CN207845828U - Alloy melt stirring device is electroplated - Google Patents
Alloy melt stirring device is electroplated Download PDFInfo
- Publication number
- CN207845828U CN207845828U CN201721923736.1U CN201721923736U CN207845828U CN 207845828 U CN207845828 U CN 207845828U CN 201721923736 U CN201721923736 U CN 201721923736U CN 207845828 U CN207845828 U CN 207845828U
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- China
- Prior art keywords
- hanging plate
- alloy melt
- stirring device
- driving wheel
- driving
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Abstract
The utility model discloses a kind of plating alloy melt stirring devices, including：Hanging plate and driving device；Several first through hole are offered on the hanging plate, first through hole makes the liquid communication of hanging plate both sides；The driving device driving hanging plate movement is arranged with driving hanging plate movement by transmission mechanism；Electroplate liquid is stirred when the hanging plate movement.The utility model can effectively reinforce the flowing of electroplate liquid so that the part more than ion flows to the few part of ion, to ensure the effect of plating.
Description
Technical field
The utility model is related to a kind of plating alloy melt stirring devices.
Background technology
Electroplating bath is used to accommodate the electroplate liquids of plated wafers, when electroplate liquid plated wafers, in the electroplate liquid of wafer periphery
The plating ion for the electroplate liquid that plating ion can be gradually decreased because of plating consumption, and be not electroplated on periphery is not disappeared
Consumption, the ion for comparing the part electroplate liquid being electroplated is more, and after the plating ion reduction of wafer periphery, the effect of plating is just
It can give a discount, and the electroplate liquid ion that periphery is not electroplated can cause to waste.
Utility model content
The utility model is in order to solve the above technical problems, provide a kind of plating alloy melt stirring device.
In order to achieve the above object, the utility model is achieved through the following technical solutions：
A kind of plating alloy melt stirring device, including：Hanging plate and driving device；Several first through hole are offered on the hanging plate,
First through hole makes the liquid communication of hanging plate both sides；The driving device driving hanging plate movement drives extension by transmission mechanism
Plate movement ground setting；Electroplate liquid is stirred when the hanging plate movement.
An embodiment according to the present utility model, the shape of the first through hole are：Middle part is rectangle, rectangle
Both ends are semicircle.
An embodiment according to the present utility model, each first through hole vertical direction arrangement.
An embodiment according to the present utility model is arranged to the hanging plate vertical motion, and the first through hole is lateral
Setting.
An embodiment according to the present utility model, the transmission mechanism include：Driving wheel and transmission component；It is described
Driving wheel rotatably arranged with；The overlying contact of the side surface of one end of the transmission component and the driving wheel, the other end with
Hanging plate connects；The transmission component is driven to be arranged up and down when the driving wheel rotation.
An embodiment according to the present utility model, driven wheel side surface orthographic projection are non-circular curve；Or
The surface orthographic projection of person's driven wheel side is that the rotation axis of the round and described driving wheel is passed through from non-center location.
An embodiment according to the present utility model, the transmission component includes drive link；The drive link is set vertically
It sets, the drive link can be arranged up and down；The drive link upper end is connect with the hanging plate, and lower end is driven by the driving wheel
It is arranged dynamicly.
An embodiment according to the present utility model, the transmission component further includes frame；The drive link lower end
It is connect with the frame, the driving wheel is set in the frame；On the top on the driven wheel side surface and the frame
End in contact.
An embodiment according to the present utility model, the frame are that four rod pieces join end to end outside the rectangle to be formed
Frame, frame vertical straight setting, driving wheel is set to lower portion, under the top of the side surface of driving wheel and the rod piece of frame roof
Side's contact.
An embodiment according to the present utility model, further includes guider, and the guider is used to be the biography
It is oriented to when lever moves up and down.
An embodiment according to the present utility model, the guider include sliding block and guide rail, and the sliding block can
Slidably it is arranged along the guide rail；The drive link is connect with the sliding block, the guide rail fixed setting.
An embodiment according to the present utility model, the transmission mechanism quantity are two sets, and the driving device is logical
It crosses two sets of transmission mechanism and respectively drives the hanging plate both ends and be movably arranged.
An embodiment according to the present utility model, the driving device are connected with drive shaft, and the driving device is driven
It is arranged with moving the drive shaft turns, for described two driving wheel spacer sleeves in the drive shaft, the driving wheel is circle；
The drive shaft is passed through from the non-center location of the driving wheel.
Hanging plate, the electroplate liquid near hanging plate up and down motion stirring wafer so that do not carry out around is arranged in the utility model
Near the plating ion flow to wafer of plating, so that the plating ion that wafer is nearby electroplated is increased, keep the effect of plating
Fruit.First through hole is set on hanging plate, and first through hole is middle part rectangle, the structure of both ends semicircle so that the electroplate liquid of hanging plate both sides
Fully connection.Driving wheel is set, and driving wheel rotation can drive hanging plate to move up and down.Frame is set, hanging plate and driving wheel are played
The effect of connection.Transmission component is set, and the movement for realizing frame to hanging plate is transmitted, while can be arranged by transmission component multiple
Hanging plate；Guider is set, plays the role of being oriented to for drive link, the movement of limitation drive link in the up-down direction；In hanging plate
Both sides respectively setting one transmission mechanism so that the movement of hanging plate is more steady.
Description of the drawings
Fig. 1 is the stereogram of the utility model；
Fig. 2 is the side view of Fig. 1；
Fig. 3 is the front view of Fig. 1.
Specific implementation mode
The utility model is described in detail below in conjunction with the accompanying drawings：
As shown in Figure 1, Figure 2 and Figure 3, alloy melt stirring device is electroplated in the present embodiment, including：Hanging plate 1 and driving device 2；It is described
Several first through hole 101 are offered on hanging plate 1, first through hole 101 makes the liquid communication of 1 both sides of hanging plate；The driving dress
It sets the movement of 2 driving hanging plates 1 or is arranged with driving the movement of hanging plate 1 by transmission mechanism；The hanging plate 1 stirs electroplate liquid when moving.
The shape of the first through hole 101 is：Middle part is rectangle, and the both ends of rectangle are semicircle.Described each first
101 vertical direction of through-hole arranges.1 vertical motion of the hanging plate it is arranged, the laterally setting of the first through hole 101.
The transmission mechanism includes：Driving wheel 3 and transmission component；The driving wheel 3 rotatably arranged with；The transmission
The overlying contact of one end of component and the side surface of the driving wheel 3, the other end are connect with hanging plate 1；When the driving wheel 3 rotates
The transmission component is driven to be arranged up and down.3 side surface orthographic projection of the driving wheel is non-circular curve；Or driving
The rotation axis that 3 side surface orthographic projections are the round and described driving wheel 3 is taken turns to pass through from non-center location.
The transmission component includes drive link 4；The drive link 4 is vertically arranged, and the drive link 4 can be set up and down
It sets；4 upper end of the drive link is connect with the hanging plate 1, and lower end is drivingly disposed by the driving wheel 3.The transmission component
It further include frame 5；4 lower end of the drive link is connect with the frame 5, and the driving wheel 3 is set in the frame 5；It is described
The top of 3 side surface of driving wheel and 5 upper-end contact of the frame.The frame 5 is that four rod pieces 501 join end to end to be formed
Rectangular outer frame, frame 5 are vertically arranged, and driving wheel 3 is set to inside frame 5, and top and the frame 5 of the side surface of driving wheel 3 push up
The lower contact of the rod piece 501 in portion.
The present embodiment further includes guider, and the guider is used to be oriented to when moving up and down for the drive link 4.Institute
The guider stated includes sliding block 6 and guide rail 7, and the sliding block 6 can be slidably arranged along the guide rail 7；The drive link 4 and institute
The connection of sliding block 6 is stated, the guide rail 7 is fixedly installed.
The transmission mechanism quantity is two sets, and the driving device 2 respectively drives the extension by two sets of transmission mechanism
1 both ends of plate are movably arranged.The driving device 2 is connected with drive shaft 8, and the driving device 2 drives the drive shaft 8 to rotate
Ground is arranged, and for 3 spacer sleeve of described two driving wheels in the drive shaft 8, the driving wheel 3 is circle；The drive shaft 8 is certainly
3 non-center location of the driving wheel passes through.The driving device 2 of the present embodiment includes motor.
In use, motor drive driving wheel 3 rotates, driving wheel 3 drives frame 5 to move up and down, and frame 5 passes through drive link
4 transmission driving hanging plate 1 moves up and down, and hanging plate 1 stirs liquid so that plating ion flow to the wafer periphery being electroplated,
More ions participate in the plating of wafer, effectively utilize plating ion, will not cause to waste, and keep the effect of plating.
When drive link 4 moves, moves, do not deviate by the range of guide rail 7 limits always, will not shake.
Hanging plate, the electroplate liquid near the up and down motion stirring wafer of hanging plate 1 so that do not carry out around is arranged in the utility model
Near the plating ion flow to wafer of plating, so that the plating ion that wafer is nearby electroplated is increased, keep the effect of plating
Fruit.First through hole 101 is set on hanging plate 1, and first through hole 101 is middle part rectangle, the structure of both ends semicircle so that 1 both sides of hanging plate
Electroplate liquid be fully connected to.Driving wheel 3 is set, and the rotation of driving wheel 3 can drive hanging plate 1 to move up and down.Frame 5 is set, is played
The effect that hanging plate 1 and driving wheel 3 connect.Transmission component is set, and the movement for realizing frame to hanging plate 1 is transmitted, while can be passed through
Multiple hanging plates 1 are arranged in transmission component；Guider is set, plays the role of being oriented to for drive link, limitation drive link 4 is in upper and lower
Upward movement；One transmission mechanism is respectively set on the both sides of hanging plate 1 so that the movement of hanging plate 1 is more steady.
The embodiments of the present invention are only used for illustrating the utility model, do not constitute to right
Limitation, other substantially equivalent replacements that those skilled in that art are contemplated that, in scope of protection of the utility model
It is interior.
Claims (13)
1. alloy melt stirring device is electroplated, which is characterized in that including：Hanging plate and driving device；Several first are offered on the hanging plate
Through-hole, first through hole make the liquid communication of hanging plate both sides；The driving device driving hanging plate movement passes through transmission mechanism
Drive hanging plate movement ground setting；Electroplate liquid is stirred when the hanging plate movement.
2. plating alloy melt stirring device according to claim 1, which is characterized in that the shape of the first through hole is：In
Portion is rectangle, and the both ends of rectangle are semicircle.
3. plating alloy melt stirring device according to claim 1 or 2, which is characterized in that each first through hole is vertical
Direction arranges.
4. plating alloy melt stirring device according to claim 1, which is characterized in that be arranged to the hanging plate vertical motion, institute
First through hole is stated laterally to be arranged.
5. plating alloy melt stirring device according to claim 1, which is characterized in that the transmission mechanism includes：Driving wheel
And transmission component；The driving wheel rotatably arranged with；One end of the transmission component is upper with the side surface of the driving wheel
Side's contact, the other end are connect with hanging plate；The transmission component is driven to be arranged up and down when the driving wheel rotation.
6. plating alloy melt stirring device according to claim 5, which is characterized in that driven wheel side surface orthographic projection is non-
Circular curve；Or the rotation axis that the orthographic projection of driven wheel side surface is the round and described driving wheel is passed through from non-center location.
7. plating alloy melt stirring device according to claim 5, which is characterized in that the transmission component includes drive link；Institute
It states drive link to be vertically arranged, the drive link can be arranged up and down；The drive link upper end is connect with the hanging plate, lower end
It is arranged by the drive wheel.
8. plating alloy melt stirring device according to claim 7, which is characterized in that the transmission component further includes frame；
The drive link lower end is connect with the frame, and the driving wheel is set in the frame；The driven wheel side surface
Top and the frame upper-end contact.
9. plating alloy melt stirring device according to claim 8, which is characterized in that the frame is four rod piece head and the tail phases
The rectangular outer frame even formed, frame vertical straight setting, driving wheel are set to lower portion, the top of the side surface of driving wheel and frame
The lower contact of the rod piece at top.
10. plating alloy melt stirring device according to claim 7, which is characterized in that further include guider, the guiding dress
It is oriented to when setting for being moved up and down for the drive link.
11. plating alloy melt stirring device according to claim 10, which is characterized in that the guider include sliding block and
Guide rail, the sliding block can be slidably arranged along the guide rail；The drive link is connect with the sliding block, and the guide rail fixation is set
It sets.
12. plating alloy melt stirring device according to claim 5, which is characterized in that the transmission mechanism quantity is two sets,
The driving device respectively drives the hanging plate both ends by two sets of transmission mechanism and is movably arranged.
13. plating alloy melt stirring device according to claim 12, which is characterized in that the driving device is connected with driving
Axis, the driving device are arranged with driving the drive shaft turns, and described two driving wheel spacer sleeves are mounted in the drive shaft,
The driving wheel is circle；The drive shaft is passed through from the non-center location of the driving wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721923736.1U CN207845828U (en) | 2017-12-29 | 2017-12-29 | Alloy melt stirring device is electroplated |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721923736.1U CN207845828U (en) | 2017-12-29 | 2017-12-29 | Alloy melt stirring device is electroplated |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207845828U true CN207845828U (en) | 2018-09-11 |
Family
ID=63416635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721923736.1U Active CN207845828U (en) | 2017-12-29 | 2017-12-29 | Alloy melt stirring device is electroplated |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207845828U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110387573A (en) * | 2019-07-04 | 2019-10-29 | 广州兴森快捷电路科技有限公司 | More segregation of waste devices and electroplating producing system |
| CN111893544A (en) * | 2020-07-20 | 2020-11-06 | 昆山蕴鼎自动化科技有限公司 | Electroplating device |
-
2017
- 2017-12-29 CN CN201721923736.1U patent/CN207845828U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110387573A (en) * | 2019-07-04 | 2019-10-29 | 广州兴森快捷电路科技有限公司 | More segregation of waste devices and electroplating producing system |
| CN111893544A (en) * | 2020-07-20 | 2020-11-06 | 昆山蕴鼎自动化科技有限公司 | Electroplating device |
| CN111893544B (en) * | 2020-07-20 | 2021-12-17 | 昆山蕴鼎自动化科技有限公司 | Electroplating device |
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