CN209969005U - CdTe thin film battery substrate cleaning equipment - Google Patents

CdTe thin film battery substrate cleaning equipment Download PDF

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Publication number
CN209969005U
CN209969005U CN201920329096.4U CN201920329096U CN209969005U CN 209969005 U CN209969005 U CN 209969005U CN 201920329096 U CN201920329096 U CN 201920329096U CN 209969005 U CN209969005 U CN 209969005U
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storage tank
pure water
liquid storage
liquid
area
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CN201920329096.4U
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Inventor
陶奎任
王大鹏
梅芳
潘智林
孙鹏超
黄胜源
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Zhongshan Ruike New Energy Co Ltd
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Zhongshan Ruike New Energy Co Ltd
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Abstract

The utility model discloses a CdTe thin film battery substrate cleaning device, which comprises a liquid medicine washing area, a pure water washing area, a drying area and a conveying device, wherein the liquid medicine washing area is provided with a liquid medicine washing device; the pure water washing area is provided with a pure water washing device; the drying area is provided with a drying device; the conveying device is used for driving the substrate to sequentially pass through the liquid medicine washing area, the pure water washing area and the drying area. The substrate is cleaned in a running water mode, after the substrate is washed in a liquid medicine washing area by using liquid medicine with an oxidizing effect, the surface of the substrate has higher cleanliness, the hydrophilicity of the surface of the substrate is improved due to the oxidizing effect, the uniformity of the distribution of cadmium chloride aqueous solution on the surface of a film in the subsequent process is facilitated, and the conversion efficiency of the battery is improved.

Description

CdTe thin film battery substrate cleaning equipment
Technical Field
The utility model relates to a battery production facility field, in particular to CdTe film battery substrate cleaning equipment.
Background
The existing process, the production of CdTe thin film battery, first plates CdS on the conductive glass substrate, then plates CdTe. Because the substrate is in a high-temperature state after coating, the substrate is easily influenced by factors such as environmental humidity, dust particles and the like in a cooling process, so that the surface cleanliness is poor, particularly, the substrate is poor in surface cleanliness due to the influence of the environment on a chip which is placed for a long time after coating, and the surface hydrophilicity is poor. In the subsequent process, the cadmium chloride solution is added, so that the cadmium chloride solution is not uniformly distributed on the surface of the substrate due to poor hydrophilicity, and the uniformity of the distribution of the cadmium chloride affects the conversion efficiency of the battery. Therefore, how to overcome the problems in the prior art is the key to obtain large-area high conversion efficiency of CdTe solar cells.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to solve one of the technical problem that exists among the prior art at least, provide a CdTe film battery substrate cleaning equipment.
The technical scheme adopted for solving the technical problems is as follows: a CdTe thin film battery substrate cleaning apparatus, comprising: the liquid medicine flushing area is provided with a liquid medicine flushing device; the pure water washing area is provided with a pure water washing device; a drying zone provided with a drying device; and the conveying device is used for driving the substrate to sequentially pass through the liquid medicine washing area, the pure water washing area and the drying area.
Preferably, a first liquid storage tank is arranged at the bottom of the liquid medicine flushing area, and a first conveying device capable of conveying liquid in the first liquid storage tank to the liquid medicine flushing device is arranged between the first liquid storage tank and the liquid medicine flushing device.
Preferably, the first conveying device comprises a first pipeline, and the first pipeline is provided with a circulating pump, a filtering device, a flow regulating valve and a pressure detection device.
Preferably, the cleaning device further comprises a second liquid storage tank and a second conveying device capable of conveying the liquid in the second liquid storage tank to the first liquid storage tank, and the first liquid storage tank is internally provided with a concentration detection device.
Preferably, a heating device and a temperature detection device are arranged on the first liquid storage tank.
Further preferably, both the chemical solution rinsing device and the pure water rinsing device include a shower head.
Further preferably, the device further comprises a third conveying device, a fourth conveying device, a third liquid storage tank and a fourth liquid storage tank, wherein the third liquid storage tank and the fourth liquid storage tank are located at the bottom of the pure water flushing area, the pure water flushing devices are divided into two groups, namely a first pure water flushing device and a second pure water flushing device, the third conveying device can convey liquid in the third liquid storage tank to the first pure water flushing device, the fourth conveying device can convey liquid in the fourth liquid storage tank to the second pure water flushing device, and an overflow port capable of enabling liquid in the fourth liquid storage tank to overflow to the third liquid storage tank is arranged between the third liquid storage tank and the fourth liquid storage tank.
Further preferably, the third reservoir is in communication with a waste conduit via an overflow channel.
Further preferably, a first wind cutting device is arranged between the two groups of pure water flushing devices.
Further preferably, a spacer is arranged between the liquid medicine washing area and the pure water washing area, and a second wind cutting device is arranged in the spacer.
The cleaning equipment in the technical scheme at least has one of the following advantages or beneficial effects: the utility model discloses a continuous-flow type washs the base plate, uses the liquid medicine that has the oxidizing action to wash the processing back in the liquid medicine flushing zone, and the substrate surface has had higher cleanliness factor, again because of the oxidizing action, the hydrophilicity on substrate surface has obtained the improvement, is favorable to the back process to add the homogeneity of cadmium chloride aqueous solution at film surface distribution, has improved the conversion efficiency of battery. The technical scheme of the equipment is also suitable for cleaning large-area CdTe thin film solar cell substrates.
Drawings
The invention will be further described with reference to the following figures and examples:
FIG. 1 is a schematic view of the present invention;
fig. 2 is a schematic view of the first transfer device and the first reservoir.
Detailed Description
Referring to fig. 1, the utility model relates to a CdTe thin film battery substrate cleaning device, which comprises a liquid medicine washing area 10, a pure water washing area 20, a drying area 30 and a conveying device 40, wherein the liquid medicine washing area 10 is provided with a liquid medicine washing device 11; the pure water washing section 20 is provided with a pure water washing device 21; the drying zone 30 is provided with a drying device 31; the transfer device 40 drives the substrate 50 sequentially through the chemical rinsing zone 10, the pure water rinsing zone 20, and the drying zone 30.
The utility model discloses a running water formula washs base plate 50, uses the liquid medicine that has the oxidizing action to wash the processing back in liquid medicine flushing zone 10, and base plate 50 surface has had higher cleanliness factor, and because of the oxidizing action again, the hydrophilicity on base plate 50 surface has obtained the improvement, is favorable to the back process to add the homogeneity of cadmium chloride aqueous solution at film surface distribution, has improved the conversion efficiency of battery. The method is also suitable for cleaning the large-area CdTe thin film solar cell substrate 50.
In some embodiments, the first embodiment of the transfer device 40 is that the transfer device 40 is configured as a roller transfer device 40, and the substrate 50 is transferred by rollers to pass the substrate 50 through the chemical rinsing region 10, the pure water rinsing region 20 and the drying region 30 in sequence; in the second embodiment of the conveying device 40, the conveying device 40 is configured as a chain to drive a main transmission shaft, the main transmission shaft drives the conveying device 40 through a gear, the conveying surface is a flat surface, and the roller is driven by the transmission shaft to enable the substrate 50 placed on the conveying surface to sequentially pass through the liquid medicine washing area 10, the pure water washing area 20 and the drying area 30.
In the present invention, the drying device 31 is a fan capable of drying the substrate 50 with hot air, and the drying area 30 is provided with an air knife 32; in addition, the drying device 31 is provided as a dryer to dry the substrate 50.
Referring to fig. 2, a first reservoir 12 is disposed at the bottom of the chemical solution flushing area 10, and a first conveying device capable of conveying the liquid in the first reservoir 12 to the chemical solution flushing device 11 is disposed between the first reservoir 12 and the chemical solution flushing device 11. The first conveying device comprises a first pipeline 121, and a circulating pump 122, a filtering device 123, a flow regulating valve 124 and a pressure detection device 125 are arranged on the first pipeline 121. The first reservoir 12 is used for storing the process recipe liquid medicine, pumping up a certain water pressure by the circulating pump 122 to deliver the liquid medicine to the liquid medicine rinsing device 11, and then the liquid medicine rinsing device 11 rinses the upper and lower surfaces of the substrate 50.
As shown in fig. 1 and fig. 2, in the present invention, the cleaning apparatus further includes a second liquid storage tank 13 and a second conveying device capable of conveying the liquid in the second liquid storage tank 13 to the first liquid storage tank 12, and a concentration detecting device is disposed in the first liquid storage tank 12. The second liquid storage tank 13 is used for storing chemical liquid, the substrate 50 is washed in the medicine washing area by using the process formula liquid medicine, the concentration value of the stored process formula liquid medicine is detected by a concentration detection device arranged in the first liquid storage tank 12, and the chemical liquid in the second liquid storage tank 13 is conveyed to the first liquid storage tank 12 by a second conveying device, so that the proportion of the traditional Chinese medicine liquid in the process operation is kept in a certain range.
The second conveying device includes a second pipe 131 disposed between the first reservoir 12 and the second reservoir 13, and an automatic liquid adding device 132 disposed on the second pipe.
The utility model discloses in, cleaning equipment still advances the piece inductor and the counter of board quantity including being used for monitoring base plate 50, advances the chemical addition amount that piece quantity set for interpolation in the first reservoir 12 through base plate 50, by automatic liquid feeding device automatic interpolation, further guarantees the formula proportion in certain extent.
A heating device 126 and a temperature detection device are provided on the first reservoir 12. The temperature of the liquid medicine in the first reservoir 12 is detected by the temperature detection device so as to be heated by the heating device 126 in time, and the heating device 126 is an infrared heating device, a resistance heating device, or the like.
In the present invention, both the liquid chemical flushing device 11 and the pure water flushing device 21 include showerheads.
The utility model discloses in, still include third conveyor, fourth conveyor and be located third reservoir 22 and fourth reservoir 23 of pure water flushing area 20 bottoms, the quantity of pure water flushing device 21 is two sets of, be first pure water washing unit and second pure water flushing device respectively, third conveyor can carry the liquid in the third reservoir 22 to first pure water flushing device, fourth conveyor can carry the liquid in the fourth reservoir 23 to second pure water flushing device, be provided with the overflow mouth that can overflow the liquid in the fourth reservoir 23 to third reservoir 22 between third reservoir 22 and the fourth reservoir 23.
When the substrate 50 passes through the second pure water rinsing device, the liquid rinsed by the second pure water rinsing device from the substrate 50 flows back to the third liquid storage tank 22, and the second pure water rinsing device corresponds to the fourth liquid storage tank 23.
The third reservoir 22 and the fourth reservoir 23 are used for storing pure water, and the pure water in the fourth reservoir 23 overflows the third reservoir 22 and is continuously replenished during the process operation.
The third conveying device comprises a third pipeline, and a circulating pump 122, a filtering device 123, a flow regulating valve 124 and a pressure detection device 125 which are arranged on the third pipeline. The fourth conveying device comprises a fourth pipeline, and a circulating pump 122, a filtering device 123, a flow regulating valve 124 and a pressure detecting device 125 which are arranged in the fourth pipeline.
The third reservoir 22 is in communication with a waste conduit via an overflow passage. The excess pure water in the third reservoir 22 overflows to the waste water pipe.
A first wind cutting device 61 is arranged between the two groups of pure water washing devices 21. The interchange or overflow of the liquid between the two sets of pure water flushers 21 is reduced.
A spacer 70 is provided between the chemical solution rinsing zone 10 and the pure water rinsing zone 20, and a second air-cutting device 71 is provided in the spacer 70. The exchange or overflow of the liquids in the chemical rinsing region 10 and the pure water rinsing region 20 is reduced, and the cleanliness of the substrate 50 is further improved.
The utility model discloses a theory of operation: the transfer device 40 drives the substrate 50 sequentially through the chemical solution rinsing zone 10, the pure water rinsing zone 20, and the drying zone 30, and after the substrate 50 is rinsed by the chemical solution shower head and the pure water shower head, the substrate 50 is dried by the drying device 31.
The above embodiments are merely preferred embodiments of the present invention, and other embodiments are also possible. Equivalent modifications or substitutions may be made by those skilled in the art without departing from the spirit of the invention, and such equivalent modifications or substitutions are intended to be included within the scope of the claims set forth herein.

