CN207918699U - Plate glass - Google Patents
Plate glass Download PDFInfo
- Publication number
- CN207918699U CN207918699U CN201690000756.9U CN201690000756U CN207918699U CN 207918699 U CN207918699 U CN 207918699U CN 201690000756 U CN201690000756 U CN 201690000756U CN 207918699 U CN207918699 U CN 207918699U
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- Prior art keywords
- plate glass
- slot
- point
- information display
- glass according
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/54—Glass
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- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Laser Beam Processing (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Plate glass (1) involved by the utility model is arranged on its surface (2) with the information display section (3) that point (6) is component unit, and point (6) is formed by cricoid slot (7).
Description
Technical field
The utility model is related to plate glass, more particularly to are formed on the surface of plate glass to put as component unit
The technology of information display section.
Background technology
Such as in the manufacturing process of semiconductor wafer, tablet glass is used in the component of support semiconductor wafer sometimes
Glass.At this moment in semiconductor wafer, it is arranged referred to as groove (notch) for the direction for keeping the alignment of its crystal orientation given
Notch section.Generally the plate glass of the semiconductor wafer is being supported to be also provided with same notch section thus.
In addition, at this moment on the surface of plate glass, the various information about the plate glass etc. can be obtained by being formed sometimes
The mark that the combination of character, mark, figure etc. is constituted.These marks are for example to be constituted with the dotted element referred to as point
Unit, past in the table surface irradiation laser of plate glass, make the recessed of the irradiation area generation substantially bottomed cylindrical of the laser
Portion, to form each point (such as referenced patent document 1).
Existing technical literature
Patent document
Patent document 1：JP Laid-Open 9-278494 bulletins
Utility model content
The utility model project to be solved
But usually from viewpoints such as visual recognitions, to this to put traffic sign placement and the mark for component unit
And the relevant given specification such as distance between centers (spacing) of size, point put.Recess portion about composition point thus,
It needs to form to become the size (outer diameter, depth dimensions) based on specification.But the specification is from meeting after all to put as structure
At what is determined from the perspective of the visual recognition of the various marks of unit, even if therefore to form point as specification (recessed
Portion), also not necessarily ensure the intensity of plate glass.Especially thickness is smaller, then mark shape of the recess portion in plate glass
It is bigger at the volume ratio shared by region, it is more opposite as thin-walled around recess portion, it is true to plate glass it is therefore possible to be difficult to
Protect required intensity.
Problem described above is not limited to the plate glass in jagged portion yet, also is compliant with the surface shape in plate glass
The case where Cheng Yidian is certain marks of component unit.In addition, problem described above is not limited to the combination institute structure of character etc.
At mark directly show certain meanings from the appearance like that the case where, also be compliant with as Quick Response Code and include certain meanings,
The case where meaning can be obtained and (shown indirectly) by the reading of reader.
In view of above thing, the project to be solved in the present specification is, does not incur the strength reduction of plate glass
Ground is formed on its surface the information display section of visual recognition brilliance.
Means for solving the problems
The solution of the project is reached by the plate glass involved by the utility model.That is, the plate glass is on surface
It is arranged to put the information display section for component unit, which is characterized in that, point is formed by cricoid slot.
So in the present invention, it is characterized in that, is arranged to put the information for component unit on the surface of plate glass
When display unit, point is formed with cricoid slot.By so forming point with cricoid slot, (compared by the region that the cricoid slot surrounds
The region of slot inside) it will not be remaining by laser removing.As a result, (substantially due to existing shape identical with outer diameter is made
Bottomed cylindrical) recess portion compare, the volume of the recess portion involved by the utility model is greatly decreased, therefore can prevent as much as possible
Only it is equipped with the strength reduction in the region of the information display section of plate glass.If in addition, cricoid slot, as long as then outer diameter
Do not change, the width dimensions of reduction slot, visual recognition is just made to there will not be much reductions.Thus, if not changing the outer diameter of slot
Size and reduce width dimensions, then the volume than the region of slot inside can be increased to corresponding part, thus can ensure that vision
Identification simultaneously can ensure that required intensity.
In addition, the plate glass involved by the utility model, which may be above-mentioned slot, constitutes circular plate glass.
Since point is the component unit of information display section, from the viewpoint of making that a little there is versatility, about formation
The slot of point, is preferably capable of shape of the visual identity at point symmetry.Therefore, by the way that slot is set as circular, particularly positive annulus
Shape, so as to improve the relevant versatility of configuration mode with the point formed with the slot.
In addition, the plate glass involved by the utility model can also：By the outer diameter of point be set as 0.05mm or more and
0.2mm or less.
By so providing to become the outer diameter of the ring of the visual recognition form of point, so as to meet a little and with point
For the visual recognition of the information display section of component unit, and required intensity can be ensured plate glass.
In addition, the plate glass involved by the utility model can also：The internal diameter size for the slot for forming point is set as
0.0375mm or more and 0.125mm or less.
By so providing the internal diameter size of the ring of the visual recognition form as point, capable of also meeting a little and being to put
The visual recognition of the information display section of component unit, and required intensity can be ensured plate glass.
In addition, the plate glass involved by the utility model can also：The depth dimensions for the slot for forming point are set as 2.0 μ
M or more and 30 μm or less.
By so providing to constitute the depth dimensions of the slot of point, so as to meet a little and to put the letter for component unit
The visual recognition of display unit is ceased, and can ensure plate glass required intensity.
In addition, the plate glass involved by the utility model can also：The distance between centers of mutual adjacent point is set as
0.06mm or more and 0.25mm or less.
By so providing the distance between centers of mutual adjacent point, can also meet a little and to put as component unit
The visual recognition of information display section, and required intensity can be ensured plate glass.
In addition, the plate glass involved by the utility model can also：By the area of the inside of slot zoning to slot in surface
The region in domain and zoning to the outside of slot is in the same plane.
Zoning as above is all located to the region of the inside of slot and the region in zoning to outside on same plane, to
Being formed in the profile of the slot on the surface of glass plate becomes distinct.The vision that the point formed by the slot can thus be further increased is distinguished
The property known.
In addition, the plate glass involved by the utility model can also：Surface composition is disk-shaped, is arranged in its peripheral part
The circumferencial direction middle position of positioning region, information display section is set in circle on the basis of the circumferencial direction middle position of positioning region
2 ° or more and 10 ° of ranges below in circumferential direction.
If the plate glass involved by the utility model, the intensity in the region of information display section is formed due to can ensure that,
Therefore as described above surface constitute it is disk-shaped, peripheral part be arranged positioning region plate glass in, even in the positioning region
Near (position for the given phase mass that is staggered on circumferencial direction) formed information display section the case where, also can suitably use
The utility model.
In addition, the plate glass involved by the utility model can also：Information display section have from comprising character, mark,
1 kind or more of the element that the mass selection of Quick Response Code and figure is selected, element are made of multiple points.
In this way, in the case where information display section has the elements such as character, mark, Quick Response Code and figure, it can be by multiple
Point constitutes the elements such as the character.Therefore, regardless of the type of information display section, it is (namely minimum to constitute list to can be transferred through point
Position) correctly show the element (namely intermediate component unit).
In addition, the plate glass involved by the utility model can also：Information display section is indicated from including plate glass
At least one for selecting of mass selection of size, linear expansivity, batch, wall thickness deviation rate, producer's name, sellers' name and material code
Information.In addition, thickness, outer diameter etc. comprising plate glass (are existing as described later in described size herein
In the case that the positioning regions such as notch section are arranged in plate glass, including with positioning such as the depth dimensions of notch section, opening width sizes
The shape in portion, the size at the position that size is representative).
Plate glass involved by the utility model can visual recognition due to regardless of its display format
Various information are shown on the surface of plate glass, even therefore for example indicating the letter of foregoing illustrative information well
Breath display unit can also be formed in the surface of plate glass out of questionly.
In addition, the solution of the project is also reached by the forming method of the information display section involved by the utility model.
That is, this method is to the forming method of the information display section on the surface of plate glass, information display section is characterized in that, with point
For component unit, and formed a little by cricoid slot.
As described above, the forming method of the information display section involved by the utility model, with the utility model institute
The plate glass being related to similarly is formed a little by cricoid slot, to the region that residual is surrounded by the cricoid slot, therefore with make
The recess portion of the identical existing shape (substantially cylindric) of outer diameter is compared, and the volume of recess portion is significantly reduced.Therefore can to the greatest extent may be used
Prevent to energy the strength reduction in the region of the information display section equipped with plate glass.If in addition, cricoid slot, as long as then outer
Diameter size does not change, even if reducing the width dimensions of the slot, there will not be visual recognition reduces the worry of respective degrees.Cause
And if do not change the outer diameter of slot and reduce width dimensions, can will than the region of slot inside (by slot surround region)
Volume increase corresponding portion, can ensure that visual recognition and can ensure that required intensity.Or for the same reason,
If the depth dimensions of slot is made to be less than the depth dimensions of existing shaped recess portion, visual recognition can ensure that, and can ensure that required
The intensity wanted.
