 15 is mounted on the top of testboard 14 by holder.
X, the high-precision control of Y-axis is the basis for ensureing wafer and accurately testing, and X, Y workbench of the utility model use light
Grid ruler full closed loop control mode carrys out control servomotor and works.Y-axis drives servo motor 10 to drive 7 movement of X-axis pedestal, X
Axis drives servo motor 11 that workbench bottom plate 5 is driven to move.The mobile distance of each axis grating record, is moved to specified position
Afterwards, servo motor stops operating.The model GZ20x5-2.5-3/672x652 of X-axis ball screw assembly,；The type of Y-axis ball screw assembly,
Number be GZ20x5-2.5-3/458x445；X, Y-axis driving servo motor is the 3273N126E21 model servos of TAMAGAWA companies
Motor, motor maximum speed are 3000r/min.
In conjunction with Fig. 2, Z axis motion 4 include support shaft 16, ball screw assembly, 17, be connected and fixed plate 18, driven wheel 19,
Synchronous toothed belt 20, driving wheel 21, motor 22.Motor 22 connect with driving wheel 21 and driving wheel is driven to rotate, and driving wheel 21 is logical
It crosses synchronous toothed belt 20 to connect with driven wheel 19, driven wheel 19 is connected by being connected and fixed plate 18 with ball screw assembly, 17, ball
Lead screw pair 17 is fixedly connected with support shaft 16.When motor 22 works, driving wheel 21 is driven to rotate, driving wheel 21 passes through synchronous tooth profile
With 20, driven wheel 19 by the power transmission of motor to ball screw assembly, 17, ball screw assembly, 17 moves up and down, to drive support
Axis 16 is moved in a straight line in Z-direction.Wherein support shaft upper end is mounted directly testboard, and extension bar moves left and right logical in support shaft
It crosses corresponding structure to be limited, prevents it from rotating, can only move up and down.Motor 22 selects PH566H-A-A30 models stepping electricity
Machine.
In conjunction with Fig. 3, Z axis rotating mechanism 6 includes fixed bottom plate 23, rotation axis 24, circular arc cooperation rotating mechanism 25, guide rail cunning
Block mechanism 26, leading screw and nut mechanism 27, motor 28.Motor 28 is fixedly connected with leading screw and nut mechanism 27, leading screw and nut mechanism 27
Rotating mechanism 25 is coordinated to be connected with circular arc by guide rail slide block mechanism 26.Circular arc coordinates rotating mechanism 25 to connect with 24 activity of rotation axis
It connects, rotation axis 24 is fixedly mounted on fixed bottom plate 23.When motor 28 rotates, leadscrew-nut mechanism 27 is driven to work, leading screw
It is converted into the linear motion of nut, realizes that the linear motion of circular arc cooperation rotating mechanism 25, circular arc coordinate rotating mechanism 25
Around 24 center rotating of rotation axis, the rotation of rotation axis 24 is driven, realizes the rotation of Z-direction.
In conclusion the utility model embodiment, wafer tester, wafer are automatically aligned on testboard, are fixed
Position, test, not only improve working efficiency, reduce wafer possibility damaged in transfer process, and reduce the dirt to wafer
Dye, improves the reliability of wafer work.
Above example is only to illustrate the technical solution of the utility model, rather than its limitations；Although with reference to aforementioned reality
Example is applied the utility model is described in detail, it will be understood by those of ordinary skill in the art that：It still can be to preceding
The technical solution recorded in each embodiment is stated to modify or equivalent replacement of some of the technical features；And these
Modification or replacement, the spirit and model of various embodiments of the utility model technical solution that it does not separate the essence of the corresponding technical solution
It encloses.
Claims (5)
1. a kind of wafer tester, it is characterised in that：Including Y-axis pedestal, Y-axis guide rail slide block mechanism, Y-axis ball-screw slave
Structure, Z axis motion, workbench bottom plate, Z axis rotating mechanism, X-axis pedestal, X-axis roller bearing lead screw vice mechanism, X-axis guide rail sliding block machine
Structure, Y-axis driving servo motor, X-axis driving servo motor, thimble lifting control mechanism, thimble, testboard, CCD camera；Y-axis
Guide rail slide block mechanism is fixedly mounted on the both ends of Y-axis pedestal, and Y-axis ball-screw vice mechanism is mounted on two Y-axis guide rail sliding block machines
It between structure and is fixed on Y-axis pedestal, Y-axis driving servo motor is connected by shaft coupling with Y-axis ball-screw vice mechanism；X-axis
Pedestal is flexibly connected with Y-axis guide rail slide block mechanism, Y-axis ball-screw vice mechanism respectively, and the both ends of X-axis pedestal are separately installed with X
Axis rail slide block mechanism, X-axis roller bearing lead screw vice mechanism are mounted between two X-axis guide rail slide block mechanisms and are fixed on X-axis pedestal
On, X-axis driving servo motor is connected by shaft coupling with X-axis roller bearing lead screw vice mechanism；Workbench bottom plate and X-axis roller bearing screw pair
Mechanism, X-axis guide rail slide block mechanism are flexibly connected, and Z axis motion, Z axis rotating mechanism, top are installed on workbench bottom plate
Needle lifting control mechanism；Testboard is mounted at the top of thimble lifting control mechanism, and thimble is mounted on testboard, CCD camera
The top of testboard is mounted on by holder.
