CN205483259U - Way is from reference light interferometer altogether - Google Patents

Way is from reference light interferometer altogether Download PDF

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Publication number
CN205483259U
CN205483259U CN201620257021.6U CN201620257021U CN205483259U CN 205483259 U CN205483259 U CN 205483259U CN 201620257021 U CN201620257021 U CN 201620257021U CN 205483259 U CN205483259 U CN 205483259U
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China
Prior art keywords
light modulator
spatial light
collimating lens
reference optical
light source
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CN201620257021.6U
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Chinese (zh)
Inventor
黄伟楠
黄家俊
谭健沛
钟秀婷
董明夏
钟丽云
刘胜德
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South China Normal University
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South China Normal University
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Abstract

The utility model relates to a way is from reference light interferometer altogether, including the light source, a spatial light modulator, adjustable decay piece, collimating lens, inclined to one side vibration -damping sheet, the 2nd spatial light modulator, image sensor and the controller that set gradually, wherein a spatial light modulator and the 2nd spatial light modulator and image sensor all are connected with the controller, the object setting of awaiting measuring between adjustable decay piece and collimating lens, is modulated and the reflection through a spatial light modulator by the incident light that the light source sent to through adjustable decay piece decay back, shine to the object that awaits measuring, and by the light wave of await measuring object transmission or reflection, through the collimating lens collimation and through behind the inclined to one side vibration -damping sheet, incident to the 2nd spatial light modulator and through its modulation with reflect after received by image sensor.

