CN207938620U - A kind of pre- etching device of diamond wire silicon chip - Google Patents
A kind of pre- etching device of diamond wire silicon chip Download PDFInfo
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- CN207938620U CN207938620U CN201820511987.7U CN201820511987U CN207938620U CN 207938620 U CN207938620 U CN 207938620U CN 201820511987 U CN201820511987 U CN 201820511987U CN 207938620 U CN207938620 U CN 207938620U
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- liquid
- silicon chip
- diamond wire
- storing barrel
- accommodating space
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model is related to a kind of pre- etching devices of diamond wire silicon chip, including the texturing slot being arranged in order, wash a slot, descaling bath, wash two slots, drying tank, the pre- etching device of diamond wire silicon chip further includes the temperature control system for controlling the texturing slot herb liquid temperature, liquid storing barrel for storing liquid, the temperature control system includes the temperature inductor being arranged on the liquid storing barrel, heater on the liquid storing barrel is set, the heat exchanger being connected with the liquid storing barrel, it is connected with the heat exchanger and for reducing the ice maker of the heat exchange temperature；The pre- making herbs into wool device temperature control of diamond wire silicon chip with liquid feeding component is uniform, and speed is fast, and effect is good, maintains stabilizing power strong.
Description
Technical field
The utility model is related to a kind of pre- etching devices of diamond wire silicon chip.
Background technology
In the prior art, the process of silicon chip makes matte with sodium hydroxide solution, and principle is sodium hydroxide pair
Silicon chip surface corrosion rate is different, and rough state is formed so as to cause silicon chip surface.Matte can make light in silicon chip
Surface multiple reflections occur, increase the probability that light injects silicon chip, silicon chip accordingly obtains more energy.But caustic corrosion silicon
Piece will produce amount of heat, and the temperature rapidly changed is unfavorable for the surface wool manufacturing of silicon chip, therefore temperature control becomes silicon systems row too
Critical process in positive energy cell production process.
A kind of chain type crystal silicon etching device (205911321 U of CN) of the prior art, includes along the operation side of the crystal silicon
To texturing slot, rinse bath, rear treating groove, drying tank and the linked transmission system for being driven the gaily decorated basket being sequentially arranged at intervals,
For the gaily decorated basket for loading silicon chip, the linked transmission system includes the texturing slot, rinse bath, rear treating groove and drying tank
In the independent transmission device that is respectively provided with of each groove body.This equipment further includes the temperature control equipment being located in process for etching slot,
The control effect of temperature for controlling Woolen-making liquid, the device is poor, and stability is not strong, changes low-response, nothing for fluid temperature
The real-time regulating liquid medicine temperature of method influences technological effect very big with keeping the constant of temperature.
Utility model content
The technical problem to be solved by the present invention is to provide a kind of controls of temperature uniformly, speed is fast, effect is good and maintains
The pre- etching device of diamond wire silicon chip of the strong temperature control system of stability.
In order to solve the above-mentioned technical problem, the technical solution adopted in the utility model is：
A kind of pre- etching device of diamond wire silicon chip, including be arranged in order texturing slot, washing one slot, descaling bath, washing two
Slot, drying tank, the pre- etching device of diamond wire silicon chip further include for controlling the temperature control system of fluid temperature, being used for
The liquid storing barrel of liquid is stored, the temperature control system includes being arranged on the liquid storing barrel and for detecting the liquid storage
The temperature inductor of bucket inner liquid medicine temperature is arranged on the liquid storing barrel and for being carried out to the liquid in the liquid storing barrel
The heater of heating, the heat exchanger being connected with the liquid storing barrel are connected with the heat exchanger and for reducing described
Heat exchange temperature ice maker.
Specifically, the heat exchanger include can for liquid by the first accommodating space, with it is described first accommodating
It is that space is disposed adjacent and can pass through to the liquid in first accommodating space for the liquid in the ice maker
Second accommodating space of cooling.
Preferably, second accommodating space is located at the periphery of first accommodating space.
It is further preferred that the temperature control system further include be arranged the ice maker and the heat exchanger it
Between and can for liquid the first inlet tube out of the described ice maker flow direction second accommodating space, be arranged in the ice
Between machine and the heat exchanger and can be for liquid from the described second accommodating space flow direction ice maker first go out liquid
Pipe.
