CN207850322U - The intermediate frequency error detecting system of optical elements of large caliber and laboratory - Google Patents
The intermediate frequency error detecting system of optical elements of large caliber and laboratory Download PDFInfo
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Abstract
The utility model provides a kind of intermediate frequency error detecting system of optical elements of large caliber and laboratory, the system include：The imaging sensor being fixed on three-D displacement platform, the terminal device being connect respectively with imaging sensor and three-D displacement platform, light beam generator, collimator and extender device, beam splitter and element under test are sequentially distributed on a horizontal line, and the side of beam splitter is provided with imaging sensor, and imaging sensor can acquire the light wave wavefront reflected by element under test, plot of light intensity is generated, and plot of light intensity is sent to terminal device；Terminal device receives the plot of light intensity of different location, and the testing result of the intermediate frequency error of optical elements of large caliber is exported according to the plot of light intensity of different location.Detection process need not generate interference fringe, the internal structure of system is simple, at low cost without accurate reference path, and it is not interfered by external environment, alleviates existing white light interference micrometering system structure complexity, technical problem serious by environmental disturbances, testing cost is high.
Description
Technical field
The utility model is related to the technical fields of optical detection, are missed more particularly, to a kind of intermediate frequency of optical elements of large caliber
Poor detecting system and laboratory.
Background technology
Meter level caliber high-precision optical element has in fields such as astronomicalc optics, inertial confinement fusion and space optics
It is widely applied.When processing optical elements of large caliber, mismachining tolerance according to error space frequency range can be divided into low frequency aberration,
Intermediate frequency error and high frequency error.Wherein, for meter level optical elements of large caliber, intermediate frequency error space frequency is
0.03mm-1~0.4mm-1.The intermediate frequency error of optical elements of large caliber often generates during its retrofit and polishing.
During these, intermediate frequency error is by the tip radius of process tool, feed stepping-in amount, tool track, vibration, processing thermal drift
Etc. factors couple to be formed, be rendered as the machining spur for the periodic structure for having certain.Intermediate frequency error due to its spatial frequency height,
And distribution has certain periodic structure, often will produce diffraction effect, makes the far-field focus disperse of optical elements of large caliber,
Multiorder diffractive secondary lobe is formed, it is both very unfavorable to imaging resolution, formation harm also is utilized to energy.Therefore, for meter level
For optical elements of large caliber, the control of intermediate frequency error is the key that further increase its quality, and to the detection of intermediate frequency error
Then become the matter of utmost importance of bin error control.
The error-detecting means of optical elements of large caliber are related to error space frequency range.Low frequency aberration, that is, face type error, can
It is detected and is obtained by interferometer；High frequency error, that is, roughness can be obtained by contourgraph or atomic force microscope detection；And intermediate frequency
Error is since its error frequency range is special, for being detected particularly with optical elements of large caliber, often due to the limited figure of interferometer
The intermediate frequency control information of optical surface can not be effectively reflected by interferometer as resolution ratio, it is thus typically necessary to utilize
White light interference microscope detects.Its measurement method schematic diagram is as shown in Figure 1.The detection technique be sent out using coherent source it is white
Light, enters interference microscope by spectroscope, is divided into reference path and optical path by interference microscope.In optical path
Light is interfered by the light of surface reflection to be measured and reference path, forms interference fringe.The characteristics of white-light fringe is, by
It is directly superimposed in the interference of light striped of multiple wavelength, the intetference-fit strengthening of non-zero light path position can be made to decline, therefore can
To directly obtain zero optical path difference position.By modulate piezoelectric ceramics, change the light path of optical path, to change optical path with
The optical path difference of reference path, and then interference fringe is made to move.According to the modulation of moving interference fringes situation and piezoelectric ceramics
State can mutually be calculated apparent height information to be measured by solution, realize the detection of surface error.
Detection for large component, it is also necessary to carry out sub-aperture stitching to obtain the information of full surface.Sub-aperture is spelled
It refers to after completing the detection of a regional area, so that interference system and surface to be measured is relatively moved by displacement platform to connect, will
Effective measuring area, which is moved to, have been surveyed except region, at the same make region to be measured and surveyed region have certain overlapping in favor of spell
It connects, after the detection for completing new region to be measured, new measurement result and acquired measurement result is spliced into wide range
Measurement result.
Although white light interference micrometering mode can measure intermediate frequency error, its single measurement range is very
It is small, a large amount of sub-aperture stitching is generally required, displacement platform precision, environmental Kuznets Curves and computer disposal, storage capacity are proposed
Extremely harsh requirement, for optical elements of large caliber more so.
Therefore, for optical elements of large caliber intermediate frequency error-detecting, existing white light interference micrometering system knot
Structure complexity, disadvantage serious by environmental disturbances, testing cost is high.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of intermediate frequency error detecting systems of optical elements of large caliber
And laboratory, to alleviate, existing white light interference micrometering system structure is complicated, serious by environmental disturbances, testing cost is high
Technical problem.
In a first aspect, the utility model embodiment provides a kind of intermediate frequency error detecting system of optical elements of large caliber,
The system comprises：Light beam generator, collimator and extender device, beam splitter, element under test, the image being fixed on three-D displacement platform pass
Sensor, and the terminal device that is connect respectively with described image sensor and the three-D displacement platform, wherein the light beam generates
Device, the collimator and extender device, the beam splitter and the element under test are sequentially distributed on a horizontal line, the beam splitter
Side is provided with described image sensor, and described image sensor can acquire the light wave wave reflected by the element under test
Before；
The light beam generator is for generating light beam；
The collimator and extender device is used to the light beam being converted to plane light wave；
The beam splitter is used to be split the plane light wave, obtains transmission plane light wave and plane of reflection light wave,
Wherein, the transmission plane light wave reaches the element under test, and the plane of reflection light wave leaves the system；
The element under test obtains light wave wavefront for reflecting the transmission plane light wave；
The beam splitter is additionally operable to be split the light wave wavefront, obtains transmitted light wave wavefront and reflecting light wave
Before, wherein the reflecting light wavefront reaches described image sensor；
Described image sensor generates plot of light intensity, and the plot of light intensity is sent to institute for receiving the light wave wavefront
State terminal device；
The three-D displacement platform is used to receive the position command that the terminal device is sent, and is carried out according to the position command
It is mobile, so that the plot of light intensity of described image sensor acquisition different location；
The terminal device is used to receive the plot of light intensity of the different location, is exported according to the plot of light intensity of the different location
The testing result of the intermediate frequency error of the optical elements of large caliber.
