CN111537197A - Universal calibration method for spatial light modulator phase measurement - Google Patents
Universal calibration method for spatial light modulator phase measurement Download PDFInfo
- Publication number
- CN111537197A CN111537197A CN201911359000.XA CN201911359000A CN111537197A CN 111537197 A CN111537197 A CN 111537197A CN 201911359000 A CN201911359000 A CN 201911359000A CN 111537197 A CN111537197 A CN 111537197A
- Authority
- CN
- China
- Prior art keywords
- light
- phase
- gray
- mapping table
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
Landscapes
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a general calibration method for spatial light modulator phase measurement, which comprises the following steps: (a) generating a phase gray scale image and collecting a light field distribution map; (b) when the image quality is judged to be good manually, a 0-255 phase gray scale image is generated; (c) loading in sequence at regular time, automatically collecting a light field distribution diagram, calculating stripes and zero-level mass center offset, and further calculating a gray phase mapping table; (d) carrying out data fitting on the gray phase mapping table and carrying out comparative analysis on the expected gray phase mapping table, and finishing calibration if the gray phase mapping table is in accordance with the expectation; if the data are not matched with each other, performing Gamma correction on the acquired and calculated data and the expected data to form a new Gamma mapping table, and returning to the step (c) when the Gamma mapping table is written in at the same time until the calibration is finished.
Description
Technical Field
The invention relates to the field of development and test application of a spatial light modulator. In particular to a calibration method of the phase capability of a spatial light modulator, which is used for quickly calibrating and measuring the gray phase curve of the spatial light modulator.
Background
The phase capability measurement and calibration of the spatial light modulator is critical to its use. The mainstream methods for the phase modulation characteristics of the spatial light modulator include the following methods: 1. according to the double-slit interference method, two high-precision masks need to be processed, the optical paths need to be strictly coaxial, the construction is complex, and the anti-interference performance of the system is poor. 2. The Mach-Zehnder interferometer method has the advantages of complex optical path, great influence by system aberration and system stability, complex post data processing and low precision. 3. The Taeman-Green interferometer has much simplified optical path and relatively high system interference resistance, but the system aberration has great influence on the detection precision.
Therefore, when the phase capability of the spatial light modulator is manufactured in batch or is rapidly measured, the existing method has the defects of low precision, complex equipment and low anti-interference capability, so that the detection cannot be rapidly carried out by utilizing the image processing capability of a computer.
Disclosure of Invention
The invention provides a general calibration method for spatial light modulator phase measurement, which mainly uses zero-order light self-reference interference method and theoretical formula to determine the algorithm model of the method for extracting phase information, and provides reasonable light path design method and steps and specific implementation mode.
In order to solve the technical problems, the technical scheme of the invention is as follows:
a universal calibration method for spatial light modulator phase measurement comprises the following steps:
(a) generating a phase gray scale image and collecting a light field distribution map;
(b) when the image quality is judged to be good manually, a 0-255 phase gray scale image is generated;
(c) loading in sequence at regular time, automatically collecting a light field distribution diagram, calculating stripes and zero-level mass center offset, and further calculating a gray phase mapping table;
(d) carrying out data fitting on the gray phase mapping table and carrying out comparative analysis on the expected gray phase mapping table, and finishing calibration if the gray phase mapping table is in accordance with the expectation; if the data are not matched with each other, performing Gamma correction on the acquired and calculated data and the expected data to form a new Gamma mapping table, and returning to the step (c) when the Gamma mapping table is written in at the same time until the calibration is finished.
Preferably, step (b1) is further included in step (b):
and (c) when the image quality is judged to be poor manually, adjusting the phase gray-scale map parameters, and returning to the step (a).
Preferably, step (a) includes the steps of:
(a1) the light path is incident to the laser beam by the light source, passes through the collimation and beam expansion module, is incident to the spatial light modulator after beam expansion,
(a2) the computer is connected with the spatial light modulator and loads 3 different light areas to the spatial light modulator;
(a3) the modulated light is converged by a lens, so that light modulated by different areas of the phase gray scale image forms a light field distribution diagram.
Preferably, in step (a2), the spatial light modulator divides the target surface into 3 regions, respectively: a background image area, a reference image area and a measurement light area.
Preferably, the reference light region gradation pattern of the phase gradation map is fixed, the measurement light region gradation is changed from 0 to 255, different phase values are mapped, and the setting of the reference light region, the measurement light region, and the pitch is adjusted and selected to appropriate values according to the required interference fringe density and the region size.
Preferably, the energy distribution of the zero-order light spot is reduced by utilizing a gray scale design of the background image, so that the relative brightness of the zero-order light and the interference fringes is suitable for clear acquisition of an image acquisition device, and the gray scale distribution of the background image region can comprise one or more of a Fresnel lens, a pure-color gray scale image, a blazed grating, a Lambertian grating, a random phase and the like, and derivatives thereof.
Preferably, in the step (a3), the modulated light is converged by a lens in the optical path to cause interference between the reference light and the measurement light, and the change of the phase of the measurement light modulation causes the change of the position of the fringe light.
Preferably, the calculating of the gray scale phase mapping table in step (c) includes the steps of:
(c1) selecting a proper reference light area and measuring the size and the interval of the light area to form a light field distribution diagram;
(c2) changing the gray value of a measuring light area in a phase gray image on a computer, and acquiring a light field distribution diagram by using image acquisition equipment, wherein the center distance of the stripes and the center distance of zero-order light spots always have a mapping relation with the gray value of the measuring light area;
(c3) the collected light field distribution map is demodulated by a software algorithm, so that a mapping curve of the light region gray value to be measured and the modulation phase of the light region gray value can be obtained, the phase capability of the spatial light modulator is obtained, and a gray phase mapping table is manufactured.
Preferably, the calculation principle of the above steps (c1) - (c3) is as follows:
＝2π*(Δ/Λ)
wherein, the delta is the displacement of the fringe relative to the zero-order light to form the airy disk, and the lambda is the fringe period;
calculating the centroid of the zero-order Airy spot as o0 and calculating the coordinates of the stripe centroid as o in turn1，o2......oM；
Fringe period
(M is an even number),
(M is an odd number);
when the measured light loading gray scale is 0, calculating the distance d of the centroid of each stripe relative to the centroid of the Airy spot01，d02,......d0MWhen the loading gray scale of the measuring light is 1, calculating the distance d of the centroid of each stripe relative to the centroid of the Airy spot11，d12,......d1MThen, then
The amount of movement of the stripes when the loading gray scale is 2, 3.
Drawings
FIG. 1: a zero-order light self-reference interference method schematic diagram, which describes the overall schematic diagram of the implementation method of the zero-order light self-reference interference method;
FIG. 2: embodiment 1 optical path design diagram and phase gray scale diagram example, describe the specific optical path composition and gray scale diagram example;
FIG. 3: the loaded phase gray scale image example schematic diagram describes a plurality of phase gray scale image examples under different optical path parameters;
FIG. 4: the acquired image example schematic diagram describes the movement contrast of the interference fringes generated by different gray values;
FIG. 5: the software demodulation phase and automatic Gamma calibration flow chart describes the calculation process of moving the demodulation phase according to the interference fringe and the basic flow of adjusting the Gamma according to the result.
Detailed Description
The following further describes embodiments of the present invention with reference to the drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
As shown in fig. 1, the present invention proposes a zero-order self-reference interference method, and the specific principle is as follows: the flexible partition characteristic of the spatial light modulator is utilized, and two beams of light with different phases are generated through self modulation to generate fringes. In the method, the target surface of the spatial light modulator is divided into 3 areas, a relevant phase gray-scale image is loaded, and the distribution of the phase gray-scale image is divided into three areas:
a) in the background image area, the background image of the phase distribution may be a pure color image of a certain gray level, or may be other structural images for reducing the light intensity of the central airy disk, such as a binary gray contrast image, a blazed grating, a lambdoid grating, a fresnel lens, a checkerboard grating, etc.; the purpose of designing a distribution background graph is to obtain zero-order light spots with proper light intensity distribution so as to collect images, and the distribution is matched with corresponding distribution by combining light path design, and the background content is unchanged after being determined;
b) reference light region: opening a reference light area with proper size in a proper area of the background image, wherein the gray distribution can be set to a pure color pattern with a certain gray value, and also can be a Fresnel lens phase distribution image, and the light modulated by the area is used as reference light, and the phase parameter of the light is unchanged;
c) light area measurement: another area is opened on the background image, and the area keeps a certain distance with the reference light area, the gray value of the pure color gray scale image of the area changes from 0 to 255 in sequence, and the gray value represents that the phase value changes in sequence.
When the computer is connected with the SLM spatial light modulator, the phase gray level image is loaded to the SLM, and the SLM is put into a light path; the light path is used for emitting laser beams by a light source, the laser beams are emitted to the SLM after being subjected to beam expansion through the collimation and beam expansion module, and modulated light is converged through the lens, so that light modulated by different areas of the phase gray scale image forms a light field distribution diagram; selecting proper reference light areas and measuring light area sizes and intervals to form the light field distribution diagram shown in fig. 1, wherein the background diagram Pattern influences the brightness and size of the zero-order light spot, and the details of the phase gray diagram can be properly adjusted as required to obtain a reasonable light field distribution diagram.
As shown in fig. 2, according to the above, an embodiment optical path for constructing an optical path is specifically designed, and the optical path construction includes: 1. a polarizing plate; 2. a continuous zoom laser beam expander; 3. a beam splitter prism; 4. a shearing interferometer; 5. a spatial light modulator to be measured; 6. a lens; 7. an image acquisition device. Example 532nm laser was used to expand the beam to 10 mm; the present spatial light modulator is a liquid crystal spatial light modulator of type HDSLM 80R.
Specifically, as shown below, a laser beam passes through a polarizing plate 1, the polarization direction of the laser beam is adjusted to be parallel to the long axis direction of the liquid crystal of the spatial light modulator, the laser beam is expanded to a proper diameter through a continuous variable-power beam expander 2, the light is split into 2 beams through a beam splitter prism 3, one beam reaches a shearing interferometer 4, and the other beam passes through a spatial light modulator 5 to be measured. The wave surface of the light beam is approximate to plane light by observing the shearing interferometer and adjusting the focusing system of the zoom beam expanding lens. The light modulated by the spatial light modulator 5 is reflected and then passes through the beam splitter prism 3 and the lens 6 to be focused, the image acquisition device 7 is arranged at the back focal plane of the lens 6, interference fringes and Airy spots formed by zero-order light of the system can be observed through the image acquisition device, and the light beam phase modulation amount is calculated by observing the offset of the interference fringes relative to the Airy spots;
the phase diagram loaded on the spatial light modulator is structurally characterized in that two circular hole areas are distributed on a gray background, one hole is used as reference light, the gray value of the area is kept unchanged at a certain gray level, the other hole is used as measuring light, and the gray value of the area is changed to be 0-255. Or an example diagram of the loaded phase gray scale map shown in fig. 3.
Changing the gray value of the measured light region, and acquiring an image shown in FIG. 4; each gray scale can be acquired by a group of images, and the images are stored after being numbered or directly transmitted into analysis software for analysis. In the step 2, the optical path parameters and Pattern selection are mentioned, the most important reference basis in the link is the quality of the acquired image, the variation of the acquired image can be distinguished as the basis, and the higher the identified displacement variation precision is, the better the displacement variation precision is.
As shown in the flow chart of fig. 5, the collected image data is analyzed according to the flow chart, and phase information is demodulated to obtain a gray-scale phase curve.
According to the embodiment of the present invention, the present invention provides a general calibration method for spatial light modulator phase measurement, including the following steps:
(a) generating a phase gray scale image and collecting a light field distribution map;
(b) when the image quality is judged to be good manually, a 0-255 phase gray scale image is generated;
(c) loading in sequence at regular time, automatically collecting a light field distribution diagram, calculating stripes and zero-level mass center offset, and further calculating a gray phase mapping table;
(d) carrying out data fitting on the gray phase mapping table and carrying out comparative analysis on the expected gray phase mapping table, and finishing calibration if the gray phase mapping table is in accordance with the expectation; if the data are not matched with each other, performing Gamma correction on the acquired and calculated data and the expected data to form a new Gamma mapping table, and returning to the step (c) when the Gamma mapping table is written in at the same time until the calibration is finished.
Preferably, step (b1) is further included in step (b):
and (c) when the image quality is judged to be poor manually, adjusting the phase gray-scale map parameters, and returning to the step (a).
Preferably, step (a) includes the steps of:
(a1) the light path is incident to the laser beam by the light source, passes through the collimation and beam expansion module, is incident to the spatial light modulator after beam expansion,
(a2) the computer is connected with the spatial light modulator and loads 3 different light areas to the spatial light modulator;
(a3) the modulated light is converged by a lens, so that light modulated by different areas of the phase gray scale image forms a light field distribution diagram.
Preferably, in step (a2), the spatial light modulator divides the target surface into 3 regions, respectively: a background image area, a reference image area and a measurement light area.
Preferably, the reference light region gradation pattern of the phase gradation map is fixed, the measurement light region gradation is changed from 0 to 255, different phase values are mapped, and the setting of the reference light region, the measurement light region, and the pitch is adjusted and selected to appropriate values according to the required interference fringe density and the region size.
Preferably, the energy distribution of the zero-order light spot is reduced by utilizing a gray scale design of the background image, so that the relative brightness of the zero-order light and the interference fringes is suitable for clear acquisition of an image acquisition device, and the gray scale distribution of the background image region can comprise one or more of a Fresnel lens, a pure-color gray scale image, a blazed grating, a Lambertian grating, a random phase and the like, and derivatives thereof.
Preferably, in the step (a3), the modulated light is converged by a lens in the optical path to cause interference between the reference light and the measurement light, and the change of the phase of the measurement light modulation causes the change of the position of the fringe light.
Preferably, the calculating of the gray scale phase mapping table in step (c) includes the steps of:
(c1) selecting a proper reference light area and measuring the size and the interval of the light area to form a light field distribution diagram;
(c2) changing the gray value of a measuring light area in a phase gray image on a computer, and acquiring a light field distribution diagram by using image acquisition equipment, wherein the center distance of the stripes and the center distance of zero-order light spots always have a mapping relation with the gray value of the measuring light area;
(c3) the collected light field distribution map is demodulated by a software algorithm, so that a mapping curve of the light region gray value to be measured and the modulation phase of the light region gray value can be obtained, the phase capability of the spatial light modulator is obtained, and a gray phase mapping table is manufactured.
Preferably, the calculation principle of the above steps (c1) - (c3) is as follows:
＝2π*(Δ/Λ)
wherein, the delta is the displacement of the fringe relative to the zero-order light to form the airy disk, and the lambda is the fringe period;
calculating the centroid of the zero-order Airy spot as o0 and calculating the coordinates of the stripe centroid as o in turn1，o2......oM；
Fringe period
(M is an even number),
(M is an odd number);
when the measured light loading gray scale is 0, calculating the distance d of the centroid of each stripe relative to the centroid of the Airy spot01，d02,......d0MWhen the loading gray scale of the measuring light is 1, calculating the distance d of the centroid of each stripe relative to the centroid of the Airy spot11，d12,......d1MThen, then
The amount of movement of the stripes when the loading gray scale is 2, 3.
The method lists example applications of different phase gray level maps, and forms different embodiments according to reasonable selection of factors such as resolution, dynamic range, calibration wavelength and the like of image acquisition equipment, but the core method is not changed, and the difference of the changed embodiments lies in different selections based on comprehensive factors such as light path space size, device precision and the like.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, and the scope of protection is still within the scope of the invention.
Claims (9)
1. A universal calibration method for spatial light modulator phase measurement is characterized by comprising the following steps:
(a) generating a phase gray scale image and collecting a light field distribution map;
(b) when the image quality is judged to be good manually, a 0-255 phase gray scale image is generated;
(c) loading in sequence at regular time, automatically collecting a light field distribution diagram, calculating stripes and zero-level mass center offset, and further calculating a gray phase mapping table;
(d) carrying out data fitting on the gray phase mapping table and carrying out comparative analysis on the expected gray phase mapping table, and finishing calibration if the gray phase mapping table is in accordance with the expectation; if the data are not matched with each other, performing Gamma correction on the acquired and calculated data and the expected data to form a new Gamma mapping table, and returning to the step (c) when the Gamma mapping table is written in at the same time until the calibration is finished.
2. The method for universal calibration of spatial light modulator phase measurement according to claim 1, further comprising the step (b1) in step (b):
and (c) when the image quality is judged to be poor manually, adjusting the phase gray-scale map parameters, and returning to the step (a).
3. The method for universal calibration of spatial light modulator phase measurement according to claim 2, wherein the step (a) comprises the steps of:
(a1) the light path is incident to the laser beam by the light source, passes through the collimation and beam expansion module, is incident to the spatial light modulator after beam expansion,
(a2) the computer is connected with the spatial light modulator and loads 3 different light area gray maps to the spatial light modulator;
(a3) the modulated light is converged by a lens, so that light modulated by different areas of the phase gray scale image forms a light field distribution diagram.
4. The method for universal calibration of spatial light modulator phase measurement according to claim 3, wherein in step (a2), said spatial light modulator divides the target surface into 3 regions, respectively: a background image area, a reference image area and a measurement light area.
5. The universal calibration method for spatial light modulator phase measurement according to claim 4, characterized in that the reference light area gray pattern of the loaded phase gray pattern is fixed and the light area gray scale of the measured light is changed from 0 to 255, different phase values are mapped, and the setting of the reference light area and the light area size and the spacing of the measured light area are adjusted and selected to be suitable values according to the required interference fringe density and the area size.
6. The universal calibration method for phase measurement of the spatial light modulator according to claim 4, wherein the energy distribution of the zero-order light spot is reduced by using a gray scale design of a background image, so that the relative brightness of the zero-order light and the interference fringes is suitable for clear collection by an image collection device, and the gray scale distribution of the background image region may include one or more of a fresnel lens, a pure color gray scale image, a blazed grating, a lambertian grating, or a random phase, and a derivative design thereof.
7. The method for calibrating the phase measurement of the spatial light modulator according to claim 3, wherein in the step (a3), the modulated light is converged by a lens in the optical path to generate interference between the reference light and the measurement light, and the change of the phase of the measurement light modulation causes the change of the position of the fringe light.
8. The method for universal calibration of spatial light modulator phase measurement according to claim 4, wherein the step of calculating the gray scale phase mapping table in step (c) comprises the steps of:
(c1) selecting a proper reference light area and measuring the size and the interval of the light area to form a light field distribution diagram;
(c2) changing the gray value of a measuring light area in a phase gray image on a computer, and acquiring a light field distribution diagram by using image acquisition equipment, wherein the center distance of the stripes and the center distance of zero-order light spots always have a mapping relation with the gray value of the measuring light area;
(c3) the collected light field distribution map is demodulated by a software algorithm, so that a mapping curve of the light region gray value to be measured and the modulation phase of the light region gray value can be obtained, the phase capability of the spatial light modulator is obtained, and a gray phase mapping table is manufactured.
9. The method for universal calibration of spatial light modulator phase measurement according to claim 8, wherein the calculation principle of the above steps (c1) - (c3) is as follows:
＝2π*(Δ/Λ)
wherein, the delta is the displacement of the fringe relative to the zero-order light to form the airy disk, and the lambda is the fringe period;
calculating the centroid of the zero-order Airy spot as o0 and calculating the coordinates of the stripe centroid as o in turn1，o2......oM；
Fringe period
(M is an even number),
(M is an odd number);
when the measured light loading gray scale is 0, calculating the distance d of the centroid of each stripe relative to the centroid of the Airy spot01，d02,......d0MWhen the loading gray scale of the measuring light is 1, calculating the distance d of the centroid of each stripe relative to the centroid of the Airy spot11，d12,......d1MThen, then
The stripe can also be calculated when the loading gray scale is 2, 3The amount of movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911359000.XA CN111537197A (en) | 2019-12-25 | 2019-12-25 | Universal calibration method for spatial light modulator phase measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911359000.XA CN111537197A (en) | 2019-12-25 | 2019-12-25 | Universal calibration method for spatial light modulator phase measurement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111537197A true CN111537197A (en) | 2020-08-14 |
Family
ID=71972894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911359000.XA Pending CN111537197A (en) | 2019-12-25 | 2019-12-25 | Universal calibration method for spatial light modulator phase measurement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111537197A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112697401A (en) * | 2020-12-11 | 2021-04-23 | 浙江大学 | Calibration method and device of phase type spatial light modulator |
| CN112731692A (en) * | 2021-01-06 | 2021-04-30 | 上海交通大学 | Method and system for regulating and controlling phase distribution curved surface |
| CN112802154A (en) * | 2021-03-09 | 2021-05-14 | 西安中科微星光电科技有限公司 | Test method and test system for obtaining phase modulation curve of spatial light modulator |