In addition, the forming method of the information display section involved by the utility model can also：Irradiation laser beam simultaneously passes through burning
It loses to form cricoid slot.
Generally certain marks (carrying out so-called laser mark) are being formed on the surface of object by irradiating laser beam
When, by the way that the zone-melting for irradiating laser beam is formed the recess portion for constituting mark.But the brittleness material as to plate glass
When material implements laser mark, need to pay attention in the irradiation of laser beam that (heat is answered in the thermally-induced strain of plate glass because putting aside
Become).That is, plate glass is heated melting come in the case of forming recess portion, in the irradiation of laser beam in the irradiation by laser beam
Region and the savings that heat is generated around it.The savings of the heat is strained since the surface of plate glass can be made to generate, at
For strength reduction the reason of one of.In addition, since the part of melting is flowed to surrounding and is remained, therefore, it is difficult to copy laser beam
Irradiation area and form the slot of correct shape and size.
In this regard, in the present invention, due to irradiating laser beam, cricoid slot is formed by ablation, therefore shine
It penetrates the glass vaporization in the region of laser beam and disappears.In addition, in order to make ablation generate and in very short time irradiate high-energy it is close
The laser beam of degree, thus, it is possible to inhibit the state of affairs of accumulated heat around the irradiation area of laser beam and its.Can thus heat be inhibited to answer
The generation of change simultaneously can form slot, can ensure that the intensity in the irradiation area of laser beam.In addition, forming slot, energy by using ablation
Expect that the amount of flow of the glass of melting is reduced, therefore the region for having irradiated laser beam can be copied to form correct shape and ruler
Very little slot.
In addition, in this case, the forming method of the information display section involved by the utility model can also：Pass through ring
Shape scanning laser beam form cricoid slot.
In addition, the forming method of the information display section involved by the utility model can also：Arteries and veins is used as laser beam
Rush width be picosecond arrive the other pulse laser of femtosecond.
Think even if (pulse width is nanosecond for the nanosecond laser that generally uses having used for example in this system mark
Other pulse laser) in the case of, if critically controlling its irradiation condition, the irradiation area of laser beam can be made to generate ablation,
But it will produce the melting of many glass in this case.In contrast, if in laser beam using pulse width be picosecond to fly
The second pulse laser (picosecond laser or femtosecond laser) of rank can not be put aside then since pulse width is very short in glass
Thermally only occurring ablation in the irradiation area of laser beam, (essence does not generate the glass around the irradiation area of laser beam
Melting).Therefore the generation that can certainly prevent thermal strain, can more stably ensure intensity.In addition, since glass can be prevented molten
Melt and to the state of affairs that surrounding flows, therefore can only irradiated laser beam region formed slot, can expect slot form accuracy or
The raising of dimensional accuracy.If in addition, picosecond laser or femtosecond laser, then due to not having to consider to melt as nanosecond laser
The flowing of glass can set the irradiation condition of laser beam, therefore control also simple i.e. enough.
The effect of utility model
As described above, according to the utility model, the strength reduction of plate glass can not be incurred on its surface
Form the excellent information display section of visual recognition.
Description of the drawings
Fig. 1 is the vertical view of the plate glass involved by 1 embodiment of the utility model.
Fig. 2 is the enlarged view of the main part of plate glass shown in FIG. 1.
Fig. 3 is the portions the A enlarged drawing of plate glass shown in Fig. 2.
Fig. 4 is the portions the B enlarged drawing of plate glass shown in Fig. 3.
Fig. 5 is the C-C sectional views of plate glass shown in Fig. 4.
Fig. 6 is the solid of the summary for illustrating the laser device for mark involved by the 1 of the utility model embodiment
Figure.
Fig. 7 A are the main portions for illustrating to form the method for cricoid slot using laser device for mark shown in fig. 6
Divide enlarged plan view.
Fig. 7 B are the main portions for illustrating to form the method for cricoid slot using laser device for mark shown in fig. 6
Divide enlarged plan view.
Fig. 7 C are the main portions for illustrating to form the method for cricoid slot using laser device for mark shown in fig. 6
Divide enlarged plan view.