With reference to first aspect, the utility model embodiment provides the first possible embodiment of first aspect,
In, the light beam generator includes：Laser, the laser is for generating laser beam.
With reference to first aspect, the utility model embodiment provides second of possible embodiment of first aspect,
In, the laser includes：He-Ne laser.
With reference to first aspect, the utility model embodiment provides the third possible embodiment of first aspect,
In, the He-Ne laser is the He-Ne laser that wavelength is 632.8.
With reference to first aspect, the utility model embodiment provides the 4th kind of possible embodiment of first aspect,
In, the collimator and extender device includes：Spatial filter and collimation lens；
The spatial filter is disposed adjacent with the laser, and the spatial filter is for being converted to the light beam
Divergent spherical wave；
The collimation lens is arranged between the spatial filter and the beam splitter, and the collimation lens is used for institute
It states divergent spherical wave and is converted to the plane light wave.
With reference to first aspect, the utility model embodiment provides the 5th kind of possible embodiment of first aspect,
In, the spatial filter includes：Microcobjective and pin hole, wherein the pin hole is placed in the focus of the collimation lens.
With reference to first aspect, the utility model embodiment provides the 6th kind of possible embodiment of first aspect,
In, described image sensor includes：Charge coupled cell and metal oxide semiconductor device.
With reference to first aspect, the utility model embodiment provides the 7th kind of possible embodiment of first aspect,
In, the element under test includes：Plane component to be measured and concave element to be measured.
With reference to first aspect, the utility model embodiment provides the 8th kind of possible embodiment of first aspect,
In, when the element under test is the plane component to be measured, meeting is set between the beam splitter and described image sensor
Poly- lens.
Second aspect, the utility model embodiment additionally provide a kind of intermediate frequency error-detecting experiment of optical elements of large caliber
Room, including：The intermediate frequency error detecting system of optical elements of large caliber described in above-mentioned first aspect.
The utility model embodiment brings following advantageous effect：The utility model embodiment provides a kind of heavy caliber light
Learn element intermediate frequency error detecting system and laboratory, the intermediate frequency error detecting system of the optical elements of large caliber include：Light beam
Generator, collimator and extender device, beam splitter, element under test, the imaging sensor being fixed on three-D displacement platform, and respectively with figure
The terminal device connected with three-D displacement platform as sensor, wherein light beam generator, collimator and extender device, beam splitter and member to be measured
Part is sequentially distributed on a horizontal line, and the side of beam splitter is provided with imaging sensor, and imaging sensor can acquire process
The light wave wavefront of element under test reflection；Light beam generator is for generating light beam；Collimator and extender device is used to light beam being converted to plane
Light wave；Beam splitter obtains transmission plane light wave and plane of reflection light wave for being split to plane light wave, wherein transmission is flat
Face light wave reaches element under test, and plane of reflection light wave leaves system；Element under test is obtained for reflecting transmission plane light wave
To light wave wavefront；Beam splitter is additionally operable to be split light wave wavefront, obtains transmitted light wave wavefront and reflecting light wavefront,
In, reflecting light wavefront reaches imaging sensor；Imaging sensor generates plot of light intensity for receiving light wave wavefront, and by light intensity
Figure is sent to terminal device；Three-D displacement platform is used for the position command that receiving terminal apparatus is sent, and is moved according to position command
It is dynamic, so that the plot of light intensity of imaging sensor acquisition different location；Terminal device is used to receive the plot of light intensity of different location, according to not
With the testing result of the intermediate frequency error of the plot of light intensity output optical elements of large caliber of position.
Existing white light interference micrometering system sends out white light using coherent source, and it is micro- to enter interference by spectroscope
Mirror is divided into reference path and optical path by interference microscope.Light in optical path passes through surface reflection to be measured and reference
The light of light path interferes, and forms interference fringe, and zero optical path difference position is obtained according to interference fringe.By modulating piezoelectric ceramics,
The light path for changing optical path, to change the optical path difference of optical path and reference path, and then makes interference fringe move.
According to the modulation condition of moving interference fringes situation and piezoelectric ceramics, apparent height information to be measured can be mutually calculated by solution,
Realize the detection of surface error.Intermediate frequency error-detecting is carried out by the way of interference necessarily is formed interference fringe, internal system knot
Structure is complicated, and needs far more precise reference mirror, and cost is higher, and interference fringe is serious by environmental disturbances.With it is existing white
Interference of light micrometering system is compared, the intermediate frequency error detecting system in the utility model embodiment, it is only necessary to light beam generator,
Collimator and extender device, beam splitter and element under test are sequentially distributed on a horizontal line, and imaging sensor is arranged the one of beam splitter
Side, for the light wave wavefront reflected by element under test can be acquired.Detection process need not generate interference fringe, system
Internal structure it is simple, it is at low cost without accurate reference path, and do not interfered by external environment, alleviate existing
White light interference micrometering system structure complexity, technical problem serious by environmental disturbances, testing cost is high.
