CN207924121U - A kind of detection calibration plate for signal acquiring board - Google Patents
A kind of detection calibration plate for signal acquiring board Download PDFInfo
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- CN207924121U CN207924121U CN201820200675.4U CN201820200675U CN207924121U CN 207924121 U CN207924121 U CN 207924121U CN 201820200675 U CN201820200675 U CN 201820200675U CN 207924121 U CN207924121 U CN 207924121U
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- calibration plate
- analog switch
- detection calibration
- signal acquiring
- acquiring board
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Abstract
The utility model provides a kind of detection calibration plate for signal acquiring board, including detection calibration plate, the detection calibration plate includes simulation socket connector, variable gain amplifying unit, electric motor units, analog switch array, high precision DC power supply and digital socket connector, the simulation socket connector respectively with electric motor units, analog switch array, variable gain amplifying unit is electrically connected, the analog switch array respectively with variable gain amplifying unit, high precision DC power supply is electrically connected, it is described number socket connector respectively with electric motor units, analog switch array, high precision DC power supply and the electrical connection of variable gain amplifying unit.The signal acquisition on-board circuitry function of calibration to be tested is utilized in this detection calibration plate, and addition detection circuit is not had on detection calibration plate, simplifies detection calibration plate.In calibration signal collection plate signal source unit, small signal has passed through the high-precision amplifying on detection calibration plate, and re-test after amplification improves precision.
Description
Technical field
The utility model is related to collection plate testing field more particularly to a kind of detection calibration plates for signal acquiring board.
Background technology
There are multiple operational amplifier chips on collection plate to realize signal to the conversion between ADC chips.Due to amplifier
Chip characteristics and peripheral resistance trueness error, there are the deviations that car following-theory designs for actual circuit.If to this inclined
Difference is not calibrated, then can substantially reduce the precision of collection plate.Such as op-amp gain error caused by resistance error, make acquisition
There is precision problem in the exchange peak-to-peak value of card test signal.The presence of parasitic capacitance causes the amplitude of signal to decline with frequency
Subtract.The zero bias of amplifier itself cause capture card test direct current mistake occur.The conversion slope error of ADC itself can then make acquisition
It can all go wrong when the AC and DC of card test signal.
Calibration for this circuit error, there are two types of current general ways, is put one is high-precision operation is selected
Big device, high-precision adc and precision resister can improve precision in this way, but bring the significantly promotion of cost.Another kind is
With variable resistance capacitor, gain, zero bias and the compensating electric capacity of circuit manually are adjusted, it is time-consuming and laborious in this way, and due to
The error manually read, calibration effect is nor highly desirable.Therefore, researching and developing a kind of detection calibration plate for signal acquiring board is
A urgent problem to be solved.
Invention content
The utility model will solve the above technical problem, provide a kind of detection calibration plate for signal acquiring board.
In order to solve the above technical problems, the technical solution adopted in the utility model is：
A kind of detection calibration plate for signal acquiring board, including detection calibration plate, the detection calibration plate include simulation
Socket connector, variable gain amplifying unit, electric motor units, analog switch array, high precision DC power supply and digital socket connect
Device is connect, the simulation socket connector is electrically connected with electric motor units, analog switch array, variable gain amplifying unit respectively, institute
It states analog switch array to be electrically connected with variable gain amplifying unit, high precision DC power supply respectively, the number socket connector
It is electrically connected respectively with electric motor units, analog switch array, high precision DC power supply and variable gain amplifying unit.
Further, the electric motor units include the first stepper motor, the second stepper motor, first motor driving chip
(DRV8833) it is electrically connected with the first stepper motor with the second motor drive ic (DRV8833), the first motor driving chip
It connects, second motor drive ic is electrically connected with the second stepper motor.
Further, the motor shaft of first stepper motor and the second stepper motor respectively spiral shell with a "-" type
Silk cutter head is connected by the spring of cutter head rear end, and IO sends control signal and drives core to first motor driving chip and the second motor
Piece can adjust the rotating forward or reversion of stepper motor after driving chip.Variable capacitance to be regulated on signal acquiring board
It can be rotated by the screw of "-" type, rotating forward can increase capacitance, and reversion can reduce capacitance, and electricity is adjusted to realize
Capacitance.
Further, the analog switch array includes multiway analog switch (preferably four path analoging switch), the simulation
The model SN74HCT4052 of switch.
Further, the variable gain amplifying unit includes high-precision amplifying (OPA2180) and analog switch
(TS12A4516), the high-precision amplifying is electrically connected with analog switch, in the high-precision amplifying and analog switch array
Third analog switch electrical connection.
Further, the simulation socket connector includes power supply stitch, oscillograph stitch, signal source stitch, the electricity
Source stitch divides two-way, is electrically connected all the way with the motor drive ic in electric motor units, another way summed by resistance after with simulation
The second analog switch electrical connection in switch arrays, the oscillograph stitch and the first analog switch electricity in analog switch array
Connection, the signal source stitch are electrically connected with the high-precision amplifying in variable gain amplifying unit.
Further, the digital socket connector includes IO input stitch and IO output stitch, and when IO is tested, IO is defeated
Enter stitch and IO output stitch by being electrically connected from ring cabling.
Further, the high precision DC power supply includes high-precision amplifying (OPA2180), high accuracy data converter
(DAC7811), a reference source (REF3325).
Further, the simulation socket connector is 40 needle connectors of analog port, the number socket connector
For 36 needle connectors of digital port, detection calibration plate is by simulating socket connector, digital socket connector and signal acquisition
Corresponding connector electrical connection, transmission data carry out the calibration and test of signal acquiring board on plate.It is equipped on signal acquiring board
The USB interface of power supply and the USB interface of dataphone.
The utility model has the advantage that as follows with good effect：
1, the signal acquisition on-board circuitry function of calibration to be tested is utilized in this detection calibration plate, does not have on detection calibration plate
Detection circuit is added, detection calibration plate is simplified.
2, in calibration signal collection plate signal source unit, small signal has passed through on detection calibration plate this detection calibration plate
High-precision amplifying, re-test after amplification, improves precision.
3, this detection calibration plate is controlled by the digital I/O unit of signal acquiring board, switching signal flow direction, to signal acquiring board
On multiple analog functuion units tested and calibrated.
Description of the drawings
Fig. 1 is detection calibration plate functional block diagram；
Fig. 2 is detection calibration plate and signal acquiring board assembling schematic diagram；
Fig. 3 is the schematic diagram of variable capacitance to be regulated on electric motor units Regulate signal collection plate；
Fig. 4 is the schematic diagram matched when calibrating that signal acquiring board carries out oscillograph function；
Schematic diagram when Fig. 5 is signal acquisition on board supply functional test；
Schematic diagram when Fig. 6 is I O function test.
In figure：
1, socket connector is simulated；2, power supply stitch；3, oscillograph stitch；4, signal source stitch；5, resistance；6, it can be changed and increase
Beneficial amplifying unit；7, high-precision amplifying OPA2180；8, analog switch TS12A4516；9, electric motor units；10, the first stepping
Motor；11, the second stepper motor；12, first motor driving chip DRV8833；13, the second motor drive ic DRV8833；
14, analog switch array；15, the first analog switch；16, the second analog switch；17, third analog switch；18, the 4th simulation is opened
It closes；19, high precision DC power supply；20, high-precision amplifying OPA2180；21, high accuracy data converter DAC7811；22, base
Quasi- source REF3325；23, digital socket connector；24, IO inputs stitch；25, IO exports stitch；26, from ring cabling；27, it supplies
The USB interface of electricity；28, the USB interface of dataphone；29,40 needle connectors of analog port；30,36 needles of digital port
Connector；31, driver bit；32, multiway analog switch；33, variable capacitance to be regulated
Specific implementation mode
It elaborates below in conjunction with the accompanying drawings to specific embodiment of the utility model.
As illustrated in fig. 1 and 2, a kind of detection calibration plate for signal acquiring board, including detection calibration plate, the test school
Quasi- plate includes simulation socket connector 1, variable gain amplifying unit 6, electric motor units 9, analog switch array 14, High-accuracy direct current
Power supply 19 and digital socket connector 23, the simulation socket connector 1 respectively with electric motor units 9, analog switch array 14, can
Variable-gain amplifying unit 6 is electrically connected, and the analog switch array 14 is electric with variable gain amplifying unit 6, High-accuracy direct current respectively
Source 19 is electrically connected, the number socket connector 23 respectively with electric motor units 9, analog switch array 14, high precision DC power supply
19 and variable gain amplifying unit 6 be electrically connected.The electric motor units 9 include the first stepper motor 10, the second stepper motor 11, the
One motor drive ic 12 (DRV8833) and the second motor drive ic 13 (DRV8833), the first motor driving chip 12
It is electrically connected with the first stepper motor 10, second motor drive ic 13 is electrically connected with the second stepper motor 11.
