CN207964111U - A kind of device that temperature measures - Google Patents
A kind of device that temperature measures Download PDFInfo
- Publication number
- CN207964111U CN207964111U CN201820442406.9U CN201820442406U CN207964111U CN 207964111 U CN207964111 U CN 207964111U CN 201820442406 U CN201820442406 U CN 201820442406U CN 207964111 U CN207964111 U CN 207964111U
- Authority
- CN
- China
- Prior art keywords
- lump
- thermocouple
- sample stage
- shaped media
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model embodiment is related to a kind of device that temperature measures, including：Sample stage (1), the sample stage (1) are under vacuum infrared heating condition；Quartzy trustship (2), the quartz trustship (2) connects and supports sample stage (1), under vacuum infrared heating condition；Lump-shaped media (3) is located within the sample stage (1), and the lump-shaped media (3) is machined with hole；Thermocouple (4), the thermocouple (4) pass through quartzy trustship (2), thermometric end to be inserted within the hole of lump-shaped media (3)；Wherein, the infrared radiation absorption rate of lump-shaped media (3) is not less than 0.90, and thermal coefficient is not less than 60~70W/ (mK).The utility model embodiment provides a kind of particular surroundings that the device that temperature measures can be heated for vacuum infrared, the accurate temperature measured in sample stage.
Description
Technical field
The utility model is related to the devices that field of temperature measurement more particularly to a kind of temperature measure.
Background technology
Quartzy trustship support connection sample stage, under vacuum infrared heating condition, thermocouple passes through quartzy trustship, surveys
Wen Duan is placed in sample stage, for measuring the temperature in sample stage.
Based on this, the inventor of the utility model has found, under vacuum infrared heating condition, mutually non-touching two objects
The mode of heat transfer is only heat radiation between body, and thermocouple can not accurately measure the true temperature in sample stage.
The information for being disclosed in the background technology part is merely intended to increase the understanding to the general background of the utility model, and
It is not construed as recognizing or implying in any form that information composition has been existing well known to persons skilled in the art
Technology.
Utility model content
In view of this, the technical problems to be solved in the utility model is, for the particular surroundings of vacuum infrared heating, how
The accurate temperature for measuring sample.
In order to solve the above technical problems, the utility model embodiment provides the device that a kind of temperature measures and includes：Sample stage
1, the sample stage 1 is under vacuum infrared heating condition；Quartzy trustship 2, the quartz trustship 2 connect and support sample stage 1,
Under vacuum infrared heating condition；Lump-shaped media 3 is located within the sample stage 1, and the lump-shaped media 3 is machined with hole；Heat
Galvanic couple 4, the thermocouple 4 pass through quartzy trustship 2, and thermometric end is inserted within the hole of lump-shaped media 3, for measuring sample
Temperature in platform；Wherein, the infrared radiation absorption rate of lump-shaped media 3 is not less than 0.90, and thermal coefficient is not less than 60~70W/
(m·K)。
In one possible implementation, the material of the lump-shaped media 3 includes high purity graphite.
In one possible implementation, the hole is located at any position of the lump-shaped media 3.
In one possible implementation, the quantity in the hole is one or more, and the hole is located at blocky Jie
Any position of matter 3；The quantity of the thermocouple 4 is one or more, the thermometric end of one or more thermocouples 4 and institute
State the one or more hole matching of lump-shaped media 3.
In one possible implementation, the type of one or more thermocouples 4 includes platinum rhodium 10- platinum thermoelectricity
It is one or more in idol, platinum-13rhodium-platinum thermocouple, nickel chromium-nickel silicon thermocouple and nicrosil nisil thermocouple.
In one possible implementation, the thermocouple 4 is used to measure the temperature in sample stage, and and temperature-controlling system
Connection.
In one possible implementation, the material of the lump-shaped media 3 includes nichrome, silicon carbide ceramics, nitrogen
Change one or more in aluminium ceramics.