Specific implementation mode
Illustrate 1 embodiment of the utility model below with reference to Fig. 1~Fig. 7 C.
Fig. 1 is the vertical view of the plate glass 1 involved by 1 embodiment of the utility model.The plate glass 1
As being used as semiconductor support substrate.As shown in Figure 1, plate glass 1 forms information display section 3 on its surface 2.
In the present embodiment, plate glass 1 is formed substantially disk-shaped.In addition, the peripheral part 1a in the plate glass 1 is provided as
The notch section 4 of positioning region forms information display section 3 near the notch section 4.
In addition, as the plate glass 1 and it is preferred that wafer-like (substantially just disk-shaped), at this moment, diameter are set as 100mm
Above and 500mm is hereinafter, be preferably set to 150mm or more and 450mm or less.If the tablet of such shape and size
Glass 1 makes it easy to be used in the manufacturing process of semiconductor packages.
In addition, in the case of above-mentioned use use on the way, the plate thickness of plate glass 1 is set as less than 2.0mm, preferably
1.5mm hereinafter, more preferably be set as 1.2mm hereinafter, further 1.1mm hereinafter, be still more preferably set as 1.0mm hereinafter,
Most preferably it is set as 0.9mm or less.This is because since plate thickness is smaller, including the quality of the laminated body of plate glass 1 is got over
It is small, therefore the operability of the laminated body is more promoted.On the other hand, if plate thickness is too small, the intensity of plate glass 1 itself drops
It is low, it is possible to can not achieve the function as support plate.Thus the plate thickness of plate glass 1 is set as 0.1mm or more, excellent
Choosing is set as 0.2mm or more, is more preferably set as 0.3mm or more, is further preferably set as 0.4mm or more, further excellent
Choosing is set as 0.5mm or more, is particularly preferably set as 0.6mm or more, is most preferably set as 0.7mm or more.
Information display section 3 is as shown in the portions A in enlarged drawing 2, such as by the (character 5 said here of multiple characters 5
Including at least the ideographic character of number as shown in Figure 2 etc.) combination constitute.In addition, each character 5 is as shown in Figure 3 respectively
It is made of multiple points 6.
The composition of each point 6 is further illustrated herein.Fig. 4 amplifications indicate point 6, and as shown in Figure 4, each point 6 is by cricoid
The formation of slot 7.Thus constitute character 5 each point 6 by visual recognition circlewise (Fig. 3 and Fig. 4).In the present embodiment, slot 7
It is formed positive circular.In addition, the outer peripheral edge of slot 7 and inner peripheral all form positive round shape.Thus in this case, the width of slot 7
Size w is constant throughout week.
In addition, it is cyclic annular to form the region of information display section 3, the i.e. region of formation point 6 in the surface 2 of plate glass 1
7 zoning of slot to the inside of slot 7 the first zoning region 2a and zoning to the outside of slot 7 the second zoning region 2b.At this moment such as
As shown in Figure 5, each zoning region 2a, 2b form flat shape and in the same plane.
Next size of the narration about cricoid slot 7.First, the outer diameter d1 (Fig. 4) of slot 7 is for example set as
0.05mm or more and 0.20mm are hereinafter, be preferably set to 0.07mm or more and 0.13mm hereinafter, being further preferably set as
0.09mm or more and 0.11mm or less.The internal diameter size d2 (Fig. 4) of slot be for example set as 0.035mm or more and 0.14mm hereinafter,
0.05mm or more is preferably set to and 0.10mm hereinafter, being more preferably set as 0.06mm or more and 0.08mm or less.The depth of slot 7
Degree size d3 (Fig. 5) is for example set as 2.0 μm or more and 30 μm hereinafter, being preferably set to 4.0 μm or more and 15 μm or less.Phase
Distance d4 (Fig. 4) between center C1, C2 of mutual adjacent cricoid slot 7,7 be for example set as 0.06mm or more and 0.25mm with
Under, it is preferably set to 0.10mm or more and 0.16mm or less.In addition, at this moment in order to avoid mutually adjacent slot 7,7 is done each other
The state of affairs related to, the distance d4 between center C1, C2 of mutual adjacent slot 7,7 are set to be large the outer diameter d1 in the slot 7.Tool
Body, the interval d5 of mutual adjacent slot 7,7 is set as 0.10mm or more, is preferably set to 0.20mm or more.These be all from
The intensity of the common visual recognition for meeting point 6 and plate glass 1 is especially formed from the perspective of a little intensity in 6 region
As defined in coming.