The analog switch array 14 includes multiway analog switch 32 (preferably four path analoging switch), the analog switch
Model SN74HCT4052.The variable gain amplifying unit 6 includes high-precision amplifying 7 (OPA2180) and analog switch 8
(TS12A4516), the high-precision amplifying 7 is electrically connected with the third analog switch 17 in analog switch array.It is described high-precision
It includes high-precision amplifying 20 (OPA2180), high accuracy data converter 21 (DAC7811), a reference source 22 to spend DC power supply 19
(REF3325)。
The simulation socket connector includes power supply stitch 2, oscillograph stitch 3, signal source stitch 4, the power supply stitch 2
Point two-way, be electrically connected with the motor drive ic in electric motor units 9 all the way, another way by after the summation of resistance 5 with analog switch
The second analog switch 16 electrical connection in array 14, the oscillograph stitch 3 are opened with the first simulation in analog switch array 14
15 electrical connections are closed, the signal source stitch 4 is electrically connected with the high-precision amplifying 7 in variable gain amplifying unit 6.
The number socket connector 23 includes that IO input stitch 24 and IO export stitch 25, when IO is tested, IO input pins
Foot 24 and IO output stitch 25 from ring cabling by being electrically connected.
The simulation socket connector 1 is 40 needle connectors of analog port, and the number socket connector 23 is number
36 needle connectors of port, detection calibration plate is by simulating on socket connector 1, digital socket connector 23 and signal acquiring board
Corresponding connector electrical connection, transmission data carry out the calibration and test of signal acquiring board.Power supply is equipped on signal acquiring board
USB interface 27 and dataphone USB interface 28.
As shown in figure 3, the motor shaft of first stepper motor, 10 and second stepper motor 11 respectively with a word
The driver bit 31 of type is connected by the spring of cutter head rear end, and IO sends control signal to first motor driving chip 12 and second
Motor drive ic 13 can adjust the rotating forward or reversion of stepper motor after driving chip.It waits adjusting on signal acquiring board
The variable capacitance 33 of section can be rotated by the screw of "-" type, and rotating forward can increase capacitance, and reversion can reduce capacitance,
To realize capacitance value.When carrying out detection calibration on production line, detection calibration plate is plugged on to signal acquisition to be tested
On plate, at this moment the driver bit 31 of "-" type will touch variable capacitance 33 to be regulated.There is bullet in the rear end of driver bit 31
Spring suitably forces on variable capacitance 33 to be regulated so having.And smaller site error is admitted of to dock.Step
Driver bit 31 will drive variable capacitance 33 to be regulated to rotate when stepper motor rotates.To realize the electricity for adjusting variable capacitance
Capacitance.
As shown in figure 4, the software collection in PC machine, to the waveform of mismatch case 1, just control, which inverts, reduces variable capacitance
33 capacitance.When collecting mismatch case 2, just control rotates forward the capacitance for increasing variable capacitance 33.Turn a stepping-in amount,
A waveform is acquired, is then stopped operating after reaching matching waveform.
In use, lower section is to be calibrated and test signal acquiring board (such as EPI-M204 and EPI-M304), top is to survey
Try calibration plate.Detection calibration plate is plugged on the signal acquiring board for waiting for detection calibration.Complete the calibration of a block signal collection plate
After test, signal acquiring board and detection calibration plate are detached.Change again a block signal collection plate be inserted in lower section tested and calibrated.
And so on.Detection calibration plate is to reuse on production line, when production task is more, polylith can be used to test school
Quasi- plate is carried out at the same time.
The USB interface 27 powered on signal acquiring board is powered to signal acquiring board, the USB interfaces 28 and PC of dataphone
Machine transmission data.The power supply stitch on 40 needle connectors 29 that measured signal collection plate passes through analog port gives detection calibration plate
Power supply.The signal source stitch on 40 needle connectors 29 that measured signal collection plate passes through analog port is sent to detection calibration plate to be believed
Number.The oscillograph stitch on 40 needle connectors 29 that measured signal collection plate passes through analog port was sent out to receive detection calibration plate
The signal come.The logic IO stitch on 36 needle connectors 30 that measured signal collection plate passes through digital port controls detection calibration
Multiway analog switch 32 on plate.Multiway analog switch 32 can be used on switch test calibration plate simulate socket connector 1, can
Analog signal between variable-gain amplifying unit 6, high precision DC power supply 19.Measured signal collection plate pass through digital port 36
Needle connector 30 controls the rotation of electric motor units 9 with the logic IO on digital socket connector 23.Operate in the survey in PC machine
Examination calibration procedure executes above-mentioned function by the USB interface 28 of dataphone to control signal acquiring board.
A kind of by oscillograph function in the calibration of above-mentioned detection calibration plate and test method, including signal acquiring board
The amplitude calibration of signal source function on amplitude calibration, signal acquiring board with oscillograph function on calibration, signal acquiring board；
The matching calibration process of oscillograph function is on the signal acquiring board：The detection calibration program of PC machine passes through computer
The USB interface 28 of communication sends commands to control signal acquiring board and completes following steps：
A, the signal source unit on signal acquiring board generates the square-wave signal of a 1KHz 1Vpp；
B, square-wave signal enters detection calibration plate by 40 needle connectors 29 and simulation socket connector 1 of analog port；
C, the logic IO of signal acquiring board is controlled by 36 needle connectors 30 and digital socket connector 23 of digital port
Square-wave signal is sent into the oscillograph stitch of simulation socket connector 1 by multiway analog switch；
D, simulation socket connector 1 is connected to 40 needle connectors 29 of analog port, and square-wave signal is inserted by simulating
The oscillograph functional unit of 40 needle connector, the 29 entering signal collection plate of base connector 1 and analog port；
E, the software in PC machine reads signal acquiring board oscillograph unit by the USB interface 28 of dataphone and collects
Square-wave waveform, square-wave waveform has mismatch and match condition shown in Fig. 4；
F, the software in PC machine controls 11 turns of the first stepper motor 10 and the second stepper motor by comparing square-wave waveform again
Tunable capacitor on dynamic signal acquiring board, makes unmatched square-wave waveform become matching, and matching calibration is completed.
The amplitude calibration process of oscillograph function is as follows on the signal acquiring board：
First step direct current is calibrated：The detection calibration program of PC machine sends commands to control by the USB interface 28 of dataphone
Signal acquiring board processed completes following steps.The logic IO of signal acquiring board is inserted by 36 needle connectors 30 and number of digital port
Base connector 23 controls multiway analog switch 32 and the oscillograph stitch for simulating socket connector 1 is connect zero potential.It is soft in PC machine
The USB interface 28 that part is communicated by brain reads the numerical value D of signal acquiring board oscillograph unit at this time.D is exactly oscillograph unit
Zero bias.Software on PC machines sends-D data back to oscillograph unit, and the DC regulation circuit of oscillograph unit turns-D data
It is changed to the zero bias of voltage offset oscillograph unit.This process alternately for several times, can make zero bias data D approaches and 0.First
Step direct current calibration finishes.
Second step peak-to-peak value is calibrated.The detection calibration program of PC machine is sent commands to by the USB interface 28 of dataphone
It controls signal acquiring board and completes following steps.36 needle connectors 30 and number that the logic IO of signal acquiring board passes through digital port
Socket connector 23 controls high precision DC power supply 19 and generates V1 voltages, and the logic IO of signal acquiring board passes through digital port
36 needle connectors 30 and digital socket connector 23 control multiway analog switch 32 and V1 voltages are sent into simulation socket connector 1
Oscillograph stitch.Simulation socket connector 1 is connected to 40 needle connectors 29 of analog port, and V1 voltages are by simulating socket
The oscillograph functional unit of 40 needle connector, the 29 entering signal collection plate of connector 1 and analog port.Software in PC machine is logical
The USB interface 28 for crossing dataphone reads the numerical value M of signal acquiring board oscillograph unit at this time.It repeats the above steps, it is high-precision
It spends DC power supply 19 and generates V2 feeding oscillograph units, PC machine software readout value N.The ADC conversions for calculating signal acquiring board are oblique
Rate=(N-M)/(V2-V1).ADC converts constant=M-V1*ADC and converts slope.The calibration of second step peak-to-peak value finishes.
The amplitude calibration of signal source function includes on the signal acquiring board：The functional test of signal acquisition on board supply is shown
The functional test of wave device, signal source functional test and the test of logic I O function.
One, power supply function is tested.The detection calibration program of PC machine is sent commands to by the USB interface 28 of dataphone
It controls signal acquiring board and completes following steps.The power supply unit of signal acquiring board has five on 40 needle connectors 29 of analog port
A output stitch generates five voltage V1 to V5.It is sent to by 40 needle connectors 29 and simulation socket connector 1 of analog port
On detection calibration plate, it is connect with resistance 5R1 to R5.V1 to V5 generates voltage F1 after resistance R1 to R5 summations.Signal acquisition
The logic IO of plate controls multiway analog switch 32 by F1 by 36 needle connectors 30 and digital socket connector 23 of digital port
It is sent to oscillograph unit.Software in PC machine reads signal acquiring board oscillograph unit by the USB interface 28 of dataphone
Numerical value D at this time.D can be detected whether V1 to V5 is faulty by the software in PC machine compared with standard value.Such as Fig. 5 institutes
Show, the method once tests 5 power supplys, time saving and energy saving.
Two, oscillograph functional test and signal source functional test.The USB that the detection calibration program of PC machine passes through dataphone
Interface 28 sends commands to control signal acquiring board and completes following steps.Signal source sends the signal Vs for including direct current and exchanging,
Direct current component value is Vdc, and AC compounent value is Vac.36 needle connectors 30 that the logic IO of signal acquiring board passes through digital port
Multiway analog switch 32 is controlled with digital socket connector 23, and Vs is sent to oscillograph unit.Software in PC machine passes through computer expert
The USB interfaces 28 of news read the numerical value of signal acquiring board oscillograph unit at this time, calculate DC component Vdc and exchange point
Measure Vac.The Vdc and Vac that the test of comparison oscillograph and signal source in PC machine are sent.The two is consistent, illustrate oscillograph and
Signal source function is normal, and inconsistent then oscillograph and signal source are problematic, need repairing.The method is by signal on signal acquiring board
Source unit and oscillograph unit are tested together, it is not necessary to add detection circuit on detection calibration plate, primary test can detect two
A unit is time saving and energy saving.
Three, I O function is tested：The detection calibration program of PC machine sends commands to control by the USB interface 28 of dataphone
Signal acquiring board completes following steps.The IO output units of signal acquiring board send numerical value K, numerical value K pass through digital port 36
The IO output stitch of needle connector 30 to digital socket connector 23 enters detection calibration plate.The PCB circuits of detection calibration plate will
Numerical value K inputs stitch by the IO of 36 needle connectors 30 of digital socket connector 23 to digital port and sends back to signal acquiring board
IO input units.The numerical value that IO input units relatively receive, with K, unanimously then to output and input cell operation normal by IO, no
It is problematic that consistent then IO outputs and inputs unit.As shown in fig. 6, the method can once test two units.K values selection 16
System 0x5555 0xaaaa 0x6666 0x9999 can make the left and right of row's needle adjacent and neighbouring detect.
This method makes full use of itself circuit function of signal acquiring board to be tested so that can use simplified test school
Quasi- plate is tested and is calibrated.The detection calibration program run in PC machine makes detection calibration process all automate.
The embodiments of the present invention are described in detail above, but the content is only the preferable of the utility model
Embodiment should not be considered as limiting the scope of the present invention.It is all to become according to impartial made by the scope of the utility model
Change and improve etc., it should all still belong within this patent covering scope.
Claims (10)
1. a kind of detection calibration plate for signal acquiring board, it is characterised in that：Including detection calibration plate, the detection calibration plate
Including simulation socket connector, variable gain amplifying unit, electric motor units, analog switch array, high precision DC power supply sum number
Word socket connector, the simulation socket connector are electric with electric motor units, analog switch array, variable gain amplifying unit respectively
Connection, the analog switch array are electrically connected with variable gain amplifying unit, high precision DC power supply respectively, the number socket
Connector is electrically connected with electric motor units, analog switch array, high precision DC power supply and variable gain amplifying unit respectively.
