CN100573038C - The two-dimension chromatic dispersion fringe analysis method that is used for absolute distance measurement - Google Patents
The two-dimension chromatic dispersion fringe analysis method that is used for absolute distance measurement Download PDFInfo
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Abstract
A kind of absolute distance measurement method that is used for millimeter magnitude belongs to field of photoelectric technology.The present invention adopts chromatic dispersion rayleigh interferometer light path, gather interference fringe by ccd video camera, and utilize the stripe information of dispersion direction to carry out the absolute distance bigness scale, and utilize the interference fringe information of base direction to carry out accurate Calculation, finally realize the high-acruracy survey of absolute light path difference.This method is measured rapidly, and principle is simple and clear, and robustness is good, and range is big, and the precision height can be used for aspects such as the demarcation of high precision slip gauge, the position detection of the telescopical common phase of large-scale sectional type.
Description
Technical field:
The present invention is the absolute distance measurement method of a kind of high precision, millimeter magnitude measurement range, belongs to photoelectric detection technology field.
Background technology:
In delicate metering, astronomy, military affairs etc. are used, require tens nanometers are done precision measurement to several millimeters small bench height (being reference mirror and the measured lens absolute distance along optical axis direction).Bench height measuring method commonly used mainly is divided into the direct method of measurement and optical measuring method two classes.The direct method of measurement belongs to contact to be measured, and just can realize with three coordinate machine, but measuring speed is slow and easy scratch surface; Optical measuring method belongs to non-contact measurement, used widely, reference path and measure optical path difference Δ between the light path and be 2 times of actual bench height δ L (be Δ=2 δ L, Δ and δ L are the length amount, available nm equal length unit or convert how many wavelength X and represent).Optical measuring method commonly used is divided into white light scanning method, multi-wavelength coincidence method, chromatic dispersion the Schlieren method etc. again.The white light scanning method is used classical safe graceful Green's interferometer light path mostly, and the length that continuously changes gage beam (or reference arm) during measurement scans.When the white-light fringe contrast reaches maximum, two arm aplanatisms.Write down the aplanatic position of tested step both sides and reference arm respectively, can obtain bench height; The multi-wavelength coincidence method is used the Koster's interferometer light path more, measures the decimal order of interference of different wave length monochromatic light interference fringe respectively, then utilizes synthetic wavelength and decimal to overlap principle and calculates bench height.This method has higher measuring accuracy, but need to switch the light source or the color filter of various wavelength, takes multiple measurements just and can obtain bench height, and Measuring Time is longer, and bench height need be used the more light source or the color filter of multi-wavelength when big.More than two kinds of methods all cannot realize the instantaneous measurement of bench height therefore can't influencing the problem of nanoscale measuring accuracy from overcoming ambient vibration, temperature, flow perturbation etc. in essence.
2000, people such as the jet power laboratory Fang Shi of California, USA Polytechnics proposed chromatic dispersion the Schlieren method (being the DFS method), are used for the common phase position bigness scale of space telescope NGST of future generation.(when detecting the telescope primary mirror, be called common phase bit error δ L between the piecemeal mirror along the absolute distance of optical axis direction between the sub-mirror of each piecemeal, cophasing error, as shown in Figure 5.) its light path is the chromatic dispersion rayleigh interferometer, after the interference fringe that collects was carried out pre-service such as light source light spectrum correction, detector spectral response correction, the focal plane light distribution can be expressed as
By the strongest delegation or several capable light intensity data, press following formula least square fitting I
0, γ,
With four parameters of δ L, δ L is the bench height between the two piecemeal mirrors.(referring to: Fang Shi, etc, Segmented Mirror Coarse Phasing with a Dispersed FringeSensor:Experiment on NGST ' s Wavefront Control Testbed, Proceedings of SPIE Vol.4850, pp318-328,2003).The measurement range of this method can reach ± 1 fluctuation depth of focus, is generally positive and negative tens microns, and precision is better than 100 nanometers.But less than λ/4 o'clock, because that light intensity of each row changes is very little, brought impassable difficulty to parameter fitting in bench height, this method lost efficacy.Because the position adjustment of piecemeal mirror common phase is that a measurement and correction hocket, the process of approaching one by one is not so the chromatic dispersion the Schlieren method that lost efficacy when a small amount of journey is suitable for the accurate measurement of piecemeal mirror common phase bit error.Aspect range extension, because this method needs the gray scale fitting parameter according to striped, so require counting and (generally to be no less than 10) very little in the fringe period.Under the certain prerequisite of chromatic dispersion, this has just limited measurement range, makes it to be not suitable for the absolute distance measurement of millimeter magnitude.Because this method is the gray-scale value with the different wave length place to fit and calculates, so need to demarcate accurately as parameters such as natural stellar spectra distribution, detector spectral responses influencing the factor of relative energy distribution between different wave length.
Summary of the invention:
Purpose of the present invention is exactly for solving the deficiency of above prior art, propose that a kind of principle is simply distinct, calculated amount is little, need not to carry out complicated chromatic dispersion Rayleigh interference fringe analysis method of demarcating, realize the transient state absolute distance measurement of wide range, high precision, non-blind area.
The objective of the invention is to be achieved through the following technical solutions:
Rayleigh interferometer is an altogether light path interferometer of a kind of standard, and the plane light wave that two bundles carry optical path difference information overlaps on the focal plane after by condenser lens, interferes simultaneously.Different with the light distribution of the common interferogram (as the interferogram of the graceful Green's interferometer of Thailand) that forms at the emergent pupil face, the light distribution of Rayleigh interferogram is by the cosine striped of envelope under the single hole point spread function.The shape of envelope depends on the shape and the size in aperture, and the phase differential between reference arm and the gage beam has been determined the position of cosine striped below the envelope, as shown in Figure 1.1 is the point spread function shape of normalization single hole, and 2 is the normalization interference fringe light distribution of center, two holes correspondence, and 3 is the light distribution of Rayleigh interference fringe.As can be seen from the figure, the 1st, envelope, the 2nd, modulation item, 3 is 1 and 2 product, promptly is subjected to the interference fringe of diffraction amplitude modulation.When phase differential changed, envelope item 1 was constant, and the position of modulation item 2 is moved, and therefore, also move thereupon the position of Rayleigh interference fringe.The monochromatic Rayleigh interferogram of out of phase difference correspondence as shown in Figure 2.Phase differential
And satisfy simple proportional relationship between the optical path difference Δ, promptly
When the phase differential between two sub-apertures was 0, the main peak energy was the strongest, was positioned at the center of envelope; When phase difference variable was big, peak position began to move up, and energy weakens gradually simultaneously; When phase differential reached π, peak position moved to the top, and this moment, the energy of secondary peak was suitable with main peak; When phase differential continue to increase, secondary peak energy had originally surpassed main peak, becomes new main peak then, so peak position also suddenly changes to below by the top; Along with the continuation increase of phase differential, peak position continues to rise, and energy is also strengthening; When phase differential changed to 2 π, peak position was got back to the center of envelope, and it is the strongest that energy also reaches, with phase differential be that 0 o'clock light distribution is just the same; Continue to increase phase differential, the light distribution of Rayleigh conoscope image will periodically change according to above-mentioned rule.So at phase differential
Scope in, the position of main peak and intensity and
Between one-to-one relationship is arranged.By surveying the position of main peak, can obtain corresponding optical path difference
If phase differential
Exceed [0,2 π) scope the time, light distribution is to change in the cycle with 2 π, so unknowable
Be positioned at which 2 π cycle, so-called 2 π ambiguity that Here it is actually.Therefore, using single wavelength is the absolute light path difference that can not obtain between the two sub-apertures.In this manual, definition " decimal phase differential
" be positioned at [0,2 π) in the scope, corresponding have " integer a phase differential
", they satisfy
Similar with it, the optical path difference Δ also can be write as Δ=Δ
Zheng+ Δ
XiaoBy the peak position of the Rayleigh conoscope image of single wavelength, can in the hope of
And Δ
XiaoIn the light path of rayleigh interferometer, add chromatic dispersion original paper (as grating, prism or grism), promptly become the chromatic dispersion rayleigh interferometer.White light Rayleigh interference fringe forms dislocation arrowband Rayleigh interference fringe along perpendicular to baseline (two sub-aperture center lines) direction chromatic dispersion, and the light intensity stack of each striped promptly produces chromatic dispersion Rayleigh interference fringe.The definition dispersion direction is the x direction, and base direction is the y direction.White light chromatic dispersion Rayleigh interference fringe light distribution on the target surface of detector (CCD or CMOS) as shown in Figure 3.Under certain optical path difference Δ, the decimal phase differential of different wave length correspondence
