CN207833352U - A kind of positive pressure constant pressure closed-loop control system in high-pressure crystal growing equipment - Google Patents
A kind of positive pressure constant pressure closed-loop control system in high-pressure crystal growing equipment Download PDFInfo
- Publication number
- CN207833352U CN207833352U CN201820095766.6U CN201820095766U CN207833352U CN 207833352 U CN207833352 U CN 207833352U CN 201820095766 U CN201820095766 U CN 201820095766U CN 207833352 U CN207833352 U CN 207833352U
- Authority
- CN
- China
- Prior art keywords
- pressure
- control system
- loop control
- closed
- reaction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 24
- 238000010438 heat treatment Methods 0.000 claims abstract description 20
- 150000001875 compounds Chemical class 0.000 claims description 4
- 230000000740 bleeding effect Effects 0.000 claims description 3
- 239000003638 chemical reducing agent Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 3
- 230000001737 promoting effect Effects 0.000 abstract description 3
- 238000012797 qualification Methods 0.000 abstract description 3
- 238000005457 optimization Methods 0.000 description 4
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000008054 signal transmission Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The utility model discloses the positive pressure constant pressure closed-loop control system in a kind of high-pressure crystal growing equipment, including reaction chamber, positive pressure constant pressure closed-loop control system, heating system, industrial control systems, it is characterised in that：The positive pressure constant pressure closed-loop control system includes air supply system and inlet, outlet pipeline；The reaction chamber is internally provided with heating system；The industrial control system and positive pressure constant pressure closed-loop control system, heating system connection carry out the control of pressure and temperature.The utility model is designed reasonably so that the gas pressure in reaction chamber and air inlet pipeline, outlet pipe becomes stable controllably；Simultaneously, increase pressure setting range value under different temperatures section environment, charge valve and relief valve is avoided frequently to open, it ensure that the gas pressure needed in reaction chamber under different temperatures environment is more constant, the stability of product high-pressure crystal growing environment, material finished product qualification rate higher are improved, while reducing production cost, it is highly practical, it is suitable for promoting.
Description
Technical field
The utility model belongs to the compound crystals growth apparatus such as indium phosphide field, more specifically to a kind of high pressure
Positive pressure constant pressure closed-loop control system on crystal growth equipment.
Background technology
The growth of the compound crystals such as indium phosphide carries out under constant positive pressure environment.The high pressure range of conventional equipment setting
It is filled with process gas, works as reaction chamber that is, when the pressure in reaction chamber is less than setting pressure minimum for 1.0MPa-9.9MPa
Pressure release is vented when pressure is more than setting Pressure maximum value；With the variation of technological temperature, reaction cavity pressure can accordingly become
Change, this constant voltage operation mode is complicated, and stability is poor, causes constant pressure environment unstable, destroys crystal growth, job efficiency is low.
Utility model content
In view of the deficienciess of the prior art, the purpose of this utility model is to provide a kind of high-pressure crystal growing equipment
On positive pressure constant pressure closed-loop control system, reasonable design so that gas pressure in reaction chamber and air inlet pipeline, outlet pipe becomes
It obtains stably and controllable；Meanwhile increasing pressure setting range value under different temperatures section environment, avoid charge valve and relief valve from frequently opening
It opens, ensure that the gas pressure needed in reaction chamber under different temperatures environment is more constant, improve the life of product high-pressure crystal
The stability of long environment, material finished product qualification rate higher, while production cost is reduced, and it is highly practical, it is suitable for promoting.
To achieve the above object, the utility model provides following technical solution：
A kind of positive pressure constant pressure closed-loop control system in high-pressure crystal growing equipment is grown with compound crystals such as indium phosphides
Equipment is corresponding, includes reaction chamber, positive pressure constant pressure closed-loop control system, heating system in the high-pressure crystal growing equipment
System, industrial control system, it is characterised in that：The positive pressure constant pressure closed-loop control system includes air supply system and inlet, outlet pipeline；It is described
Reaction chamber is internally provided with heating system；The industrial control system and positive pressure constant pressure closed-loop control system, heating system connection carry out
The control of pressure and temperature.
As a kind of technical solution of optimization, be disposed on the air supply system filter, pressure reducer, charge valve,
Manual modulation valve.
As a kind of technical solution of optimization, the inlet, outlet pipeline is connected with reaction chamber, is connected on inlet, outlet pipeline
There is pressure sensor；Filter, air bleeding valve, relief valve are disposed on the outlet pipe.
As a kind of technical solution of optimization, the heating system is provided with heating component and sensor for measuring temperature, adds
Hot systems are connected with power cord and signal wire, are connected with industrial control system.