2. a kind of detection calibration plate for signal acquiring board according to claim 1, it is characterised in that：The motor list
Member includes the first stepper motor, the second stepper motor, first motor driving chip and the second motor drive ic, first electricity
Machine driving chip is electrically connected with the first stepper motor, and second motor drive ic is electrically connected with the second stepper motor.
3. a kind of detection calibration plate for signal acquiring board according to claim 2, it is characterised in that：The first step
The motor shaft of stepper motor and the second stepper motor is respectively connected with a driver bit by the spring of cutter head rear end.
4. a kind of detection calibration plate for signal acquiring board according to claim 2, it is characterised in that：The simulation is opened
It includes multiway analog switch to close array.
5. a kind of detection calibration plate for signal acquiring board according to claim 4, it is characterised in that：The simulation is inserted
Base connector includes power supply stitch, oscillograph stitch, signal source stitch, and the power supply stitch divides two-way, all the way with electric motor units
In motor drive ic electrical connection, another way by being electrically connected with the second analog switch in analog switch array after resistance,
The oscillograph stitch is electrically connected with the first analog switch in analog switch array, and the signal source stitch is put with variable gain
High-precision amplifying electrical connection in big unit.
6. a kind of detection calibration plate for signal acquiring board according to claim 1 or 5, it is characterised in that：The number
Word socket connector includes that IO inputs stitch and IO output stitch, and when IO is tested, IO inputs stitch and IO output stitch passes through certainly
Ring cabling is electrically connected.
7. a kind of detection calibration plate for signal acquiring board according to claim 1, it is characterised in that：The simulation is inserted
Base connector is 40 needle connectors of analog port, and the number socket connector is 36 needle connectors of digital port, test
Calibration plate is being believed by simulating the connector electrical connection corresponding on signal acquiring board of socket connector, digital socket connector
Number collection plate is equipped with the USB interface of the USB interface and dataphone of power supply.
8. a kind of detection calibration plate for signal acquiring board according to claim 1, it is characterised in that：The variable increasing
Beneficial amplifying unit includes amplifier and analog switch, and the amplifier is electrically connected with analog switch, and the amplifier is opened with simulation
Close the third analog switch electrical connection in array.
9. a kind of detection calibration plate for signal acquiring board according to claim 1, it is characterised in that：The high-precision
DC power supply includes amplifier, data converter and a reference source.
10. a kind of detection calibration plate for signal acquiring board according to claim 9, it is characterised in that：The amplification
Device is OPA2180 amplifiers, and the data converter is DAC7811 data converters, and a reference source is REF3325 benchmark
Source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820200675.4U CN207924121U (en) | 2018-02-06 | 2018-02-06 | A kind of detection calibration plate for signal acquiring board |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820200675.4U CN207924121U (en) | 2018-02-06 | 2018-02-06 | A kind of detection calibration plate for signal acquiring board |
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| CN207924121U true CN207924121U (en) | 2018-09-28 |
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ID=63603187
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| CN201820200675.4U Active CN207924121U (en) | 2018-02-06 | 2018-02-06 | A kind of detection calibration plate for signal acquiring board |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108132452A (en) * | 2018-02-06 | 2018-06-08 | 苏州硬木智能科技有限公司 | It is a kind of for the detection calibration plate of signal acquiring board and its calibration and test method |
| CN112858978A (en) * | 2021-01-08 | 2021-05-28 | 胜达克半导体科技(上海)有限公司 | High-precision testing method for self calibration of carrier plate |
-
2018
- 2018-02-06 CN CN201820200675.4U patent/CN207924121U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108132452A (en) * | 2018-02-06 | 2018-06-08 | 苏州硬木智能科技有限公司 | It is a kind of for the detection calibration plate of signal acquiring board and its calibration and test method |
| CN112858978A (en) * | 2021-01-08 | 2021-05-28 | 胜达克半导体科技(上海)有限公司 | High-precision testing method for self calibration of carrier plate |
| TWI799941B (en) * | 2021-01-08 | 2023-04-21 | 大陸商勝達克半導體科技（上海）有限公司 | High-precision test method for self-calibration of carrier board |
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