Difference, so the also variation continuously of the peak position of the accurate monochromatic Rayleigh interference fringe of each wavelength correspondence, and transition takes place when π, form chromatic dispersion Rayleigh interference fringe as shown in Figure 3.Peak position can be made up by main peak centroid position, peak or its and characterize, to the measurement of fringe period T based on identical characteristic manner.The coordinate system of two-dimension chromatic dispersion the Schlieren method is chosen as shown in the figure, and the interference direction is y, and dispersion direction is x, so the x axle is corresponding with wavelength X again.The corresponding identical order of interference of each bar bright rays among the figure is as m level bright rays among the figure and n level bright rays.The value of m and n can't directly obtain from interferogram, but the difference of m and n can be simply obtains by the method for several lines, as shown in FIG., and n-m=5.X direction (laterally) is a dispersion direction, when there is the optical path difference Δ in two sub-apertures, and the phase differential of the correspondence of different wave length
For identical optical path difference, the phase place difference of different wave length correspondence.The light distribution of y direction (vertically) in fact is the interference fringe of the arrowband of respective wavelength, the monochromatic light Rayleigh conoscope image of its characteristics shown in accompanying drawing 1,2.Fringe period T is relevant at interval with two sub-apertures, peak with
Be directly proportional.
By interference fringe peak y and fringe period T, can calculate the decimal phase differential
T is a y direction fringe period in the formula (1), by
When neighbouring, measure the fringe spacing when promptly two striped peak heights are roughly the same, also can obtain by the method for traversal.(traversal, light distribution image when promptly gathering a large amount of out of phase difference, experienced transition between maximal value and the minimum value with the interference fringe peak y that guarantees each wavelength, and with the difference of the maximal value of the interference fringe peak y that surveys and the minimum value measurement result as T.) the fringe period T difference of each wavelength correspondence, the size of T is directly proportional with wavelength.Be to improve measuring accuracy, the T that each wavelength can be recorded is averaged after divided by wavelength, and the result multiply by wavelength again, as the final measurement of each wavelength fringe period T.In actual the use because the influence of factors such as optical system aberration, peak position y that also can be by demarcating interference fringe with
Relation curve, calculate the decimal phase differential by curve interpolation
The bearing accuracy of the interference fringe peak of y direction can reach T/50 usually, and the optical path difference measuring accuracy of promptly corresponding λ/50 is therefore higher at y direction phase measurement accuracy.But because the problem of 2 π ambiguity, can not obtain the integral part of phase place, promptly can not obtain absolute optical path difference according to the phase information of single wavelength interference fringe.In order to measure absolute light path difference value, can calculate the optical path difference Δ by the phase place and the number of interference fringes between two wavelength at two wavelength places:
M is a wavelength X in the formula
1And λ
2Between fringe number, i.e. n-m among Fig. 3.At λ
1, λ
2One regularly, and the optical path difference Δ is directly proportional with fringe number M, can directly obtain relative number of interference fringes M by the method along the dispersion direction counting.Formula (2) is not only used λ
1, λ
2The decimal phase differential at two places
Also utilized λ
1, λ
2Between all wavelengths determine between two wavelength the interference fringe relative level along the interference light intensity information of dispersion direction, therefore can obtain the absolute light path difference by formula (2).