Other feature and advantage of the utility model will illustrate in the following description, also, partly from specification
In become apparent, or understood by implementing the utility model.The purpose of this utility model and other advantages are illustrating
Specifically noted structure is realized and is obtained in book, claims and attached drawing.
To enable the above objects, features, and advantages of the utility model to be clearer and more comprehensible, preferred embodiment cited below particularly, and
The appended attached drawing of cooperation, is described in detail below.
Description of the drawings
It, below will be right in order to illustrate more clearly of specific embodiment of the present invention or technical solution in the prior art
Specific implementation mode or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, it is described below
In attached drawing be that some embodiments of the utility model are not paying creativeness for those of ordinary skill in the art
Under the premise of labour, other drawings may also be obtained based on these drawings.
Fig. 1 is the detecting system signal that the white light interference that the utility model embodiment provides is measured microscopically intermediate frequency error
Figure；
Fig. 2 is the structural schematic diagram of the intermediate frequency error detecting system for the plane component that the utility model embodiment provides；
Fig. 3 is the structural schematic diagram of the intermediate frequency error detecting system for the concave element that the utility model embodiment provides；
Fig. 4 be the utility model embodiment provide by improved Phase Retrieve Algorithm focal plane figure and focal plane
Figure carries out phase recovery, obtains the flow chart of the testing result of the intermediate frequency error of optical elements of large caliber；
Fig. 5 be the improved Phase Retrieve Algorithm that provides of the utility model embodiment to intermediate frequency error-detecting when flow
Figure.
Icon：
11- light beam generators；12- collimator and extender devices；13- beam splitters；14- element under tests；15- three-D displacement platforms；16- schemes
As sensor；121- spatial filters；122- collimation lenses.
Specific implementation mode
To keep the purpose, technical scheme and advantage of the utility model embodiment clearer, below in conjunction with attached drawing to this
The technical solution of utility model is clearly and completely described, it is clear that described embodiment is that the utility model part is real
Example is applied, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not making
The every other embodiment obtained under the premise of creative work, shall fall within the protection scope of the present invention.
For ease of understanding the present embodiment, first to a kind of large-aperture optical disclosed in the utility model embodiment
The intermediate frequency error detecting system of element describes in detail.
Embodiment one：
A kind of intermediate frequency error detecting system of optical elements of large caliber, with reference to figure 2, which includes：Light beam generator 11,
Collimator and extender device 12, beam splitter 13, element under test 14, the imaging sensor 16 being fixed on three-D displacement platform 15, and respectively
The terminal device being connect with imaging sensor 16 and three-D displacement platform 15, wherein light beam generator 11, collimator and extender device 12, point
Beam mirror 13 and element under test 14 are sequentially distributed on a horizontal line, and the side of beam splitter 13 is provided with imaging sensor 16, figure
As sensor 16 can acquire the light wave wavefront reflected by element under test 14；
Light beam generator 11 is for generating light beam；
Collimator and extender device 12 is used to light beam being converted to plane light wave；
Beam splitter 13 obtains transmission plane light wave and plane of reflection light wave for being split to plane light wave, wherein thoroughly
It penetrates plane light wave and reaches element under test 14, plane of reflection light wave leaves system；
Element under test 14 obtains light wave wavefront for reflecting transmission plane light wave；
Beam splitter 13 is additionally operable to be split light wave wavefront, obtains transmitted light wave wavefront and reflecting light wavefront, wherein
Reflecting light wavefront reaches imaging sensor 16；
Imaging sensor 16 generates plot of light intensity, and plot of light intensity is sent to terminal device for receiving light wave wavefront；
Three-D displacement platform 15 is used for the position command that receiving terminal apparatus is sent, and is moved according to position command, so that
Imaging sensor 16 acquires the plot of light intensity of different location；
Terminal device is used to receive the plot of light intensity of different location, and large-aperture optical member is exported according to the plot of light intensity of different location
The testing result of the intermediate frequency error of part.
In the utility model embodiment, the structure of the intermediate frequency error detecting system of optical elements of large caliber is as shown in Figure 2
(terminal device being not shown in Fig. 2, and Fig. 2 is illustrated by taking the intermediate frequency error detecting system of plane component as an example).
Wherein, light beam generator 11 is for generating light beam, and light beam reaches collimator and extender device 12, and collimator and extender device 12 is by light beam
Plane light wave is converted to, plane light wave reaches beam splitter 13, and beam splitter 13 is split plane light wave, obtains transmission plane light
Wave and plane of reflection light wave, transmission plane light wave reach plane component to be measured, and plane of reflection light wave leaves system and (is reflected into Fig. 2
The lower section of middle beam splitter 13), there are surface errors on plane component surface to be measured, can be formed and be modulated to transmission plane light wave, therefore,
Accordingly changed by the reflected light wave wavefront of plane component to be measured, light wave wavefront reaches beam splitter 13, beam splitter
13 are again split light wave wavefront, transmitted light wave wavefront and reflecting light wavefront, and reflecting light wavefront reaches imaging sensor
16, imaging sensor 16 receives light wave wavefront, generates plot of light intensity (including focal plane figure and focal plane figure), and plot of light intensity is sent out
It send to terminal device.
In addition, three-D displacement platform 15 is capable of the position command of receiving terminal apparatus transmission, moved according to position command,
So that imaging sensor 16 acquires the plot of light intensity (including focal plane figure and focal plane figure) of different location, finally, terminal device
The plot of light intensity for receiving the different location exports the inspection of the intermediate frequency error of optical elements of large caliber according to the plot of light intensity of different location
Survey result.
As shown in Fig. 2, imaging sensor 16 is fixed on three-D displacement platform 15, three-D displacement platform 15 can make imaging sensor
16 can make 16 collected hot spot of imaging sensor generate different defocusing amounts along optical axis direction stepping by front and back stepping,
There are a series of focal plane images to obtain.
On the basis of moving axially, by the two-dimensional movement in 15 offer face of three-D displacement platform, it can be achieved that using limited
The large range of light distribution of 16 dimensional measurement of imaging sensor, can especially acquire by intermediate frequency error diffraction generate away from center
The diffraction secondary lobe light intensity of focal spot farther out, to obtain complete focal plane figure and focal plane figure, and then for for intermediate frequency error
Phase recovery detection provide calculation basis.
Specifically, in actual use, three-D displacement platform 15 and imaging sensor 16 (for example are calculated with terminal device respectively
Machine) it connects, user can set default acquisition position (i.e. default defocus position, quantity are multiple) on computers, originally scheme
Picture sensor 16 is arranged in focal plane position, collects focal plane figure, and focal plane figure is sent to terminal device, then,
Computer sends position command according to default acquisition position to three-D displacement platform 15, and three-D displacement platform 15 is carried out according to position command
It is mobile, it reaches after presetting acquisition position, imaging sensor 16 collects multiple defocus corresponding to multiple default acquisition positions
The focal plane figure collected after often collecting a focal plane figure, is sent to terminal device by plan view, until complete
At the acquisition position of all focal plane figures and focal plane figure.
Existing white light interference micrometering system sends out white light using coherent source, and it is micro- to enter interference by spectroscope
Mirror is divided into reference path and optical path by interference microscope.Light in optical path passes through surface reflection to be measured and reference
The light of light path interferes, and forms interference fringe, and zero optical path difference position is obtained according to interference fringe.By modulating piezoelectric ceramics,
The light path for changing optical path, to change the optical path difference of optical path and reference path, and then makes interference fringe move.
According to the modulation condition of moving interference fringes situation and piezoelectric ceramics, apparent height information to be measured can be mutually calculated by solution,
Realize the detection of surface error.Intermediate frequency error-detecting is carried out by the way of interference necessarily is formed interference fringe, internal system knot
Structure is complicated, and needs far more precise reference mirror, and cost is higher, and interference fringe is serious by environmental disturbances.With it is existing white
Interference of light micrometering system is compared, the intermediate frequency error detecting system in the utility model embodiment, it is only necessary to light beam generator,
Collimator and extender device, beam splitter and element under test are sequentially distributed on a horizontal line, and imaging sensor is arranged the one of beam splitter
Side, for the light wave wavefront reflected by element under test can be acquired.Detection process need not generate interference fringe, system
Internal structure it is simple, it is at low cost without accurate reference path, and do not interfered by external environment, alleviate existing
White light interference micrometering system structure complexity, technical problem serious by environmental disturbances, testing cost is high.
The above has carried out brief introduction to the structure of the intermediate frequency error detecting system of optical elements of large caliber, below it is right
Concrete structure therein is described in detail.
Optionally, light beam generator 11 includes：Laser, laser is for generating laser beam.
Optionally, laser includes：He-Ne laser.
Optionally, He-Ne laser is the He-Ne laser that wavelength is 632.8.
Laser generates laser beam, and laser wavelength can be selected according to the response characteristic of imaging sensor 16, can usually be adopted
Use the He-Ne laser of 632.8nm as the laser light source of stabilization.
Optionally, collimator and extender device 12 includes：Spatial filter 121 and collimation lens 122；
Spatial filter 121 is disposed adjacent with laser, and spatial filter 121 is used to light beam being converted to diverging spherical
Wave；
Collimation lens 122 is arranged between spatial filter 121 and beam splitter 13, and collimation lens 122 will be for that will dissipate ball
Surface wave is converted to plane light wave.
Optionally, spatial filter 121 includes：Microcobjective and pin hole, wherein pin hole is placed in the coke of collimation lens 122
Point on.
Specifically, the spatial filter 121 of microcobjective and pin hole composition can effectively inhibit the light beams noise such as speckle.
Meanwhile laser light wave after spatial filter 121 by can be changed to divergent spherical wave.
The pin hole of spatial filter 121 is placed in the focus of collimation lens 122, spatial filter 121 can be made to be emitted
Divergent spherical wave by collimation lens 122 become plane light wave.
Optionally, imaging sensor 16 includes：Charge coupled cell and metal oxide semiconductor device.
Specifically, charge coupled cell is CCD (Charge Coupled Device), metal-oxide semiconductor (MOS) member
Part is CMOS (Complementary Metal-Oxide Semiconductor).
In view of the optical element of plane and concave surface face type applies such as reflective astronomical telescope neck in large-aperture optical
Domain is using more, therefore the utility model embodiment is using plane component and concave element as illustrating that object is illustrated.Plane
The intermediate frequency error detecting system of element is as shown in Fig. 2, the intermediate frequency error detecting system of concave element is as shown in Figure 3.
Optionally, element under test 14 includes：Plane component to be measured and concave element to be measured.
Optionally, when element under test 14 is plane component to be measured, it is arranged between beam splitter 13 and imaging sensor 16
Convergent lens.
The detection of plane component needs to introduce convergent lens, and the light beam reflected from beam splitter 13 can pass through convergent lens and assemble
Onto imaging sensor 16.The detection of concave element is not necessarily to convergent lens, and the light beam itself by element reflection has convergent angle,
Directly imaging sensor 16 can be utilized to receive.
Export the detection of the intermediate frequency error of optical elements of large caliber according to the plot of light intensity of different location to terminal device below
As a result process is described.
Specifically, the intermediate frequency error of optical elements of large caliber is since its spatial frequency is higher, and it is distributed there is certain week
Phase property structure, often will produce diffraction effect, make the far-field focus disperse of optical elements of large caliber, form multiorder diffractive secondary lobe.
