CN207881463U - A kind of horizontal reducing atmosphere vacuum annealing furnace - Google Patents
A kind of horizontal reducing atmosphere vacuum annealing furnace Download PDFInfo
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- CN207881463U CN207881463U CN201820010707.4U CN201820010707U CN207881463U CN 207881463 U CN207881463 U CN 207881463U CN 201820010707 U CN201820010707 U CN 201820010707U CN 207881463 U CN207881463 U CN 207881463U
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- flue
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- fire door
- reducing atmosphere
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Abstract
The utility model provides a kind of horizontal reducing atmosphere vacuum annealing furnace, including rack, furnace body, fire door, flue, adiabatic heat-insulation furnace lining, heating element, vacuum system, atmosphere system, control system, safety device and radiator, vacuum system and atmosphere system are mounted on frame lower, control system installation frame rear portion；Flue is designed using height warm area, and high-temperature region is heated using U-shaped Si-Mo rod, and Si-Mo rod both sides arrangement, low-temperature space is heated using FEC ceramic fiber heaters, circumferentially arranged, height warm area is designed with diaphragm structure；Flue is designed using high and low warm area in the present invention, can effectively realize temperature gradient；Light fibre material thermal conductivity is relatively low, proportion is small, can effectively reduce the power consumption during equipment normal use；Vacuum system and atmosphere system are controlled using vacuum pump set and mass flowmenter so that vacuum degree is higher, gas flow control accuracy is preferable, reaches the index request of high, precision and frontier CVD technological experiments.
Description
Technical field
The present invention relates to vacuum equipment field more particularly to a kind of horizontal reducing atmosphere vacuum annealing furnace.
Background technology
Atmosphere vacuum annealing furnace serial equipment is primarily adapted for use in the development of carbon nanotube, crystalline silicon substrates plated film, nano-ZnO
Controllable growth, ceramic capacitor (MLCC) the CVD techniques such as the diffusion welding (DW) of atmosphere sintering, metal material.Currently, traditional gas
Atmosphere vacuum annealing furnace designs for single temperature zone, is difficult to realize the control of temperature gradient, can not meet the requirement of CVD techniques；In boiler tube
In selection, high aluminum pipe is selected in the past, alumina content is low, heat resistance is poor, the easy Cracking of furnace tube of generation in the case of a high temperature,
Phenomenon of rupture causes technological experiment that cannot be normally carried out, simultaneously as boiler tube both ends and centre do not support, will also result in height
Boiler tube bending in the case of temperature is even broken；In addition, vacuum system, atmosphere system use traditional mechanical pump and float stream
Gauge controls, the disadvantage is that system vacuum is relatively low, gas flow control accuracy is poor, it is real to be extremely difficult to high, precision and frontier CVD techniques
The index request tested, prevents user from normal use.
Invention content
The purpose of the present invention is to provide a kind of horizontal reducing atmosphere vacuum annealing furnaces, and above-mentioned traditional atmosphere vacuum is overcome to move back
Stove is difficult to realize the control of temperature gradient, and Cracking of furnace tube, bending even phenomenon of rupture, vacuum system, atmosphere system are true
Reciprocal of duty cycle is relatively low, gas flow control accuracy is poor, the defects of being extremely difficult to the index request of high, precision and frontier CVD technological experiments.
To achieve the above object, the present invention provides the following technical solutions：
A kind of horizontal reducing atmosphere vacuum annealing furnace, including rack, furnace body, fire door, flue, adiabatic heat-insulation furnace lining, heating
Element, vacuum system, atmosphere system, control system, safety device and radiator, wherein：Furnace body is mounted in rack, fire door
It is connect with furnace body, flue is placed in furnace interior, and adiabatic heat-insulation furnace lining is mounted on inside flue, and heating element is in adiabatic heat-insulation furnace lining
Two sides arrangement installation, vacuum system and atmosphere system be mounted on frame lower, control system installation frame rear portion, and safety fills
It sets and is mounted on upper of furnace body with radiator.
Preferably, guide-track groove, the company of being slidably matched between flue and guide-track groove are installed in the furnace interior two sides
It connects, such flue can be free to slide on guide-track groove；Lower portion of furnace body is welded on saddle, and furnace body is fixedly connected as with rack
One.
Preferably, pivoted arm one end is connect by aligning device with fire door, and the pivoted arm other end passes through shaft and furnace body
Connection, such fire door can rotate around the axis, be opened and closed；Aligning device is mounted on fire door outer side center position,
For multidirectional adjusting fire door position.
Preferably, the flue is arranged in furnace interior, and flue both sides are equipped with idler wheel, these idler wheels and guide rail
It is slidably connected between slot so that idler wheel can be free to slide on guide-track groove, and flue is equipped with interior fire door, by interior fire door
Closed heating space is formed after closing.
Preferably, the adiabatic heat-insulation furnace lining inside flue is made of multiple layer refractory.
Preferably, the control system for measuring temperature and pressure when material sintering, and energy basis in real time
Material sintering process carries out atmosphere filling and displacement, opens and closes automatically heating.
Preferably, the safety device is mounted on upper of furnace body, the work in furnace interior superpressure or gas burst
Make, equipment safety can be protected.
Preferably, the radiator is mounted on upper of furnace body, for reducing the surface temperature of furnace body.
Preferably, the flue is designed using height warm area, and high-temperature region is heated using U-shaped Si-Mo rod, Si-Mo rod
Both sides arrange that low-temperature space is heated using FEC ceramic fiber heaters, is circumferentially arranged, height warm area is designed with diaphragm structure；
Resistance to material whole Ceramics fiber light material pressure seaming in flue is assembled, is flame retardant coating successively from inside to outside, protects
Warm layer and thermal insulation layer select mullite fiber, high aluminum fiber and alumina silicate fibre respectively；High-purity corundum boiler tube in flue can
To free in and out flue, high-purity corundum boiler tube both ends are fixed with the steel flange with water cooling, and steel flange is detachable, silicon
Rubber sealing, both ends steel flange connect vacuum system and atmosphere system respectively.
Compared with prior art, beneficial effects of the present invention are as follows：
Structure of the invention is novel, easy to operate, adaptable, wherein：Flue is designed using high and low warm area in the present invention,
It can effectively realize temperature gradient；Light fibre material thermal conductivity is relatively low, proportion is small, can effectively reduce equipment normal use process
In power consumption；Vacuum system and atmosphere system are controlled using vacuum pump set and mass flowmenter so that vacuum degree is higher, gas stream
It is preferable to measure control accuracy, reaches the index request of high, precision and frontier CVD technological experiments.
Description of the drawings
Fig. 1 is dimensional structure diagram of the present invention；
Fig. 2 is another angle dimensional structure diagram of the present invention；
It is marked in figure：Rack (1), furnace body (2), guide-track groove (201), saddle (202), fire door (3), pivoted arm (301), shaft
(302), aligning device (303), flue (4), idler wheel (401), interior fire door (402), adiabatic heat-insulation furnace lining (5), heating element
(6), vacuum system (7), atmosphere system (8), control system (9), safety device (10), radiator (11).
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes.
It please refers to Fig.1-2 present invention and a kind of technical solution is provided：A kind of horizontal reducing atmosphere vacuum annealing furnace, including rack
1, furnace body 2, fire door 3, flue 4, adiabatic heat-insulation furnace lining 5, heating element 6, vacuum system 7, atmosphere system 8, control system 9, peace
Full device 10 and radiator 11, wherein：Furnace body 2 is mounted in rack 1, and fire door 3 is connect with furnace body 2, and flue 4 is placed in furnace body 2
Inside, adiabatic heat-insulation furnace lining 5 are mounted on inside flue 4, and heating element 6 arranges installation in the two sides of adiabatic heat-insulation furnace lining 5, very
Empty set system 7 and atmosphere system 8 are mounted on 1 lower part of rack, 9 installation frame of control system, 1 rear portion, safety device 10 and radiator
11 are mounted on 2 top of furnace body.Guide-track groove 201 is installed in 2 inside two sides of the furnace body, slides and matches between flue 4 and guide-track groove 201
Connection is closed, such flue 4 can be free to slide on guide-track groove 201；2 lower weld of furnace body on saddle 202, and furnace body 2 with
Rack 1 is connected to one.301 one end of pivoted arm is connect by aligning device 303 with fire door 3, and 301 other end of pivoted arm is by turning
Axis 302 is connect with furnace body 2, and such fire door 3 302 can rotate around the shaft, be opened and closed；Aligning device 303 is mounted on
On 3 outer side center position of fire door, it to be used for multidirectional 3 position of adjusting fire door.The flue 4 is arranged inside furnace body 2,4 both sides of flue
Idler wheel 401 is installed, is slidably connected between these idler wheels 401 and guide-track groove 201 so that idler wheel 401 can be in guide-track groove
Free to slide on 201, flue 4 is equipped with interior fire door 402, and closed heating space is formed after closing interior fire door 402.Installation
Adiabatic heat-insulation furnace lining 5 inside flue 4 is made of multiple layer refractory.The control system 9 for measuring material in real time
Temperature and pressure when sintering, and atmosphere filling and displacement can be carried out according to material sintering process, open and close automatically heating.
The safety device 10 is mounted on 2 top of furnace body, works in 2 inner overpressure of furnace body or gas burst, can protect equipment safety.
The radiator 11 is mounted on 2 top of furnace body, for reducing the surface temperature of furnace body 2.
Wherein：The flue 4 is designed using height warm area, and high-temperature region is heated using U-shaped Si-Mo rod, Si-Mo rod both sides cloth
It sets, low-temperature space is heated using FEC ceramic fiber heaters, is circumferentially arranged, height warm area is designed with diaphragm structure；In flue 4
Interior resistance to material whole Ceramics fiber light material pressure seaming is assembled, is flame retardant coating, insulating layer successively from inside to outside
And thermal insulation layer, mullite fiber, high aluminum fiber and alumina silicate fibre are selected respectively；High-purity corundum boiler tube in flue 4 can be with
Flue 4 is freed in and out, high-purity corundum boiler tube both ends are fixed with the steel flange with water cooling, and steel flange is detachable, silicon
Rubber sealing, both ends steel flange connect vacuum system and atmosphere system respectively.
Structure of the invention is novel, easy to operate, adaptable, wherein：Flue is designed using high and low warm area in the present invention,
It can effectively realize temperature gradient；Light fibre material thermal conductivity is relatively low, proportion is small, can effectively reduce equipment normal use process
In power consumption；Vacuum system and atmosphere system are controlled using vacuum pump set and mass flowmenter so that vacuum degree is higher, gas stream
It is preferable to measure control accuracy, reaches the index request of high, precision and frontier CVD technological experiments.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, although with reference to aforementioned reality
Applying example, invention is explained in detail, for those skilled in the art, still can be to aforementioned each implementation
Technical solution recorded in example is modified or equivalent replacement of some of the technical features.All essences in the present invention
With within principle, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention god.
Claims (8)
1. a kind of horizontal reducing atmosphere vacuum annealing furnace, which is characterized in that including rack (1), furnace body (2), fire door (3), flue
(4), adiabatic heat-insulation furnace lining (5), heating element (6), vacuum system (7), atmosphere system (8), control system (9), safety device
(10) and radiator (11), wherein：Furnace body (2) is mounted in rack (1), and fire door (3) is connect with furnace body (2), and flue (4) is set
Internal in furnace body (2), adiabatic heat-insulation furnace lining (5) is mounted on flue (4) inside, and heating element (6) is in adiabatic heat-insulation furnace lining (5)
Two sides arrangement installation, vacuum system (7) and atmosphere system (8) are mounted on rack (1) lower part, control system (9) installation frame
(1) rear portion, safety device (10) and radiator (11) are mounted on furnace body (2) top.
2. a kind of horizontal reducing atmosphere vacuum annealing furnace according to claim 1, which is characterized in that the furnace body (2) is internal
Guide-track groove (201) is installed in two sides, is slidably connected between flue (4) and guide-track groove (201), and such flue (4) can be
It is free to slide on guide-track groove (201)；Furnace body (2) lower weld is on saddle (202), and furnace body (2) is fixedly connected with rack (1)
It is integrated.
3. a kind of horizontal reducing atmosphere vacuum annealing furnace according to claim 1, which is characterized in that pivoted arm (301) one end is logical
It crosses aligning device (303) to connect with fire door (3), pivoted arm (301) other end is connect by shaft (302) with furnace body (2), such stove
Door (3) (302) can rotate around the shaft, be opened and closed；Aligning device (303) is mounted on fire door (3) outer side center position
It sets, is used for multidirectional adjusting fire door (3) position.
4. a kind of horizontal reducing atmosphere vacuum annealing furnace according to claim 1, which is characterized in that flue (4) setting
Internal in furnace body (2), flue (4) both sides are equipped with idler wheel (401), slide and match between these idler wheels (401) and guide-track groove (201)
Close connection so that idler wheel (401) can be free to slide on guide-track groove (201), and flue (4) is equipped with interior fire door (402), is inciting somebody to action
Interior fire door (402) forms closed heating space after closing.
5. a kind of horizontal reducing atmosphere vacuum annealing furnace according to claim 1, which is characterized in that be mounted in flue (4)
The adiabatic heat-insulation furnace lining (5) in portion is made of multiple layer refractory.
6. a kind of horizontal reducing atmosphere vacuum annealing furnace according to claim 1, which is characterized in that the control system (9)
For measuring temperature and pressure when material sintering in real time, and atmosphere filling and displacement can be carried out according to material sintering process, from
It is dynamic to open and close heating.
7. a kind of horizontal reducing atmosphere vacuum annealing furnace according to claim 1, which is characterized in that the safety device (10)
Mounted on furnace body (2) top, works in furnace body (2) inner overpressure or gas burst, equipment safety can be protected.
8. a kind of horizontal reducing atmosphere vacuum annealing furnace according to claim 1, which is characterized in that the radiator (11)
Mounted on furnace body (2) top, for reducing the surface temperature of furnace body (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820010707.4U CN207881463U (en) | 2018-01-04 | 2018-01-04 | A kind of horizontal reducing atmosphere vacuum annealing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820010707.4U CN207881463U (en) | 2018-01-04 | 2018-01-04 | A kind of horizontal reducing atmosphere vacuum annealing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207881463U true CN207881463U (en) | 2018-09-18 |
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ID=63505709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820010707.4U Active CN207881463U (en) | 2018-01-04 | 2018-01-04 | A kind of horizontal reducing atmosphere vacuum annealing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207881463U (en) |
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2018
- 2018-01-04 CN CN201820010707.4U patent/CN207881463U/en active Active
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