It is further preferred that the temperature control system further includes being arranged to hold in the liquid storing barrel and described first
The second inlet tube of the heat exchanger can be flowed between emptying and from the liquid storing barrel for liquid, is arranged described
The liquid storage can be flowed between liquid storing barrel and first accommodating space and from first accommodating space for liquid
Second outlet tube of bucket.
Specifically, the heater includes heating tube.
Preferably, the heating tube has one or more.
It is further preferred that the heater selects acid and alkali-resistance, heat safe material.
The scope of the utility model, however it is not limited to technical solution made of the specific combination of above-mentioned technical characteristic, while
The other technical solutions for being carried out arbitrary combination by above-mentioned technical characteristic or its equivalent feature and being formed should be covered.Such as features described above
The technical solution that with (but not limited to) disclosed herein there is the technical characteristic of similar functions to be replaced mutually and formed
Deng.
Since above-mentioned technical proposal is used, the utility model has following advantages compared with prior art：The utility model
The temperature control system of the pre- etching device of diamond wire silicon chip of use, due to the setting for the heat exchanger being connected with liquid storing barrel, with
The setting for the ice maker that heat exchanger is connected, temperature control is uniform, and speed is fast, and effect is good, maintains stabilizing power strong.
Description of the drawings
Attached drawing 1 is the schematic diagram of the pre- etching device of the utility model diamond wire silicon chip；
Attached drawing 2 is the schematic diagram of the temperature control system of the pre- etching device of diamond wire silicon chip of the utility model；
Attached drawing 3 is the schematic diagram of the liquid feeding component of the pre- etching device of diamond wire silicon chip of the utility model；
Attached drawing 4 is the vertical view of the chain type roller Transmission system of the pre- etching device of diamond wire silicon chip of the utility model；
Attached drawing 5 is the schematic diagram of the upper roller of the pre- etching device of diamond wire silicon chip of the utility model；
Attached drawing 6 is the schematic diagram of the bottom roller of the pre- etching device of diamond wire silicon chip of the utility model；
Wherein：
10, diamond wire silicon chip；11, feeding groove；12, texturing slot；13, a slot is washed；14, descaling bath；15, two slots are washed；
16, drying tank；17, blanking groove；18, air knife；19, chain type roller Transmission system；21, upper roller；211, annular projection；22, under
Idler wheel；3, box is added；311, first partition；312, second partition；32, the second analog quantity level sensor；33, second switch amount
Level sensor；34, inlet；35, overflow port；4, liquid storing barrel；41, the first analog quantity level sensor；42, first switch amount
Level sensor；43, suction opening；51, inlet tube；52, second pipe；53, first pipe；54, third pipeline；61, the second valve
Door；62, the 4th valve；63, third valve；64, the first valve；72, ice maker；73, heat exchanger；731, the second accommodating space；
732, the first accommodating space；74, heater；75, temperature inductor；81, the second inlet tube；82, the second outlet tube；83, first
Inlet tube；84, the first outlet tube.
Specific implementation mode
As shown in the drawings, the utility model is related to a kind of pre- etching devices of diamond wire silicon chip, including are arranged in order upper
Hopper 11, texturing slot 12, washing one slot 13, descaling bath 14, washing two slots 15, drying tank 16, blanking groove 17, for transporting Buddha's warrior attendant
The chain type roller Transmission system 19 of line silicon chip 10, can add the progress liquid feeding of texturing slot 12 driving motor (not shown)
Liquid component, the temperature control system for controlling fluid temperature, the first spray tube (not shown), the second spray tube are (in figure
It is not shown) and air knife 18.
Diamond wire silicon chip 10 is the silicon chip of Buddha's warrior attendant wire cutting.
Driving motor can drive chain type roller Transmission system 19 to work, and chain type roller Transmission system 19 can be driven by one
Dynamic motor drives in front or one in front and one in back drives work by two driving motors.
In order to improve the cleaning performance of diamond wire silicon chip 10, a slot is being washed in the setting of the first spray tube (not shown)
At 13 and up and down to spraying for being cleaned to diamond wire silicon chip 10, two slots are being washed in the setting of the second spray tube (not shown)
At 15 and up and down to spraying for being cleaned to diamond wire silicon chip 10, up and down to the first spray tube (not shown) of spray and the
Two spray tube (not shown)s, up and down to the cleaning way of spray, cleaning effect is good and energy saving, can thoroughly clean diamond wire silicon chip
10, the dirty of surface is taken away, and the problem of be not in general ultrasonic cleaning apparatus of high cost and easy shatter silicon chip.
In order to efficient drying diamond wire silicon chip 10, air knife 18 is arranged at drying tank 16 and up and down to blowing for drying up gold
Rigid line silicon chip 10, up and down to blowing and using hot-air seasoning, drying efficiency is high, and without water stain residual.
As shown in figs. 4 through 6, demand is measured in order to adapt to different factories, chain type roller Transmission system 19 includes along diamond wire
The width direction of the pre- etching device of silicon chip multiple transmission units arranged side by side, each transmission unit are transmitted by one first respectively
Item and one second transmission item are constituted.First transmission item sequentially passes through texturing slot 12, one slot 13 of washing, descaling bath 14, washing two
Slot 15 and drying tank 16；Second transmission item sequentially passes through feeding groove 11, texturing slot 12, one slot 13 of washing, descaling bath 14, washing
Two slots 15, drying tank 16 and blanking groove 17.
The width direction of the pre- etching device of diamond wire silicon chip is the vertical direction in direction as shown in figs. 4 through 6, i.e. attached drawing 4-6
The front-rear direction in shown direction.In the present embodiment, chain type roller Transmission system 19 includes 5 transmission units being arranged side by side, and
And it can be adjusted according to the requirement that different factories measure.
The operation logic of the pre- etching device of diamond wire silicon chip is as follows：
As shown in Fig. 1, diamond wire silicon chip 10 enters texturing slot 12 under the drive of the second transmission item from feeding groove 11, then
Diamond wire silicon chip 10 is transported at the uniform velocity by texturing slot 12, one slot 13 of washing, descaling bath 14, washing by chain type roller Transmission system 19
Two slots 15, drying tank 16, then enter blanking groove 17 from drying tank 16 by the second transmission item transport diamond wire silicon chip 10.Diamond wire silicon
Piece 10 first passes around texturing slot 12, is immersed in liquid, is chemically reacted with the chemicals in liquid；By washing a slot 13
When, cleaning showers are carried out to diamond wire silicon chip 10 to the first spray tube of spray up and down；Diamond wire silicon chip 10 passes through descaling bath 14, into
Row pickling；Again by washing two slots 15, cleaning showers are carried out to diamond wire silicon chip 10 to the second spray tube of spray up and down；Then again
By drying tank 16, using the upper and lower to the water stain of 10 surface of hot blast drying diamond wire silicon chip blown of air knife 18, blanking is entered back into
Slot 17.
Chain type roller Transmission system 19 is explained in detail now：
First transmission item is located at the top of diamond wire silicon chip 10, and the first transmission item includes the transmission along diamond wire silicon chip 10
Direction multiple upper rollers 21 arranged side by side；Second transmission item is located at the lower section of diamond wire silicon chip 10, and the second transmission item includes edge
The transmission direction of diamond wire silicon chip 10 multiple bottom rollers 22 arranged side by side.Two adjacent upper rollers in multiple upper rollers 21
It is connected by gear between 21, is connected by gear between two adjacent bottom rollers 22 in multiple bottom rollers 22.
In order to reduce the breakage rate of diamond wire silicon chip 10, the weight of upper roller 21 is less than the weight of bottom roller 22, to subtract
The small pressure to diamond wire silicon chip 10.In the present embodiment, upper roller 21 is hollow wheel, and bottom roller 22 is solid wheel.
In order to allow the less reaction in the upper surface of diamond wire silicon chip 10, and promote diamond wire silicon chip 10 lower surface it is anti-
It answers, the surface of upper roller 21 is formed with annular projection 211, and the surface of bottom roller 22 is plane；To upper roller 21 and diamond wire
The contact area of silicon chip 10 is less than the contact area of bottom roller 22 and diamond wire silicon chip 10.In the present embodiment, annular projection 211
The outer diameter of the upper roller 21 in place portion is equal to the outer diameter of bottom roller 22.Upper roller 21 because annular projection 211 setting, with Buddha's warrior attendant
The contact area of line silicon chip 10 is smaller, and the bubble on 10 surface of diamond wire silicon chip is avoided to be removed, and bottom roller 22 and diamond wire
The contact area of silicon chip 10 is big, anti-to promote so as to remove the bubble for being enriched in 10 surface of diamond wire silicon chip in reaction
It answers.
Diamond wire silicon chip 10 is immersed in texturing slot 12 and is chemically reacted, and can cause the reduction of liquid and the drop of concentration
It is low, therefore it is also provided with liquid feeding component, liquid feeding can be carried out to texturing slot 12.Liquid feeding component is described in detail below：
As shown in Fig. 3, liquid feeding component includes liquid storing barrel 4, addition box 3, the first analog quantity level sensor 41, first opens
Measure level sensor 42, the second analog quantity level sensor 32, second switch amount level sensor 33, first partition 311, the in pass
Two partition boards 312, the first feed liquor unit, the second feed liquor unit, third feed liquor unit, third pipeline 54 and return duct (do not show in figure
Go out).
Liquid storing barrel 4 is arranged in the lower section of texturing slot 12, for storing liquid and can convey liquid to making herbs into wool by pumping
Slot 12, the first feed liquor unit can to liquid storing barrel 4 carry out liquid feeding arrive preliminary liquid level, the second feed liquor unit setting addition box 3 and
Between liquid storing barrel 4, and the liquid added in box 3 can be delivered to liquid storing barrel 4 and the liquid in liquid storing barrel 4 is made to reach accurate liquid
Position, third feed liquor unit are used to carry out liquid feeding to addition box 3, and when adding the liquid level in box 3 and being higher than setting value, liquid is from third
Pipeline 54 enters liquid storing barrel 4.Return duct (not shown) is arranged between texturing slot 12 and liquid storing barrel 4, when in texturing slot 12
Liquid be more than setting value when, liquid can be back to storage from texturing slot 12 by gravity through return duct (not shown)
Liquid bucket 4.
Liquid storing barrel 4 includes suction opening 43, the first low liquid level line for exhausting.First analog quantity level sensor 41 is arranged
In liquid storing barrel 4 and for incuding the liquid level of liquid storing barrel 4, the setting of first switch amount level sensor 42 is in liquid storing barrel 4 and uses
To open feed liquor or stop feed liquor.
As shown in Fig. 3, addition box 3 is arranged in the top of liquid storing barrel 4 and stores liquid.It includes inlet to add box 3
34, overflow port 35, while adding and being additionally provided with the second low liquid level line, high liquid level line in box 3, overflow port 35 is located at high liquid level line
Top.Second analog quantity level sensor 32 is arranged in addition box 3 and can be used for detecting the height of liquid level in addition box 3,
Second switch amount level sensor 33 is arranged in addition box 3 and can be used for opening feed liquor or stop the valve switch of feed liquor.
The first analog quantity liquid level sense is influenced in order to cause the wide fluctuations of liquid level when preventing liquid from entering addition box 3
Answer the detection of device 32, liquid feeding component top of the opposite sides of inlet 34 also in addition box 3 be provided with first partition 311,
Second partition 312, first partition 311 extend along the upper and lower directions of addition box 3, lower end and the addition box 3 of second partition 312
Side wall be connected and from bottom to top towards addition box 3 inner inclination extend, between first partition 311 and second partition 312
There is gap.In the present embodiment, the lower end of second partition 312 is located at the top of the lower end of first partition 311.
As shown in Fig. 3, the first feed liquor unit includes inlet tube 51, the second valve 61 and third valve 63.Inlet tube 51
It is connected with liquid storing barrel 4, the second valve 61, which is arranged on inlet tube 51 and is sequentially connected in series with third valve 63, to be connected to.This reality
It applies in example, the second valve 61 is ball valve, and third valve 63 is pneumatic operated valve.
As shown in Fig. 3, the second feed liquor unit includes first pipe 53, the first valve 64.The one end of first pipe 53
Box 3 is connected, the other end is connected with liquid storing barrel 4 with addition, and the first valve 64 is arranged in first pipe 53.In order to realize
Accurate liquid feeding, the first valve 64 within the unit interval by liquid amount be definite value, can by control fluid infusion time come
Control the amount of fluid infusion.
As shown in Fig. 3, to include one end be connected third feed liquor unit with the inlet 34 of addition box 3 and the other end
The second pipe 52 being connected with inlet tube 51, the 4th valve 62 being arranged on second pipe 52, second pipe 52 and feed liquor
Pipe 51 is connected and junction is between the second valve 61 and third valve 63.
The one end of third pipeline 54 is connected with overflow port 35 and the other end is connected with first pipe 53, third pipe
The lower end in road 54 is located at the lower section of the first valve 64, if the 4th valve 62 or the second analog quantity level sensor 32 or the second are opened
Pass amount level sensor 33 breaks down, and when the liquid level of addition box 3 is higher than high liquid level line, liquid is flowed out through by overflow port 35
Third pipeline 54 flows to first pipe 53 and enters liquid storing barrel 4, prevents liquid from being overflowed from other positions of addition box 3.
Add the fluid infusion operation principle of box 3：
Liquid, by the second valve 61, addition box is entered into second pipe 52 from inlet tube 51 by the 4th valve 62
In 3, liquid is added to by the way that first partition 311 and second partition 312 are steady in addition box 3.When the second analog quantity liquid level incudes
Device 32 senses the liquid level in addition box 3 when be in the second low liquid level line, the control third of second switch amount level sensor 33 into
Liquid unit opens feed liquor, when the second analog quantity level sensor 32 senses that the liquid level in addition box 3 is in high liquid level line, the
Two switching value level sensors 33 control third feed liquor unit and stop feed liquor.
The fluid infusion operation principle of liquid storing barrel 4：
When the first analog quantity level sensor 41 senses that the liquid level in liquid storing barrel 4 is in the first low liquid level line, first
Switching value level sensor 42 controls the first feed liquor unit feed liquor until the first analog quantity level sensor 41 senses liquid storing barrel 4
Interior liquid level is in preliminary liquid level；
When the first analog quantity level sensor 41 senses that the liquid level in liquid storing barrel 4 is in preliminary liquid level, first switch
It measures level sensor 42 to control the first feed liquor unit stopping feed liquor and control the second feed liquor unit unlatching feed liquor, the first valve 64 is single
Position the time in by liquid amount be it is fixed, control time until liquid storing barrel 4 in liquid level reach elaborate position, stop mend
Liquid.
Because diamond wire silicon chip 10 is chemically reacted in texturing slot 12, the fluid temperature in texturing slot 12 can be with change
It learns reaction and changes to which the optimum condition of chemical reaction be not achieved, therefore be also provided with a set of temperature control system and be used for supervise
Testing temperature and for making fluid temperature be constantly in optimal reaction temperature condition, the degree in addition chemically reacted is by adjusting work
Skill parameter controls.Temperature control system is described in detail below：
As shown in Fig. 2, temperature control system includes temperature inductor 75, heater 74, heat exchanger 73, ice maker 72,
One inlet tube 83, the first outlet tube 84, the second inlet tube 81, the second outlet tube 82.
Temperature inductor 75 is arranged on liquid storing barrel 4, for detecting 4 inner liquid medicine temperature of liquid storing barrel, in the present embodiment, and temperature
Inductor 75 is highly sensitive temperature inductor.
Heater 74 is arranged on liquid storing barrel 4, for being heated to the liquid in liquid storing barrel 4.The heating side of heater
Formula can be electrical heating or be passed through deep fat realization heating in heating tube, this is not the emphasis of the utility model protection, only
It needs to realize heating function.Heater 74 includes one or more heating tubes, and in the present embodiment, heater 74 includes
Three heating tubes.Because heater 74 is arranged in liquid storing barrel 4, therefore heater 74 selects acid and alkali-resistance, heat safe material.
Heat exchanger 73 is connected with liquid storing barrel 4, for storing the liquid in 4 inner liquid medicine of liquid storing barrel and ice maker 72.Heat exchange
Device 73 include can for liquid by the first accommodating space 732, be disposed adjacent with the first accommodating space 732 and can be for ice
Liquid in machine 72 passes through to the second accommodating space 731 to the liquid cooling in the first accommodating space 732.The present embodiment
In, the second accommodating space 731 is located at the periphery of the first accommodating space 732.
Ice maker 72 is connected with heat exchanger 73 and for reducing the temperature of heat exchanger 73.
As shown in Fig. 2, the first inlet tube 83 and the first outlet tube 84 are arranged at ice maker 72 and the second accommodating space 731
Between, the first inlet tube 83 can flow to the second accommodating space 731 from ice maker 72 for liquid, and the first outlet tube 84 can be for liquid
Ice maker 72 is flowed to from the second accommodating space 731；Second inlet tube 81 and the second outlet tube 82 are arranged at the appearance of liquid storing barrel 4 and first
Between 732 between emptying, the second inlet tube 81 can flow to heat exchanger 73 for liquid from liquid storing barrel 4, and the second outlet tube 82 can be for
Liquid flows to liquid storing barrel 4 from the first accommodating space 732, forms the cycle of liquid, to reduce fluid temperature.