The device that a kind of temperature that the utility model embodiment provides measures is in vacuum infrared heating by sample stage 1
Under the conditions of；Quartzy trustship 2 connects and supports sample stage 1, under vacuum infrared heating condition；Lump-shaped media 3 is located at the sample
Within sample platform 1, the lump-shaped media 3 is machined with hole；Thermocouple 4 passes through quartzy trustship 2, thermometric end to be inserted into 3 institute of lump-shaped media
It states within hole, the temperature for measuring sample stage；Wherein, the infrared radiation absorption rate of lump-shaped media 3 is not less than 0.90, heat conduction system
Number is not less than 60~70W/ (mK), can utilize with the lump-shaped media compared with high infrared radiation absorptivity and Thermal conductivity
3 absorb and conduct the temperature measurement error that heat overcomes thermocouple 4, and thermocouple 4 is enable accurately to measure the temperature in sample stage.
According to below with reference to the accompanying drawings to detailed description of illustrative embodiments, the other feature and aspect of the utility model will
It becomes apparent.
Description of the drawings
One or more embodiments are illustrated by the picture in corresponding attached drawing, these exemplary theorys
The bright restriction not constituted to embodiment, the element with same reference numbers label is expressed as similar element in attached drawing, removes
Non- to have special statement, composition does not limit the figure in attached drawing.
Fig. 1 shows the structural schematic diagram for the device that a kind of temperature that the utility model embodiment provides measures.
Fig. 2 shows the structural schematic diagrams for the device that a kind of temperature that another embodiment of the utility model provides measures.
Fig. 3 shows the structural schematic diagram for the device that a kind of temperature that another embodiment of the utility model provides measures.
Fig. 4 shows the structural schematic diagram for the device that a kind of temperature that another embodiment of the utility model provides measures.
Specific implementation mode
Below in conjunction with the accompanying drawings, specific embodiment of the present utility model is described in detail, it is to be understood that this practicality
Novel protection domain is not restricted by specific implementation.
It is new below in conjunction with this practicality to keep the purpose, technical scheme and advantage of the utility model embodiment clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Based on the implementation in the utility model
Example, the every other embodiment that those of ordinary skill in the art are obtained without creative efforts belong to
The range of the utility model protection.Unless otherwise explicitly stated, otherwise in entire disclosure and claims, term
" comprising " or its transformation such as "comprising" or " including " etc. will be understood to comprise stated element or component, and simultaneously
Other elements or other component parts are not excluded.
Dedicated word " exemplary " means " being used as example, embodiment or illustrative " herein.Here as " exemplary "
Illustrated any embodiment should not necessarily be construed as preferred or advantageous over other embodiments.
In addition, in order to better illustrate the utility model, given in specific implementation mode below numerous specific
Details.It will be appreciated by those skilled in the art that without certain details, the utility model can equally be implemented.In some realities
In example, method well known to those skilled in the art, means, element are not described in detail, in order to highlight the utility model
Purport.
Fig. 1 shows the structural schematic diagram for the device that a kind of temperature that the utility model embodiment provides measures.Such as Fig. 1 institutes
Show, the device of the temperature correction includes：Sample stage 1, quartzy trustship 2, quartz spacer 3 and thermocouple 4.
Wherein, sample stage 1 and quartzy trustship 2 are under vacuum infrared heating condition.Quartz spacer 3 be placed in sample stage 1 it
Interior, sample is placed on quartz spacer 3, and thermocouple 4 passes through quartzy trustship 2, and thermometric end is placed within sample stage 1, and is in
Under quartz spacer 3, for measuring the temperature in sample stage.
In one possible implementation, thermocouple 4 can be cased with aluminium oxide ceramics set, play high temperature protection.
Due to the particular form of vacuum infrared heating, the mode of heat transfer is only between mutually non-touching two objects
Heat radiation, there are errors for thermocouple temperature measurement, can not accurately measure the true temperature in sample stage.
In view of this, the utility model embodiment provides alternatively possible embodiment.It is another that Fig. 2 shows the utility model
The structural schematic diagram for the device that a kind of temperature that one embodiment provides measures.As shown in Fig. 2, the device that the temperature measures includes：
Sample stage 1, quartzy trustship 2, lump-shaped media 3 and thermocouple 4.
