CN207916262U - A kind of angular adjustment apparatus and printing screen device - Google Patents
A kind of angular adjustment apparatus and printing screen device Download PDFInfo
- Publication number
- CN207916262U CN207916262U CN201820349077.3U CN201820349077U CN207916262U CN 207916262 U CN207916262 U CN 207916262U CN 201820349077 U CN201820349077 U CN 201820349077U CN 207916262 U CN207916262 U CN 207916262U
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- CN
- China
- Prior art keywords
- angular adjustment
- linear guide
- adjustment apparatus
- actuator
- drive connection
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Abstract
The utility model discloses a kind of angular adjustment apparatus, part is run including pedestal and angle, the pedestal is equipped with arc-shaped guide rail, the angle operation part is slidably disposed under the driving of driving mechanism on the arc-shaped guide rail, the driving mechanism includes the linear guide rod being arranged on the pedestal, the actuator being slidably arranged on the linear guide rod and the power plant for driving the actuator to be moved along the length direction of the linear guide rod, the driving mechanism further includes drive connection part, the drive connection part is rotationally connected with the actuator, the drive connection part is movably connected with angle operation part along the linear guide apparatus being installed on the angle operation part；Interaction relation complicated between the actuator for doing simple linear movement in driving mechanism and the angle operation part for doing arcuate movement is decomposed into two kinds of more manageable component motions by the angular adjustment apparatus in the utility model, has been obviously improved the precision and control accuracy of angle.
Description
Technical field
The utility model is related to a kind of printing equipment more particularly to a kind of angular adjustment apparatus and the monocrystalline silicon polysilicon sun
It can cell piece manufacture printing screen device used.
Background technology
In order in front side of silicon wafer printed motor, after silicon chip positions on the table, the position of silver grating line adjusted is needed, one
The method that front motor kind is carried out to double exposure twice in the field of business comes into vogue.Offset in order to ensure printing double exposure twice is best small
In 1 micron, currently, industry has had the setting using arc-shaped guide rail, grating scale and the reading head worked in coordination, radius is utilized
Amplification improves the precision of measurement and control.
But realization is connect to arc-shaped guide rail with the feed screw nut in transmission mechanism by drive link in the prior art
Driving, drive link rotatably connect with printing screen frame；Or leading screw both ends respectively pivotally with electricity
Machine is connected with screen frame, and motor is rotationally connect with pedestal, realizes the driving to printing screen frame.In both type of drive
Interaction relation is complicated, cannot achieve the precise controlling to printing screen frame, needs a kind of more preferably type of drive further to carry
Adjustment precision when lift angle degree adjusts and control accuracy.
Invention content
In order to overcome the deficiencies of existing technologies, the purpose of this utility model is to provide a kind of angular adjustment apparatus, are promoted
The precision and control accuracy of angle when adjustment.
A kind of angular adjustment apparatus, including pedestal and angle run part, and the pedestal is equipped with arc-shaped guide rail, the angle
Operation part is slidably disposed under the driving of driving mechanism on the arc-shaped guide rail, and the driving mechanism includes being arranged in institute
State the power plant on pedestal, the linear guide rod being arranged on the pedestal and the driving being slidably arranged on the linear guide rod
Part, the power plant is for driving the actuator to be moved along the length direction of the linear guide rod, and the driving mechanism is also
Including drive connection part, the drive connection part is rotationally connected with the actuator, and the drive connection part is along fixed
Linear guide apparatus on angle operation part is movably connected with angle operation part.
Preferably, the rotational axis line between the drive connection part and the actuator and the linear guide apparatus institute
Plane it is vertical.
It is connect it is further preferred that the drive connection part is rotated with the actuator by rolling bearing.
It is further preferred that the length direction of the linear guide apparatus is parallel with the angle operation length direction of part
Or it is substantially parallel.
It is further preferred that the linear guide apparatus is one or more arranged in parallel.
It is further preferred that two linear guide apparatus are symmetricly set on described turn relative to the rotational axis line
The both sides of dynamic axial line.
It is further preferred that the linear guide apparatus is linear guides, along the length direction of linear guides described in every
It is slideably equipped with linear slide block, the drive connection part is fixedly connected with the linear slide block.
It is further preferred that the drive connection part includes connecting shaft and linking arm, the connecting shaft and the actuator
Rotation connection, the linking arm are fixedly connected with the connecting shaft, and the linking arm is transported with the actuator point row angle
The both sides of row part, the linear cunning are fixedly connected with the linking arm soon.
It is further preferred that the linear guide rod is leading screw, the actuator is feed screw nut, and the power plant is electricity
Machine.
The utility model also provides a kind of printing screen containing the angular adjustment apparatus provided in the utility model
The angle operation part of device, including printing screen, the angular adjustment apparatus is printing screen frame, and the printing screen setting exists
On the printing screen frame.
Compared with prior art, the utility model has the beneficial effects that：
Angular adjustment apparatus in the utility model, by the rotation connection between drive connection part and actuator come with angle
The angle variables adaptation that degree operation part generates when arcuately guide rail moves, the line between part is run by drive connection part and angle
Property displacement be adapted come the radial displacement generated when arcuately guide rail moves with angle operation part, and the displacement is one-dimensional ruler
Degree, will not be subjected to displacement so that do simple linear along Linear Driving bar in driving mechanism and move perpendicular to the direction of the straight line
Actuator and the angle operation part for doing arcuate movement between complicated interaction relation be decomposed into two kinds of more manageable movements point
Amount, has been obviously improved the precision and control accuracy of angle.
Being in rolling contact between drive connection part and actuator is realized by the setting of rolling bearing, is reduced between the two
Frictional force, promote transmission efficiency and precision, reduce energy consumption.
The a plurality of linear guide apparatus is parallel and is symmetricly set on the both sides of the rotational axis line so that is drivingly connected
Connection type between part and angle operation part is more firm, and support more balances.
Linear guide apparatus use linear guides, itself be also to be in rolling contact, it is simple in structure and also simultaneously improve branch
Precision is supportted, energy consumption is reduced, prolongs the service life.
Description of the drawings
Fig. 1 is vertical view when the angular adjustment apparatus in the utility model is located at first position；
Fig. 2 is structural schematic diagram of the angular adjustment apparatus in the utility model without printing screen frame；
Fig. 3 is vertical view of the angular adjustment apparatus in the utility model without printing screen frame；
Fig. 4 is the structural schematic diagram that the angular adjustment apparatus in the utility model includes printing screen frame；
Fig. 5 be in Fig. 1 A-A to structural schematic diagram；
Fig. 6 is B-B direction structural schematic diagram in Fig. 1；
Fig. 7 is vertical view when the angular adjustment apparatus in the utility model is located at the second position；
Fig. 8 is vertical view when the angular adjustment apparatus in the utility model is located at the third place.
In attached drawing, 1- angles run part；2- pedestals；3- driving mechanisms；The linear guide rods of 31-；32- actuators；33- drivings connect
Fitting；331- linking arms；332- connecting shafts；34- connections end；4- rolling bearings；5- linear guide apparatus；51- linear slide blocks；
6- arc-shaped guide rails；61- arc shaped sliders.
The utility model is described further below in conjunction with the drawings and specific embodiments.
Specific implementation mode
The utility model can further be well understood by specific embodiment of the utility model given below, but
They are not the restrictions to the utility model.
As shown in figures 1 to 6, the present embodiment provides a kind of angular adjustment apparatus, including pedestal 2 and angle to run part 1, pedestal 2
It is equipped with arc-shaped guide rail 6, angle operation part 1 is slidably disposed under the driving of driving mechanism 3 on arc-shaped guide rail 6, described
Driving mechanism includes setting power plant on the base 2, setting linear guide rod 31 on the base 2 and is slidably arranged in linear
Actuator 32 on guide rod 31, the power plant for driving actuator 32 to be moved along linear guide rod 31, also wrap by driving mechanism 3
Drive connection part 33 is included, drive connection part 33 is rotationally connected with actuator 32, and drive connection part 33 is along being installed in angle
Linear guide apparatus 5 on operation part 1 is movably connected with angle operation part 1.
Arc-shaped guide rail 6 is equipped with arc shaped slider 61, and angle operation part 1 is fixedly connected with arc shaped slider 61, realizes angle fortune
Sliding of the row part 1 on arc-shaped guide rail 6.The power plant is also provided on the base 2.Drive connection part 33 and actuator 32 it
Between rotation connection come with angle operation part 1 arcuately guide rail 6 moves when the angle variables that generate be adapted to, pass through drive connection part
Linear displacement between 33 and angle operation part 1 is come the displacement of the radial direction generated when arcuately guide rail 6 moves with angle operation part 1
It is adapted, has been obviously improved the Adjustment precision and control accuracy of angle.
Rotational axis line between drive connection part 33 and actuator 32 is vertical with the plane where linear guide apparatus 5,
In the present embodiment, when angular adjustment apparatus is horizontally arranged, shaft center line is vertical line, flat where linear guide apparatus 5
Face is horizontal plane.
Drive connection part 33 is rotated by rolling bearing with actuator 32 and is connect, and transmission efficiency is promoted, and reduces energy consumption.
The width direction and length direction for setting pedestal 2 are respectively X-axis and Y-axis, the linear guide apparatus 5 in the present embodiment
Length direction and angle operation part 1 length direction it is parallel or substantially parallel.
Angular adjustment apparatus in the utility model may include a plurality of linear guide apparatus disposed in parallel 5.Specifically,
In the present embodiment, two lines guide device 5 is symmetricly set on the rotational axis line relative to the rotational axis line
Both sides.Linear guide apparatus 5 runs part 1 and is fixedly connected by connecting end 34 and angle, and connection end 34 is rectangle, length
Spend direction and the width direction of angle operation part 1 be parallel or substantially parallel, correspondingly, width direction and angle operation part 1
Length direction is parallel or substantially parallel.Linear guide apparatus 4 is that the linear of width direction setting along connection end 34 itself is led
The length direction of rail, the length direction and angle operation part 1 of the linear guides is parallel or substantially parallel.Along the length of linear guides
Direction is slideably equipped with linear slide block 51, and linear slide block 51 is fixedly connected with drive connection part 33.
Connection end 34 is equipped with the perforation passed through for drive connection part 33 and a plurality of linear guides.In the present embodiment, institute
Perforation is stated positioned at the middle part of the length direction in connecting pin portion 34, the both sides of the two lines guide rail point row perforation are drivingly connected
The connecting shaft 332 of part 33 is threaded through in the perforation, and two lines guide rail is symmetricly set on rotation axis relative to rotational axis line
The both sides of heart line.
Specifically, drive connection part 33 includes linking arm 331 and connecting shaft 332, one end and the actuator 32 of connecting shaft 332
The other end in the length direction of connecting shaft 332 is arranged in connection, linking arm 331, and linking arm 331 constitutes the one of drive connection part 33
End.Connecting shaft 332 is rollably rotatablely connected with actuator 32 by rolling bearing 4.Linking arm 331 divides row angle with actuator 32
The both sides of degree operation part 1, linear slide block 51 are fixedly connected with linking arm 331.
Further, linking arm 331 is rectangle.In the present embodiment, the linear slide block 51 in each linear guides and company
The lower surface for connecing arm 331 is fixedly connected；Or linear slide block 51 is integrally formed with linking arm 331.
In the present embodiment, linear guide rod 31 is leading screw, and actuator 32 is feed screw nut, and power plant is for driving leading screw
The width direction of the motor that nut is moved along the length direction of leading screw, the length direction and pedestal 2 of leading screw is parallel or substantially parallel.
Angle operation part 1 in the present embodiment is printing screen frame, and two arc shaped sliders 61 are arranged on arc-shaped guide rail 6,
Printing screen frame is fixedly connected with two arc shaped sliders 61.
The present embodiment also provides a kind of printing screen device, including angular adjustment apparatus 1 and printing screen, angle adjustment dress
1 is set as the printing screen frame provided in the present embodiment, the printing screen is arranged on printing screen frame.
As shown in Figure 1, when the printing screen frame in the angular adjustment apparatus provided in the present embodiment is located at first position, print
The length direction of brush filament rack is parallel or almost parallel with Y-axis, at this time linear slide block 51 be located at linear guides length direction it is close
Like intermediate part.When motor drives feed screw nut along guide screw movement, linking arm 331 is also one under the drive of connecting shaft 332
It is moved with along the length direction of leading screw, when printing screen frame is moved to the second position or the third place, such as Fig. 7-8 institutes
Show, length direction and the Y-axis oblique of printing screen frame.In the process of moving, printing screen frame is driven same linking arm 331
When be controlled by the limitation of arc-shaped guide rail 5 arcuate movement, the angle of the relative motion between linking arm 331 and printing screen frame can occur
Degree variable quantity is converted into the rotation of rolling bearing 4, the displacement variable of the relative motion between linking arm 331 and printing screen frame
It is converted into the displacement variable of the length direction along linear guides, and position will not occur in the length direction perpendicular to linear guides
It moves.
The angular adjustment apparatus provided in the present embodiment, by the rotation connection between drive connection part and feed screw nut come
The angle variables generated when arcuately guide rail moves with angle operation part are adapted to, by between drive connection part and angle operation part
Linear displacement be adapted come the radial displacement generated when arcuately guide rail moves with angle operation part so that in driving mechanism
It does interaction relation complicated between the feed screw nut of simple linear movement and the angle operation part for doing arcuate movement and is decomposed into two kinds
More manageable component motion has been obviously improved the precision and control accuracy of angle compared with prior art.
Above disclosed is only the preferred embodiment in the utility model, cannot limit the utility model with this certainly
Interest field, therefore equivalent variations made according to the patent scope of the utility model still belong to what the utility model was covered
Range.
Claims (10)
1. a kind of angular adjustment apparatus, including pedestal and angle run part, the pedestal is equipped with arc-shaped guide rail, the angle fortune
Row part is slidably disposed under the driving of driving mechanism on the arc-shaped guide rail, and the driving mechanism includes being arranged described
Power plant, the linear guide rod being arranged on the pedestal on pedestal and the driving being slidably arranged on the linear guide rod
Part, the power plant is for driving the actuator to be moved along the linear guide rod, it is characterised in that：The driving mechanism is also
Including drive connection part, the drive connection part is rotationally connected with the actuator, and the drive connection part is along fixed
Linear guide apparatus on angle operation part is movably connected with angle operation part.
2. angular adjustment apparatus according to claim 1, it is characterised in that：The drive connection part and the actuator it
Between rotational axis line it is vertical with the plane where the linear guide apparatus.
3. angular adjustment apparatus according to claim 2, it is characterised in that：The drive connection part is logical with the actuator
Rolling bearing is crossed to rotate connection.
4. angular adjustment apparatus according to claim 2, it is characterised in that：The length direction of the linear guide apparatus with
The length direction of the angle operation part is parallel.
5. angular adjustment apparatus according to claim 4, it is characterised in that：The linear guide apparatus is one or more
It is arranged in parallel.
6. angular adjustment apparatus according to claim 5, it is characterised in that：Two linear guide apparatus are relative to institute
State the both sides that rotational axis line is symmetricly set on the rotational axis line.
7. angular adjustment apparatus according to claim 6, it is characterised in that：The linear guide apparatus is linear guides,
It is slideably equipped with linear slide block, the drive connection part and the linear slide block along the length direction of linear guides described in every
It is fixedly connected.
8. angular adjustment apparatus according to claim 7, it is characterised in that：The drive connection part includes connecting shaft and company
Arm is connect, the connecting shaft is rotatablely connected with the actuator, and the linking arm is fixedly connected with the connecting shaft, the linking arm
The both sides of part are run with the actuator point row angle, the linear cunning is fixedly connected with the linking arm soon.
9. angular adjustment apparatus according to claim 4, it is characterised in that：The linear guide rod is leading screw, the driving
Part is feed screw nut, and the power plant is motor.
10. a kind of printing screen device including any angular adjustment apparatus in claim 1-9, including printing screen,
It is characterized in that：The angle operation part of the angular adjustment apparatus is printing screen frame, and the printing screen is arranged in the print
On brush filament rack.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820349077.3U CN207916262U (en) | 2018-03-14 | 2018-03-14 | A kind of angular adjustment apparatus and printing screen device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820349077.3U CN207916262U (en) | 2018-03-14 | 2018-03-14 | A kind of angular adjustment apparatus and printing screen device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207916262U true CN207916262U (en) | 2018-09-28 |
Family
ID=63598810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820349077.3U Ceased CN207916262U (en) | 2018-03-14 | 2018-03-14 | A kind of angular adjustment apparatus and printing screen device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207916262U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108357192A (en) * | 2018-03-14 | 2018-08-03 | 苏州迈为科技股份有限公司 | A kind of angular adjustment apparatus and printing screen device |
| CN110560926A (en) * | 2019-08-26 | 2019-12-13 | 深圳市牧激科技有限公司 | Laser processing apparatus |
-
2018
- 2018-03-14 CN CN201820349077.3U patent/CN207916262U/en not_active Ceased
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108357192A (en) * | 2018-03-14 | 2018-08-03 | 苏州迈为科技股份有限公司 | A kind of angular adjustment apparatus and printing screen device |
| CN110560926A (en) * | 2019-08-26 | 2019-12-13 | 深圳市牧激科技有限公司 | Laser processing apparatus |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| IW01 | Full invalidation of patent right | ||
| IW01 | Full invalidation of patent right |
Decision date of declaring invalidation: 20201113 Decision number of declaring invalidation: 46758 Granted publication date: 20180928 |