CN207966929U - A kind of full-automatic processing operating system of chip - Google Patents
A kind of full-automatic processing operating system of chip Download PDFInfo
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- CN207966929U CN207966929U CN201721521565.XU CN201721521565U CN207966929U CN 207966929 U CN207966929 U CN 207966929U CN 201721521565 U CN201721521565 U CN 201721521565U CN 207966929 U CN207966929 U CN 207966929U
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Abstract
The utility model is related to a kind of full-automatic processing operating systems of chip, including chip machining platform, control device, handling unit, feeding locomotive, blanking locomotive, and image information collecting is carried out by vision collecting unit, and the image information of acquisition is handled and generates processing data using visual processing unit；For the control device according to the processing data, the carrying instruction of chip is carried in output；The carrying instruction that the handling unit is exported according to the control device obtains feeding locomotive and the chip position information of the generation loaded thereon processing to control the vision-based detection module, and drive robot body to capture chip to be processed by the motion control member, to improve the efficiency of chip automation processing operation.
Description
Technical field
The utility model is related to field of semiconductor processing more particularly to a kind of full-automatic processing operating systems of chip.
Background technology
It is in life now, under the progress of Science and Technology Day crescent benefit, robot and the arm maximum area for having the mankind
It is not that flexibility ratio and resistance to dynamics, that is, the sharpest edges of manipulator recursive do same action in the positive reason of machinery
It will not always feel tired under condition, the application of manipulator also will be more and more extensive.
Automation processing also receive more and more attention, automation (Automation) refer to machinery equipment, system or
Process (production, management process) is in the directly presence of nobody or less people, according to the requirement of people, by detecting, believing automatically
Breath processing analyzes and determines, manipulation and control, realizes the process of the set goal.Automatic technology is widely used in industry, agricultural, army
Thing, scientific research, communications and transportation, business, medical treatment, service and family etc..Using automatic technology not only can people from
It is freed in heavy manual labor, part mental labour and severe, dangerous working environment, and the device of people can be extended
Official's function greatlys improve labor productivity, enhances the ability in the human knowledge world and reforming world.Therefore, automation is work
Industry, agricultural, national defence and the essential condition of the modernization of science technology and distinctive marks.
And the manufacture of semiconductor crystal wafer chip includes：Semiconductor crystal wafer is cut down from crystal, followed by many
The procedure of processing of continuous material removal.These procedure of processings are to obtain surface as smooth as possible, semiconductor crystal wafer
The semiconductor crystal wafer of parallel side and offer with rounding seamed edge.The procedure of processing of the material removal usually considered includes：Half
Seamed edge rounding, grinding or twin grinding, etching and the polishing of semiconductor wafer.In the processing operation of semiconductor crystal wafer chip, deposit
It is more demanding simultaneously for operating environment in a large amount of repeated labor, manipulator is applied to the processing operation of chip wafer
In be the trend of current social development, while also needing to the general sex chromosome mosaicism in processing operation and safety problem etc..
Utility model content
In order to solve the above-mentioned technical problem, the utility model provides a kind of full-automatic processing operating system of chip.
The utility model is realized with following technical solution：
A kind of full-automatic processing operating system of chip, including chip machining platform, control device, handling unit, on
Expect locomotive, blanking locomotive, chips machine platform, handling unit, feeding locomotive and blanking locomotive with control
Device processed connects and is controlled by the control device, and the feeding locomotive is moved for delivering chip to be processed, the blanking
Motor-car is used to deliver the chip processed, further includes：
Vision collecting unit, the first image information and chip for acquiring the feeding locomotive machine platform
Second image information simultaneously exports；
Visual processing unit connects the vision collecting unit, to the first image information and the second image information of acquisition
It is handled and generates processing data；
Man-machine interaction unit for machining platform input control signal to chip, and shows that vision collecting unit acquires
Image；
The control device is separately connected the vision collecting unit and the visual processing unit, for according to the first figure
As the processing data of information and the second image information, the carrying instruction of chip is carried in output；
The handling unit is industrial robot, and the industrial robot includes robot body, robot control unit,
And the vision-based detection module and motion control device being connect with robot control unit, the robot control unit are used for root
According to the carrying instruction of the control device output feeding locomotive is obtained controlling the vision-based detection module and load thereon
The chip position information of generation processing, and drive robot body to capture chip to be processed by the motion control member.
Further, the vision-based detection module is B/W camera.
Further, the man-machine interaction unit includes for controlling the chip machining platform power break-make and start and stop
Control button and for chip machining platform input input control signal and systematic parameter, and the display core
Piece machines the touch screen of platform operating status.
Further, the touch screen is LCD liquid crystal displays.