Wherein, sample stage 1 is under vacuum infrared heating condition；Quartzy trustship 2 connects and supports sample stage 1, in true
Under the conditions of empty infrared heating.Lump-shaped media 3 is located within sample stage 1, and lump-shaped media 3 is machined with hole；Thermocouple 4, the thermoelectricity
Even 4 pass through quartzy trustship 2, and thermometric end is inserted within the hole of lump-shaped media 3, for measuring the temperature in sample stage；Its
In, the infrared radiation absorption rate of lump-shaped media 3 is not less than 0.90, and thermal coefficient is not less than 60~70W/ (mK).Wherein, unit
W/ (mK) (Chinese：Watt/ meter Du) indicate steady heat transfer under the conditions of, the material of 1 meter (m) thickness, the temperature difference of both side surface is 1 degree
(K, DEG C), in 1 second (1s), pass through the heat of 1 square metre of area transmission.Thermocouple 4 passes through quartzy trustship 2, thermometric end
It is inserted within hole, which can be embedded hole, or through hole, thermocouple 4 measure the temperature in sample stage.
Lump-shaped media 3 has compared with high infrared radiation absorptivity and good heat conductivility, blocky during infra-red radiation
Medium 3 absorbs infrared heat, and the temperature of lump-shaped media 3 is the actual temperature in sample stage, and thermocouple 4 is inserted into lump-shaped media 3
Hole in, contacted with lump-shaped media 3, heat is conducted to the measurement end of thermocouple 4 so that thermocouple 4 can accurately measure sample
Temperature in platform, and no matter the hole is set to which kind of position of lump-shaped media 3, and thermocouple 4 can accurately measure sample
Temperature in platform accomplishes multiple spot equality of temperature.
The device that a kind of temperature that the utility model embodiment provides measures can effectively overcome vacuum infrared heating condition
The big problem of lower thermocouple temperature measurement error, it is ensured that thermocouple 4 measures the accuracy of temperature in sample stage, and no matter the hole is set
It is placed in which kind of position of lump-shaped media 3, thermocouple 4 can accurately measure temperature in sample stage, accomplish multiple spot equality of temperature.
In one possible implementation, the material of lump-shaped media 3 may include high purity graphite.Graphite has higher
Infrared radiation absorption rate, absorptivity be not less than 0.9.There is graphite good heat conductivility, thermal coefficient to be equal to 129W/ (m
K).During infra-red radiation, graphite absorbs infrared heat, and the temperature of graphite is the actual temperature of sample stage.One kind can
In the realization method of energy, the hole is located at any position of the lump-shaped media 3.Thermocouple 4 is inserted into the hole of graphite, with graphite
Contact, heat conducts to the measurement end of thermocouple 4 so that and thermocouple 4 can accurately measure the temperature in sample stage, and no matter
The hole is set to which kind of position of lump-shaped media 3, and thermocouple 4 can accurately measure the temperature in sample stage, accomplish multiple spot
Equality of temperature.
In addition, graphite high temperature resistant, coefficient of thermal expansion is small, good heat conductivity, and chemical property is stablized, nothing under the conditions of vacuum high-temperature
Volatile matter will not occur chemical reaction with thermocouple and pollute thermocouple, a kind of temperature that the utility model embodiment provides as a result,
The device that degree measures can effectively avoid the temperature caused by thermocouple is contaminated from measuring inaccuracy, further ensure that thermoelectricity
Even 4 can accurately measure the temperature in sample stage, it is ensured that the accuracy that temperature measures, and no matter the hole is set to blocky Jie
Which kind of position of matter 3, thermocouple 4 can accurately measure the temperature in sample stage, accomplish multiple spot equality of temperature.
In one possible implementation, as shown in figure 3, the quantity in the hole can be one or more, the hole
Any position of the lump-shaped media 3 can be located at, with the number in hole for 2 in figure, and positioned at the same side of lump-shaped media 3,
Carried out by example.
The quantity of thermocouple 4 can also be one or more, the thermometric end of one or more thermocouples 4 and blocky Jie
The one or more hole matching of matter 3, one or more thermocouples 4 can be across quartzy trustship 2, thermometric as a result,
End is inserted within one or more holes of lump-shaped media 3 respectively, it is ensured that each thermocouple 4 can be measured accurately in sample stage
Temperature, it is ensured that the accuracy that temperature measures.