In addition, being formed on the surface 2 of the such plate glass of present embodiment 1, disk-shaped, in its peripheral part, 1a is provided as
In the case of the notch section 4 of positioning region (Fig. 1), on the basis of the circumferencial direction middle position C3 of notch section 4 in the case of letter
The phase theta (Fig. 2) for ceasing the circumferencial direction middle position C4 of display unit 3 is set as 2 ° or more and 10 ° hereinafter, being preferably set to 3 °
Above and 7 ° or less.
So in the present invention, the surface of plate glass 12 be arranged with put 6 for component unit character 5 and
When the information display section 3 that the combination of multiple characters 5 is constituted, a little 6 are formed by cricoid slot 7.By being formed by cricoid slot 7
Point 6, to 7 area encompassed of cricoid slot (than region of slot inside) remaining.It is thus identical as outer diameter d1 is made
The recess portion of existing shape (substantially bottomed cylindrical) compare, the appearance of the recess portion (cricoid slot 7) involved by the utility model
Product is significantly reduced.Therefore, the strength reduction in the region for being provided with information display section 3 of plate glass 1 can be prevented as far as possible.
If in addition, cricoid slot 7, as long as then outer diameter d1 does not change, even if then reducing the width dimensions w of slot 7, visual recognition
Property there will not be much reductions.If thus not changing the outer diameter d1 of slot 7 and reducing width dimensions w, can increase than slot 7
The corresponding part of volume in the region of inside, can ensure that visual recognition and ensures required intensity.
The plate glass 1 of above-mentioned composition can for example be formed by using the method for laser beam.It describes in detailed below.
Fig. 6 indicates 1 configuration example of the laser device for mark 10 involved by 1 embodiment of the utility model.Such as figure
Shown in 6 like that, which has：Capable of vibrating, there is the laser of the pulse laser 11 of given pulse width to shake
Swing device 12；For control the pulse laser 11 vibrated from laser oscillator 12 two-dimentional irradiation position the first scanning mirror 13 with
And second scanning mirror 14；Gather with by the pulse laser 11 for controlling its two-dimentional irradiation position by the first and second scanning mirror 13,14
The lens 15 of light.
To in this case, the pulse laser 11 that is vibrated from laser oscillator 12 is reflected into the of the first scanning mirror 13
The pulse laser 11 of one laser reflection face 13a, the reflection are reflected into the second laser reflecting surface 14a of the second scanning mirror 14, pass through
Lens 15, pulse laser 11 are irradiated to the given position of supported plate glass 1 in supporting table 16, to form information
The region of display unit 3.In addition, at this point, the first scanning motor 17 linked with the first scanning mirror 13 rotation is made to drive to adjust
The phase of the first laser reflecting surface 13a of first scanning mirror 13 makes the second scanning motor linked with the second scanning mirror 14
18 rotations drive the phase of the second laser reflecting surface 14a to adjust the second scanning mirror 14, and thus setting is irradiated to plate glass
The scanning track L1 (referring to aftermentioned Fig. 7 A~Fig. 7 C) of the pulse laser 11 on 1 surface 2.
In addition, an example of the irradiation condition of the pulse laser 11 described below at this moment vibrated from laser oscillator 12.That is,
The pulse width of the pulse laser 11 is set to a picosecond rank, is preferably set to femtosecond rank, is specifically set as 10fs or more
And 500000fs (500ps) is below.In addition, the wavelength of the pulse laser 11 is set as 200nm or more and 2500nm hereinafter, simultaneously
And its repetition rate is set as 1Hz or more and 1G (gigabit) Hz or less.In addition, the beam diameter of pulse laser 11 is set to 1 μm
Above and 100 μm hereinafter, its sweep speed, that is, pulse laser 11 scans the speed moved on the L1 of track shown in Fig. 7 A~Fig. 7 C
Degree is set to 1mm/s or more and 800mm/s or less.
The point 6 for the laser device for mark 10 that above-mentioned composition is utilized and the word with point 6 for inscape will be illustrated next
Accord with the forming method of 5 (information display sections 3).
First as shown in figure 7 a, scanning starting point P0 of the pulse laser 11 on given scanning track L1 is made to shine
It penetrates, and starts the scanning along scanning track L1 of pulse laser 11.Make the irradiated region of pulse laser 11 by irradiation action
There is ablation in domain A1, is thus following given width along the region formation of scanning track L1 as starting point to scan starting point P0
It is the slot 7 (Fig. 4, Fig. 7 B) of the size of the outer diameter of irradiation area A1 to spend size w herein.
Then at substantially one week on scanning track L1 and the irradiation center of pulse laser 11 back to scanning starting point P0
Time point, the scanning and irradiation of stop pulse laser 11.Thus it completes along scanning track L1 and closed cyclic annular, sheet
It is the slot 7 (Fig. 7 C) of annular shape in embodiment.
So after forming 1 point 6, the focus of laser 11 is next made to be moved to the formation fate of adjacent point 6
Domain, the mode irradiated with pulse laser 11 shown in Fig. 7 A~Fig. 7 C occur come ablation caused by making the irradiation, are formed and constitute point 6
Cricoid slot 7.It is corresponding to be formed that the formation presumptive area of whole points 6 to constituting 1 character 5 repeats irradiation action
Multiple points 6 with these multiple points 6 are 1 character 5 (Fig. 2) of component unit.
Further, above action is similarly repeated to the formation presumptive area of other characters 5, thus with corresponding
Multiple points 6 are respectively formed multiple characters 5 (Fig. 2, Fig. 3) of configuration information display unit 3.
So in the present invention, ablation caused by the irradiation by using pulse laser 11 forms structure
At the glass of the cricoid slot 7 of each point 6, therefore the region (i.e. irradiation area A1) of illuminated pulse laser 11 be vaporized from
And it disappears.In addition, due in order to make ablation occur and in very short time irradiate high-energy density pulse laser 11, thus
Can inhibit the irradiation area A1 of pulse laser 11 and around it accumulated heat the state of affairs.The generation of thermal strain can thus be inhibited
And slot 7 is formed, it can ensure that the intensity in the irradiation area A1 of pulse laser 11.In addition, the energy by using ablation formation slot 7
Expect that the situation that the glass of melting is flowed to surrounding is greatly decreased, therefore the irradiation area A1 of pulse laser 11 can be copied to pursue
Track (scanning track L1) form the slot 7 of correct shape and size.
In addition, in the present embodiment, it is picosecond to arrive the other arteries and veins of femtosecond that pulse width is used as pulse laser 11
Impulse light (so-called picosecond laser or femtosecond laser).If it is very short to give full play to its pulse width for this laser beam
Such characteristic, make plate glass 1 not accumulated heat and only there is ablation in the irradiation area A1 of pulse laser 11.It therefore, can be really
The generation for preventing thermal strain on the spot, so as to more stably ensure the intensity of plate glass 1.In addition, since glass can be prevented molten
Melt to the state of affairs that surrounding flows, therefore only can properly form slot 7 in the irradiation area A1 of pulse laser 11.In this implementation
In mode, due to plate glass 1 surface 2 in by 7 zoning of cricoid slot on the inside of it the first zoning region 2a and area
It is all flat and formed in the same plane, therefore visual recognition to draw the second zoning region 2b to the outside of cricoid slot 7
Well.If in addition, picosecond laser or femtosecond laser, since the stream for the glass for considering to melt as nanosecond laser can not had to
The irradiation condition of pulse laser 11 is set dynamicly, therefore is controlled also simple i.e. enough.
If in addition, form circular slot 7 by the irradiation of pulse laser 11 as in the present embodiment, and for example
The case where polygon that slot 7 is formed as a generally rectangular etc., is compared, the deflection of the irradiation energy of pulse laser 11 (can be shone
Penetrate the deviation of time) inhibit small.This partial shape and the well-balanced high-precision slot 7 of size can thus be formed.Certainly, due to
The more high part for then becoming the defect in intensity of form accuracy, dimensional accuracy is fewer, therefore is also relate to intensity and is more promoted.
It is explained above 1 embodiment of the utility model, but above-mentioned plate glass 1 and information display section 3
Forming method can use arbitrary form in the scope of the utility model certainly.
Such as the shape about slot 7, it instantiates to form circular (Fig. 4) in the above-described embodiment, but certain and unlimited
In the form.Although such as illustration omitted, slot 7 non-annulars such as polygons such as can also be formed as a generally rectangular to.Or
Slot 7 can also be formed as to the shape relative to center (center of gravity) point symmetry of slot 7 such as these polygons or elliptical shape.
In addition, in the above-described embodiment, instantiating be formed as being closed completely by cricoid slot 7 as shown in Figure 4, etc.
Form the case where, but the form may not be defined in.It can also will be cricoid in the range of visual recognition can't go wrong
Slot 7 is formed as the form that the part of it such as C-shape is opened.Slot 7 is formed if so, then for example passes through arteries and veins like that above-mentioned
The irradiation of impulse light 11 in the case of forming cricoid slot 7, is avoided that the irradiation area A1 by scanning of pulse laser 11
It repeats, the shape or width dimensions w for being formed in the slot 7 of the repeating part generate deviation.
In addition, the case where 1 point 6 is only formd by corresponding 1 cricoid slot 7 is instantiated in the above-described embodiment,
But it is not limited to the form.Although such as illustration omitted, by visual recognition it is further promotion for the purpose of formed point
The dotted recess portion that is centrally formed of the inside (being the first zoning region 2a in Fig. 4) of the cricoid slot 7 of 6 gabarit also has no relations.
Or the inside of the cricoid slot 7 in the gabarit for forming point 6 re-forms another cricoid slot and also has no relations.
In addition, the generation type about the point 6 based on pulse laser 11, instantiates pass through photograph in the above-described embodiment
It penetrates and scans 1 pulse laser 11 to come the case where the irradiation and scanning area form 1 cricoid slot 7, but for operation
The promotion of efficiency, the multiple cricoid slots 7 for being formed simultaneously composition each point 6 also have no relations.In this case, although illustration omitted,
But branch's means well known to one or more beam splitters or space optical phase modulator etc. make 11 branch of pulse laser, and
The pulse laser 11 of branch is set to irradiate and scan in the formation presumptive area of corresponding point 6 respectively, thus, it is possible to (primary simultaneously
Property) form multiple slots 7 i.e. multiple points 6.
In addition, in the above-described embodiment, as the means for being used to form the cricoid slot 7 for constituting point 6, instantiating makes
With the form of 10 scanning pulse laser 11 of laser device for mark, but which may not be defined in.Although such as illustration omitted,
It by irradiating laser to given mask, can also make to have transmitted the laser irradiation of the mask to object (plate glass 1), from
And cricoid slot 7 is formed as copying the shape for the transmission pattern for being previously formed in mask.
In addition, instantiating the fortune of surface 2 for foring the plate glass 1 of notch section 4 in peripheral part 1a in the above description
The case where with the utility model, but the plate glass 1 that the positioning region other than notch section 4 is equipped in peripheral part 1a can also be used
The utility model.Certainly, as long as to be formed on its surface 2 to put 6 as the plate glass of the information display section 3 of component unit
1, then the utility model can also be used by not forming positioning region.
The explanation of label
1 plate glass
The peripheral parts 1a
2 surfaces
2a, 2b zoning region
3 information display sections
4 notch sections
5 characters
6 points
7 cricoid slots
10 laser device for mark
11 pulse lasers
12 laser oscillators
13,14 scanning mirror
13a, 14a laser reflection face
15 lens
16 supporting tables
17,18 scanning motor
The irradiation area of A1 laser
The scanning track of L1 laser
Claims (11)
1. a kind of plate glass is arranged on surface to put the information display section for component unit, the feature of the plate glass exists
In,
The point is formed by cricoid slot.
2. plate glass according to claim 1, wherein
The slot constitutes circular.
3. plate glass according to claim 1, wherein
The outer diameter of the point is 0.05mm or more and 0.2mm or less.
4. plate glass according to claim 2, wherein
The outer diameter of the point is 0.05mm or more and 0.2mm or less.
5. plate glass according to any one of claims 1 to 4, wherein
The internal diameter size for forming the slot of the point is 0.035mm or more and 0.14mm or less.
6. plate glass according to any one of claims 1 to 4, wherein
The depth dimensions for forming the slot of the point are 2.0 μm or more and 30 μm or less.
7. plate glass according to any one of claims 1 to 4, wherein
The region position in outside of the region and zoning of the inside in the surface by the slot zoning to the slot to the slot
In on same plane.
8. plate glass according to any one of claims 1 to 4, wherein
The distance between centers of the mutual adjacent point is 0.06mm or more and 0.25mm or less.
9. plate glass according to any one of claims 1 to 4, wherein
The plate glass composition is disk-shaped, and positioning region is arranged in its peripheral part,
The circumferencial direction middle position of described information display unit is set on the basis of the circumferencial direction middle position of the positioning region
2 ° or more and 10 ° of ranges below in a circumferential direction.
10. plate glass according to any one of claims 1 to 4, wherein
Described information display unit is to be wanted with a kind or more selected from the group comprising character, mark, Quick Response Code and figure
The information display section of element, and described a kind or more of element is made of multiple points.
11. plate glass according to any one of claims 1 to 4, wherein
Described information display unit is shown from the size comprising the plate glass, linear expansivity, batch, wall thickness deviation rate, manufacture
At least one information selected in the group of person's name, sellers' name and material code.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015094097A JP6579361B2 (en) | 2015-05-01 | 2015-05-01 | Method for forming information display on plate glass |
| JP2015-094097 | 2015-05-01 | ||
| PCT/JP2016/060329 WO2016178344A1 (en) | 2015-05-01 | 2016-03-30 | Plate glass and method for forming information display section on plate glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207918699U true CN207918699U (en) | 2018-09-28 |
Family
ID=57218273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201690000756.9U Active CN207918699U (en) | 2015-05-01 | 2016-03-30 | Plate glass |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6579361B2 (en) |
| KR (1) | KR102497518B1 (en) |
| CN (1) | CN207918699U (en) |
| TW (1) | TWI675016B (en) |
| WO (1) | WO2016178344A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113998898A (en) * | 2020-07-28 | 2022-02-01 | Ａｇｃ株式会社 | Glass member |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018150759A1 (en) * | 2017-02-15 | 2018-08-23 | Ａｇｃ株式会社 | Glass substrate having mark and production method therefor |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09278494A (en) | 1996-04-15 | 1997-10-28 | Corning Japan Kk | Method for marking glass substrate |
| JP2000042763A (en) * | 1998-07-24 | 2000-02-15 | Komatsu Ltd | Dot mark shape by laser beam, its marking device and method |
| JP3242632B2 (en) * | 1998-11-25 | 2001-12-25 | 株式会社小松製作所 | Small dot mark form by laser beam, marking method |
| JP2002346772A (en) * | 2001-05-21 | 2002-12-04 | Sumitomo Mitsubishi Silicon Corp | Laser marking wafer |
| JP3944135B2 (en) * | 2003-07-14 | 2007-07-11 | 川崎重工業株式会社 | Edge retention aligner |
| JP2005270992A (en) * | 2004-03-23 | 2005-10-06 | Toppan Printing Co Ltd | Method for machining surface of material by pulse laser, method for manufacturing copy, method for processing surface treatment data, information carrier, optical element and image |
| TW200950915A (en) * | 2008-06-06 | 2009-12-16 | Uni Via Technology Inc | Laser processing apparatus and laser processing method |
| JP4776038B2 (en) * | 2008-06-18 | 2011-09-21 | Ｈｏｙａ株式会社 | Method for manufacturing glass substrate for mask blank, method for manufacturing mask blank, and method for manufacturing mask |
| JP2010003795A (en) * | 2008-06-19 | 2010-01-07 | Sinfonia Technology Co Ltd | Substrate position detector and substrate position detecting method |
| JP2010186863A (en) * | 2009-02-12 | 2010-08-26 | Disco Abrasive Syst Ltd | Aligning mechanism, working device and aligning method |
| JP2010201446A (en) * | 2009-03-02 | 2010-09-16 | Miyachi Technos Corp | Marking method using laser and method of manufacturing flat panel display by the marking method |
-
2015
- 2015-05-01 JP JP2015094097A patent/JP6579361B2/en active Active
-
2016
- 2016-03-30 CN CN201690000756.9U patent/CN207918699U/en active Active
- 2016-03-30 WO PCT/JP2016/060329 patent/WO2016178344A1/en active Application Filing
- 2016-03-30 KR KR1020177034206A patent/KR102497518B1/en active IP Right Grant
- 2016-04-12 TW TW105111374A patent/TWI675016B/en active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113998898A (en) * | 2020-07-28 | 2022-02-01 | Ａｇｃ株式会社 | Glass member |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI675016B (en) | 2019-10-21 |
| JP6579361B2 (en) | 2019-09-25 |
| JP2016210644A (en) | 2016-12-15 |
| TW201706227A (en) | 2017-02-16 |
| KR102497518B1 (en) | 2023-02-08 |
| KR20170141759A (en) | 2017-12-26 |
| WO2016178344A1 (en) | 2016-11-10 |
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