2. a kind of wafer tester as described in claim 1, which is characterized in that the X-axis driving servo motor, Y-axis are driven
Dynamic servo motor is 3273N126E21 model servo motors.
3. a kind of wafer tester as described in claim 1, which is characterized in that the Z axis motion include support shaft,
Ball screw assembly, is connected and fixed plate, driven wheel, synchronous toothed belt, driving wheel, motor；Motor connect with driving wheel and drives master
Wheel rotation, driving wheel are connect by synchronous toothed belt with driven wheel, and driven wheel is by being connected and fixed plate and ball screw assembly, phase
Even, ball screw assembly, is fixedly connected with support shaft.
4. a kind of wafer tester as claimed in claim 3, which is characterized in that the motor is PH566H-A-A30 models
Stepper motor.
5. a kind of wafer tester as described in claim 1, which is characterized in that the Z axis rotating mechanism includes fixed bottom
Plate, rotation axis, circular arc cooperation rotating mechanism, guide rail slide block mechanism, leading screw and nut mechanism, motor；Motor and leading screw and nut mechanism
It is fixedly connected, leading screw and nut mechanism coordinates rotating mechanism to be connected by guide rail slide block mechanism with circular arc, and circular arc coordinates rotating mechanism
It is flexibly connected with rotation axis, rotation axis is fixedly mounted on fixed bottom plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820406482.4U CN207992391U (en) | 2018-03-26 | 2018-03-26 | A kind of wafer tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820406482.4U CN207992391U (en) | 2018-03-26 | 2018-03-26 | A kind of wafer tester |
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| Publication Number | Publication Date |
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| CN207992391U true CN207992391U (en) | 2018-10-19 |
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| CN201820406482.4U Active CN207992391U (en) | 2018-03-26 | 2018-03-26 | A kind of wafer tester |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109406021A (en) * | 2018-12-07 | 2019-03-01 | 江门市华创电机有限公司 | A kind of comprehensive measurement of power mechanism of Full-automatic remote and power-measuring system |
| CN111208400A (en) * | 2018-11-16 | 2020-05-29 | 杭州海康微影传感科技有限公司 | Wafer test equipment and test method |
| CN111307445A (en) * | 2018-12-12 | 2020-06-19 | 东北林业大学 | Aerostatic spindle test bed based on accurate removal in X, Y direction |
| CN112201606A (en) * | 2020-10-12 | 2021-01-08 | 华海清科股份有限公司 | Wafer centering mechanism with flexible coupling, transmission device and thinning equipment |
| CN113155745A (en) * | 2020-01-07 | 2021-07-23 | 江苏鲁汶仪器有限公司 | Wafer parameter measuring device based on ellipsometer |
| CN114371169A (en) * | 2020-10-14 | 2022-04-19 | 苏州艺力鼎丰智能技术有限公司 | Wafer test analysis device |
-
2018
- 2018-03-26 CN CN201820406482.4U patent/CN207992391U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111208400A (en) * | 2018-11-16 | 2020-05-29 | 杭州海康微影传感科技有限公司 | Wafer test equipment and test method |
| CN109406021A (en) * | 2018-12-07 | 2019-03-01 | 江门市华创电机有限公司 | A kind of comprehensive measurement of power mechanism of Full-automatic remote and power-measuring system |
| CN111307445A (en) * | 2018-12-12 | 2020-06-19 | 东北林业大学 | Aerostatic spindle test bed based on accurate removal in X, Y direction |
| CN113155745A (en) * | 2020-01-07 | 2021-07-23 | 江苏鲁汶仪器有限公司 | Wafer parameter measuring device based on ellipsometer |
| CN112201606A (en) * | 2020-10-12 | 2021-01-08 | 华海清科股份有限公司 | Wafer centering mechanism with flexible coupling, transmission device and thinning equipment |
| CN112201606B (en) * | 2020-10-12 | 2023-08-25 | 华海清科股份有限公司 | Wafer centering mechanism with flexible coupling, transmission device and thinning equipment |
| CN114371169A (en) * | 2020-10-14 | 2022-04-19 | 苏州艺力鼎丰智能技术有限公司 | Wafer test analysis device |
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Address after: 247100 No. 2, Shuanglong Road, economic and Technological Development Zone, Chizhou City, Anhui Province Patentee after: Anhui Juxin Semiconductor Technology Co.,Ltd. Country or region after: China Address before: 247100 No. 2, Shuanglong Road, economic and Technological Development Zone, Chizhou City, Anhui Province Patentee before: ANHUI JUXIN SEMICONDUCTOR TECHNOLOGY Co.,Ltd. Country or region before: China |