In one possible implementation, the type of thermocouple includes platinum rhodium 10- platinum thermocouples (S types), platinum rhodium 13- platinum
It is one or more in thermocouple (R types), nickel chromium-nickel silicon thermocouple (K-type) and nicrosil nisil thermocouple (N-type).
In alternatively possible realization method, the material of lump-shaped media 3 can also be iron, molybdenum, nickel, silicon carbide and nitridation
It is one or more in aluminium.Those materials have preferable heat conductivility.
Fig. 4 shows the structural schematic diagram for the device that a kind of temperature that another embodiment of the utility model provides measures.Such as Fig. 4
Shown, the device which measures includes：Sample stage 1, quartzy trustship 2, lump-shaped media 3, thermocouple 4 and temperature-controlling system 5.
Wherein, sample stage 1 is under vacuum infrared heating condition；Quartzy trustship 2 connects and supports sample stage 1, in true
Under the conditions of empty infrared heating.Lump-shaped media 3 is located within sample stage 1, and lump-shaped media 3 is machined with hole；Thermocouple 4, the thermoelectricity
Even 4 pass through quartzy trustship 2, and thermometric end is inserted within the hole of lump-shaped media 3, for measuring the temperature in sample stage；Its
In, the infrared radiation absorption rate of lump-shaped media 3 is not less than 0.9, and thermal coefficient is not less than 60~70W/ (mK).
In one possible implementation, the material of lump-shaped media 3 can be high purity graphite.Graphite has higher
Infrared radiation absorption rate, absorptivity are not less than 0.9.There is graphite good heat conductivility, thermal coefficient to be equal to 129W/ (m
K).In vacuum infrared heating process, graphite absorbs infrared heat, and the temperature of graphite is the temperature in actual sample stage, heat
Galvanic couple 4 is inserted into the hole of lump-shaped media 3, and with graphite contact, heat is conducted to the thermometric end of thermocouple 4 so that thermocouple 4 can
The accurate temperature measured in sample stage, improves the accuracy that temperature measures in sample stage, and no matter the hole is set to bulk
Which kind of position of medium 3, thermocouple 4 can accurately measure the temperature in sample stage, accomplish multiple spot equality of temperature.
In one possible implementation, the other end of thermocouple 4 is connect with temperature-controlling system 5.It can be seen that this practicality
The device that the temperature that new embodiment provides measures is easy to operate, easy to implement.
The apparatus embodiments described above are merely exemplary, wherein the unit illustrated as separating component can
It is physically separated with being or may not be.Some or all of module therein can be selected according to the actual needs
It achieves the purpose of the solution of this embodiment.
Finally it should be noted that：Above example is only to illustrate the technical solution of the utility model, rather than its limitations；
Although the utility model is described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that：
It still can be with technical scheme described in the above embodiments is modified, or is carried out to which part technical characteristic etc.
With replacement；And these modifications or replacements, various embodiments of the utility model technology that it does not separate the essence of the corresponding technical solution
The spirit and scope of scheme.
Claims (7)
1. the device that a kind of temperature measures, which is characterized in that including：
Sample stage (1), the sample stage (1) are under vacuum infrared heating condition；
Quartzy trustship (2), the quartz trustship (2) connects and supports sample stage (1), under vacuum infrared heating condition；
Lump-shaped media (3) is located within the sample stage (1), and the lump-shaped media (3) is machined with hole；
Thermocouple (4), the thermocouple (4) pass through quartzy trustship (2), thermometric end be inserted into lump-shaped media (3) the hole it
It is interior, for measuring the temperature in sample stage；
Wherein, the infrared radiation absorption rate of lump-shaped media (3) is not less than 0.90, and thermal coefficient is not less than 60~70W/ (mK).
2. the apparatus according to claim 1, which is characterized in that the material of the lump-shaped media (3) includes high purity graphite.
3. the apparatus according to claim 1, which is characterized in that the hole is located at any position of the lump-shaped media (3).
