CN205959963U - Single crystal making herbs into wool cleaning machine - Google Patents

Single crystal making herbs into wool cleaning machine Download PDF

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Publication number
CN205959963U
CN205959963U CN201620990697.6U CN201620990697U CN205959963U CN 205959963 U CN205959963 U CN 205959963U CN 201620990697 U CN201620990697 U CN 201620990697U CN 205959963 U CN205959963 U CN 205959963U
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China
Prior art keywords
cell body
cleaning
gaily decorated
decorated basket
cleaning machine
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CN201620990697.6U
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Chinese (zh)
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姜涛
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SUZHOU JUKING TECHNOLOGY Co Ltd
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SUZHOU JUKING TECHNOLOGY Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The utility model discloses a single crystal making herbs into wool cleaning machine, including wasing the body, it includes three box to wash the body, it is equipped with the feed inlet to wash the body front end, it is equipped with the discharge gate to wash the body rear end, feed inlet and discharge gate position are equipped with the conveyer belt respectively, the conveyer belt top is equipped with a plurality of manipulators that are used for snatching the material, it is equipped with the air exit to cover on the washing body, rinse this internal making herbs into wool groove that still is equipped with, the descaling bath, the wash bowl, dehydration tank and drying groove in advance, every cell body below is equipped with heating device and temperature sensor, rinse this internal still be equipped with link to each other with every cell body join in marriage liquid solution replenishing system. The utility model discloses be favorable to realizing the full self - cleaning of single crystal making herbs into wool, can monitor and manage whole cleaning process, adopt the box structure, be applicable to the industrial production.

Description

A kind of monocrystalline etching cleaning machine
Technical field
This utility model is related to monocrystalline making herbs into wool cleaning equipment, particularly a kind of monocrystalline etching cleaning machine.
Background technology
Silicon chip is needing to be carried out after a series of processor, and the purpose of cleaning is intended to eliminate absorption in silicon Each pollutant on piece surface, and manufacture the suede structure that can reduce surface sunlight reflection, and the clean level cleaned is straight Connect the yield rate affecting cell piece and reliability.Making herbs into wool is first technique manufacturing crystal silicon battery, also known as " surface texture Change ".Effectively suede structure makes incident illumination in silicon chip surface multiple reflections and refraction, increased the absorption of light, reduces anti- Penetrate rate, be favorably improved the performance of battery.
Number of patent application:201410267231.9 disclosing a kind of cleaning method of fine-hair maring using monocrystalline silicon slice, by monocrystalline system Cleaned twice with the nitration mixture cleaning solution of Fluohydric acid. salt adding acid after floss, the acid cleaning of first time Fluohydric acid. salt adding can effectively be gone Except principal metal impurities such as sodium ion, potassium ions, and remove the silica film of silicon chip surface;Second Fluohydric acid. salt adding acid Cleaning further cleaning silicon chip superficial layer metal impurities (metal impurities of residual after cleaning for the first time), in addition remove silicon chip table The silicon dioxide layer in face, reaches effective dehydrating effect.Meanwhile, this utility model also discloses a kind of monocrystalline etching device, leads to Cross and be simultaneously introduced hydrochloric acid pipeline and Fluohydric acid. pipeline in hydrochloric acid trough, hydrofluoric acid groove is simultaneously introduced Fluohydric acid. pipeline and hydrochloric acid Pipeline;Thus the mixed solution of hydrochloric acid and Fluohydric acid. can easily be obtained, conveniently carry out the cleaning side of above-mentioned fine-hair maring using monocrystalline silicon slice Method.
Above-mentioned existing patented technology cannot merely provide what liquid to be carried out the silicon chip after monocrystalline making herbs into wool using, but Do not there is provided corresponding equipment it is impossible to realize automatization's cleaning.
Utility model content
The purpose of this utility model is to overcome the deficiencies in the prior art, provides a kind of monocrystalline etching cleaning machine, this practicality The new automatic washing being advantageously implemented monocrystalline making herbs into wool, can be monitored to whole cleaning process and manage, using casing knot Structure is it is adaptable to industrialized production.
The purpose of this utility model is achieved through the following technical solutions:A kind of monocrystalline etching cleaning machine, including clear Wash body, cleaning body includes three casings, cleaning body front end is provided with charging aperture, cleaning body rear end is provided with discharging opening, enters Material mouth and discharging opening position are respectively equipped with conveyer belt, are provided with multiple mechanical hands for capturing material above conveyer belt, and cleaning is originally Body side is provided with for the regulation and control intrinsic cleaning process of cleaning, and cleaning process is carried out with the switch board of monitor in real time, cleaning Housing cover is provided with exhaust outlet, and cleaning is originally additionally provided with texturing slot, descaling bath, rinsing bowl, predrainage groove and drying tank, often in vivo Be provided with heater and temperature sensor below individual cell body, cleaning this be additionally provided with vivo be connected with each cell body join liquid fluid infusion system System.
Preferably, 3 mechanical hands at charging aperture are provided with spray equipment.
Preferably, texturing slot include making herbs into wool cell body, automatic cover, overfall, pumping suction inlet, heater, pumping discharge opening, Pump cycle device and the gaily decorated basket, automatic cover is arranged on making herbs into wool cell body top, is provided with overfall below automatic cover, and pumping suction inlet sets Outside overfall, the gaily decorated basket, in texturing slot body, is provided with heater below the gaily decorated basket, be provided with pumping discharge opening below heater, Pump cycle device is connected outside texturing slot and respectively with pumping suction inlet and pumping discharge opening.
Preferably, descaling bath includes pickling cell body, automatic cover, overfall, pumping suction inlet, pumping discharge opening, pumping follow Loop device and the gaily decorated basket, are provided with the gaily decorated basket in pickling cell body, gaily decorated basket bottom is provided with homogenizing plate and bubbling, and pickling cell body both sides are provided with overflow Mouthful.
Preferably, potcher includes rinsing cell body and the gaily decorated basket in potcher body, gaily decorated basket bottom be provided with homogenizing plate and Bubbling, rinsing cell body side is provided with overflow discharge mouth, and overflow discharge mouth is provided with conductivity meter, and potcher is additionally provided with vitro into water Control valve.
Preferably, predrainage groove includes predrainage cell body and the motor above predrainage cell body and push-pull mechanism, It is provided with the gaily decorated basket, gaily decorated basket bottom is provided with heater in predrainage cell body.
Preferably, drying tank includes drying cell body and the gaily decorated basket in drying tank body, and the side of the gaily decorated basket is provided with dividing plate, every It is provided with quartz heating-pipe between plate and drying cell body, below quartz heating-pipe, is provided with blower fan, dry and be provided with automatic cover above cell body, Dry cell body bottom and be provided with drainage mechanism.
The beneficial effects of the utility model are:
(1) using multiple function cell bodies, monocrystalline making herbs into wool is carried out, cleaning is simple, degree of cleaning is high, is conducive to The drawbacks of avoid the silicon dioxide layer that tradition cannot thoroughly remove product surface;
(2) whole cleaning process can be monitored and early warning, the process after being conducive to producing is reviewed and quality is fine Change management and control;
(3) carry out feature cleaning using multiple cell bodies, structure is simple, easy to use,
(4) equipment operation safety and stability, high degree of automation, intelligence degree is strong, is conducive to saving cost of labor and section About production cost is it is adaptable to large industrialized production and application.