Because in the formula (2)
With phase place
Measuring error amplify, so the resulting optical path difference Δ of formula (2) precision is not high, can not be as final result of calculation.([] expression rounds Δ substitution formula (3) can be determined in the visual field arbitrarily the order of interference k of af at wavelength lambda, k is an integer, similar with m, n among Fig. 3, the absolute level that is interference fringe is inferior), again by formula (4) accurate Calculation optical path difference Δ ' (annotate: Δ ' with Δ be same physical quantity, Δ is the bigness scale value, Δ ' be the accurate measurement value), and then obtain between tested surface and the reference surface absolute distance δ L along optical axis direction.In order further to improve the measuring accuracy of δ L, can all calculate a δ L value to a plurality of wavelength X according to formula (5), get the final measurement of average as δ L.
Utilize the stripe information of horizontal (dispersion direction) to carry out absolute light path difference primary Calculation by formula (2), utilize vertical (vertical dispersion direction) highly sensitive characteristic of interference fringe information to carry out accurate Calculation, realize the high-acruracy survey of absolute distance, utilize the measurement result mean value of multi-wavelength further to improve the precision of measurement result.
Description of drawings:
Accompanying drawing 1 Rayleigh is interfered the one dimension surface of intensity distribution
10, single hole point spread function; 11, cosine interference fringe; 12, Rayleigh interference fringe
The light distribution of single wavelength Rayleigh conoscope image during accompanying drawing 2 out of phase differences
Accompanying drawing 3 chromatic dispersion Rayleigh interference fringe light distribution and two-dimension chromatic dispersion striped disposal route synoptic diagram
Accompanying drawing 4 two-dimension chromatic dispersion the Schlieren methods detect slip gauge height light path principle figure
1, parallel light tube; 2, standard block gauge; 3, tested slip gauge; 4, beam-splitter; 5, diaphragm; 6, dispersion element; 7, condenser lens; 8, detector
Accompanying drawing 5 two-dimension chromatic dispersion the Schlieren methods detect piecemeal mirror common phase bit error light path principle figure
13, standard mirror; 14, measured lens; 9, collimation lens; 5, diaphragm; 6, dispersion element; 7, condenser lens; 8, detector
Embodiment is as follows:
Concrete agent example 1
The two-dimension chromatic dispersion the Schlieren method is used to detect the slip gauge height, and light path principle figure as shown in Figure 4.
The plane wave that the white light parallel light tube sends through the beam-splitter back reflection on measured lens and reference mirror.The reference mirror height is known, and the difference in height of measured lens and reference mirror is δ L.Accurately measure measured lens and reference mirror absolute distance δ L, can obtain the height of tested slip gauge along optical axis direction.Usually, δ L should be less than several millimeters.Plane wave by the reflection of reference mirror and measured lens after, be divided into two bundle parallel plane ripples, the optical path difference Δ between them is 2 times δ L.After seeing through beam-splitter, two bundle directional lights pass two sub-apertures of diaphragm 5 respectively, and the shape of diaphragm 5 has determined the cycle of the size and the cosine interference fringe (modulation item) of single hole point spread function in the Rayleigh conoscope image (envelope item).Collimated white light is through behind the dispersion element 6, and the direction of propagation deflects, and the angle of deviation that different wavelength is corresponding different becomes the different monochromatic plane wave in a series of directions of propagation.For a certain wavelength, the plane wave of two sub-aperture correspondences is still parallel, so condenser lens 7 converges to same point on its focal plane with them, forms monochromatic Rayleigh interference fringe.The plane wave of different wave length is owing to its angle of deviation difference, and its intersection point launches along dispersion direction, forms the monochromatic Rayleigh interference fringe of a row on the back focal plane of lens 7.These monochromatic Rayleigh interference fringe light intensity mutual superposition, so arbitrary wavelength place correspondence all is the Rayleigh interference fringe of arrowband, promptly accurate monochromatic Rayleigh interference fringe.When dispersive power is big, the smaller bandwidth of different wave length light intensity overlapping part, the character of the accurate monochromatic Rayleigh interference fringe of formation and monochromatic Rayleigh interference fringe are very approaching.The target surface of CCD 8 overlaps with the back focal plane of lens 7, is used for receiving chromatic dispersion Rayleigh interference fringe.Light path builds, adjust finish after, handle as follows:
(1) setting up with the dispersion direction is the x axle, and base direction is the coordinate system of y axle, and demarcate wavelength and coordinate concern λ (x);
(2) measure the fringe period T of each wavelength correspondence, the peak position of each the wavelength correspondence when demarcating absolute distance and being zero;
(3) gather chromatic dispersion Rayleigh interference fringe by image scanner, and intercept the part that has chromatic dispersion Rayleigh interference fringe along the y direction, the intercepting scope is calculated the position y of each wavelength place interference fringe light distribution main peak greater than the diameter of single hole diffraction Airy disk;
(4) by formula (1)
Calculate the decimal phase differential of each wavelength correspondence
(5) selection is near a pair of wavelength X at two ends, visual field
1, λ
2, the decimal phase differential of their correspondences is respectively
With
Along the order of interference difference M of x direction calculating between them, according to formula (2)
Optical path difference Δ between bigness scale two light beams; According to formula (3)
Can determine the order of interference k of random wave strong point in the visual field; By formula (4)
Accurate Calculation optical path difference Δ ';
(6) by formula (5)
Calculate with a certain wavelength when calculating wavelength the absolute distance δ L between measured lens and the reference mirror;
(7) be further to improve measuring accuracy, can adopt a plurality of calculating wavelength to (6) step, obtain corresponding a plurality of absolute distance δ L with it, the mean value of getting described a plurality of absolute distances is as final measurement.
Concrete agent example 2
The two-dimension chromatic dispersion the Schlieren method is used to detect piecemeal mirror common phase bit error, and light path principle figure as shown in Figure 5.
It is basic identical with the principle that detects the slip gauge height that the two-dimension chromatic dispersion the Schlieren method is used to detect the principle of piecemeal mirror common phase bit error, but what measure here is the axial distance of piecemeal mirror to be measured with respect to reference mirror.In most cases, the used light source of this measurement no longer is artificial infinity target generator---parallel light tube, but directly uses starlight.The two bundle spherical waves that collimation lens 9 will carry optical path difference information are converted to two bundle plane waves, and are identical in follow-up system and disposal route and the agent example 1, repeat no more.Principal feature of the present invention (comparing with the chromatic dispersion the Schlieren method) with the multi-wavelength coincidence method:
Be a kind of wide range, high sensitivity, high-precision absolute distance measurement method, need not carry out complicated light source light spectrum demarcation and CCD spectrum response curve and demarcate, can realize the instantaneous measurement of submillimeter magnitude absolute distance.
Compare with the multi-wavelength coincidence method:
Two-dimension chromatic dispersion the Schlieren method and multi-wavelength coincidence method all are to use multi-wavelength information to eliminate the influence of 2 π ambiguity, solve the measurement of the integral multiple distance of absolute distance medium wavelength; Calculate the measurement of the distance of a wavelength of less than in the absolute distance with the decimal optical path difference measurement result of each individual wavelengths.Do not occur in integer calculations under the prerequisite of mistake, measuring accuracy depends on the measuring accuracy of decimal phase differential.Measuring accuracy for single wavelength decimal phase differential, these two kinds of methods are roughly suitable, but the decimal phase differential of the normally used several wavelength of multi-wavelength coincidence method is done on average, and the two-dimension chromatic dispersion the Schlieren method use thousands of single wavelength (the pixel number that depends on the CCD camera) the decimal phase differential on average as measurement result, its quantity of information is much larger than the multi-wavelength coincidence method.Because these two kinds of methods all are that average with the multi-wavelength measurement result is as measurement result, so result's repeatability (variance) is proportional to the square root of number of wavelengths.Select for use the laser of 10 wavelength to measure with the multi-wavelength coincidence method, the two-dimension chromatic dispersion the Schlieren method is selected for use 1000 wavelength (the row pixel number of CCD) to do and is measured as example, and repeatability can rise to original 10 times.What is more important, multi-wavelength coincidence method need be switched the light source or the color filter of various wavelength, when each the measurement, can only obtain the decimal phase differential of a wavelength correspondence; And in the two-dimension chromatic dispersion the Schlieren method, the decimal phase differential of all wavelengths obtains simultaneously.This instantaneous measurement influences the problem of nanoscale measuring accuracy from having overcome ambient vibration, temperature, flow perturbation etc. in essence.
Conclusion: compare with the multi-wavelength coincidence method, the two-dimension chromatic dispersion the Schlieren method is measured absolute distance system robustness height, and good reproducibility can be realized instantaneous measurement.
Compare with the chromatic dispersion the Schlieren method:
Both light paths are identical, are the chromatic dispersion rayleigh interferometer, but to resulting chromatic dispersion Rayleigh Interferogram Processing difference.The chromatic dispersion the Schlieren method has only used the strongest delegation of light intensity or a few line data to determine two sub-aperture absolute light path differences by the method for least square fitting parameter, and the two-dimension chromatic dispersion the Schlieren method utilizes the stripe information of dispersion direction to carry out absolute common phase bit error calculating, utilize the interference fringe information of base direction to carry out accurate Calculation, the final high-acruracy survey that realizes the absolute light path difference, the light intensity of having used chromatic dispersion Rayleigh interference fringe to be had a few in the measuring process contains much information.The two-dimension chromatic dispersion the Schlieren method thinks that the light distribution of y direction is exactly the Rayleigh interference light intensity distribution of quasi-monochromatic light under the respective wavelength, its physical concept to chromatic dispersion Rayleigh interference fringe is explained more thorough, clearly, accordingly, also more targeted on the disposal route, make its calculated amount significantly be reduced with respect to the chromatic dispersion the Schlieren method.
1) range aspect: under the certain prerequisite of dispersive power and CCD pixel number, the fringe number that the x direction allows have at most determined measurement range.DFS method chromatic dispersion the Schlieren method will use the light distribution of x direction to carry out data fitting, so require in its each fringe period more sampling number is arranged, generally is no less than 6; And the two-dimension chromatic dispersion the Schlieren method, the fringe number of demand x direction only, the sampling number that needs in each fringe period less (2 points get final product in theory, and 4 points can obtain good result of calculation), therefore, comparing the range of two-dimension chromatic dispersion the Schlieren method with DFS can be nearly greatly 1 times.
2) blind area:, can not comprise a complete fringe period in the whole dispersion range because x direction chromatic dispersion fringe period is very big.The DFS method fits thoroughly inefficacy because of can't accurately finishing cosine; And the two-dimension chromatic dispersion the Schlieren method utilizes at this moment is the interference fringe information of y direction, still can obtain high-precision result of calculation.Near to be the two-dimension chromatic dispersion the Schlieren method just do not exist on the principle the zero common phase bit error Problem of Failure.
3) external chromatic dispersion the Schlieren method DFS utilizes the chromatic dispersion striped to carry out the cosine function parameter along the light intensity value of x direction to fit and calculate the common phase bit error, and is therefore all very high to luminous intensity measurement precision and noise requirements; And the two-dimension chromatic dispersion the Schlieren method is to utilize the peak of striped to calculate the common phase bit error, and is low, affected by noise less to the luminous intensity measurement accuracy requirement by contrast.Distribution of beacon stellar spectra and CCD spectral response all have a direct impact the light intensity absolute value of each wavelength, and therefore being based upon the DFS method that is fitted on the calculating common phase bit error basis by each wavelengths centered point light intensity value must measure and revise distribution of beacon stellar spectra and CCD spectral response; And the beacon stellar spectra distributes and the CCD spectral response to the relative light intensity distribution did not influence of any single wavelength interference fringe itself, therefore the two-dimension chromatic dispersion the Schlieren method that calculates common phase bit error value by y direction interference fringe information need not to carry out the demarcation and the correction of distribution of beacon stellar spectra and CCD spectral response.Under the application scenario of detecting in piecemeal mirror common phase position, because light source is a fixed star, and that each stellar spectrum distributes is different, thus the chromatic dispersion the Schlieren method need to demarcate in advance might be as the stellar spectrum of beacon light source, very complicated.
Conclusion: compare two-dimension chromatic dispersion the Schlieren method physical concept with the chromatic dispersion the Schlieren method distinct, and measurement range is big, non-blind area, and the striped disposal route is simple, need not carry out complicated spectrum calibration.
The two-dimension chromatic dispersion the Schlieren method is a kind of contactless transient state absolute distance measurement method, and it uses chromatic dispersion rayleigh interferometer light path to measure.The measurement range of this method can reach a millimeter magnitude, and in whole measurement range non-blind area; The measuring accuracy height, measurement range is big, and repeatability is better than 1nm; Need not to carry out complicated spectrum calibration, be specially adapted to the common phase position detection of heavy caliber sectional type telescope primary mirror and the demarcation of high precision slip gauge.
Claims (9)
1, be used for the two-dimension chromatic dispersion fringe analysis method of absolute distance measurement, may further comprise the steps:
(1) uses wideband white light source, in rayleigh interferometer, add dispersion element, and make the line direction of its dispersion direction perpendicular to two perforate centers on the diaphragm, can obtain the quasi-monochromatic light Rayleigh interference fringe of a series of wavelength, i.e. chromatic dispersion Rayleigh interference fringe this moment at the place, focal plane of condenser lens simultaneously;
(2) setting up with the dispersion direction is the x axle, and base direction is the coordinate system of y axle, and demarcate wavelength and coordinate concern λ (x);
(3) measure the fringe period T of each wavelength correspondence, the peak position of each the wavelength correspondence when demarcating absolute distance and being zero;
(4) gather chromatic dispersion Rayleigh interference fringe by image scanner, and intercept the part that has chromatic dispersion Rayleigh interference fringe along the y direction, the intercepting scope is calculated the position y of each wavelength place interference fringe light distribution main peak greater than the diameter of single hole diffraction Airy disk;
(5) by formula (1)
Calculate the decimal phase differential of each wavelength correspondence
(6) selection is near a pair of wavelength X at two ends, visual field
1, λ
2, the decimal phase differential of their correspondences is respectively
With
Along the order of interference difference M of x direction calculating between them, according to formula (2)
Optical path difference Δ between bigness scale two light beams; With Δ substitution formula (3)
Can determine the order of interference k of any af at wavelength lambda in the visual field; By formula (4)
Accurate Calculation optical path difference Δ '; (7) by formula (5)
Calculate with in the visual field arbitrarily wavelength when calculating wavelength,
Absolute distance δ L between measured lens and the reference mirror.
2, the two-dimension chromatic dispersion fringe analysis method that is used for absolute distance measurement according to claim 1, the step (8) that also is included as further raising measuring accuracy and carries out, described step (8) is for to adopt a plurality of calculating wavelength to (7) step, obtain corresponding a plurality of absolute distance δ L with it, the mean value of getting described a plurality of absolute distances is as final measurement.
3, the two-dimension chromatic dispersion fringe analysis method that is used for absolute distance measurement according to claim 1, wherein said peak position can be made up by main peak centroid position, peak or its and characterize, to the measurement of fringe period T based on identical characteristic manner.
4, the two-dimension chromatic dispersion fringe analysis method that is used for absolute distance measurement according to claim 1, the measurement of wherein said fringe period T can be obtained by the method for traversal.
5, the two-dimension chromatic dispersion fringe analysis method that is used for absolute distance measurement according to claim 1, for further improving the measuring accuracy of described fringe period T, the T that each wavelength can be recorded is averaged after divided by wavelength, averaged result multiply by wavelength again, as the final measurement of each wavelength fringe period T.
6, the two-dimension chromatic dispersion fringe analysis method that is used for absolute distance measurement according to claim 1, wherein the peak position y that step (5) can be by demarcating interference fringe with
Relation curve, calculate by curve interpolation.
7, the two-dimension chromatic dispersion fringe analysis method that is used for absolute distance measurement according to claim 1, described wideband white light source can be starlight.
8, the two-dimension chromatic dispersion fringe analysis method that is used for absolute distance measurement according to claim 1, wherein dispersion element is prism, grating or grism.
9, the two-dimension chromatic dispersion fringe analysis method that is used for absolute distance measurement according to claim 1, wherein image scanner is CCD or CMOS.
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| CN105547168B (en) * | 2016-01-27 | 2018-02-13 | 北京理工大学 | Optical-modulation transfer function analysis method for absolute distance measurement |
| CN105700128B (en) * | 2016-05-03 | 2018-06-19 | 中国科学院上海天文台 | A kind of spliced telescope common phase level control device and control method |
| CN105806240B (en) * | 2016-05-25 | 2018-03-30 | 北京理工大学 | The method that multiple absolute distances are measured while based on optical transfer function |
| CN106441569B (en) * | 2016-10-31 | 2018-03-13 | 佛山市顺德区蚬华多媒体制品有限公司 | A kind of light-source system of full spectrum various dimensions |
| CN108519671B (en) * | 2018-04-19 | 2020-09-18 | 中国科学院上海天文台 | Closed-loop correction control method for phase translation error of splicing telescope system |
| CN115046476B (en) * | 2022-06-08 | 2023-05-16 | 中国科学院长春光学精密机械与物理研究所 | Sparse aperture telescope edge sensing method |
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| Title |
|---|
| Performance of segmented mirror coarse phasing with adispersed fringe sensor: modeling and simulations. Fang shi, Dave C. Redding, Joseph J.Green, and CatherineM.Ohara.Proceedings of SPIE,Vol.5487 . 2004 |
| Performance of segmented mirror coarse phasing with adispersed fringe sensor: modeling and simulations. Fang shi, Dave C. Redding, Joseph J.Green, and CatherineM.Ohara.Proceedings of SPIE,Vol.5487 . 2004 * |
| Segmented mirror coarse phasing with a dispersed fringesensor: experiment on NGST's wavefront control testbed. Fang Shi, Dave Redding, Andrew Lowman, Chuck Bowers,Laura Burns, Peter Petrone, Catherine Ohara, and ScottBasinger.Proceedings of the SPIE,Vol.4850 . 2003 |
| Segmented mirror coarse phasing with a dispersed fringesensor: experiment on NGST's wavefront control testbed. Fang Shi, Dave Redding, Andrew Lowman, Chuck Bowers,Laura Burns, Peter Petrone, Catherine Ohara, and ScottBasinger.Proceedings of the SPIE,Vol.4850 . 2003 * |
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| CN101221042A (en) | 2008-07-16 |
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