Further, the control device includes programmable logic controller (PLC), the relay for executing logic control output
Device module and communication module；The programmable logic controller (PLC) is connect with processing module and relay module respectively；The communication
Module is connect with vision collecting unit, visual processing unit, feeding locomotive, blanking locomotive and handling unit respectively.
Further, the vision collecting unit is visual sensor, and the visual sensor includes shell, is encapsulated in shell
Internal CCD camera, case top trepanning, power cord and signal wire for video camera are drawn.
Further, described first image information includes adding in the generation on the position and feeding locomotive of feeding locomotive
The quantity of work chip.
Further, the handling unit is industrial robot.
Further, the artificial six-shaft industrial manipulator of the industrial machine.Six-shaft industrial manipulator be multi-joint, mostly freely
The robot of degree, action is more, and variation is flexible;It is a kind of higher industrial robot of Technology of Flexibility, application surface is also relatively broad, and six
Axis robot two joints more than four axis robots, therefore have more " freedom of action degree ".First pass of six axis robot
Energy saving to be rotated freely in horizontal plane as four axis robots, latter two joint can be moved in vertical plane.In addition, six shaft mechanicals
Hand is there are one " arm ", two " wrist " joints, this allows ability that it has the arm of the mankind similar with wrist.Six-joint robot is more
More joints means that they can pick up the component of arbitrary direction on horizontal plane, is put into product with special angle.They
Many operations that could be completed by experienced operator can also be performed.
The utility model has the beneficial effects that：
The utility model provides a kind of full-automatic processing operating system of chip, including chip machining platform, control dress
It sets, handling unit, feeding locomotive, blanking locomotive, and image information collecting is carried out by vision collecting unit, and use
Visual processing unit handles the image information of acquisition and generates processing data；The control device is according to the processing number
According to the carrying instruction of chip is carried in output；The carrying that the handling unit is exported according to the control device instructs to control
It states vision-based detection module and obtains feeding locomotive and the chip position information of the generation loaded thereon processing, and controlled by the movement
System member driving robot body captures chip to be processed, to improve the efficiency of chip automation processing operation.
Description of the drawings
Fig. 1 is a kind of full-automatic processing operating system overall schematic of chip provided in this embodiment.
Fig. 2 is the structural schematic diagram of industrial robot provided in this embodiment.
Specific implementation mode
It is new to this practicality below in conjunction with attached drawing to keep the purpose of this utility model, technical solution and advantage clearer
Type is described in further detail.
A kind of full-automatic processing operating system of chip, as shown in Figs. 1-2, including chip machining platform 1, control device
2, handling unit 3, feeding locomotive 4, blanking locomotive 5, chips machine platform 1, handling unit 3, feeding locomotive 4
The control device 2 is connect and is controlled by with control device 2 with blanking locomotive 5, the feeding locomotive is waited for for delivering
The chip of processing, the blanking locomotive further include for delivering the chip processed：
Vision collecting unit 6, the first image information and chip for acquiring the feeding locomotive machine platform
The second image information and export；
Visual processing unit 7 connects the vision collecting unit, to the first image information and the second image information of acquisition
It is handled and generates processing data；
Man-machine interaction unit 8 for machining 1 input control signal of platform to chip, and shows that vision collecting unit is adopted
The image of collection；
The control device 2 is separately connected the vision collecting unit and the visual processing unit, for according to first
The carrying instruction of chip is carried in the processing data of image information and the second image information, output；
The handling unit is industrial robot, and the industrial robot includes robot body 31, robot control list
Member 32, and the vision-based detection module 33 and motion control device 34 that connects with robot control unit, the robot control
Unit be used for the carrying that export according to the control device 2 instruct control the vision-based detection module acquisition feeding locomotive and
The chip position information that the generation 33 loaded thereon processes, and drive robot body crawl to be processed by the motion control member
Chip.
Further, the vision-based detection module is B/W camera.
Further, the man-machine interaction unit includes for controlling the chip machining platform power break-make and start and stop
Control button and for chip machining platform input input control signal and systematic parameter, and the display core
Piece machines the touch screen of platform operating status.
Further, the touch screen is LCD liquid crystal displays.
Further, the control device 2 includes programmable logic controller (PLC), the relay for executing logic control output
Device module and communication module；The programmable logic controller (PLC) is connect with processing module and relay module respectively；The communication
Module is connect with vision collecting unit, visual processing unit, feeding locomotive, blanking locomotive and handling unit respectively.
Further, the vision collecting unit 6 is visual sensor, and the visual sensor includes shell, is encapsulated in
CCD camera in shell, case top trepanning, power cord and signal wire for video camera are drawn.
Further, described first image information includes adding in the generation on the position and feeding locomotive of feeding locomotive
The quantity of work chip.
Further, the handling unit is industrial robot.
Further, the artificial six-shaft industrial manipulator of the industrial machine.Six-shaft industrial manipulator be multi-joint, mostly freely
The robot of degree, action is more, and variation is flexible;It is a kind of higher industrial robot of Technology of Flexibility, application surface is also relatively broad, and six
Axis robot two joints more than four axis robots, therefore have more " freedom of action degree ".First pass of six axis robot
Energy saving to be rotated freely in horizontal plane as four axis robots, latter two joint can be moved in vertical plane.In addition, six shaft mechanicals
Hand is there are one " arm ", two " wrist " joints, this allows ability that it has the arm of the mankind similar with wrist.Six-joint robot is more
More joints means that they can pick up the component of arbitrary direction on horizontal plane, is put into product with special angle.They
Many operations that could be completed by experienced operator can also be performed.
Above disclosures are merely preferred embodiments of the utility model, with this utility model cannot be limited certainly
Interest field, therefore equivalent variations made according to the claim of the utility model still fall within the scope of the utility model.
Claims (8)
1. a kind of full-automatic processing operating system of chip, including chip machining platform, control device, handling unit, feeding
Locomotive, blanking locomotive, chips machine platform, handling unit, feeding locomotive and blanking locomotive with control
Device connects and is controlled by the control device, and the feeding locomotive is for delivering chip to be processed, the blanking movement
Vehicle is for delivering the chip processed, which is characterized in that further includes：
Vision collecting unit, the first image information and chip for acquiring the feeding locomotive machine the second of platform
Image information simultaneously exports；
Visual processing unit connects the vision collecting unit, and the first image information and the second image information to acquisition carry out
It handles and generates processing data；
Man-machine interaction unit for machining platform input control signal to chip, and shows the figure of vision collecting unit acquisition
Picture；
The control device is separately connected the vision collecting unit and the visual processing unit, for being believed according to the first image
The carrying instruction of chip is carried in the processing data of breath and the second image information, output；
The handling unit is industrial robot, and the industrial robot includes robot body, robot control unit, and
The vision-based detection module and motion control device being connect with robot control unit, the robot control unit are used for according to institute
The carrying instruction for stating control device output adds to control the generation that the vision-based detection module obtains feeding locomotive and loads thereon
The chip position information of work, and drive robot body to capture chip to be processed by the motion control member.
2. the full-automatic processing operating system of chip according to claim 1, it is characterised in that：The man-machine interaction unit
Include machining the control button of platform power break-make and start and stop and for being machined to the chip for controlling the chip
Platform inputs input control signal and systematic parameter, and the touch screen of the display chip machining platform operating status.
3. the full-automatic processing operating system of chip according to claim 2, it is characterised in that：The touch screen is LCD
Liquid crystal display.
4. the full-automatic processing operating system of chip according to claim 1, it is characterised in that：The control device includes
Programmable logic controller (PLC), relay module and communication module for executing logic control output；The programmable logic control
Device processed is connect with processing module and relay module respectively；The communication module respectively with vision collecting unit, visual processes list
Member, feeding locomotive, blanking locomotive are connected with handling unit.
5. the full-automatic processing operating system of chip according to claim 1, it is characterised in that：The vision collecting unit
For visual sensor.
6. the full-automatic processing operating system of chip according to claim 1, it is characterised in that：Described first image information
The quantity of generation processing chip on position and feeding locomotive including feeding locomotive.
7. the full-automatic processing operating system of chip according to claim 1, it is characterised in that：The industrial machine is artificial
Six-shaft industrial manipulator.
8. the full-automatic processing operating system of chip according to claim 1, it is characterised in that：The vision-based detection module
For B/W camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721521565.XU CN207966929U (en) | 2017-11-15 | 2017-11-15 | A kind of full-automatic processing operating system of chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721521565.XU CN207966929U (en) | 2017-11-15 | 2017-11-15 | A kind of full-automatic processing operating system of chip |
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| Publication Number | Publication Date |
|---|---|
| CN207966929U true CN207966929U (en) | 2018-10-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721521565.XU Expired - Fee Related CN207966929U (en) | 2017-11-15 | 2017-11-15 | A kind of full-automatic processing operating system of chip |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113245722A (en) * | 2021-06-17 | 2021-08-13 | 昆山华恒焊接股份有限公司 | Control method and device of laser cutting robot and storage medium |
-
2017
- 2017-11-15 CN CN201721521565.XU patent/CN207966929U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113245722A (en) * | 2021-06-17 | 2021-08-13 | 昆山华恒焊接股份有限公司 | Control method and device of laser cutting robot and storage medium |
| CN113245722B (en) * | 2021-06-17 | 2021-10-01 | 昆山华恒焊接股份有限公司 | Control method and device of laser cutting robot and storage medium |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181012 Termination date: 20191115 |