As a kind of technical solution of optimization, the industrial control system includes industrial personal computer, temperature controller, processor, processing
Device is connect by signal control line with positive pressure constant pressure closed-loop control system.
By adopting the above-described technical solution, compared with prior art, pressure sensor monitoring in the utility model
Airline pressure signal transmission to industrial control system, industrial control system can real-time display pressure value, on industrial control system can set temperature value with
Pressure limit value, temperature value is associated with pressure limit value, and corresponding to corresponding pressure limit under different temperatures section setting value sets
Definite value.When pressure value is less than threshold pression range setting value lower limit in reaction chamber, industrial control system controls air supply system and carries out automatically
Inflation, when pressure value is higher than the threshold pression range setting value upper limit, stopping inflation；When pressure value is higher than pressure upper limit in reaction chamber
The range setting value upper limit, industrial control system control air supply system and carry out automatic deflation, when pressure value is less than pressure upper limit in reaction chamber
Range setting value lower limit stops deflating.It is provided with safety relief valve on reaction chamber outlet pipe, is set when reaction chamber pressure value reaches
When fixed safety critical pressure value, reaction chamber carries out releasing pressure automatically by safety relief valve, ensures that reaction cavity pressure is in peace
Within gamut, ensure the safety that equipment uses.
The utility model is designed reasonably so that the gas pressure in reaction chamber and air inlet pipeline, outlet pipe becomes stable
Controllably；Meanwhile increasing pressure setting range value under different temperatures section environment, it avoids charge valve and relief valve from frequently opening, ensures
The gas pressure needed in reaction chamber under different temperatures environment is more constant, improves product high-pressure crystal growing environment
Stability, material finished product qualification rate higher, while production cost is reduced, and it is highly practical, it is suitable for promoting.
The utility model is described further with reference to drawings and examples.
Description of the drawings
Fig. 1 is the structural schematic diagram in a kind of embodiment of the utility model.
Specific implementation mode
Embodiment
As shown in Figure 1, the positive pressure constant pressure closed-loop control system in a kind of high-pressure crystal growing equipment, with the chemical combination such as indium phosphide
Object crystal growth equipment is corresponding, in the high-pressure crystal growing equipment include reaction chamber 5, positive pressure constant pressure closed-loop control system,
Heating system, industrial control system, the positive pressure constant pressure closed-loop control system include air supply system and inlet, outlet pipeline；The reaction
Chamber 5 is internally provided with heating system；The industrial control system and positive pressure constant pressure closed-loop control system, heating system connection carry out pressure
With the control of temperature.
Filter 7, pressure reducer 8, charge valve 3, manual modulation valve 9 are disposed on the air supply system.
The inlet, outlet pipeline and reaction chamber 5 connect, and pressure sensor 1 is communicated on inlet, outlet pipeline；The outlet
Filter 11, air bleeding valve 2, relief valve 6 are disposed on pipeline.
The heating system is provided with heating component 13 and sensor for measuring temperature 10, heating system be connected with power cord and
Signal wire is connected with industrial control system.
The industrial control system includes industrial personal computer 4, temperature controller 10, processor 12, and processor 12 passes through signal control line
It is connect with positive pressure constant pressure closed-loop control system.
For the airline pressure signal transmission of pressure sensor monitoring in the utility model to industrial control system, industrial control system can be real
When show pressure value, on industrial control system can set temperature value and pressure limit value, temperature value is associated with pressure limit value, not
Corresponding pressure limit setting value is corresponded under synthermal section of setting value.When pressure value is set less than threshold pression range in reaction chamber
Be worth lower limit, industrial control system control air supply system carry out automatic inflating, when pressure value be higher than the threshold pression range setting value upper limit, stop
Only inflate；When pressure value is higher than the pressure upper limit range setting value upper limit in reaction chamber, industrial control system controls air supply system and carries out certainly
Dynamic to deflate, when pressure value is less than pressure upper limit range setting value lower limit in reaction chamber, stopping is deflated.It is set on reaction chamber outlet pipe
It is equipped with safety relief valve, when reaction chamber pressure value surpasses the safety critical pressure value of setting, reaction chamber passes through safety relief valve
Releasing pressure automatically is carried out, ensures that reaction cavity pressure is within safe range, ensures the safety that equipment uses.
The scope of protection of the utility model is not limited merely to above-described embodiment, skill belonging to the idea of the present invention
Art scheme belongs to the scope of protection of the utility model.It should be pointed out that for those skilled in the art,
Several improvements and modifications under the premise of the utility model principle are not departed from, these improvements and modifications also should be regarded as the utility model
Protection domain.
Claims (5)
1. the positive pressure constant pressure closed-loop control system in a kind of high-pressure crystal growing equipment, opposite with compound crystal growth apparatus
Answer, in the high-pressure crystal growing equipment include reaction chamber, positive pressure constant pressure closed-loop control system, heating system, industrial control system,
It is characterized in that：The positive pressure constant pressure closed-loop control system includes air supply system and inlet, outlet pipeline；Setting inside the reaction chamber
There is heating system；The industrial control system and positive pressure constant pressure closed-loop control system, heating system connection carry out the control of pressure and temperature
System.
2. the positive pressure constant pressure closed-loop control system in a kind of high-pressure crystal growing equipment according to claim 1, feature
It is：Filter, pressure reducer, charge valve, manual modulation valve are disposed on the air supply system.
3. the positive pressure constant pressure closed-loop control system in a kind of high-pressure crystal growing equipment according to claim 2, feature
It is：The inlet, outlet pipeline is connected with reaction chamber, and pressure sensor is communicated on inlet, outlet pipeline；On the outlet pipe
It is disposed with filter, air bleeding valve, relief valve.
4. the positive pressure constant pressure closed-loop control system in a kind of high-pressure crystal growing equipment according to claim 3, feature
It is：The heating system is provided with heating component and sensor for measuring temperature, and heating system is connected with power cord and signal wire,
It is connected with industrial control system.
5. the positive pressure constant pressure closed-loop control system in a kind of high-pressure crystal growing equipment according to claim 1, feature
It is：The industrial control system includes industrial personal computer, temperature controller, processor, and processor passes through signal control line and positive pressure constant pressure
Closed-loop control system connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820095766.6U CN207833352U (en) | 2018-01-21 | 2018-01-21 | A kind of positive pressure constant pressure closed-loop control system in high-pressure crystal growing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820095766.6U CN207833352U (en) | 2018-01-21 | 2018-01-21 | A kind of positive pressure constant pressure closed-loop control system in high-pressure crystal growing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207833352U true CN207833352U (en) | 2018-09-07 |
Family
ID=63393901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820095766.6U Expired - Fee Related CN207833352U (en) | 2018-01-21 | 2018-01-21 | A kind of positive pressure constant pressure closed-loop control system in high-pressure crystal growing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207833352U (en) |
-
2018
- 2018-01-21 CN CN201820095766.6U patent/CN207833352U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN2927982Y (en) | Full automatic pneumoperitoneum machine | |
| CN211499052U (en) | Intelligent supercharged diaphragm type air pressure tank | |
| CN207833352U (en) | A kind of positive pressure constant pressure closed-loop control system in high-pressure crystal growing equipment | |
| CN202554160U (en) | Self-control type animal experiment hypoxia chamber | |
| CN207831907U (en) | A kind of positive pressure pressure control system on vacuum heat treatment furnace | |
| CN210065982U (en) | Novel high-pressure cavity air inlet and outlet device | |
| CN101839396B (en) | Double-air-source air path automatic switching pressurizer | |
| CN105221926A (en) | The SF of electrical equipment 6automatic inflating equipment | |
| CN108255216B (en) | Control method for wind tunnel propeller slipstream air source system | |
| CN103605295B (en) | Based on speed and the satellite large-volume automatic inflatable pneumatic control method of temperature requirement | |
| CN210716965U (en) | Pneumatic control pressure reducing device | |
| CN213866075U (en) | Thermal cracking equipment for treating oily waste liquid by utilizing hot blast stove | |
| CN108916379A (en) | A kind of pressure vessel and application method with pressure adjusting function | |
| CN207960895U (en) | A kind of vacuum supply system of low energy consumption | |
| CN207344934U (en) | Tire production air bag heating system | |
| CN206766792U (en) | One kind production solvent naphtha surge tank | |
| CN209431074U (en) | A kind of air charging system applied to vacuum cavity | |
| CN113444642A (en) | Pneumatic system for cell loading and control method | |
| CN206731065U (en) | A kind of increase and decrease pressure device of resin reaction kettle | |
| CN108169050B (en) | Gas hydrate saturation monitoring devices | |
| CN217279374U (en) | Material level control device of sludge wet-type pyrolysis reactor | |
| CN217113116U (en) | Oven pressure control system | |
| CN109323123A (en) | A kind of air charging system applied to vacuum cavity | |
| CN214369310U (en) | Liquid propane supercharging device | |
| CN212056740U (en) | Vacuum pressure self-adjusting control equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180907 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |