CN207818595U - The pumping gas-flow closure system of avalanche photodide - Google Patents
The pumping gas-flow closure system of avalanche photodide Download PDFInfo
- Publication number
- CN207818595U CN207818595U CN201820242490.XU CN201820242490U CN207818595U CN 207818595 U CN207818595 U CN 207818595U CN 201820242490 U CN201820242490 U CN 201820242490U CN 207818595 U CN207818595 U CN 207818595U
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- Prior art keywords
- valve
- box body
- inflation
- pumping
- box
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
- 238000005086 pumping Methods 0.000 title claims abstract description 40
- 238000007789 sealing Methods 0.000 claims abstract description 34
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000000284 extract Substances 0.000 claims abstract description 12
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 12
- 239000011737 fluorine Substances 0.000 claims abstract description 12
- 239000007789 gas Substances 0.000 claims description 36
- 238000001816 cooling Methods 0.000 claims description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 12
- 239000013307 optical fiber Substances 0.000 claims description 9
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 235000012149 noodles Nutrition 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 2
- 230000035900 sweating Effects 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 5
- 230000005494 condensation Effects 0.000 description 7
- 238000009833 condensation Methods 0.000 description 7
- 230000007257 malfunction Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000004378 air conditioning Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
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- Measurement Of Radiation (AREA)
Abstract
The utility model discloses a kind of pumping gas-flow closure systems of avalanche photodide, seal box including being equipped with avalanche photodide, extract system and inflation system, seal box includes box cover, box body and cassette bottom, the top surrounding and bottom surrounding of box body are equipped with a circle groove, fluorine cushion rubber is filled in the groove, the lateral surface of box body is connected with sealing valve by sealing exhaust flange, extract system includes vacuum meter, it is evacuated hand-operated valve and sliding vane rotary pump, sealing valve is connect with vacuum meter and pumping hand-operated valve respectively, pumping hand-operated valve is connect with sliding vane rotary pump, inflation system includes pressure drag rule, inflate reset valve and inflation gas cylinder, sealing valve is advised and is inflated with pressure drag respectively reset valve and connect, inflation reset valve is connected with inflation gas cylinder.The utility model sealing effect is good, and effectively prevents avalanche diode surface sweating, and external vapor is prevented to enter.
Description
Technical field
The utility model is related to quantum-key distributions and single photon detection field, and in particular to a kind of avalanche photodide
Pumping gas-flow closure system.
Background technology
The single photon of quantum information is carried using single-photon detector detection in quantum cryptography, and is converted to telecommunications
Number output, then extracts its quantum information or the realization communication tasks such as quantum-key distribution by means such as coincidence measurement, counting.
Only after single-photon detector detects single photon signal, the launch party and recipient of key could be built by certain method
Vertical key.At present indium gallium arsenic avalanche photodide is mainly utilized in 1550nm communication bands（InGaAs-APD）As photaesthesia
Element realizes infrared single photon detectors.
When carrying out single photon detection using avalanche photodide, under avalanche photodide work and Reform Mode, i.e.,
The reverse bias voltage for being added in avalanche photodide both ends is more than its avalanche voltage.In such a mode, two pole of avalanche optoelectronic
" self-holding snowslide " occurs under the triggering of single photon for pipe, i.e. snowslide gain amplifier can reach 106More than, at this moment, single photon signal
Can be amplified to it is sufficiently large, to ensure that it can be detected by subsequent conditioning circuit.
Avalanche diode needs low temperature under work（- 40 DEG C or so）Under, the quantity of excitation carrier is reduced, thermal noise is inhibited
Caused random thermal noise electric current.
Avalanche diode works at such temperatures, and avalanche diode surface is easy moisture condensation, if seal approach is bad,
Avalanche diode dew condensation phenomenon is more obvious.Moisture condensation can not only influence device operational characteristics, when serious, can also cause short circuit, make
Whole system fails.
Utility model content
Technical problem to be solved in the utility model is to provide one kind in view of the above shortcomings of the prior art to prevent snowslide
The pumping gas-flow closure system of the avalanche photodide of diode moisture condensation, the pumping gas-flow closure system of this avalanche photodide are close
It is good to seal effect, and effectively prevents avalanche diode surface sweating, external vapor is prevented to enter.
To realize the above-mentioned technical purpose, the technical solution that the utility model is taken is：
A kind of pumping gas-flow closure system of avalanche photodide, including be equipped with avalanche photodide seal box,
Extract system and inflation system, the seal box include box cover, box body and cassette bottom, the top surrounding and bottom surrounding of the box body
Be equipped with a circle groove, be filled with fluorine cushion rubber in the groove, the top surrounding and bottom surrounding of the box body be respectively connected with to
Outside engaging lug outstanding, the box cover is connect by screw with the engaging lug at the top of box body and the fluorine cushion rubber at the top of box body is located at
Between box body and box cover, the cassette bottom is connect by screw with the engaging lug of box body bottom and the fluorine cushion rubber of box body bottom is located at box
Between body and cassette bottom, the lateral surface of the box body is connected with sealing valve by sealing exhaust flange, and the extract system includes true
Sky meter, pumping hand-operated valve and sliding vane rotary pump, the sealing valve are connect with vacuum meter and pumping hand-operated valve respectively, the pumping hand-operated valve
Connect with sliding vane rotary pump, the inflation system include pressure drag rule, inflation reset valve and inflation gas cylinder, the sealing valve respectively with pressure drag
Rule connect with inflation reset valve, and the inflation reset valve is connected with inflation gas cylinder.
As the further improved technical solution of the utility model, further include five-way tubing, several clips, bellows and
Gas piping, for the sealing valve by clip and connecting all the way in five-way tubing, the vacuum meter passes through clip and Five-way tube
Connection all the way in part, for the pumping hand-operated valve by clip and connecting all the way in five-way tubing, the pumping hand-operated valve is logical
The one end for crossing clip and bellows connects, and the other end of the bellows is connect by clip with sliding vane rotary pump, and the pressure drag rule are logical
Clip and connecting all the way in five-way tubing are crossed, the inflation reset valve passes through clip and connecting all the way in five-way tubing, institute
Inflation reset valve is stated to connect with inflation gas cylinder by gas piping.
As the further improved technical solution of the utility model, the middle part of the box cover is equipped with observation panel, the observation
Mouth is sealedly connected with observation window by screw, and the observation window corresponding mounting screw holes on box cover is blind hole.
As the further improved technical solution of the utility model, the inside of the seal box is also equipped with thermoelectric (al) cooling
The hot face of component TEC, thermistor, pcb board and SMA RF cables, the thermoelectric cooling module TEC is fixed on the sealing
The inner surface of the cassette bottom of box, the avalanche photodide and thermistor are by floor installation in thermoelectric cooling module
Huyashi-chuuka (cold chinese-style noodles), the avalanche photodide are electrically connected by pcb board with SMA RF cables, the lateral wall of the box body of the seal box
It is respectively fixed with radio frequency connector, optical fiber seal connector and feedthrough connector, the thermoelectric cooling module TEC and temperature-sensitive electricity
Resistance is electrically connected with feedthrough connector, and the feedthrough connector is used to provide external control signal for thermoelectric cooling module TEC,
The optical fiber tail pipe of the avalanche photodide is connect with optical fiber seal connector, the SMA RF cables and radio frequency connector
Connection.
As the further improved technical solution of the utility model, the inflation gas cylinder is built-in to have the argon gas, the box body to be
The tetrahedron being processed and formed at one time.