| CN114137713A (en) * | 2021-11-17 | 2022-03-04 | 华中科技大学 | Real-time quantitative phase imaging method and system for unmarked thick sample |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101151207A (en) * | 2005-02-23 | 2008-03-26 | 皮克斯特罗尼克斯公司 | Methods and apparatus for spatial light modulation |
| CN102109414A (en) * | 2010-12-15 | 2011-06-29 | 深圳大学 | Method and device for calibrating phase modulation of spatial light modulators by utilizing heterodyne interference |
| CN104269136A (en) * | 2014-10-11 | 2015-01-07 | 成都晶砂科技有限公司 | Pixel-by-pixel gamma correction method for OLED displayer |
| CN205483259U (en) * | 2016-03-30 | 2016-08-17 | 华南师范大学 | Way is from reference light interferometer altogether |
| DE102018115001A1 (en) * | 2018-06-21 | 2019-12-24 | Carl Zeiss Microscopy Gmbh | Procedure for calibrating a phase mask and microscope |
-
2019
- 2019-12-25 CN CN201911359000.XA patent/CN111537197A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101151207A (en) * | 2005-02-23 | 2008-03-26 | 皮克斯特罗尼克斯公司 | Methods and apparatus for spatial light modulation |
| CN102109414A (en) * | 2010-12-15 | 2011-06-29 | 深圳大学 | Method and device for calibrating phase modulation of spatial light modulators by utilizing heterodyne interference |
| CN104269136A (en) * | 2014-10-11 | 2015-01-07 | 成都晶砂科技有限公司 | Pixel-by-pixel gamma correction method for OLED displayer |
| CN205483259U (en) * | 2016-03-30 | 2016-08-17 | 华南师范大学 | Way is from reference light interferometer altogether |
| DE102018115001A1 (en) * | 2018-06-21 | 2019-12-24 | Carl Zeiss Microscopy Gmbh | Procedure for calibrating a phase mask and microscope |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112697401A (en) * | 2020-12-11 | 2021-04-23 | 浙江大学 | Calibration method and device of phase type spatial light modulator |
| CN112731692A (en) * | 2021-01-06 | 2021-04-30 | 上海交通大学 | Method and system for regulating and controlling phase distribution curved surface |
| CN112731692B (en) * | 2021-01-06 | 2022-05-20 | 上海交通大学 | Method and system for regulating and controlling phase distribution curved surface |
| CN112802154A (en) * | 2021-03-09 | 2021-05-14 | 西安中科微星光电科技有限公司 | Test method and test system for obtaining phase modulation curve of spatial light modulator |
| CN114137713A (en) * | 2021-11-17 | 2022-03-04 | 华中科技大学 | Real-time quantitative phase imaging method and system for unmarked thick sample |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111537197A (en) | Universal calibration method for spatial light modulator phase measurement | |
| US9535247B2 (en) | Interferometric focusing of guide-stars for direct wavefront sensing | |
| CN100485312C (en) | Methods and apparatus for wavefront manipulations and improved three-dimension measurements | |
| KR102079416B1 (en) | Apodization for pupil imaging scatterometry | |
| Hu et al. | Absolute three-dimensional micro surface profile measurement based on a Greenough-type stereomicroscope | |
| JP3237309B2 (en) | System error measuring method and shape measuring device using the same | |
| US4387994A (en) | Optical system for surface topography measurement | |
| JP2014521122A (en) | Microscopy with adaptive optics | |
| JP2013513823A (en) | Method and system for microscope imaging with high-speed three-dimensional structured illumination | |
| CA2336942C (en) | Combining interference fringe patterns to a moire fringe pattern | |
| KR20110129343A (en) | Refractive index distribution measuring method and refractive index distribution measuring apparatus | |
| CN103592108A (en) | CCD chip modulation transfer function test device and method | |
| CN207850322U (en) | The intermediate frequency error detecting system of optical elements of large caliber and laboratory | |
| CN106768890B (en) | Gray scale cosine distribution optical target simulator for modulation transfer function detection | |
| JP2014123124A (en) | Method for high-resolution 3d-localization microscopy | |
| US20220065617A1 (en) | Determination of a change of object's shape | |
| CN108918465A (en) | Optical 3-dimensional imaging system and optical 3-dimensional imaging method | |
| CN105784129A (en) | Low-frequency heterodyne ineterferometer used for laser wavefront detection | |
| Briers | Optical testing: a review and tutorial for optical engineers | |
| CN112611548B (en) | Lens focal length measuring device and method based on digital holography | |
| CN102494631A (en) | Rotating around optical axis alignment error analysis method | |
| JP2000329648A (en) | Method and apparatus for evaluation of lens as well as adjusting apparatus for lens | |
| CN114967368A (en) | High-precision online measuring device and method for wave aberration of imaging system | |
| CN205581024U (en) | Optical element surface defect detecting device of transmission type synthetic aperture digital holographic art | |
| CN105446111B (en) | A kind of focusing method applied to digital hologram restructuring procedure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200814 |
|
| RJ01 | Rejection of invention patent application after publication |