CN207883668U - A kind of wafer processing means for communicating - Google Patents

A kind of wafer processing means for communicating Download PDF

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Publication number
CN207883668U
CN207883668U CN201721472705.9U CN201721472705U CN207883668U CN 207883668 U CN207883668 U CN 207883668U CN 201721472705 U CN201721472705 U CN 201721472705U CN 207883668 U CN207883668 U CN 207883668U
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China
Prior art keywords
fixed
shaft
column
mounting base
suction cup
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Active
Application number
CN201721472705.9U
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Chinese (zh)
Inventor
魏盘生
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Shanghai Magic Valley Ic Technology Co Ltd
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Shanghai Magic Valley Ic Technology Co Ltd
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Priority to CN201721472705.9U priority Critical patent/CN207883668U/en
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Publication of CN207883668U publication Critical patent/CN207883668U/en
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Abstract

The utility model discloses a kind of wafer processing means for communicating, including:Pedestal, shaft, electric rotating machine, fixed seat, column, sliding block, mounting base, elevating screw, lifting motor, rodless cylinder, Pneumatic suction cup, the shaft is mounted on the base by bearing, the electric rotating machine output shaft and shaft is affixed, the fixed seat is fixed in the upper end of shaft, the column is fixed in the upper surface of fixed seat vertically, the sliding block is slidably connected on column, the mounting base is fixed in column top, the elevating screw both ends by bearing block respectively with fixed seat, mounting base connects, the lifting motor is fixed in mounting base, and lifting motor output shaft and elevating screw are affixed, the rodless cylinder is fixed in sliding block side, the Pneumatic suction cup is fixed in the working end of rodless cylinder, Pneumatic suction cup is connect by tracheae with air pump.The utility model has many advantages, such as that simple in structure, accurate positioning, using effect are good.

Description

A kind of wafer processing means for communicating
Technical field
The utility model is related to wafers to process technical field of auxiliary equipment, specially a kind of wafer processing means for communicating.
Background technology
The processing program of wafer is very complicated and accurate, generally includes:Positioning, lithographic, etching, diffusion, ion cloth Plant, film, cleaning etc., but it is existing to be sent wafer to each processing flow be typically reached using single mechanical arm At, therefore find that there are still following problems in actual use experience:Since the mechanical arm is mostly through flexible, liter Drop and rotation etc. make flowing mode delivery wafer, and therefore, the center that the allocation position of each flow must correspond to mechanical arm is in Ring-type surrounds kenel, can be smoothed out delivery operation, so as it can be seen that mechanical arm must be transmitted through sizable movement angle And it apart from just there is method delivery wafer to complete all flows, causes mechanical arm traveling time long, causes wafer to be easy idle And the problem of reducing overall operation efficiency and disadvantage.
Utility model content
The purpose of this utility model is to provide a kind of wafer processing means for communicating, to solve to carry in above-mentioned background technology The problem of going out.
To achieve the above object, the utility model provides the following technical solutions:A kind of wafer processing means for communicating, packet It includes:It is pedestal, shaft, electric rotating machine, fixed seat, column, sliding block, mounting base, elevating screw, lifting motor, rodless cylinder, pneumatic Sucker, the pedestal are horizontal table, and the shaft is mounted on the base by bearing, electric rotating machine output Axis is affixed with shaft, and the fixed seat is fixed in the upper end of shaft, and the column is fixed in the upper surface of fixed seat vertically, The sliding block is slidably connected on column, and sliding block rear portion is provided with threaded hole, and the mounting base is fixed in column top, described Elevating screw both ends connect respectively with fixed seat, mounting base by bearing block, the lifting motor is fixed in mounting base, And lifting motor output shaft and elevating screw are affixed, the rodless cylinder is fixed in sliding block side, and the Pneumatic suction cup is solid It is connected on the working end of rodless cylinder, Pneumatic suction cup is connect by tracheae with air pump.
Further, the column is two, and two columns are arranged in parallel.
Further, the electric rotating machine, lifting motor, rodless cylinder, Pneumatic suction cup are controlled by same controller.
Compared with prior art, the utility model has the beneficial effects that:
1. simple in structure, cheap;
2. it cooperates, accurate positioning;
3. can work long hours, operating distance is long, operating angle is big, using effect is good.
The utility model has many advantages, such as that simple in structure, accurate positioning, using effect are good.
Description of the drawings
Fig. 1 is the utility model overall structure diagram;
In figure:1- pedestals;2- shafts;3- electric rotating machines;4- fixed seats;5- columns;6- sliding blocks;7- mounting bases;8- is lifted Lead screw;9- lifting motors;10- rodless cylinders;11- Pneumatic suction cups.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work The every other embodiment obtained, shall fall within the protection scope of the present invention.
Referring to Fig. 1, the utility model provides a kind of wafer processing means for communicating, including:Pedestal 1, shaft 2, rotation Rotating motor 3, fixed seat 4, column 5, sliding block 6, mounting base 7, elevating screw 8, lifting motor 9, rodless cylinder 10, Pneumatic suction cup 11, the pedestal 1 is horizontal table, and the shaft 2 is mounted on by bearing on pedestal 1, and the electric rotating machine 3 is defeated Shaft and shaft 2 are affixed, and the fixed seat 4 is fixed in the upper end of shaft 2, and the column 5 is fixed in fixed seat 4 vertically Upper surface, the sliding block 6 are slidably connected on column 5, and 6 rear portion of sliding block is provided with threaded hole, and the mounting base 7 is fixed in vertical 5 top of column, 8 both ends of elevating screw are connect with fixed seat 4, mounting base 7 respectively by bearing block, the lifting motor 9 are fixed in mounting base 7, and 9 output shaft of lifting motor and elevating screw 8 are affixed, and the rodless cylinder 10 is fixed in sliding block 6 Side, the Pneumatic suction cup 11 are fixed in the working end of rodless cylinder 10, and Pneumatic suction cup 11 is connect by tracheae with air pump.
Further, the column 5 is two, and two columns 5 are arranged in parallel.
Further, the electric rotating machine 3, lifting motor 9, rodless cylinder 10, Pneumatic suction cup 11 are by same controller Control.
Operation principle:The utility model provides a kind of wafer processing means for communicating, in use, Pneumatic suction cup 11 is work Make end, allow working end to be rotated up in the side of horizontal plane by electric rotating machine 3, the cooperation of elevating screw 8 and lifting motor 9 allows work End upgrades on vertical direction, and rodless cylinder 10 allows working end monodisplacement on the direction of horizontal plane, passes through three dimensions The movement of degree allows working end to realize the movement in space, by the air-breathing of Pneumatic suction cup 11 and deflation to the absorption of workpiece with release It puts, to complete the delivery effect of wafer processing.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art, It is appreciated that can these embodiments be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaiied Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.