The beneficial effects of the utility model are：（1）The box body of the seal box of the utility model is four be processed and formed at one time
Face body, the sealing means between the box cover and box body of seal box, between box cover and cassette bottom are that fluorine cushion rubber compresses sealing means, whole
Body sealing effect is preferable, prevents outside air and vapor from entering, reduces avalanche diode dew condensation phenomenon.（2）The utility model
Seal box connect with extract system by sealing valve, realize vacuum state, the air and vapor of tray interior are reduced, into one
Step effectively prevents avalanche photodide surface sweating, circuit malfunction.Actual test, the whole leak rate of seal box 1 are less than 10- 11pa*m3/s.（3）Charge air conditioning in the inflation system of the utility model can be finely tuned via inflation gas cylinder followed by inflation
Valve, pressure drag rule, sealed valve enter seal box.At this time due to positive pressure in box body, external vapor can preferably be prevented to enter
In seal box, avalanche photodide surface sweating, circuit malfunction are further prevented.（4）The utility model can pass through temperature
Poor electricity refrigerating assembly TEC is that avalanche photodide freezes, and is realized to the temperature difference by thermistor and extraneous control signal
The size of current of electric refrigerating assembly TEC is adjusted in real time, and temperature in box body is effectively ensured and stablizes, remain be operated in it is low
Temperature（- 40 DEG C or so）Under, to reduce the quantity of excitation carrier, inhibit random thermal noise electric current caused by thermal noise.（5）This
Utility model realizes the integrated connection of seal box and inflation system and extract system by five-way tubing, easy for assemble or unload, whole
Body structure operation is simple.
Description of the drawings
Fig. 1 is the side structure schematic diagram of the seal box of the utility model.
Fig. 2 is the vertical view of the seal box of the utility model.
Fig. 3 is the internal structure schematic diagram of the seal box of the utility model.
Fig. 4 is the overall structure connection diagram of the utility model.
Specific implementation mode
Specific embodiment of the present utility model is further illustrated below according to Fig. 1 to Fig. 4：
Referring to Fig. 1, a kind of pumping gas-flow closure system of avalanche photodide, including avalanche photodide 13 is installed
Seal box 1 and extract system, the seal box 1 includes box cover 2, box body 3 and cassette bottom 4, the top surrounding of the box body 3 and bottom
Portion's surrounding is equipped with a circle groove, is filled with fluorine cushion rubber 5 in the groove, the top surrounding and bottom surrounding of the box body 3 are equal
It is connected with the engaging lug 26 protruded outward, the box cover 2 is connect with the engaging lug 26 at 3 top of box body by screw 6 and box body 3
Between box body 3 and box cover 2, the cassette bottom 4 is connect by screw 6 with the engaging lug 26 of 3 bottom of box body the fluorine cushion rubber 5 at top
And the fluorine cushion rubber 5 of 3 bottom of box body is between box body 3 and cassette bottom 4, referring to Fig. 2 and Fig. 4, the lateral surface of the box body 3 passes through close
Envelope exhaust flange 11 is connected with sealing valve 19, and the extract system includes vacuum meter 20, pumping hand-operated valve 21 and sliding vane rotary pump 22, institute
It states sealing valve 19 to connect with vacuum meter 20 and pumping hand-operated valve 21 respectively, the pumping hand-operated valve 21 is connect with sliding vane rotary pump 22.This
The box body 3 of the seal box 1 of embodiment is the tetrahedron being processed and formed at one time, between the box cover 2 and box body 3 of seal box 1, box cover 2
Sealing means between cassette bottom 4 be fluorine cushion rubber 5 compress sealing means, integral sealing effect is preferable, prevent outside air and
Vapor enters, and reduces avalanche diode dew condensation phenomenon.Seal box 1 can be taken out by opening sealing valve 19 using extract system
Gas realizes vacuum state, reduces air and vapor inside box body 3, further effectively prevents 13 table of avalanche photodide
Face condenses, circuit malfunction.Actual test, the whole leak rate of seal box 1 are less than 10-11pa*m3/s。
In order to avoid seal box 1 is further polluted by vapor, atmosphere protection method, gas can also be used to use High Purity Nitrogen
Or high-purity argon can be with.Pressure maintains 0.11-0.13 megapascal.Seal box 1 after vacuumize process need to be full of High Purity Nitrogen
Gas or high-purity argon gas can preferably prevent external vapor from entering in seal box 1, more at this time due to positive pressure in seal box 1
Further prevent 13 surface sweating of avalanche photodide, circuit malfunction.Inflation system is for realizing this function, specially：
Referring to Fig. 4, the present embodiment further includes inflation system, and the inflation system includes pressure drag rule 23, inflation reset valve 24 and inflating air
Bottle 25, the sealing valve 19 are connect with pressure drag rule 23 and inflation reset valve 24 respectively, the inflation reset valve 24 and inflation gas cylinder
25 connections.The present embodiment had both protected seal box 1, also protection and seal box 1 mating extract system and inflation system, unitedly called
To take out gas-flow closure system.Wherein vacuum meter 20 is used to measure vacuum degree when seal box 1 is evacuated；Pressure drag rule 23 are filled for measuring
The pressure of gas atmosphere.
Further include five-way tubing 27, several clips, bellows 28 and gas piping 29 referring to Fig. 4 in the present embodiment,
For the sealing valve 19 by clip and connecting all the way in five-way tubing 27, the vacuum meter 20 passes through clip and five-way tubing 27
In connection all the way, the pumping hand-operated valve 21 passes through clip and connecting all the way in five-way tubing 27, the pumping hand-operated valve
21 are connect by clip with one end of bellows 28, and the other end of the bellows 28 is connect by clip with sliding vane rotary pump 22, institute
Pressure drag rule 23 are stated by clip and connecting all the way in five-way tubing 27, the inflation reset valve 24 passes through clip and five-way tubing
Connection all the way in 27, the inflation reset valve 24 are connect by gas piping 29 with inflation gas cylinder 25.
When initial, each valve（19,21,24）It is closed, starts sliding vane rotary pump 22, open pumping hand-operated valve 21 and close
Valve 19 is sealed, seal box 1 is evacuated, vacuum degree in seal box 1 is monitored with vacuum meter 20, after being extracted into 10Pa vacuum degrees, closes blade
Pump 22 and pumping hand-operated valve 21, complete seal box 1 and are evacuated, and the seal box 1 of vacuum effectively reduces the vapor in box body, prevents
13 surface sweating of avalanche photodide.After starting pumping, gas is by 1 sealed valve 19 of seal box, vacuum meter in seal box 1
20, pumping hand-operated valve 21 is discharged by the air bleeding valve of sliding vane rotary pump 22.Sliding vane rotary pump 22 is connected with power supply.When seal box 1 is inflated,
Inflation reset valve 24 is opened, the gas in gas cylinder 25 will be inflated and introduce plenum chamber by inflating reset valve 24（Seal box 1）, with pressure
Gas pressure in 23 monitoring seal box 1 of resistance rule, sealing valve 19 is closed after gas reaches specified pressure 110kPa and is inflated micro-
Adjust valve 24, you can complete inflation.Argon gas is housed in the inflation gas cylinder 25.When applying argon gas, charge air conditioning is via inflation gas cylinder 25
Enter seal box 1 followed by inflation reset valve 24, pressure drag rule 23, sealed valve 19.It, can be more preferable at this time due to positive pressure in box
Prevention outside vapor enter in seal box 1, further prevent 13 surface sweating of avalanche photodide, circuit malfunction.
In the present embodiment, referring to Fig. 1, the middle part of the box cover 2 is equipped with observation panel 7, and the observation panel 7 is close by screw 6
Envelope is connected with observation window 8, and the corresponding mounting screw holes on box cover 2 of the observation window 8 is blind hole.Observation window 8 is glass material,
Observation window 8 facilitates situation in observation seal box 1, blind hole more preferable relative to through-hole sealing effect.
In the present embodiment, referring to Fig. 3, the inside of the seal box 1 is also equipped with thermoelectric cooling module TEC14, temperature-sensitive
The hot face of resistance 15, pcb board 17 and SMA RF cables 18, the thermoelectric cooling module TEC14 is fixed on the seal box 1
Cassette bottom 4 inner surface, the avalanche photodide 13 and thermistor 15 are mounted on thermoelectric (al) cooling by pedestal 16
The huyashi-chuuka (cold chinese-style noodles) of component, the avalanche photodide 13 is electrically connected by pcb board 17 with SMA RF cables 18, described referring to Fig. 2
The lateral wall of the box body 3 of seal box 1 is respectively fixed with radio frequency connector 10, optical fiber seal connector 9 and feedthrough connector 12, institute
It states thermoelectric cooling module TEC14 and thermistor 15 is electrically connected with feedthrough connector 12, the feedthrough connector 12 is used for
External control signal is provided for thermoelectric cooling module TEC14, the optical fiber tail pipe and optical fiber of the avalanche photodide 13 are close
It seals connector 9 to connect, the SMA RF cables 18 are connect with radio frequency connector 10.Thermistor 15 is using PT1000 temperature-sensitive electricity
Resistance adjusts TEC size of current, cold junction temperature for detecting 13 temperature of avalanche photodide, and according to PT1000 fed back values
Control realizes the continual and steady low temperature of avalanche photodide 13, remains operating in low temperature（- 40 DEG C or so）Under, to subtract
The quantity for exciting carrier less, inhibits random thermal noise electric current caused by thermal noise.Pcb board 17 and 3 SMA RF cables 18,
For handling avalanche signal and will treated that avalanche signal is sent to outside box body 3 is amplified examination.Radio frequency connector 10, light
Fine hermetically sealed connector 9 and feedthrough connector 12 and 1 link position good seal of seal box.
The concrete operation method of the present embodiment, includes the following steps：
（1）Initialization：Keep sealing valve 19, pumping hand-operated valve 21 and inflation 24 Close All of reset valve；
（2）Seal box 1 is evacuated：Start sliding vane rotary pump 22, open pumping hand-operated valve 21 and sealing valve 19, seal box 1 is carried out
Pumping, vacuum meter 20 monitor the vacuum degree in seal box 1 in real time, and the vacuum degree that gauge 20 monitors reaches specified vacuum degree
After value, sliding vane rotary pump 22 and pumping hand-operated valve 21 are closed, seal box 1 is completed and is evacuated；
（3）Seal box 1 is inflated：Inflation reset valve 24 is opened, the gas in gas cylinder 25 will be inflated by inflating reset valve 24
It is inflated into seal box 1 with sealing valve 19, pressure drag rule 23 monitor the gas pressure in seal box 1 in real time, when 23 monitoring of pressure drag rule
Gas pressure reach specified gas pressure value after, close inflation reset valve 24 and sealing valve 19, complete seal box 1 and inflate.
After the seal box 1 of the utility model carries out pumping inflation, can at least ensure avalanche photodide 13 be operated in-
40 DEG C, normal atmosphere pressure, were not in moisture condensation situation in 3 years.
The scope of protection of the utility model includes but not limited to embodiment of above, and the scope of protection of the utility model is to weigh
Subject to sharp claim, any replacement being readily apparent that those skilled in the art that this technology is made, deformation, improvement are each fallen within
The scope of protection of the utility model.
Claims (5)
1. a kind of pumping gas-flow closure system of avalanche photodide, it is characterised in that：Including being equipped with avalanche photodide
Seal box, extract system and inflation system, the seal box includes box cover, box body and cassette bottom, the top surrounding of the box body
It is equipped with a circle groove with bottom surrounding, fluorine cushion rubber, the top surrounding and bottom surrounding of the box body are filled in the groove
It is respectively connected with the engaging lug protruded outward, the box cover is connect with the engaging lug at the top of box body by screw and at the top of box body
Fluorine cushion rubber is between box body and box cover, and the cassette bottom is connect with the engaging lug of box body bottom by screw and the fluorine of box body bottom
For cushion rubber between box body and cassette bottom, the lateral surface of the box body is connected with sealing valve, the pumping by sealing exhaust flange
System includes vacuum meter, pumping hand-operated valve and sliding vane rotary pump, and the sealing valve is connect with vacuum meter and pumping hand-operated valve respectively, described
Pumping hand-operated valve is connect with sliding vane rotary pump, and the inflation system includes pressure drag rule, inflation reset valve and inflation gas cylinder, the sealing valve
It advises and inflates reset valve with pressure drag respectively to connect, the inflation reset valve is connected with inflation gas cylinder.
2. the pumping gas-flow closure system of avalanche photodide according to claim 1, it is characterised in that：Further include five logical
Pipe fitting, several clips, bellows and gas piping, the sealing valve pass through clip and connecting all the way in five-way tubing, institute
Vacuum meter is stated by clip and connecting all the way in five-way tubing, the pumping hand-operated valve passes through one in clip and five-way tubing
Road connects, and the pumping hand-operated valve is connected by one end of clip and bellows, the other end of the bellows by clip and
Sliding vane rotary pump connects, pressure drag rule by clip and connecting all the way in five-way tubing, the inflation reset valve by clip and
Connection all the way in five-way tubing, the inflation reset valve are connect by gas piping with inflation gas cylinder.
3. the pumping gas-flow closure system of avalanche photodide according to claim 2, it is characterised in that：The box cover
Middle part is equipped with observation panel, and the observation panel is sealedly connected with observation window, the observation window corresponding peace on box cover by screw
Cartridge screw hole is blind hole.
4. the pumping gas-flow closure system of avalanche photodide according to claim 1, it is characterised in that：The seal box
Inside be also equipped with thermoelectric cooling module TEC, thermistor, pcb board and SMA RF cables, the thermoelectric (al) cooling group
The hot face of part TEC is fixed on the inner surface of the cassette bottom of the seal box, and the avalanche photodide and thermistor pass through
In the huyashi-chuuka (cold chinese-style noodles) of thermoelectric cooling module, the avalanche photodide is electrically connected floor installation by pcb board and SMA RF cables
It connects, the lateral wall of the box body of the seal box is respectively fixed with radio frequency connector, optical fiber seal connector and feedthrough connector, institute
It states thermoelectric cooling module TEC and thermistor is electrically connected with feedthrough connector, the feedthrough connector is used to be thermoelectric
Refrigerating assembly TEC provides external control signal, and the optical fiber tail pipe of the avalanche photodide is connect with optical fiber seal connector,
The SMA RF cables are connect with radio frequency connector.
5. the pumping gas-flow closure system of avalanche photodide according to claim 1, it is characterised in that：The inflating air
Argon gas is housed, the box body is the tetrahedron being processed and formed at one time in bottle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820242490.XU CN207818595U (en) | 2018-02-11 | 2018-02-11 | The pumping gas-flow closure system of avalanche photodide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820242490.XU CN207818595U (en) | 2018-02-11 | 2018-02-11 | The pumping gas-flow closure system of avalanche photodide |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207818595U true CN207818595U (en) | 2018-09-04 |
Family
ID=63321211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820242490.XU Withdrawn - After Issue CN207818595U (en) | 2018-02-11 | 2018-02-11 | The pumping gas-flow closure system of avalanche photodide |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207818595U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108231948A (en) * | 2018-02-11 | 2018-06-29 | 安徽问天量子科技股份有限公司 | The pumping gas-flow closure system and its operating method of avalanche photodide |
| CN111223849A (en) * | 2020-01-13 | 2020-06-02 | 中国电子科技集团公司第四十四研究所 | Multi-channel integrated refrigeration single photon avalanche photodiode device |
-
2018
- 2018-02-11 CN CN201820242490.XU patent/CN207818595U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108231948A (en) * | 2018-02-11 | 2018-06-29 | 安徽问天量子科技股份有限公司 | The pumping gas-flow closure system and its operating method of avalanche photodide |
| CN108231948B (en) * | 2018-02-11 | 2024-03-01 | 安徽问天量子科技股份有限公司 | Pumped gas sealing system of avalanche photodiode and operation method thereof |
| CN111223849A (en) * | 2020-01-13 | 2020-06-02 | 中国电子科技集团公司第四十四研究所 | Multi-channel integrated refrigeration single photon avalanche photodiode device |
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