The operation logic of temperature control system is as follows：When temperature inductor 75 detects that fluid temperature is less than setting value,
Heater 74 is started to work, and is heated to liquid, when fluid temperature, which heats, reaches setting value, heater 74 and ice maker
72 are all stopped, and when fluid temperature is higher than setting value, ice maker 72 is started to work, and liquid passes through 731 shape of the second accommodating space
The circuit recycled at one, liquid is by the first accommodating space 732 of heat exchanger 73, then comes back to liquid storing barrel 4, to realize
The reduction of fluid temperature.
As described above, we are illustrated fully according to the objective of the utility model, but the utility model not limits to
In above-described embodiment and implementation.The range that the practitioner of correlative technology field can permit in the technological thought of the utility model
It is interior to carry out different variation and implementation.
Claims (8)
1. a kind of pre- etching device of diamond wire silicon chip, including the texturing slot (12), one slot of washing (13), the descaling bath that are arranged in order
(14), two slots of washing (15), drying tank (16), the pre- etching device of diamond wire silicon chip further includes for controlling fluid temperature
Temperature control system, the liquid storing barrel (4) for storing liquid, it is characterised in that：The temperature control system includes setting
Exist on the liquid storing barrel (4) and for detecting the temperature inductor (75) of described liquid storing barrel (4) the inner liquid medicine temperature, being arranged
On the liquid storing barrel (4) and for the liquid in the liquid storing barrel (4) is heated heater (74), with it is described
Heat exchanger (73) that liquid storing barrel (4) is connected is connected and with the heat exchanger (73) for reducing the heat exchanger
(73) ice maker (72) of temperature.
2. the pre- etching device of diamond wire silicon chip according to claim 1, it is characterised in that:The heat exchanger (73) includes
Can for liquid by the first accommodating space (732), be disposed adjacent with first accommodating space (732) and can be for
Liquid in the ice maker (72) passes through to the second accommodating space to the liquid cooling in first accommodating space
(731)。
3. the pre- etching device of diamond wire silicon chip according to claim 2, it is characterised in that:Second accommodating space
(731) it is located at the periphery of first accommodating space (732).
4. the pre- etching device of diamond wire silicon chip according to claim 2 or 3, it is characterised in that：The temperature control system
System further includes being arranged between the ice maker (72) and the heat exchanger (73) and can be for liquid from the ice maker
(72) the first inlet tube (83) in flow direction second accommodating space (731), be arranged the ice maker (72) with it is described
Heat exchanger (73) between and can be for liquid from the first of described second accommodating space (731) flow direction ice maker (72)
Outlet tube (84).
5. the pre- etching device of diamond wire silicon chip according to claim 2 or 3, it is characterised in that：The temperature control system
System further includes being arranged between the liquid storing barrel (4) and first accommodating space (732) and can be for liquid from described
Liquid storing barrel (4) the flow direction heat exchanger (73) the second inlet tube (81), be arranged the liquid storing barrel (4) with it is described
The liquid storing barrel (4) can be flowed between first accommodating space (732) and from first accommodating space (732) for liquid
The second outlet tube (82).
6. the pre- etching device of diamond wire silicon chip according to claim 1, it is characterised in that:The heater (74) includes
Heating tube.
7. the pre- etching device of diamond wire silicon chip according to claim 6, it is characterised in that:The heating tube be one or
More of person.
8. the pre- etching device of diamond wire silicon chip according to claim 1 or 6, it is characterised in that:The heater (74)
Select acid and alkali-resistance, heat safe material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820511987.7U CN207938620U (en) | 2018-04-11 | 2018-04-11 | A kind of pre- etching device of diamond wire silicon chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820511987.7U CN207938620U (en) | 2018-04-11 | 2018-04-11 | A kind of pre- etching device of diamond wire silicon chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207938620U true CN207938620U (en) | 2018-10-02 |
Family
ID=63656573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820511987.7U Active CN207938620U (en) | 2018-04-11 | 2018-04-11 | A kind of pre- etching device of diamond wire silicon chip |
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| CN (1) | CN207938620U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109768004A (en) * | 2018-12-29 | 2019-05-17 | 无锡琨圣科技有限公司 | A kind of system that reflectivity self-regulation produces black silicon product |
-
2018
- 2018-04-11 CN CN201820511987.7U patent/CN207938620U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109768004A (en) * | 2018-12-29 | 2019-05-17 | 无锡琨圣科技有限公司 | A kind of system that reflectivity self-regulation produces black silicon product |
| CN109768004B (en) * | 2018-12-29 | 2021-01-05 | 无锡琨圣智能装备股份有限公司 | System for producing black silicon product through reflectivity self-adjustment |
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