Claims (3)

1. a kind of wafer processing means for communicating, including:Pedestal (1), shaft (2), electric rotating machine (3), fixed seat (4), column (5), sliding block (6), mounting base (7), elevating screw (8), lifting motor (9), rodless cylinder (10), Pneumatic suction cup (11), it is special Sign is:The pedestal (1) is horizontal table, and the shaft (2) is mounted on by bearing on pedestal (1), described Electric rotating machine (3) output shaft and shaft (2) are affixed, and the fixed seat (4) is fixed in the upper end of shaft (2), the column (5) it is fixed in the upper surface of fixed seat (4) vertically, the sliding block (6) is slidably connected on column (5), and sliding block (6) rear portion is opened There are threaded hole, the mounting base (7) to be fixed in column (5) top, the elevating screw (8) both ends are distinguished by bearing block It is connect with fixed seat (4), mounting base (7), the lifting motor (9) is fixed in mounting base (7), and lifting motor (9) is defeated Shaft and elevating screw (8) are affixed, and the rodless cylinder (10) is fixed in sliding block (6) side, the Pneumatic suction cup (11) It is fixed in the working end of rodless cylinder (10), Pneumatic suction cup (11) is connect by tracheae with air pump.
2. a kind of wafer processing means for communicating according to claim 1, it is characterised in that:The column (5) is two A, two columns (5) are arranged in parallel.
3. a kind of wafer processing means for communicating according to claim 1, it is characterised in that:The electric rotating machine (3), Lifting motor (9), rodless cylinder (10), Pneumatic suction cup (11) are controlled by same controller.
CN201721472705.9U 2017-11-07 2017-11-07 A kind of wafer processing means for communicating Active CN207883668U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721472705.9U CN207883668U (en) 2017-11-07 2017-11-07 A kind of wafer processing means for communicating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721472705.9U CN207883668U (en) 2017-11-07 2017-11-07 A kind of wafer processing means for communicating

Publications (1)

Publication Number Publication Date
CN207883668U true CN207883668U (en) 2018-09-18

Family

ID=63500823

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721472705.9U Active CN207883668U (en) 2017-11-07 2017-11-07 A kind of wafer processing means for communicating

Country Status (1)

Country Link
CN (1) CN207883668U (en)

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