Brief description
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the structural representation of this utility model texturing slot;
Fig. 3 is the structural representation of this utility model descaling bath;
Fig. 4 is the structural representation of this utility model potcher;
Fig. 5 is the structural representation of this utility model predrainage groove;
Fig. 6 is the structural representation of this utility model drying tank;
In figure, 10- cleans body, 20- switch board, 101- charging aperture, 102- discharging opening, 301- automatic cover, 302- overflow Mouthful, 303- pumping suction inlet, 304- heater, 305- pump cycle device, the 306- gaily decorated basket, 307- pumping discharge opening, 308- is equal Stream plate and bubbling, 309- conductivity meter, 310- overflow discharge mouth, 311- motor, 312- push-pull mechanism, 313- dividing plate, 314- stone English heating tube, 315- dividing plate return air inlet, 316- blower fan, 317- drainage mechanism.
Specific embodiment
Below in conjunction with the accompanying drawings the technical solution of the utility model is described in further detail, but protection domain of the present utility model It is not limited to described below.
As shown in figure 1, a kind of monocrystalline etching cleaning machine, including cleaning body 10, cleaning body 10 includes three casings, clearly Wash body 10 front end and be provided with charging aperture 101, cleaning body 10 rear end is provided with discharging opening 102, charging aperture 101 and discharging opening 102 Put and be respectively equipped with conveyer belt, above conveyer belt, be provided with multiple mechanical hands for capturing material, cleaning body 10 side is provided with use Cleaning process in regulation and control cleaning body 10, and cleaning process is carried out with the switch board 20 of monitor in real time, on cleaning body 10 Cover and be provided with exhaust outlet, in cleaning body 10, be additionally provided with texturing slot, descaling bath, rinsing bowl, predrainage groove and drying tank, each groove Be provided with heater and temperature sensor below body, be additionally provided with cleaning body 10 be connected with each cell body join liquid fluid infusion system System.
It is provided with six mechanical hands in this utility model, mechanical hand moves above conveyer belt or cell body, and press technique Flow process order carries out capturing the gaily decorated basket.By the motor control located at cleaning body side, mechanical hand enables for the operation of mechanical hand Under, the movement of left and right directions, mobile steadily, extract the gaily decorated basket and no rock.Mechanical hand extracts during the gaily decorated basket so that the gaily decorated basket is in adjacent two grooves The air exposure time between body is 11s.Further, 3 mechanical hands at charging aperture are provided with spray equipment.
In this utility model, as shown in Fig. 2 texturing slot includes making herbs into wool cell body, automatic cover 301, overfall 302, pumping suction Entrance 303, heater 304, pumping discharge opening 307, pump cycle device 305 and the gaily decorated basket 306, automatic cover 301 is arranged on making herbs into wool Cell body top, is provided with overfall 302 below automatic cover 301, outside overfall 302, the gaily decorated basket 306 sets pumping suction inlet 303 In texturing slot body, it is provided with heater 304 below the gaily decorated basket 306, below heater 304, is provided with pumping discharge opening 307, pump cycle Device 305 is connected outside texturing slot and respectively with pumping suction inlet 303 and pumping discharge opening 307.
In this utility model, as shown in figure 3, descaling bath includes pickling cell body, automatic cover 301, overfall 302, pumping suction Entrance 303, pumping discharge opening 307, pump cycle device 305 and the gaily decorated basket 306, are provided with the gaily decorated basket 306, the gaily decorated basket 306 in pickling cell body Bottom is provided with homogenizing plate and bubbling 308, and pickling cell body both sides are provided with overfall 302.
Preferably, as shown in figure 4, potcher includes rinsing cell body, automatic cover 301, overfall 302, pumping suction inlet 303rd, heater 304, pumping discharge opening 307, pump cycle device 305 and the gaily decorated basket 306, the gaily decorated basket 306 bottom be provided with homogenizing plate and Bubbling 308, rinsing cell body side is provided with overflow discharge mouth 310, and overflow discharge mouth 310 is provided with conductivity meter 309, rinses cell body It is additionally provided with outward water inlet control valve.
In this utility model, as shown in figure 5, predrainage groove includes predrainage cell body and the electricity above predrainage cell body Machine 311 and push-pull mechanism 312, are provided with the gaily decorated basket 306 in predrainage cell body, the gaily decorated basket 306 bottom is provided with heater.
In this utility model, as shown in fig. 6, drying tank includes drying cell body and the gaily decorated basket in drying tank body 306, flower The side of basket 306 is provided with dividing plate 313, is provided with quartz heating-pipe 314, under quartz heating-pipe 314 between dividing plate 313 and drying cell body Side is provided with blower fan 316, is provided with dividing plate return air inlet 315 between dividing plate 313 and cell body bottom, dries and is provided with automatic cover above cell body 301, dry cell body bottom and be provided with drainage mechanism 317.
In the present embodiment, it is set in the mistake processing through texturing slot, descaling bath, rinsing bowl, predrainage groove and drying tank Cheng Zhong, also include real-time monitoring liquid level, groove lid state, mechanical hand put in place state, valve start and stop state, heater start and stop state, Acid-base Gas content, air pressure value and each cell body temperature data.
The present embodiment is carried out to monocrystalline making herbs into wool using multiple function cell bodies, and cleaning is simple, and degree of cleaning is high, has The drawbacks of beneficial to the silicon dioxide layer avoiding tradition cannot thoroughly remove product surface, meanwhile, the equipment operation of full-automation, peace Entirely stable, be conducive to saving cost of labor and save production cost it is adaptable to large industrialized production and application.
Embodiment described above only have expressed specific embodiment of the present utility model, and its description is more concrete and detailed, But therefore can not be interpreted as the restriction to this utility model the scope of the claims.It should be pointed out that it is common for this area For technical staff, without departing from the concept of the premise utility, some deformation can also be made and improve, these all belong to In protection domain of the present utility model.

Claims (7)

1. it is characterised in that including cleaning body, cleaning body includes three casings to a kind of monocrystalline etching cleaning machine, and cleaning is originally Body front end is provided with charging aperture, and cleaning body rear end is provided with discharging opening, and charging aperture and discharging opening position are respectively equipped with conveyer belt, transmission It is provided with multiple mechanical hands for capturing material, cleaning body side is provided with to be cleaned for regulation and control cleaning is intrinsic above band Journey, and cleaning process is carried out with the switch board of monitor in real time, cleaning housing cover is provided with exhaust outlet, and cleaning is originally additionally provided with vivo Texturing slot, descaling bath, rinsing bowl, predrainage groove and drying tank, are provided with heater and temperature sensor, clearly below each cell body Wash this be additionally provided with vivo be connected with each cell body join liquid fluid infusion system.
2. according to claim 1 a kind of monocrystalline etching cleaning machine it is characterised in that 3 mechanical hands at charging aperture Spray equipment is installed.
3. according to claim 1 a kind of monocrystalline etching cleaning machine it is characterised in that texturing slot includes making herbs into wool cell body, automatically Lid, overfall, pumping suction inlet, heater, pumping discharge opening, pump cycle device and the gaily decorated basket, automatic cover is arranged on texturing slot Body top, is provided with overfall below automatic cover, pumping suction inlet outside overfall, the gaily decorated basket in texturing slot body, the gaily decorated basket Lower section is provided with heater, is provided with pumping discharge opening below heater, pump cycle device outside texturing slot and respectively with pumping Suction inlet is connected with pumping discharge opening.
4. according to claim 1 a kind of monocrystalline etching cleaning machine it is characterised in that descaling bath includes pickling cell body, automatically Lid, overfall, pumping suction inlet, pumping discharge opening, pump cycle device and the gaily decorated basket, are provided with the gaily decorated basket, gaily decorated basket bottom in pickling cell body Portion is provided with homogenizing plate and bubbling, and pickling cell body both sides are provided with overfall.
5. according to claim 1 a kind of monocrystalline etching cleaning machine it is characterised in that potcher include rinse cell body and located at The gaily decorated basket in potcher body, gaily decorated basket bottom is provided with homogenizing plate and bubbling, and rinsing cell body side is provided with overflow discharge mouth, overflow discharge Mouth is provided with conductivity meter, and potcher is additionally provided with water inlet control valve in vitro.
6. according to claim 1 a kind of monocrystalline etching cleaning machine it is characterised in that predrainage groove include predrainage cell body and Motor above predrainage cell body and push-pull mechanism, are provided with the gaily decorated basket in predrainage cell body, gaily decorated basket bottom is provided with heater.
7. according to claim 1 a kind of monocrystalline etching cleaning machine it is characterised in that drying tank include dry cell body and located at The gaily decorated basket in drying tank body, the side of the gaily decorated basket is provided with dividing plate, is provided with quartz heating-pipe, quartz heating between dividing plate and drying cell body It is provided with blower fan below pipe, dries and be provided with automatic cover above cell body, dry cell body bottom and be provided with drainage mechanism.
CN201620990697.6U 2016-08-30 2016-08-30 Single crystal making herbs into wool cleaning machine Active CN205959963U (en)

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Application Number Priority Date Filing Date Title
CN201620990697.6U CN205959963U (en) 2016-08-30 2016-08-30 Single crystal making herbs into wool cleaning machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620990697.6U CN205959963U (en) 2016-08-30 2016-08-30 Single crystal making herbs into wool cleaning machine

Publications (1)

Publication Number Publication Date
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106206381A (en) * 2016-08-30 2016-12-07 苏州聚晶科技有限公司 A kind of monocrystalline etching cleaning machine and process thereof
CN112387646A (en) * 2021-01-20 2021-02-23 常州江苏大学工程技术研究院 Anti-overflow silicon chip cleaning equipment
CN112387647A (en) * 2021-01-20 2021-02-23 常州江苏大学工程技术研究院 Silicon wafer cleaning method
CN114653705A (en) * 2022-03-31 2022-06-24 广东高景太阳能科技有限公司 Silicon chip automatic cleaning machine with monitoring function

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106206381A (en) * 2016-08-30 2016-12-07 苏州聚晶科技有限公司 A kind of monocrystalline etching cleaning machine and process thereof
CN112387646A (en) * 2021-01-20 2021-02-23 常州江苏大学工程技术研究院 Anti-overflow silicon chip cleaning equipment
CN112387647A (en) * 2021-01-20 2021-02-23 常州江苏大学工程技术研究院 Silicon wafer cleaning method
CN112387646B (en) * 2021-01-20 2021-05-18 常州江苏大学工程技术研究院 Anti-overflow silicon chip cleaning equipment
CN114653705A (en) * 2022-03-31 2022-06-24 广东高景太阳能科技有限公司 Silicon chip automatic cleaning machine with monitoring function

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