Claims (10)

1. A CdTe thin film battery substrate cleaning device is characterized by comprising:
a liquid medicine washing area (10), wherein the liquid medicine washing area (10) is provided with a liquid medicine washing device (11);
a pure water rinsing area (20), wherein the pure water rinsing area (20) is provided with a pure water rinsing device (21);
a drying zone (30), the drying zone (30) being provided with a drying device (31);
a conveying device (40), wherein the conveying device (40) is used for driving the substrate (50) to sequentially pass through the liquid medicine washing area (10), the pure water washing area (20) and the drying area (30).
2. The CdTe thin film battery substrate cleaning device as defined in claim 1, wherein: a first liquid storage tank (12) is arranged at the bottom of the liquid medicine flushing area (10), and a first conveying device capable of conveying liquid in the first liquid storage tank (12) to the liquid medicine flushing device (11) is arranged between the first liquid storage tank (12) and the liquid medicine flushing device (11).
3. The CdTe thin film battery substrate cleaning device as defined in claim 2, wherein: the first conveying device comprises a first pipeline (121), and a circulating pump (122), a filtering device (123), a flow regulating valve (124) and a pressure detection device (125) are arranged on the first pipeline (121).
4. The CdTe thin film battery substrate cleaning device as defined in claim 2, wherein: the cleaning equipment further comprises a second liquid storage tank (13) and a second conveying device which can convey liquid in the second liquid storage tank (13) to the first liquid storage tank (12), and a concentration detection device is arranged in the first liquid storage tank (12).
5. The CdTe thin film battery substrate cleaning device as defined in claim 2, wherein: the first liquid storage tank (12) is provided with a heating device (126) and a temperature detection device.
6. The CdTe thin film battery substrate cleaning device as defined in claim 1, wherein: the liquid medicine washing device (11) and the pure water washing device (21) both comprise spray heads.
7. The CdTe thin film battery substrate cleaning device as defined in claim 1, wherein: the device is characterized by further comprising a third conveying device, a fourth conveying device, a third liquid storage tank (22) and a fourth liquid storage tank (23), wherein the third liquid storage tank (22) and the fourth liquid storage tank (23) are located at the bottom of the pure water flushing area (20), the pure water flushing devices (21) are two groups and are respectively a first pure water flushing device and a second pure water flushing device, the third conveying device can convey liquid in the third liquid storage tank (22) to the first pure water flushing device, the fourth conveying device can convey liquid in the fourth liquid storage tank (23) to the second pure water flushing device, and an overflow port capable of enabling liquid in the fourth liquid storage tank (23) to overflow to the third liquid storage tank (22) is arranged between the third liquid storage tank (22) and the fourth liquid storage tank (23).
8. The CdTe thin film battery substrate cleaning device of claim 7, wherein: the third reservoir (22) is in communication with a waste conduit via an overflow passage.
9. The CdTe thin film battery substrate cleaning device of claim 7, wherein: a first wind cutting device (61) is arranged between the two groups of pure water flushing devices (21).
10. The CdTe thin film battery substrate cleaning device as defined in claim 1, wherein: an interval area (70) is arranged between the liquid medicine washing area (10) and the pure water washing area (20), and a second wind cutting device (71) is arranged in the interval area (70).
CN201920329096.4U 2019-03-14 2019-03-14 CdTe thin film battery substrate cleaning equipment Active CN209969005U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920329096.4U CN209969005U (en) 2019-03-14 2019-03-14 CdTe thin film battery substrate cleaning equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920329096.4U CN209969005U (en) 2019-03-14 2019-03-14 CdTe thin film battery substrate cleaning equipment

Publications (1)

Publication Number Publication Date
CN209969005U true CN209969005U (en) 2020-01-21

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Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112750735A (en) * 2020-12-31 2021-05-04 阳光中科(福建)能源股份有限公司 Perovskite solar cell FTO base belt cleaning device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112750735A (en) * 2020-12-31 2021-05-04 阳光中科(福建)能源股份有限公司 Perovskite solar cell FTO base belt cleaning device

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