From optical grating diffraction equation m λ=d sin θs, wherein which diffraction fringe m indicates, λ indicates optical wavelength, for one
Specific diffraction fringe, m and λ are constant, and spatial frequency is higher, i.e., d is got over hour, and diffraction angle is bigger, the table of optical elements of large caliber
Surface error is class grating, and in other words, the position (i.e. θ) of diffraction secondary lobe and the frequency of optical element surface error are (i.e.) related,
The spatial frequency of intermediate frequency error is (i.e.) relatively high, diffraction secondary lobe can be made far from focal spot (i.e. θ is bigger).
The utility model embodiment is directed to the diffraction characteristic of intermediate frequency error, by fully considering since intermediate frequency error diffraction is imitated
The secondary lobe that should be brought realizes that the three-dimensional of imaging sensor is mobile far from focal spot problem, using three-D displacement platform, in can obtaining and including
The focal plane figure and focal plane figure of frequency error diffraction secondary lobe, and then the realization pair of improved Phase Retrieve Algorithm is passed through by computer
The detection of optical elements of large caliber intermediate frequency error.
It is flat by improved Phase Retrieve Algorithm focal plane figure and defocus after obtaining focal plane figure and focal plane figure
Face figure carries out phase recovery, obtains the testing result of the intermediate frequency error of optical elements of large caliber.
Phase recuperation technique is a kind of non-interfering detection technique based on diffraction optics and iterative algorithm.Phase recuperation technique
Using several collected focal plane figures and focal plane figure, the parameters such as different diffraction distances obtain the amplitude letter of light wave wavefront
It ceases, and then recovers the phase information of light wave wavefront by iteration optimization algorithms.For optical element detection, wave is obtained
Preceding phase information can calculate apparent height distribution according to wavelength, to realize detection.
That is the utility model embodiment passes through improved Phase Retrieve Algorithm focal plane figure and focal plane figure
After carrying out phase recovery, object plane phase value can be obtained, after obtaining object plane phase value, passes through formula：
The face shape offset d (i.e. distance) corresponding to Mid Frequency can be calculated, n is the refractive index of optical element material therefor,
It is exactly that object plane phase value is substituted into the phase difference position in formula, d, the i.e. apparent height of optical element can be obtained.
Below to carrying out phase recovery by improved Phase Retrieve Algorithm focal plane figure and focal plane figure, obtain big
The process of the testing result of the intermediate frequency error of bore optical element is described.With reference to figure 4, specifically：
S401, the initial solution for obtaining improved Phase Retrieve Algorithm, wherein initial solution includes initial object plane amplitude,
Initial object plane phase value, the face type design parameter or optical elements of large caliber that first time initial solution passes through optical elements of large caliber
Face type interferometer measured value obtain；
Phase recovery detection technique is a kind of detection technique based on diffraction optics and iterative algorithm.
The essence of Phase Retrieve Algorithm is to solve for the inverse source problem in diffraction optics, and inverse source problem often faces solution not
Certainty, to which true solution can not be converged to.Therefore, it is multiple with different defocusing amounts to generally require acquisition for phase recovery detection
Focal plane figure improves the convergence capabilities of algorithm.
Phase recovery is generally basede on Gerchberg-Saxton-Fienup series of iterations algorithm to realize.Iterative algorithm
Core is the optimization problem of object function, and the emphasis of optimization problem is to find globally optimal solution for high-dimensional nonlinear system.Well
Initial solution and for the effective constraints of object function be obtain globally optimal solution key factor.Therefore, for phase
For recovery algorithms, initial solution and constraints with abundant physical background are particularly important to its iteration convergence effect.
In consideration of it, the utility model is directed to the phase retrieval problem of the meter level optical elements of large caliber containing intermediate frequency error,
It is proposed the Phase Retrieve Algorithm flow for detecting intermediate frequency error as shown in figure 5, the process shown in figure for nth iteration.
First time initial solution is by the face type design parameter of element (i.e. optical elements of large caliber) or the interferometer of component side type
Initial solution of the measured value as phase recovery iterative algorithmWhereinRepresent object plane amplitude in the 1st iterative process
Value,Represent object plane phase value in the 1st iterative process.This initial solution extremely may be used from the reality of element, physical background
It leans on, avoids a large amount of futile-iteration operation and the interference of a large amount of locally optimal solutions, be used as just when using interferometer measured value
When the solution that begins, the interference of low frequency aberration more can be fully eliminated.
Specifically, optical elements of large caliber has face type design parameter, wherein just containing in designMember
The interferometer measured value of part face type refers to the rough measured value obtained by way of interferometer irradiation.
Initial solution during successive iterations is carried out as initial solution by the result obtained after the completion of last iteration
Iterative process.
After obtaining initial solution, following iterative step is executed, until obtaining the inspection of the intermediate frequency error of optical elements of large caliber
Until surveying result：
S402, positive diffraction calculations are carried out to initial solution by positive diffraction theory, obtains different answering for defocus position and shakes
Width calculated value, wherein the complex amplitude calculated value of different defocus positions includes：The magnitude determinations value of different defocus positions, it is different from
The phase calculation value of burnt position；
For practical diffractional field distance, (for example fresnel diffraction is in the range areas of fresnel diffraction, and fraunhofer spreads out
Penetrate is in the range areas of Fraunhofer diffraction) select corresponding scalar diffraction theory to carry out positive diffraction calculations.Near field diffraction pattern
Optional fresnel diffraction, Diffraction theory are calculated, and far field construction may be selected theory of Fraunhofer diffraction and be calculated.
That is, positive diffraction theory includes：Fresnel diffraction is theoretical, Diffraction theory, theory of Fraunhofer diffraction；
For the 1st iteration, by rightPositive diffraction calculations, different defocus positions can be obtained and corresponded to
Complex amplitude calculated value, including：The complex amplitude calculated value of 1st defocus positionThe complex amplitude of 2nd defocus position calculates
ValueThe complex amplitude calculated value of 3rd defocus positionIf acquiring the focal plane figure of m defocus position,
The complex amplitude calculated value of corresponding m defocus position can so be calculated, that is,
As shown in figure 5, for nth iteration, by rightPositive diffraction calculations, for different defocus
Position can obtain the corresponding complex amplitude calculated value in different defocus positions, including：The complex amplitude for obtaining the 1st defocus position calculates
ValueThe complex amplitude calculated value of 2nd defocus positionThe complex amplitude calculated value of 3rd defocus position
According to algorithmic statement requirement and computing capability condition, the selection of defocus position, the complex amplitude calculated value of m defocus position can be increased
It can be denoted as
S403, the amplitude actual value that different defocus positions are obtained according to focal plane figure and focal plane figure；
AboveAnd It is the value that initial solution is calculated by positive diffraction calculations, it is believed that be prediction
Value.
And actual value be reflected by focal plane figure and focal plane figure, so, by actual acquisition obtain coke put down
Face figure and focal plane figure (i.e. the figure containing intensity signal), the amplitude that actual each defocus position is obtained by extracting operation are real
Actual value
S404, the magnitude determinations value that corresponding different defocus position is replaced with the amplitude actual value of different defocus positions, obtain
To the new complex amplitude value of different defocus positions；
The amplitude actual value of acquisition is substituted in the complex amplitude calculated value of corresponding defocus position amplitude components (correspond to from
The magnitude determinations value of burnt position), as shown in figure 5, obtaining the new complex amplitude value of different defocus positions
Since different images sensor is different to the responding ability of actual light intensity, the light intensity value obtained herein by gradation of image
Need the response curve amendment according to imaging sensor.
At this point, the new complex amplitude value of the different defocus positions obtained contains true amplitude information.
S405, reverse diffraction calculations are carried out to the new complex amplitude value of different defocus positions by reverse diffraction theory, obtained
New object plane complex amplitude calculated value corresponding to different defocus positions, wherein the new object plane corresponding to different defocus positions is multiple
Magnitude determinations value includes：New object plane amplitude corresponding to different defocus positions, the new object corresponding to different defocus positions
Face phase value；
As shown in figure 5, by the new complex amplitude value of different defocus positions
According to each plane defocus position by reverse diffraction calculations, obtains the new object plane complex amplitude corresponding to different defocus positions and calculate
Value
Inversely diffraction theory includes：Inverse fresnel diffraction is theoretical, inverse Diffraction theory, inverse theory of Fraunhofer diffraction.
New object plane complex amplitude calculated value corresponding to different defocus positions by acquisition is by constraints naturalization under
The initial value of one wheel iterationInto next round iteration.Constraints instructs iteration convergence direction to provide foundation,
The constraints of Phase Retrieve Algorithm generally comprises the contents such as energy conservation principle, error reduction, weight distribution.It is missed for intermediate frequency
Certain periodic structure is presented in difference, and the constraints that intermediate frequency error phase restores detection algorithm can introduce power spectral density unevenness
Even priority principle.Specifically：
S406, Fourier analysis is carried out to the new object plane phase value corresponding to different defocus positions, obtains power spectrum
Spend distribution map；
The concrete methods of realizing of the uneven priority principle of power spectral density in the utility model embodiment is, to acquisition
The phase distribution (i.e. new object plane phase value) of each new object plane complex amplitude calculated value carries out Fourier analysis, obtains its corresponding surface
The power spectral density distribution map of type.
S407, determined according to power spectral density distribution map it is each in the new object plane phase value corresponding to different defocus positions
The weight of each object plane amplitude in new object plane amplitude corresponding to the weight of object plane phase value and different defocus positions；
Further, the solution for power spectral density plot being presented to obvious peak value (refers to new object plane phase value and corresponding new
Object plane amplitude) weight increase, the weight of the solution without obvious peak value is reduced.
S408, target object plane phase value, and root are determined according to the weight of each object plane phase value and each object plane phase value
Target object plane amplitude is determined according to the weight of each object plane amplitude and each object plane amplitude；
Specifically, target object plane phase value is the weighted average of each object plane phase value；Target object plane amplitude is each
The weighted average of a object plane amplitude.
S409, judge whether target object plane phase value meets the preset value of object function, wherein object function is preset
Function about object plane phase value；
After obtaining target object plane phase value, target object plane phase value is substituted into object function, for example object function isThe value of object function is calculated, judges whether the value that object function is calculated meets preset value.
Specifically, object function is the preset function about object plane phase value, object function is according to different detections
Demand, different accuracy of detection and be manually set.Preset value is also artificially to be arranged, and preset value is adjustable.
If S410, target object plane phase value meet the preset value of object function, whether target object plane phase value is judged
For locally optimal solution；
Specifically, when determining whether locally optimal solution, can be judged by way of default compare, intermediate frequency error is deposited
In certain range, if obtained target object plane phase value no longer within the scope of this, for locally optimal solution；On the contrary, for the overall situation
Optimal solution.
If S411, target object plane phase value are not locally optimal solutions, using target object plane phase value as heavy caliber light
Learn the testing result of the intermediate frequency error of element；
If S412, target object plane phase value are locally optimal solutions, perturbation item or relaxation factor are introduced, to jump out part
Optimal solution；
In order to avoid locally optimal solution, it cannot make object function further convergent in successive ignition, it can be with
It is selectively introducing relaxation factor or perturbation item, new object plane complex amplitude calculated value naturalization process is had an impact, to jump out office
Portion's optimal solution obtains preferably convergence result.
If S413, target object plane phase value are unsatisfactory for the preset value of object function, by target object plane phase value and mesh
Object plane amplitude is marked as initial solution, continues to execute the above iterative step, until obtaining the intermediate frequency error of optical elements of large caliber
Testing result until.
Optionally, perturbation item or relaxation factor are being introduced, after jumping out locally optimal solution, this method further includes：
(1) according to perturbation item or relaxation factor more new object face phase value and target object plane amplitude, after obtaining update
Target object plane phase value and updated target object plane amplitude；
(2) using updated target object plane phase value and updated target object plane amplitude as initial solution；
(3) it is based on initial solution and executes iterative step, until obtaining the testing result of the intermediate frequency error of optical elements of large caliber
Until.
The utility model relative to it is traditional based on the microscopical intermediate frequency error measure mode of white light interference have it is following excellent
Point：
1, non-interfering formula measures.The utility model is not necessarily to that element under test surface is made to form interference fringe with the plane of reference, to
Evaded interference detection environmental factor is such as vibrated, the rigors of air agitation factor；
2, measurement range is big, is suitable for the detection of optical elements of large caliber.The utility model is made using phase recovery detection
For basic scheme, in existing each optical element allowable range, single measurement range can cover it is unified, so as to avoid white
Light interfering microscope needs the disadvantage of a large amount of sub-aperture stitchings, testing cost height, detection cycle length；
3, system structure is simple, and cost is relatively low.Interference detection, which necessarily is formed interference fringe, to be detected, and often require that complexity
Internal structure and far more precise reference mirror, cost it is higher.The utility model only needs accurate recording focal spot light intensity and defocus
Position light intensity is not necessarily to high-precision reference mirror without reference to light path, and cost is relatively low.
The utility model has the following advantages relative to traditional phase recovery detection technique：
1, the detection for intermediate frequency error can be achieved.The utility model is from the intermediate frequency error-detecting of optical elements of large caliber
Practical problem is set out, and the feature of intermediate frequency error is taken full advantage of, and is obtained effectively by pointedly expanding luminous intensity measurement range
Intermediate frequency control information, at the same propose targetedly innovatory algorithm, it can be achieved that the intermediate frequency error based on phase recuperation technique inspection
It surveys；
2, initial solution, which is chosen, has outstanding physical significance.The utility model uses face type design value or interferometer measured value
There is the support of sufficient physics view, can more be directed to intermediate frequency error feelings relative to traditional phase recuperation technique as initial solution
Condition realizes convergence；
3, constraints is more efficient.The utility model proposes the uneven priority principles of power spectrum as Phase Retrieve Algorithm
Constraints in iterative process, prominent intermediate frequency error character, can effectively instruct Phase Retrieve Algorithm iteration direction, realize
Faster, more effective algorithmic statement.
In short,
It 1, can the utility model proposes the detection that phase recovery detection technique is used for optical elements of large caliber intermediate frequency error
To realize efficient, the fullaperture test of optical elements of large caliber intermediate frequency error；
2, the utility model is directed to the demand of intermediate frequency error-detecting, has expanded the displacement dimension that conventional phase restores detecting system
Spend the acquisition, it can be achieved that intermediate frequency error diffraction information；
3, the constraints the utility model proposes the uneven priority principle of power spectrum as Phase Retrieve Algorithm, for
Intermediate frequency error-detecting enhances algorithmic statement effect；
4, the utility model proposes the initial solution selection principles that phase recovery detects intermediate frequency error, from actual physics view
It sets out, improves algorithmic statement ability.
Embodiment two：
The utility model embodiment additionally provides a kind of intermediate frequency error-detecting laboratory of optical elements of large caliber, the experiment
Room includes the intermediate frequency error detecting system of the optical elements of large caliber in above-described embodiment one.
The intermediate frequency error detecting system for the optical elements of large caliber that the utility model embodiment is provided and the meter in laboratory
Calculation machine program product, including the computer readable storage medium of program code is stored, the instruction that said program code includes can
For executing the method described in previous methods embodiment, specific implementation can be found in embodiment of the method, and details are not described herein.
It is apparent to those skilled in the art that for convenience and simplicity of description, the system of foregoing description
It with the specific work process of device, can refer to corresponding processes in the foregoing method embodiment, details are not described herein.
In addition, in the description of the utility model embodiment unless specifically defined or limited otherwise, term " installation ",
" connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally connect
It connects；It can be mechanical connection, can also be electrical connection；It can be directly connected, can also indirectly connected through an intermediary, it can
To be the connection inside two elements.For the ordinary skill in the art, it can understand above-mentioned term with concrete condition
Concrete meaning in the present invention.
It, can be with if the function is realized in the form of SFU software functional unit and when sold or used as an independent product
It is stored in a computer read/write memory medium.Based on this understanding, the technical solution of the utility model substantially or
Person says that the part of the part that contributes to existing technology or the technical solution can be expressed in the form of software products,
The computer software product is stored in a storage medium, including some instructions are used so that computer equipment (can be with
Personal computer, server or the network equipment etc.) execute each embodiment the method for the utility model whole or portion
Step by step.And storage medium above-mentioned includes：USB flash disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), with
Machine accesses various Jie that can store program code such as memory (RAM, Random Access Memory), magnetic disc or CD
Matter.
It is in the description of the present invention, it should be noted that term "center", "upper", "lower", "left", "right", " perpendicular
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, and is only
The utility model and simplifying describes for ease of description, do not indicate or imply the indicated device or element must have it is specific
Orientation, with specific azimuth configuration and operation, therefore should not be understood as limiting the present invention.In addition, term " the
One ", " second ", " third " are used for description purposes only, and are not understood to indicate or imply relative importance.
Finally it should be noted that：Embodiment described above, only specific embodiment of the present utility model, to illustrate this
The technical solution of utility model, rather than its limitations, the scope of protection of the utility model is not limited thereto, although with reference to aforementioned
The utility model is described in detail in embodiment, it will be understood by those of ordinary skill in the art that：It is any to be familiar with this skill
The technical staff in art field within the technical scope disclosed by the utility model, still can be to the skill recorded in previous embodiment
Art scheme modify or can readily occur in variation or equivalent replacement of some of the technical features；And these modifications,
Variation is replaced, the spirit and model of the utility model embodiment technical solution that it does not separate the essence of the corresponding technical solution
It encloses, should be covered within the scope of the utility model.Therefore, the scope of protection of the utility model is answered described is wanted with right
Subject to the protection domain asked.
Claims (10)
1. a kind of intermediate frequency error detecting system of optical elements of large caliber, which is characterized in that the system comprises：Light beam generates
Device, collimator and extender device, beam splitter, element under test, the imaging sensor being fixed on three-D displacement platform, and respectively with the figure
The terminal device connected with the three-D displacement platform as sensor, wherein the light beam generator, the collimator and extender device, institute
It states beam splitter and the element under test is sequentially distributed on a horizontal line, the side of the beam splitter is provided with described image biography
Sensor, described image sensor can acquire the light wave wavefront reflected by the element under test；
The light beam generator is for generating light beam；
The collimator and extender device is used to the light beam being converted to plane light wave；
The beam splitter obtains transmission plane light wave and plane of reflection light wave for being split to the plane light wave, wherein
The transmission plane light wave reaches the element under test, and the plane of reflection light wave leaves the system；
The element under test obtains light wave wavefront for reflecting the transmission plane light wave；
The beam splitter is additionally operable to be split the light wave wavefront, obtains transmitted light wave wavefront and reflecting light wavefront,
In, the reflecting light wavefront reaches described image sensor；
Described image sensor generates plot of light intensity, and the plot of light intensity is sent to the end for receiving the light wave wavefront
End equipment；
The three-D displacement platform is used to receive the position command that the terminal device is sent, and is moved according to the position command
It is dynamic, so that the plot of light intensity of described image sensor acquisition different location；
The terminal device is used to receive the plot of light intensity of the different location, according to the output of the plot of light intensity of the different location
The testing result of the intermediate frequency error of optical elements of large caliber.
2. system according to claim 1, which is characterized in that the light beam generator includes：Laser, the laser
For generating laser beam.
3. system according to claim 2, which is characterized in that the laser includes：He-Ne laser.
4. system according to claim 3, which is characterized in that the He-Ne laser is that the He-Ne that wavelength is 632.8 swashs
Light device.
5. system according to claim 2, which is characterized in that the collimator and extender device includes：Spatial filter and collimation
Lens；
The spatial filter is disposed adjacent with the laser, and the spatial filter is used to the light beam being converted to diverging
Spherical wave；
The collimation lens is arranged between the spatial filter and the beam splitter, and the collimation lens is used for the hair
Scattered spherical wave is converted to the plane light wave.
6. system according to claim 5, which is characterized in that the spatial filter includes：Microcobjective and pin hole,
In, the pin hole is placed in the focus of the collimation lens.
7. system according to claim 1, which is characterized in that described image sensor includes：Charge coupled cell and gold
Belong to oxide-semiconductor devices.
8. system according to claim 1, which is characterized in that the element under test includes：Plane component to be measured and to be measured
Concave element.
9. system according to claim 8, which is characterized in that when the element under test is the plane component to be measured,
Convergent lens is set between the beam splitter and described image sensor.
10. a kind of intermediate frequency error-detecting laboratory of optical elements of large caliber, which is characterized in that including：In claim 1 to 9
The intermediate frequency error detecting system of any one of them optical elements of large caliber.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109596227A (en) * | 2018-12-06 | 2019-04-09 | 浙江大学 | A kind of phase recovery detection system of the optical element intermediate frequency error of convolutional neural networks priori enhancing |
| CN110017969A (en) * | 2019-05-05 | 2019-07-16 | 清华大学 | The parameter determination method and device of transparent OLED |
| CN110375964A (en) * | 2019-07-18 | 2019-10-25 | 浙江大学 | It is a kind of based on extension how the wavefront error detection device and detection method of bohr-Zernike polynominal optimization phase recovery |
| CN110687080A (en) * | 2019-09-06 | 2020-01-14 | 中国科学院上海光学精密机械研究所 | Detection device and detection method for quickly detecting and identifying surface defects of optical element |
| CN111442909A (en) * | 2020-05-20 | 2020-07-24 | 北京理工大学 | Phase-shifting interference transmission wavefront measuring device and method for large-caliber workbench |
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- 2018-01-08 CN CN201820028451.XU patent/CN207850322U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109596227A (en) * | 2018-12-06 | 2019-04-09 | 浙江大学 | A kind of phase recovery detection system of the optical element intermediate frequency error of convolutional neural networks priori enhancing |
| CN110017969A (en) * | 2019-05-05 | 2019-07-16 | 清华大学 | The parameter determination method and device of transparent OLED |
| CN110375964A (en) * | 2019-07-18 | 2019-10-25 | 浙江大学 | It is a kind of based on extension how the wavefront error detection device and detection method of bohr-Zernike polynominal optimization phase recovery |
| WO2021008606A1 (en) * | 2019-07-18 | 2021-01-21 | 浙江大学 | Wavefront error measurement apparatus and measurement method for optimizing phase retrieval on the basis of extended nijboer-zernike mode |
| US11709111B2 (en) | 2019-07-18 | 2023-07-25 | Zhejiang University | Device and method for detecting wavefront error by modal-based optimization phase retrieval using extended Nijboer-Zernike theory |
| CN110687080A (en) * | 2019-09-06 | 2020-01-14 | 中国科学院上海光学精密机械研究所 | Detection device and detection method for quickly detecting and identifying surface defects of optical element |
| CN111442909A (en) * | 2020-05-20 | 2020-07-24 | 北京理工大学 | Phase-shifting interference transmission wavefront measuring device and method for large-caliber workbench |
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