Description

A kind of road self-reference optical interferometer altogether
Technical field
This utility model relates to optical field, particularly relates to a kind of adjustable laser coherence, produces the interferometer in weak coherent light source.
Background technology
Fresnel incoherent correlated digital holography (Fresnel Incoherent Correlation Holography, FINCH), use quasi monochromatic spread illumination light source, the mode loading phase mask on phase type spatial light modulator is utilized to carry out diffraction light splitting and phase shift, record the hologram with different angle of phase displacements, and by phase shift algorithm and calculate the method for fresnel transform (convolution) and carry out the three-dimensional information of reconstruction of objects, thus in reproducing processes, suppress twin image and the impact of DC terms.The depth information of object point is embodied by this technology by the fringe density of fresnel's zone plate, and lateral position information is directly embodied by the center of striped, it is not necessary to system has any scanning means and mobile parts just can obtain the three-dimensional information of sample.This technology shows its application potential at aspects such as color body identification, biological sample micro-imaging and high-resolution synthetic aperture imagings.
Laser is as the standard light source of the system and device such as interferometer, holophotal system, having the strongest time and spatial coherence, therefore in interference imaging system, the defect (such as dust, depression, scar, bubble etc.) of optical element can produce coherent noise as the center of light scattering.The conventional method reducing laser coherence is the rotating ground glass making laser light have certain rotating speed.LASER Light Source adds the combination of rotating ground glass, is widely used in various weak relevant even incoherent optical processor, such as holophotal system, microscope system and laser projection system etc..But be there is the problems such as vibration, mechanical noise and flow perturbation by motor-driven rotating ground glass, additionally introduce new noise to optical system.This is the hugest for some accurate sensitive optical system impacts.
Utility model content
The purpose of this utility model is to provide one road self-reference optical interferometer altogether, to overcome the existing deficiency that be there is vibration, mechanical noise and flow perturbation etc. by motor-driven rotating ground glass, and regulate LASER Light Source coherence to adapt to the requirement to various different light sources of the different system device.
A kind of road self-reference optical interferometer altogether, described interferometer includes light source, the first spatial light modulator, transmissibility of adjustable attenuation piece, collimating lens, polaroid, second space photomodulator, imageing sensor and the controller set gradually, and wherein the first spatial light modulator and second space photomodulator and imageing sensor are all connected with controller;Object under test is arranged between transmissibility of adjustable attenuation piece and collimating lens, the incident illumination sent by light source is through the first spatial light modulator modulation and reflection, and after transmissibility of adjustable attenuation piece decays, expose to object under test, and by the light wave of object under test transmission or reflection, after collimating lens collimates and passes through polaroid, it is incident to second space photomodulator and is received by imageing sensor after its modulation and reflection.
Wherein in a kind of embodiment, described controller includes display, coding and decoding video module, image capture module and frame rate control module.
Wherein in a kind of embodiment, described first spatial light modulator uses resolution to be 1280X 1024 pixel, and pixel dimension is the pure phase type spatial light modulator of 20um X 20um.
Wherein in a kind of embodiment, described second space photomodulator uses resolution to be 1280X 768 pixel, and pixel dimension is the pure phase type spatial light modulator of 12.3um X 12.3um.
Wherein in a kind of embodiment, the focal length of described collimating lens is 190mm, and the distance of described collimating lens to second space photomodulator is 160mm.
Wherein in a kind of embodiment, second space photomodulator is 250mm with the distance of imageing sensor.
Wherein in a kind of embodiment, described light source is He-Ne LASER Light Source, and wavelength is 632.8nm.
Relative to prior art, in road self-reference optical interferometer altogether described in the utility model, first spatial light modulator plays the effect of equivalent rotary clouded glass, the first spatial light modulator can be controlled by controller, make when loading video, the video of different frame per second, and the imageing sensor of different exposure time of arranging in pairs or groups can be respectively adopted according to actual needs, adapt to various different LASER Light Source;Described interferometer can produce weak coherent light source, suppression coherent noise, thus obtain the incoherent digital hologram of part and obtain having certain resolution reproduction while, moreover it is possible to avoid the problems such as the vibration, mechanical noise and the flow perturbation that are produced by motor-driven rotating ground glass.Further, it is also possible to adapt to various light source by the frame per second changing random mask video.
Accompanying drawing explanation
In order to be illustrated more clearly that the technical solution of the utility model, the accompanying drawing used required in embodiment will be briefly described below, apparently, accompanying drawing in describing below is only embodiments more of the present utility model, for those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is structure and the light path schematic diagram of the common road self-reference optical interferometer that this utility model embodiment provides.
Fig. 2 is the schematic diagram that the second space photomodulator shown in Fig. 1 loads a kind of embodiment of random mask video.
Fig. 3 is the controller architecture shown in Fig. 1 and the relation schematic diagram with imageing sensor and second space photomodulator thereof.
Detailed description of the invention
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is clearly and completely described.
As shown in Figure 1, this utility model embodiment provides one road self-reference optical interferometer 100 altogether, described road self-reference optical interferometer 100 altogether includes light source the 11, first spatial light modulator 12, transmissibility of adjustable attenuation piece 13, collimating lens 15 and polaroid 16, second space photomodulator 17, imageing sensor (CCD) 18 and controller 19.
Object under test 14 is arranged between the first spatial light modulator 12 and collimating lens 15, and transmissibility of adjustable attenuation piece 13 is arranged between the first spatial light modulator 12 and object under test 14, and polaroid 16 is arranged between collimating lens 15 and second space photomodulator 17.
In the present embodiment, described first spatial light modulator 12 uses resolution to be 1280X 1024 pixel, and pixel dimension is the pure phase type spatial light modulator of 20um X 20um.Described second space photomodulator 17 uses resolution to be 1280X 768 pixel, and pixel dimension is the pure phase type spatial light modulator of 12.3um X 12.3um.
The focal length of described collimating lens 15 is 190mm, and its front focal plane places object under test 14 (i.e. at a distance of 190mm between object under test 14 and collimating lens 15), and the distance of described collimating lens 15 to second space photomodulator 17 is 160mm.
In the present embodiment, described light source 11 is He-Ne LASER Light Source, and wavelength is 632.8nm.During use, the incident illumination that light source 11 sends is modulated by the first spatial light modulator 12, object under test 14 is irradiated after transmissibility of adjustable attenuation piece 13, converged by the collimated lens of light wave 15 after object under test 14 transmission, and then be modulated through second space photomodulator 17, gathered by imageing sensor (CCD) 18 again, thus reproduced through phase shift algorithm further.
In the present embodiment, the first described spatial light modulator 12 and second space photomodulator 17 are respectively pure phase reflection type spatial light modulator (SLM).
In the present embodiment, what described first spatial light modulator 12 loaded is random mask video, and what described second space photomodulator 17 loaded is plane wave and the phase mask of spherical wave of random superposition, and the two ratio is 1:1.It addition, the spherical wave focal length loaded is 500mm, second space photomodulator 17 is 250mm with the distance of imageing sensor 18.
In the present embodiment, for making second space photomodulator 17 play the effect of regulation light source coherence, random mask video (video and the video frame rate be made up of individual gray value a random set picture are adjustable) is made by certain frame number in controller 19, in second space photomodulator 17, (can be considered display screen) with player to play, and carried out frame rate adjustment by the frame per second press control of controller 19.The principle of foundation is: plays video and essentially corresponds to a kind of statistical average, due to being switched fast of video frame number, the pattern that imageing sensor 18 receives has been that multiple stacking forms the most, be equivalent to an integral process, therefore light source 11 coherence can be reduced, suppression speckle noise, improves system signal noise ratio.
For making second space photomodulator 17 play the effect of a light splitting phase-shifting element, controller 19 is made the phase mask pattern of light splitting phase shift and is loaded on second space photomodulator 17.In the incoming controller of interference pattern 19 that imageing sensor 18 receives, eliminate bias light and conjugate image through phase shift algorithm, and use representation approach to be reproduced.
In described light path, second space photomodulator 17 is assembled in the exit end of light source 11 and forms an angle with it, pass through transmissibility of adjustable attenuation piece 13 through its light wave reflected reflected by object under test 14 again or be transmitted through with object under test 14 spacing equal on the front surface of the collimating lens 15 of focal length, the collimated beam of outgoing forms an angle with second space photomodulator 17 shape being assemblied in thereafter, assembles imageing sensor 18 on the reflected light path of second space photomodulator 17.
In the present embodiment, as in figure 2 it is shown, first spatial light modulator 12 can be controlled by controller 19, make when loading video, the video of different frame per second, and the imageing sensor 18 of different exposure time of arranging in pairs or groups can be respectively adopted according to actual needs, adapt to various different light source 11.Such as, can be selected for the video of 30 frames/10s, pass through player plays, adjustment video window is placed in the middle, loop play is set, reloads in the first spatial light modulator 12, and frame rate controller 194 can be set carry out frame rate adjustment, by the coherence of its regulation light source 11, obtain adapting to the suitable sources of this system.
Please also refer to Fig. 3, described controller 19 can include display 191, coding and decoding video module 192, image capture module 193 and frame rate control module 194.Specifically, frame rate control module 194 may be based on the control module (FPGA model used is Altera MAX 10FPGA) of FPGA.Described coding and decoding video module 192 is main is core by high integration video coding/decoding chip TVP5150, completes the decoding of analog video signal and produces the work of stadardized video.Described image capture module 193 is mainly received caching plate by FPGA view data and forms.
In the present embodiment, described frame rate control module 194 is mainly formed by by strong circuit.Groundwork process: the image that imageing sensor 18 collects inputs FPGA coding and decoding video module 192 via image capture module 193 and processes;Frame rate control module 194 controls the video frequency output frame per second of FPGA coding and decoding video module 192, then by its output to second space photomodulator 17, simultaneously can be in display 191 preview video and parameter.
In road self-reference optical interferometer 100 altogether described in the utility model, the first spatial light modulator plays the effect of equivalent rotary clouded glass, the first spatial light modulator 12 can be controlled by controller 19, make when loading video, the video of different frame per second can be respectively adopted according to actual needs, and the imageing sensor 18 of different exposure time of arranging in pairs or groups, adapt to various different light source 11;Described road self-reference optical interferometer 100 altogether can produce weak coherent light source, suppression coherent noise, thus obtain the incoherent digital hologram of part and obtain having certain resolution reproduction while, moreover it is possible to avoid the problems such as the vibration, mechanical noise and the flow perturbation that are produced by motor-driven rotating ground glass.Further, it is also possible to adapt to various light source by the frame per second changing random mask video.
The above is preferred implementation of the present utility model; it should be pointed out that, for those skilled in the art, on the premise of without departing from this utility model principle; can also make some improvements and modifications, these improvements and modifications are also considered as protection domain of the present utility model.

Claims (7)

1. a Zhong Gong road self-reference optical interferometer, it is characterized in that, described interferometer includes light source, the first spatial light modulator, transmissibility of adjustable attenuation piece, collimating lens, polaroid, second space photomodulator, imageing sensor and the controller set gradually, and wherein the first spatial light modulator and second space photomodulator and imageing sensor are all connected with controller;Object under test is arranged between transmissibility of adjustable attenuation piece and collimating lens, the incident illumination sent by light source is through the first spatial light modulator modulation and reflection, and after transmissibility of adjustable attenuation piece decays, expose to object under test, and by the light wave of object under test transmission or reflection, after collimating lens collimates and passes through polaroid, it is incident to second space photomodulator and is received by imageing sensor after its modulation and reflection.
2. a kind of road self-reference optical interferometer altogether as claimed in claim 1, it is characterised in that described controller includes display, coding and decoding video module, image capture module and frame rate control module.
3. a kind of road self-reference optical interferometer altogether as claimed in claim 1, it is characterised in that described first spatial light modulator uses resolution to be 1280X 1024 pixel, and pixel dimension is the pure phase type spatial light modulator of 20um X 20um.
4. a kind of road self-reference optical interferometer altogether as claimed in claim 3, it is characterised in that described second space photomodulator uses resolution to be 1280X 768 pixel, and pixel dimension is the pure phase type spatial light modulator of 12.3um X 12.3um.
5. a kind of road self-reference optical interferometer altogether as claimed in claim 1, it is characterised in that the focal length of described collimating lens is 190mm, and the distance of described collimating lens to second space photomodulator is 160mm.
6. a kind of road self-reference optical interferometer altogether as claimed in claim 1, it is characterised in that described second space photomodulator is 250mm with the distance of imageing sensor.
7. a kind of road self-reference optical interferometer altogether as claimed in claim 1, it is characterised in that described light source is He-Ne LASER Light Source, and its wavelength is 632.8nm.
CN201620257021.6U 2016-03-30 2016-03-30 Way is from reference light interferometer altogether Expired - Fee Related CN205483259U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111537197A (en) * 2019-12-25 2020-08-14 上海瑞立柯信息技术有限公司 Universal calibration method for spatial light modulator phase measurement
CN113917819A (en) * 2021-10-13 2022-01-11 中国工程物理研究院激光聚变研究中心 Incoherent three-dimensional holographic layered reconstruction method based on Fresnel mask

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111537197A (en) * 2019-12-25 2020-08-14 上海瑞立柯信息技术有限公司 Universal calibration method for spatial light modulator phase measurement
CN113917819A (en) * 2021-10-13 2022-01-11 中国工程物理研究院激光聚变研究中心 Incoherent three-dimensional holographic layered reconstruction method based on Fresnel mask
CN113917819B (en) * 2021-10-13 2023-03-21 中国工程物理研究院激光聚变研究中心 Incoherent three-dimensional holographic layered reconstruction method based on Fresnel mask

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Granted publication date: 20160817

Termination date: 20170330