CN207992321U - Four probe resistance instrument of resistivity under a kind of detectable different temperatures - Google Patents
Four probe resistance instrument of resistivity under a kind of detectable different temperatures Download PDFInfo
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- CN207992321U CN207992321U CN201820408954.XU CN201820408954U CN207992321U CN 207992321 U CN207992321 U CN 207992321U CN 201820408954 U CN201820408954 U CN 201820408954U CN 207992321 U CN207992321 U CN 207992321U
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- 239000000523 sample Substances 0.000 title claims abstract description 80
- 239000012774 insulation material Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 abstract description 7
- 239000010408 film Substances 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 abstract 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 abstract 1
- 238000012360 testing method Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 7
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000013082 photovoltaic technology Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
技术领域technical field
本实用新型涉及测量不同温度下半导体薄膜电阻率的实验设备，主要涉及一种可检测不同温度下电阻率的四探针电阻仪。The utility model relates to experimental equipment for measuring the resistivity of semiconductor thin films at different temperatures, in particular to a four-probe resistance meter which can detect the resistivity at different temperatures.
背景技术Background technique
四探针电阻仪的工作原理是用四个等距的金属探针接触半导体薄膜表面，外边的两令探针通直流电流I，中间两个探针之间的电压降V由电位差计测量，由所测得的电流I和电压V，利用关于样品和探针几何结构的适当校正因子，可以直接换算成薄层电阻。半导体薄膜一般应用在光伏技术、电解水、电化学照相、电子及微电子工业中，其中主要应用于太阳能电池的吸收层，用来吸收太阳光从而在内部形成电流。但传统的四探针电阻仪只能检测常温时半导体薄膜的电阻率，实际应用时，由于不同时段的太阳光的照射会使得薄膜的温度有所不同，这样测得的半导体薄膜的电阻率和实际情况存在一定偏差，无法检测不同温度下的电阻率，从而在实际应用时造成局限性。The working principle of the four-probe resistance meter is to use four equidistant metal probes to touch the surface of the semiconductor film, the two outer probes pass a DC current I, and the voltage drop V between the middle two probes is measured by a potentiometer , from the measured current I and voltage V can be directly converted to sheet resistance using appropriate correction factors for the sample and probe geometry. Semiconductor thin films are generally used in photovoltaic technology, electrolysis of water, electrochemical photography, electronics and microelectronics industries, among which they are mainly used in the absorbing layer of solar cells to absorb sunlight and form currents inside. However, the traditional four-probe resistance meter can only detect the resistivity of the semiconductor thin film at room temperature. In practical applications, the temperature of the thin film will be different due to the irradiation of sunlight at different periods. There is a certain deviation in the actual situation, and the resistivity at different temperatures cannot be detected, which causes limitations in practical applications.
发明内容Contents of the invention
一种可检测不同温度下电阻率的四探针电阻仪，主要包括连杆，样品台，探针，调节旋钮Ⅰ，调节旋钮Ⅱ，探针臂，控温盒，导线，温度显示屏，电源，底座，活动栓，热电偶，四探针孔，温度感应器，试样；其主要特征在于：连杆与底座固定连接；样品台和底座通过连杆固定连接；控温盒通过活动栓安装在样品台的中央，控温盒采用保温材料制成；控温盒内部左右两侧设置有热电偶；热电偶与电源通过导线相连接；控温盒内部上方安装有温度感应器；温度感应器与温度显示屏通过导线相连接；温度显示屏与电源通过导线相连接；试样放置在控温盒内；控温盒上方设置有四个四探针孔，分别与上方的四个探针位置相对应；探针安装在探针臂上；探针臂上设置有调节旋钮Ⅰ和调节旋钮Ⅱ。A four-probe resistance meter that can detect resistivity at different temperatures, mainly including connecting rod, sample stage, probe, adjustment knob Ⅰ, adjustment knob Ⅱ, probe arm, temperature control box, wire, temperature display screen, power supply , base, movable bolt, thermocouple, four probe holes, temperature sensor, sample; its main features are: the connecting rod is fixedly connected with the base; the sample stage and the base are fixedly connected through the connecting rod; the temperature control box is installed through the movable bolt In the center of the sample stage, the temperature control box is made of thermal insulation material; there are thermocouples on the left and right sides of the temperature control box; the thermocouples are connected to the power supply through wires; It is connected with the temperature display screen by wire; the temperature display screen is connected with the power supply by wire; Corresponding; the probe is installed on the probe arm; the probe arm is provided with an adjustment knob I and an adjustment knob II.
工作时，通过活动栓打开控温盒，将试样放置在控温盒内，调整所需要的位置，盖上控温盒，准备试验。打开四探针电阻仪开关，通过调节调节旋钮Ⅱ控制探针臂向下移动至探针臂接近四探针孔，再调节调节旋钮Ⅰ使探针从四探针孔进入控温盒内，直至接触试样并对试样施加一定的压力。打开电源，热电偶开始工作，对控温盒内进行加温，温度感应器随时监测控温盒内的温度并显示在温度显示屏上，当温度显示屏显示的温度达到需要的测试温度时，关闭电源，开始对特定温度下的半导体薄膜进行电阻率测试。打开四探针电阻仪开关进行测试。When working, open the temperature control box through the movable bolt, place the sample in the temperature control box, adjust the required position, cover the temperature control box, and prepare for the test. Turn on the switch of the four-probe resistance meter, adjust the adjustment knob II to control the probe arm to move down until the probe arm is close to the four-probe hole, and then adjust the adjustment knob I to make the probe enter the temperature control box from the four-probe hole until Touch the sample and apply some pressure to the sample. Turn on the power, the thermocouple starts to work, and heats the temperature control box. The temperature sensor monitors the temperature in the temperature control box at any time and displays it on the temperature display. When the temperature displayed on the temperature display reaches the required test temperature, Turn off the power and start the resistivity test of the semiconductor thin film at a specific temperature. Turn on the switch of the four-probe resistance meter for testing.
一种可检测不同温度下电阻率的四探针电阻仪，本实用新型中通过控温盒和热电偶的结合，使得被检测的试样可以处于不同的温度下进行电阻率的测量。解决了实际应用时，因薄膜温度的不同造成半导体薄膜的电阻率和实际情况存在一定偏差，无法检测不同温度下的电阻率的问题，使得实验结果能更好的应用于实际生活中。A four-probe resistance meter that can detect resistivity at different temperatures. In the utility model, through the combination of a temperature control box and a thermocouple, the tested sample can be measured at different temperatures for resistivity. It solves the problem that the resistivity of the semiconductor film has a certain deviation from the actual situation due to the difference in film temperature, and the resistivity at different temperatures cannot be detected in practical application, so that the experimental results can be better applied in real life.
附图说明：Description of drawings:
图1是一种可检测不同温度下电阻率的四探针电阻仪的主视图；Fig. 1 is a front view of a four-probe resistance meter capable of detecting resistivity at different temperatures;
图2是一种可检测不同温度下电阻率的四探针电阻仪的局部视图。Fig. 2 is a partial view of a four-probe resistance meter capable of detecting resistivity at different temperatures.
图中1是连杆，2是样品台,3是探针，4是调节旋钮Ⅰ，5是调节旋钮Ⅱ，6是探针臂，7是控温盒，8是导线，9是温度显示屏，10是电源，11是底座，12是活动栓，13是热电偶，14是四探针孔，15是温度感应器，16是试样。In the figure, 1 is the connecting rod, 2 is the sample stage, 3 is the probe, 4 is the adjustment knob Ⅰ, 5 is the adjustment knob Ⅱ, 6 is the probe arm, 7 is the temperature control box, 8 is the wire, and 9 is the temperature display , 10 is a power supply, 11 is a base, 12 is a movable bolt, 13 is a thermocouple, 14 is a four-probe hole, 15 is a temperature sensor, and 16 is a sample.
具体实施方式：Detailed ways:
一种可检测不同温度下电阻率的四探针电阻仪，主要包括连杆，样品台，探针，调节旋钮Ⅰ，调节旋钮Ⅱ，探针臂，控温盒，导线，温度显示屏，电源，底座，活动栓，热电偶，四探针孔，温度感应器，试样；其主要特征在于：连杆与底座固定连接；样品台和底座通过连杆固定连接；控温盒通过活动栓安装在样品台的中央，控温盒采用保温材料制成；控温盒内部左右两侧设置有热电偶；热电偶与电源通过导线相连接；控温盒内部上方安装有温度感应器；温度感应器与温度显示屏通过导线相连接；温度显示屏与电源通过导线相连接；试样放置在控温盒内；控温盒上方设置有四个四探针孔，分别与上方的四个探针位置相对应；探针安装在探针臂上；探针臂上设置有调节旋钮Ⅰ和调节旋钮Ⅱ。A four-probe resistance meter that can detect resistivity at different temperatures, mainly including connecting rod, sample stage, probe, adjustment knob Ⅰ, adjustment knob Ⅱ, probe arm, temperature control box, wire, temperature display screen, power supply , base, movable bolt, thermocouple, four probe holes, temperature sensor, sample; its main features are: the connecting rod is fixedly connected with the base; the sample stage and the base are fixedly connected through the connecting rod; the temperature control box is installed through the movable bolt In the center of the sample stage, the temperature control box is made of thermal insulation material; there are thermocouples on the left and right sides of the temperature control box; the thermocouples are connected to the power supply through wires; It is connected with the temperature display screen by wire; the temperature display screen is connected with the power supply by wire; Corresponding; the probe is installed on the probe arm; the probe arm is provided with an adjustment knob I and an adjustment knob II.
工作时，通过活动栓打开控温盒，将试样放置在控温盒内，调整所需要的位置，盖上控温盒，准备试验。打开四探针电阻仪开关，通过调节调节旋钮Ⅱ控制探针臂向下移动至探针臂接近四探针孔，再调节调节旋钮Ⅰ使探针从四探针孔进入控温盒内，直至接触试样并对试样施加一定的压力。打开电源，热电偶开始工作，对控温盒内进行加温，温度感应器随时监测控温盒内的温度并显示在温度显示屏上，当温度显示屏显示的温度达到需要的测试温度时，关闭电源，开始对特定温度下的半导体薄膜进行电阻率测试。打开四探针电阻仪开关进行测试。When working, open the temperature control box through the movable bolt, place the sample in the temperature control box, adjust the required position, cover the temperature control box, and prepare for the test. Turn on the switch of the four-probe resistance meter, adjust the adjustment knob II to control the probe arm to move down until the probe arm is close to the four-probe hole, and then adjust the adjustment knob I to make the probe enter the temperature control box from the four-probe hole until Touch the sample and apply some pressure to the sample. Turn on the power, the thermocouple starts to work, and heats the temperature control box. The temperature sensor monitors the temperature in the temperature control box at any time and displays it on the temperature display. When the temperature displayed on the temperature display reaches the required test temperature, Turn off the power and start the resistivity test of the semiconductor thin film at a specific temperature. Turn on the switch of the four-probe resistance meter for testing.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201820408954.XU CN207992321U (en) | 2018-03-26 | 2018-03-26 | Four probe resistance instrument of resistivity under a kind of detectable different temperatures |
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| CN201820408954.XU CN207992321U (en) | 2018-03-26 | 2018-03-26 | Four probe resistance instrument of resistivity under a kind of detectable different temperatures |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110672926A (en) * | 2019-10-24 | 2020-01-10 | 河北工业大学 | Electrical conductivity measuring device and measuring system suitable for different working conditions |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110672926A (en) * | 2019-10-24 | 2020-01-10 | 河北工业大学 | Electrical conductivity measuring device and measuring system suitable for different working conditions |
| CN110672926B (en) * | 2019-10-24 | 2021-08-10 | 河北工业大学 | Electrical material conductivity measuring device and measuring system suitable for different working conditions |
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Granted publication date: 20181019 Termination date: 20190326 |