4. the apparatus according to claim 1, which is characterized in that the quantity in the hole is one or more, and the hole is located at
Any position of the lump-shaped media (3)；
The quantity of the thermocouple (4) is one or more, the thermometric end and the bulk of one or more thermocouples (4)
The one or more hole matching of medium (3).
5. device according to claim 4, which is characterized in that the type of one or more thermocouples (4) includes platinum
Rhodium 10- platinum thermocouples, platinum-13rhodium-platinum thermocouple, nickel chromium-nickel silicon thermocouple and one kind or more in nicrosil nisil thermocouple
Kind.
6. the apparatus according to claim 1, which is characterized in that the thermocouple (4) is used to measure the temperature in sample stage,
And it is connect with temperature-controlling system.
7. the apparatus according to claim 1, which is characterized in that the material of the lump-shaped media (3) includes nichrome, carbon
It is one or more in SiClx ceramics, aluminium nitride ceramics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820442406.9U CN207964111U (en) | 2018-03-30 | 2018-03-30 | A kind of device that temperature measures |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820442406.9U CN207964111U (en) | 2018-03-30 | 2018-03-30 | A kind of device that temperature measures |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207964111U true CN207964111U (en) | 2018-10-12 |
Family
ID=63726442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820442406.9U Active CN207964111U (en) | 2018-03-30 | 2018-03-30 | A kind of device that temperature measures |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207964111U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108195478A (en) * | 2018-03-30 | 2018-06-22 | 中国计量科学研究院 | A kind of device of temperature survey |
-
2018
- 2018-03-30 CN CN201820442406.9U patent/CN207964111U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108195478A (en) * | 2018-03-30 | 2018-06-22 | 中国计量科学研究院 | A kind of device of temperature survey |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103454306B (en) | A kind of detection measuring method of heat conduction coefficient tester | |
| Tiwari et al. | Effect of the condensing cover's slope on internal heat and mass transfer in distillation: an indoor simulation | |
| EP1775758A2 (en) | Silicon wafer substrate locking stage and silicon wafer substrate temperature measuring method | |
| CN207964111U (en) | A kind of device that temperature measures | |
| CN102830134B (en) | Up-and-down constant-temperature parameter identifying method for testing thermal interface material performance | |
| CN108195478A (en) | A kind of device of temperature survey | |
| CN102353468B (en) | Device for measuring temperature of solar cell sintering furnace and using method thereof | |
| Hartunian et al. | On Thin‐Film Heat‐Transfer Measurements in Shock Tubes and Shock Tunnels | |
| CN102608154A (en) | System for measuring thermal performance transiently by using pulsing method or constant current method | |
| CN207964129U (en) | A kind of device of temperature correction | |
| CN102778475A (en) | Method for measuring solid-solid thermal contact resistance via up-and-down constant temperature parameter identification method | |
| WO2010014354A1 (en) | System and method for a temperature sensor using temperature balance | |
| CN203849193U (en) | Indoor rock sample heat conduction coefficient testing device | |
| KR101889818B1 (en) | Thermal conductivity mearsuring device and measuring method thereof | |
| AIHARA | Natural convection heat transfer from vertical rectangular-fin arrays: Part 2, heat transfer from fin-edges | |
| CN108562378A (en) | A kind of device of temperature correction | |
| US1977340A (en) | Heat convection meter | |
| CN102128855B (en) | Device and method for measuring high temperature thermophysical property | |
| CN108152326A (en) | The measuring device and method that solid material thermal diffusion coefficient varies with temperature | |
| CN207689608U (en) | A kind of heat resistance detection device of metalized film capacitor | |
| RU2797313C1 (en) | Method for measuring thermal conductivity of solids under conditions of heat exchange with the environment and device for its implementation | |
| CN114424035A (en) | Non-invasive thermometer | |
| Boyer et al. | Measurements of Surface Temperatures IA Portable Thermocouple Device Compensated for Heat Losses | |
| CN206339310U (en) | The measurement apparatus of smooth surface Temperature Distribution | |
| CN108896602B (en) | Heat conduction temperature measuring device and temperature measuring method using same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |