CN207831907U - A kind of positive pressure pressure control system on vacuum heat treatment furnace - Google Patents
A kind of positive pressure pressure control system on vacuum heat treatment furnace Download PDFInfo
- Publication number
- CN207831907U CN207831907U CN201820095768.5U CN201820095768U CN207831907U CN 207831907 U CN207831907 U CN 207831907U CN 201820095768 U CN201820095768 U CN 201820095768U CN 207831907 U CN207831907 U CN 207831907U
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- pressure
- control system
- heat treatment
- vacuum heat
- reaction chamber
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 22
- 230000000740 bleeding effect Effects 0.000 claims description 6
- 239000003638 chemical reducing agent Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 4
- 238000012797 qualification Methods 0.000 abstract description 4
- 230000001737 promoting effect Effects 0.000 abstract description 3
- 238000013461 design Methods 0.000 abstract description 2
- 238000005457 optimization Methods 0.000 description 4
- 239000000696 magnetic material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
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Abstract
It is corresponding with vacuum heat treatment furnace the utility model discloses the positive pressure pressure control system on a kind of vacuum heat treatment furnace, include reaction chamber, positive pressure pressure control system, industrial control system on the vacuum heat treatment furnace, it is characterised in that：The positive pressure pressure control system includes air supply system and outlet system；It is provided with pressure sensor outside the reaction chamber；The industrial control system and positive pressure pressure control system, pressure sensor connection carry out the control of reaction cavity pressure.The utility model is designed reasonably, reasonable design so that the gas pressure in reaction chamber and gas handling system, outlet system becomes stable controllably；Simultaneously, increase pressure setting range value under different temperatures section environment, charge valve and relief valve is avoided frequently to open, it ensure that the gas pressure needed in reaction chamber under different temperatures environment is more constant, the stability of product heat treatment environment, material finished product qualification rate higher are improved, while reducing production cost, it is highly practical, it is suitable for promoting.
Description
Technical field
The utility model belongs at the electronic materials precise vacuum heat such as a kind of magnetic material, semi-conducting material, functional material
Stove field is managed, more specifically to the positive pressure pressure control system on a kind of vacuum heat treatment furnace.
Background technology
Magnetic material, semi-conducting material positive pressure heat treatment process when, the positive pressure range that conventional equipment is set is 0.1MPa-
1.0MPa is filled with process gas that is, when the pressure in reaction chamber is less than low pressure limit value, when reaction cavity pressure is more than in pressure
Pressure release is vented when limit value；With the variation of technological temperature, reaction cavity pressure can accordingly change, this constant voltage operation mode
Complexity, stability is poor, causes constant pressure environment unstable, destroys the thermal effectiveness of raw material, job efficiency is low.
Utility model content
In view of the deficienciess of the prior art, the purpose of this utility model is to provide on a kind of vacuum heat treatment furnace just
Pressure pressure control system, reasonable design so that the gas pressure in reaction chamber and gas handling system, outlet system becomes stable can
Control, avoids charge valve and relief valve from frequently opening, ensure that the gas pressure needed in reaction chamber under different temperatures environment more
Add constant, improve the stability of product heat treatment environment, material finished product qualification rate higher, while reducing production cost,
It is highly practical, it is suitable for promoting.
To achieve the above object, the utility model provides following technical solution：
A kind of positive pressure pressure control system on vacuum heat treatment furnace, the Vacuum Heat corresponding with vacuum heat treatment furnace
Include reaction chamber, positive pressure pressure control system, industrial control system in treatment furnace, it is characterised in that：The positive pressure pressure control system
Including including air supply system and outlet system；It is provided with pressure sensor outside the reaction chamber；The industrial control system and positive pressure
Control pressurer system, pressure sensor connection carry out the control of reaction cavity pressure.
As a kind of technical solution of optimization, the air supply system is connected with reaction chamber, is disposed on air supply system
Filter, pressure reducer, charge valve, manual modulation valve.
As a kind of technical solution of optimization, the outlet system is connected with reaction chamber, is disposed in outlet system
Filter, air bleeding valve, relief valve, manual modulation valve, check valve.
As a kind of technical solution of optimization, the industrial control system includes industrial personal computer, industrial personal computer by signal control line with
The charge valve of positive pressure pressure control system is connected with air bleeding valve.
As a kind of technical solution of optimization, it is provided with pressure sensor on the reaction chamber, pressure sensor passes through letter
Number line is by pressure measuring value Real-time Feedback to industrial control system.
By adopting the above-described technical solution, compared with prior art, the utility model is designed reasonably so that reaction chamber and
Gas pressure in gas handling system, outlet system becomes stable controllably, avoids charge valve and relief valve from frequently opening, ensure that
The gas pressure needed in reaction chamber under different temperatures environment is more constant, improves the stability of product heat treatment environment, object
Expect finished product qualification rate higher, while reducing production cost, it is highly practical, it is suitable for promoting.
The utility model is described further with reference to drawings and examples.
Description of the drawings
Fig. 1 is the principle schematic diagram in a kind of embodiment of the utility model.
Specific implementation mode
Embodiment
As shown in Figure 1, the positive pressure pressure control system on a kind of vacuum heat treatment furnace, corresponding with vacuum heat treatment furnace,
Include reaction chamber 1, positive pressure pressure control system, industrial control system 3 on the vacuum heat treatment furnace, it is characterised in that：The positive pressure
Control pressurer system includes air supply system and outlet system；Pressure sensor 2 is provided with outside the reaction chamber 1；It is described
Industrial control system 3 and positive pressure pressure control system, the connection of pressure sensor 2 carry out the control of pressure in reaction chamber 1.
The air supply system and reaction chamber 1 connect, and filter 4, pressure reducer 5, charge valve are disposed on air supply system
6, manual modulation valve 7.
The outlet system and reaction chamber 1 connect, and filter 8, air bleeding valve 9, relief valve are disposed in outlet system
10, manual modulation valve 11, check valve 12.
The industrial control system 3 includes industrial personal computer, the inflation that industrial personal computer passes through signal control line and positive pressure pressure control system
Valve 6 and air bleeding valve 9 connect.
Pressure sensor 2 is provided on the reaction chamber 1, pressure sensor 2 is real-time by pressure measuring value by signal wire
Feed back to industrial control system 3.
For the airline pressure signal transmission of pressure sensor monitoring in the utility model to industrial control system, industrial control system can be real
When show pressure value, on industrial control system can set temperature value and pressure limit value, temperature value is associated with pressure limit value, not
Corresponding pressure limit setting value is corresponded under synthermal section of setting value.When pressure value is set less than threshold pression range in reaction chamber
Be worth lower limit, industrial control system control air supply system carry out automatic inflating, when pressure value be higher than the threshold pression range setting value upper limit, stop
Only inflate；When pressure value is higher than the pressure upper limit range setting value upper limit in reaction chamber, industrial control system controls air supply system and carries out certainly
Dynamic to deflate, when pressure value is less than pressure upper limit range setting value lower limit in reaction chamber, stopping is deflated.Realize reaction cavity pressure just
Voltage-controlled system improves material finished product qualification rate, reduces production cost.It is provided with safety relief valve in reaction chamber outlet system, when
When reaction chamber pressure value surpasses the safety critical pressure value of setting, reaction chamber carries out releasing pressure automatically by safety relief valve, ensures
Reaction cavity pressure is within safe range, ensures the safety that equipment uses.
The scope of protection of the utility model is not limited merely to above-described embodiment, skill belonging to the idea of the present invention
Art scheme belongs to the scope of protection of the utility model.It should be pointed out that for those skilled in the art,
Several improvements and modifications under the premise of the utility model principle are not departed from, these improvements and modifications also should be regarded as the utility model
Protection domain.
Claims (5)
1. the positive pressure pressure control system on a kind of vacuum heat treatment furnace, corresponding with vacuum heat treatment furnace, at the Vacuum Heat
Manage on stove includes reaction chamber, positive pressure pressure control system, industrial control system, it is characterised in that：The positive pressure pressure control system packet
It includes including air supply system and outlet system；It is provided with pressure sensor outside the reaction chamber；The industrial control system and positive pressure pressure
Force control system, pressure sensor connection carry out the control of reaction cavity pressure.
2. the positive pressure pressure control system on a kind of vacuum heat treatment furnace according to claim 1, it is characterised in that：It is described
Air supply system is connected with reaction chamber, and filter, pressure reducer, charge valve, manual modulation valve are disposed on air supply system.
3. the positive pressure pressure control system on a kind of vacuum heat treatment furnace according to claim 1, it is characterised in that：It is described
Outlet system is connected with reaction chamber, and filter, air bleeding valve, relief valve, manual modulation valve, unidirectional is disposed in outlet system
Valve.
4. the positive pressure pressure control system on a kind of vacuum heat treatment furnace according to claim 1, it is characterised in that：It is described
Industrial control system includes industrial personal computer, and industrial personal computer is connected by the charge valve and air bleeding valve of signal control line and positive pressure pressure control system
It connects.
5. the positive pressure pressure control system on a kind of vacuum heat treatment furnace according to claim 1, it is characterised in that：It is described
It is provided with pressure sensor on reaction chamber, pressure sensor is by signal wire by pressure measuring value Real-time Feedback to industrial control system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820095768.5U CN207831907U (en) | 2018-01-21 | 2018-01-21 | A kind of positive pressure pressure control system on vacuum heat treatment furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820095768.5U CN207831907U (en) | 2018-01-21 | 2018-01-21 | A kind of positive pressure pressure control system on vacuum heat treatment furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207831907U true CN207831907U (en) | 2018-09-07 |
Family
ID=63393872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820095768.5U Expired - Fee Related CN207831907U (en) | 2018-01-21 | 2018-01-21 | A kind of positive pressure pressure control system on vacuum heat treatment furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207831907U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112294006A (en) * | 2020-11-03 | 2021-02-02 | 苏州贝氪智能科技有限公司 | Back supporting force following control method and back following supporting device |
-
2018
- 2018-01-21 CN CN201820095768.5U patent/CN207831907U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112294006A (en) * | 2020-11-03 | 2021-02-02 | 苏州贝氪智能科技有限公司 | Back supporting force following control method and back following supporting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180907 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |