CN108414156A - Sealing leak detection system based on avalanche photodide and its operating method - Google Patents
Sealing leak detection system based on avalanche photodide and its operating method Download PDFInfo
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- CN108414156A CN108414156A CN201810139886.6A CN201810139886A CN108414156A CN 108414156 A CN108414156 A CN 108414156A CN 201810139886 A CN201810139886 A CN 201810139886A CN 108414156 A CN108414156 A CN 108414156A
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- leak detection
- valve
- box
- leak
- seal box
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
Abstract
The invention discloses a kind of sealing leak detection system and its operating method based on avalanche photodide, seal box and leak detection system including being equipped with avalanche photodide, the leak detection system includes leak detection box, leak detection charge valve manually, first inflation gas cylinder, manual leak detector valve, leak detector and extract system, the inside of the leak detection box is for placing seal box, the leak detection box is connect with manual leak detector valve, the manual leak detector valve is connect with leak detector, the leak detection box is connect with manual leak detection charge valve, the manual leak detection charge valve is connect with the first inflation gas cylinder, the extract system is used to connect with leak detection box or seal box.The present invention effectively can carry out leak detection to discover whether leakage problem in time to seal box, moreover it is possible to effective to reduce avalanche photodide dew condensation phenomenon inside seal box.
Description
Technical field
The present invention relates to quantum-key distributions and single photon detection field, and in particular to one kind being based on avalanche photodide
Sealing leak detection system and its operating method.
Background technology
The single photon of quantum information is carried using single-photon detector detection in quantum cryptography, and is converted to telecommunications
Number output, then extracts its quantum information or the realization communication tasks such as quantum-key distribution by means such as coincidence measurement, counting.
Only after single-photon detector detects single photon signal, the launch party and recipient of key could be built by certain method
Vertical key.At present indium gallium arsenic avalanche photodide is mainly utilized in 1550nm communication bands（InGaAs-APD）As photaesthesia
Element realizes infrared single photon detectors.
When carrying out single photon detection using avalanche photodide, under avalanche photodide work and Reform Mode, i.e.,
The reverse bias voltage for being added in avalanche photodide both ends is more than its avalanche voltage.In such a mode, two pole of avalanche optoelectronic
" self-holding snowslide " occurs under the triggering of single photon for pipe, i.e. snowslide gain amplifier can reach 106More than, at this moment, single photon signal
Can be amplified to it is sufficiently large, to ensure that it can be detected by subsequent conditioning circuit.
Avalanche photodide is generally located in seal box, and avalanche photodide needs low temperature under work（- 40 DEG C of left sides
It is right）Under, the quantity of excitation carrier is reduced, random thermal noise electric current caused by thermal noise is inhibited.Avalanche photodide works
At such temperatures, avalanche photodide surface is easy moisture condensation.If seal approach is bad, vapor enters seal box,
Avalanche photodide dew condensation phenomenon is more obvious, and moisture condensation can not only influence device operational characteristics, when serious, can also cause short
Road makes whole system fail.Therefore it is badly in need of at present a kind of both with the function of hunting leak to seal box, also with reduction sealing
The sealing leak detection system of avalanche photodide dew condensation phenomenon function inside box.
Invention content
It is a kind of based on avalanche optoelectronic the technical problem to be solved by the present invention is to provide in view of the above shortcomings of the prior art
The sealing leak detection system and its operating method of diode, based on the sealing leak detection system of avalanche photodide and its operation side
Method effectively can carry out leak detection to discover whether leakage problem in time to seal box, moreover it is possible to effective to reduce inside seal box
Avalanche photodide dew condensation phenomenon.
To realize the above-mentioned technical purpose, the technical solution that the present invention takes is：
A kind of sealing leak detection system based on avalanche photodide, including seal box and the inspection of avalanche photodide are installed
Leakage system, the leak detection system include leak detection box, manually hunt leak charge valve, first inflation gas cylinder, manual leak detector valve, leak detector and
Extract system, the inside of the leak detection box is for placing seal box, and the leak detection box is connect with manual leak detector valve, the manual inspection
Leakage valve is connect with leak detector, and the leak detection box is connect with manual leak detection charge valve, the manual leak detection charge valve and the first inflation
Gas cylinder connects, and the extract system is used to connect with leak detection box or seal box.
As further improved technical scheme of the present invention, the extract system includes vacuum meter, pumping hand-operated valve and rotation
Piece pumps, and the pumping hand-operated valve is connect with sliding vane rotary pump, and the vacuum meter and pumping hand-operated valve are used to connect or pass through with leak detection box
Sealing valve is connect with seal box.
As further improved technical scheme of the present invention, the seal box is connected with inflation system by sealing valve, institute
It includes pressure gauge, inflation reset valve and the second inflation gas cylinder to state inflation system, and the inflation reset valve and the second inflation gas cylinder connect
It connects, the pressure gauge and inflation reset valve are connect with sealing valve.
Further include six way pipe fittings, several clips, bellows and gas as further improved technical scheme of the present invention
Pipeline is used for all the way through clamp connection sealing valve or leak detection box in six way pipe fitting, the vacuum meter by clip with
Connection all the way in six way pipe fittings, the pumping hand-operated valve pass through clip and connecting all the way in six way pipe fittings, the pumping hand
Dynamic valve is connected by one end of clip and bellows, and the other end of the bellows is connect by clip with sliding vane rotary pump, the pressure
Power meter passes through clip and connecting all the way in six way pipe fittings by clip and connecting all the way in six way pipe fittings, the inflation reset valve
It connects, the inflation reset valve is connect by gas piping with the second inflation gas cylinder, in the manual leak detector valve and six way pipe fittings
It connects all the way.
As further improved technical scheme of the present invention, gas cylinder is built-in helium, the second inflating air for first inflation
Argon gas is housed in bottle.
As further improved technical scheme of the present invention, the leak detector uses helium mass spectrometer leak detector.
To realize the above-mentioned technical purpose, another technical solution that the present invention takes is：
A kind of operating method of the sealing leak detection system based on avalanche photodide, includes the following steps：
（1）Keep sealing valve, pumping hand-operated valve, manually leak detection charge valve and manual leak detector valve Close All；
（2）Seal box is connect by sealing valve with extract system；
（3）Start sliding vane rotary pump, opens pumping hand-operated valve and sealing valve, sliding vane rotary pump are evacuated seal box, vacuum meter is supervised in real time
The vacuum degree in seal box is surveyed, after the vacuum degree that gauge monitors reaches specified vacuum degree, closes sliding vane rotary pump, pumping hand
Dynamic valve and sealing valve complete seal box pumping；
（4）The sealing valve of seal box and extract system are disconnected；
（5）Seal box is put into leak detection box and seals leak detection box, then will leak detection box respectively with extract system, manual leak detector valve and
Leak detection charge valve connection manually keeps pumping hand-operated valve, manually leak detection charge valve and manual leak detector valve Close All；
（6）Start sliding vane rotary pump, open pumping hand-operated valve, sliding vane rotary pump is evacuated leak detection box, and vacuum meter monitors leak detection box in real time
Interior vacuum degree after the vacuum degree that gauge monitors reaches specified vacuum degree, closes sliding vane rotary pump and pumping hand-operated valve, complete
At leak detection box pumping；
（7）Leak detection charge valve manually is opened, the first inflation gas cylinder is filled with the helium of specified pressure value into leak detection box, closes manual
Leak detection charge valve, is kept for 24 hours；
（8）Open leak detection box, take out seal box, then with drying nitrogen by seal box and leak detection box adsorption helium blow-off；
（9）Seal box is put into leak detection box and seals leak detection box, is again started up sliding vane rotary pump, opens pumping hand-operated valve, sliding vane rotary pump
Leak detection box is evacuated, vacuum meter monitors the vacuum degree in leak detection box in real time, and the vacuum degree of vacuum meter monitoring reaches specified
After vacuum degree, sliding vane rotary pump and pumping hand-operated valve are closed；
（10）Start leak detector, open manual leak detector valve, leak detector carries out back pressure method leak detection, leak detection to the seal box in leak detection box
Instrument is for detecting helium to detect the leak rate of seal box.
As further improved technical scheme of the present invention, following steps are also specifically included：
（1）Keep sealing valve, pumping hand-operated valve, inflation reset valve, manually leak detection charge valve and manual leak detector valve Close All；
（2）By seal box by the sealed connection all the way in sealing valve and six way pipe fittings, to realize sealing valve respectively with pumping
The connection of system and inflation system；
（3）Start sliding vane rotary pump, opens pumping hand-operated valve and sealing valve, sliding vane rotary pump are evacuated seal box, vacuum meter is supervised in real time
The vacuum degree in seal box is surveyed, after the vacuum degree that gauge monitors reaches specified vacuum degree, closes sliding vane rotary pump and pumping
Hand-operated valve completes seal box pumping；
（4）Inflation reset valve is opened, by the argon gas in the second inflation gas cylinder by inflating reset valve and sealing valve into seal box
Inflation, pressure gauge monitor the gas pressure in seal box in real time, when the gas pressure of pressure gauge monitoring reaches specified gas pressure
After force value, inflation reset valve and sealing valve are closed, completes seal box inflation；
（5）By the disconnection all the way in the sealing valve of seal box and six way pipe fittings；
（6）Seal box and sealing valve are put into leak detection box and are sealed leak detection box, then in will hunt leak box and six way pipe fittings all the way
It is tightly connected by clip, to realize the leak detection box connection with extract system and leak detector respectively, keeps sealing valve, pumping hand
Dynamic valve, inflation reset valve, manually leak detection charge valve and manual leak detector valve Close All；
（7）Start sliding vane rotary pump, open pumping hand-operated valve, sliding vane rotary pump is evacuated leak detection box, and vacuum meter monitors leak detection box in real time
Interior vacuum degree after the vacuum degree that gauge monitors reaches specified vacuum degree, closes sliding vane rotary pump and pumping hand-operated valve, complete
At leak detection box pumping；
（8）Leak detection charge valve manually is opened, the first inflation gas cylinder is filled with the helium of specified pressure value into leak detection box, closes manual
Leak detection charge valve, is kept for 24 hours；
（9）Open leak detection box, take out seal box, then with drying nitrogen by seal box and leak detection box adsorption helium blow-off；
（10）Seal box is put into leak detection box and seals leak detection box, is again started up sliding vane rotary pump, opens pumping hand-operated valve, sliding vane rotary pump
Leak detection box is evacuated, vacuum meter monitors the vacuum degree in leak detection box in real time, and the vacuum degree of vacuum meter monitoring reaches specified
After vacuum degree, sliding vane rotary pump and pumping hand-operated valve are closed；
（11）Start leak detector, open manual leak detector valve, leak detector carries out back pressure method leak detection, leak detection to the seal box in leak detection box
Instrument is for detecting helium to detect the leak rate of seal box.
The seal box of the present invention is connect by sealing valve with extract system, and it is real that extract system can carry out seal box pumping
Existing vacuum state, reduces the air and vapor inside seal box, effectively prevents avalanche photodide surface sweating, circuit
Failure.In order to avoid seal box is further polluted by vapor, can also further use atmosphere protection method, i.e., seal box with fill
Gas system connects, can be better at this time due to positive pressure in seal box full of high-purity argon gas to seal box by inflation system
It prevents external vapor from entering in seal box, further prevents avalanche photodide face from condensing, circuit malfunction.The present invention is also
The practical leak rate of seal box can be detected by leak detection system.It, can in the sealing system technique prepattern of avalanche photodide
With by leak detection system repeated measurement seal box leak rate, and according to be in practical leak rate reselection seal box vacuum state still just
Pressure condition, to preferably prevent avalanche photodide surface sweating.Seal box can also be found in time according to practical leak rate
Whether gas leakage, take solution, preventing vapor from entering seal box leads to avalanche photodide surface sweating.The present invention is logical
It crosses six way pipe fittings and extract system, inflation system and leak detector is combined connection, when being operated, it is only necessary to disconnect or connect
The connection of six way pipe fittings and seal box or box of hunting leak, you can realize the integrated connection of seal box and inflation system and extract system,
Also it can realize that the integrated connection of leak detection box and extract system and leak detector, smart structural design are easy to operate.
Description of the drawings
Fig. 1 is the structural schematic diagram that the leak detection box of the present invention is connect with six way pipe fittings.
Fig. 2 is the structural schematic diagram that the seal box of the present invention is connect with six way pipe fittings.
Specific implementation mode
The specific implementation mode of the present invention is further illustrated below according to Fig. 1 to Fig. 2：
Referring to Fig. 1 and Fig. 2, Fig. 1 is the structural schematic diagram that leak detection box 2 of the invention is connect with six way pipe fittings 12.Fig. 2 is the present invention
The structural schematic diagram that is connect with six way pipe fittings 12 of seal box 1.Specifically, a kind of sealing leak detection based on avalanche photodide
System, including entire seal box pumping inflation and leak detection function, specifically include the seal box 1 for being equipped with avalanche photodide
And leak detection system, the leak detection system includes leak detection box 2, leak detection charge valve 10, first inflates gas cylinder 11, manual leak detector valve manually
15, leak detector 16 and extract system, the inside of the leak detection box 2 is for placing seal box 1, the leak detection box 2 and leak detection manually
Valve 15 connects, and the manual leak detector valve 15 is connect with leak detector 16, and the leak detection box 2 is connect with manual leak detection charge valve 10, institute
It states leak detection charge valve 10 manually to connect with the first inflation gas cylinder 11, the extract system is used to connect with leak detection box 2 or seal box 1
It connects.
Further, the extract system includes vacuum meter 4, pumping hand-operated valve 5 and sliding vane rotary pump 6, the pumping hand-operated valve 5
It is connect with sliding vane rotary pump 6, the vacuum meter 4 and pumping hand-operated valve 5 are used to connect or by sealing valve 3 and seal box 1 with leak detection box 2
Connection.
Further, the seal box 1 is connected with inflation system by sealing valve 3, and the inflation system includes pressure gauge
7, inflation reset valve 8 and second inflates gas cylinder 9, and the inflation reset valve 8 and second is inflated gas cylinder 9 and connected, 7 He of the pressure gauge
Inflation reset valve 8 is connect with sealing valve 3.
Further, further include six way pipe fittings 12, several clips, bellows 13 and gas piping 14, six siphunculus
It is used to pass through clip and six way pipe fittings 12 by clamp connection sealing valve 3 or leak detection box 2, the vacuum meter 4 all the way in part 12
In connection all the way, for measure seal box 1 or hunt leak box 2 be evacuated when vacuum degree；The pumping hand-operated valve 5 by clip with
Connection all the way in six way pipe fittings 12, the pumping hand-operated valve 5 are connect by clip with one end of bellows 13, the bellows
13 other end is connect by clip with sliding vane rotary pump 6, the pressure gauge 7 by clip and connecting all the way in six way pipe fittings 12,
Pressure for measuring inflation atmosphere；The inflation reset valve 8 is described to fill by clip and connecting all the way in six way pipe fittings 12
Gas reset valve 8 is connect by gas piping 14 with the second inflation gas cylinder 9, and the second inflation gas cylinder 9 is for filling designated gas Ar, institute
State manual leak detector valve 15 and connecting all the way in six way pipe fittings 12.
Further, helium is housed in the first inflation gas cylinder 11, argon gas is housed in the second inflation gas cylinder 9.
Further, the leak detector 16 uses helium mass spectrometer leak detector 16.
The present embodiment also provides a kind of operating method of the sealing leak detection system based on avalanche photodide, including following
Step：
Referring to Fig. 2：（1）Sealing valve 3, pumping hand-operated valve 5, manually leak detection charge valve 10 and manual leak detector valve 15 is kept all to close
It closes；This step inflation system need not use, it is also desirable to close inflation reset valve 8；
（2）Seal box 1 is connect by sealing valve 3 with extract system；
（3）Start sliding vane rotary pump 6, opens pumping hand-operated valve 5 and sealing valve 3, sliding vane rotary pump 6 are evacuated seal box 1, vacuum meter 4
Vacuum degree in monitoring seal box 1 in real time, after the vacuum degree that gauge monitors reaches specified vacuum degree, closes blade
Pump, pumping hand-operated valve and sealing valve complete seal box pumping；The seal box 1 of vacuum reduces air and water steaming inside seal box 1
Gas effectively prevents avalanche photodide surface sweating, circuit malfunction；
（4）The sealing valve 3 of seal box 1 and extract system are disconnected；
Referring to Fig. 1,（5）By seal box 1 be put into leak detection box 2 in and seal leak detection box 2, then will leak detection box 2 respectively with extract system,
Manual leak detector valve 15 and the manually connection of leak detection charge valve 10 keep pumping hand-operated valve 3, manually leak detection charge valve 10 and manual leak detection
15 Close All of valve；
（6）Start sliding vane rotary pump 6, open pumping hand-operated valve 5, sliding vane rotary pump 6 is evacuated leak detection box 2, the monitoring inspection in real time of vacuum meter 4
The vacuum degree in box 2 is leaked, after the vacuum degree that gauge 4 monitors reaches specified vacuum degree, closes sliding vane rotary pump 6 and pumping hand
Dynamic valve 5 is completed leak detection box 2 and is evacuated；
（7）Leak detection charge valve 10 manually is opened, the first inflation gas cylinder 11 is filled with the helium of specified pressure value into leak detection box 2, closes
Leak detection charge valve 10 manually is closed, is kept for 24 hours；
（8）Leak detection box 2 is opened, takes out seal box 1, then blown the helium of seal box 1 and leak detection 2 adsorption of box with drying nitrogen
It removes；
（9）Seal box 1 is put into leak detection box 2 to and is sealed leak detection box 2, is again started up sliding vane rotary pump 6, opens pumping hand-operated valve 5, rotation
Piece pumps 6 pairs of leak detection boxes 2 and is evacuated, and the vacuum degree in the box 2 of monitoring leak detection in real time of vacuum meter 4, the vacuum degree that vacuum meter 4 monitors reaches
To after specified vacuum degree, sliding vane rotary pump 6 and pumping hand-operated valve 5 are closed；
（10）Start leak detector 16, open manual leak detector valve 15, leak detector 16 carries out back pressure method to the seal box 1 in leak detection box 2
Leak detection, leak detector 16 is for detecting helium to detect the leak rate of seal box 1.
Above-mentioned step（1）Purpose to (3) is to make to be vacuum state in seal box 1, and the seal box 1 of vacuum is reduced
Air inside seal box 1 and vapor effectively prevent avalanche photodide surface sweating, circuit malfunction；Step（4）It arrives
Step（10）For operating procedure of hunting leak, 1 interior sealing effect of seal box is detected.
Aforesaid operations method, also specifically includes following steps：Charge operation step, first by 1 vacuum pumping of seal box, then to
Inside can preferably prevent external vapor from entering seal box 1 full of high-purity argon gas at this time due to positive pressure in seal box 1
It is interior, further prevent avalanche photodide face from condensing, circuit malfunction.It is specific as follows：
Referring to Fig. 2,（a）Keep sealing valve 3, pumping hand-operated valve 5, inflation reset valve 8, manually leak detection charge valve 10 and leak detection manually
15 Close All of valve；
（b）By seal box 1 by the sealed connection all the way in sealing valve 3 and six way pipe fittings 12, to realize sealing valve 3 respectively with
The connection of extract system and inflation system；
（c）Start sliding vane rotary pump 6, opens pumping hand-operated valve 5 and sealing valve 3, sliding vane rotary pump 6 are evacuated seal box 1, vacuum meter 4
Vacuum degree in monitoring seal box 1 in real time, after the vacuum degree that gauge 4 monitors reaches specified 10Pa vacuum degrees, closes rotation
Piece pump 6 and pumping hand-operated valve 5, complete seal box 1 and are evacuated；After starting pumping, gas is by 1 sealed valve of seal box in seal box 1
3, vacuum meter 4, pumping hand-operated valve 5 are discharged by the air bleeding valve of sliding vane rotary pump 6；The seal box 1 of vacuum reduces the air inside seal box 1
And vapor, effectively prevent avalanche photodide surface sweating, circuit malfunction；
（d）Inflation reset valve 8 is opened, by the argon gas in the second inflation gas cylinder 9 by inflating reset valve 8 and sealing valve 3 to sealing
Inflation in box 1, pressure gauge 7 monitor the gas pressure in seal box 1 in real time, when the gas pressure that pressure gauge 7 monitors reaches specified
After pressure 110kPa, inflation reset valve 8 and sealing valve 3 are closed, seal box 1 is completed and inflates；When applying argon gas, charge air conditioning is via
Two inflation gas cylinders 9 flow through inflation reset valve 8, pressure gauge 7, sealed valve 3 and enter seal box 1；At this time due in seal box 1 just
Pressure, can preferably prevent external vapor from entering in seal box 1, further prevent avalanche photodide face from condensing, electricity
It fails on road；
（e）By the disconnection all the way in the sealing valve 3 of seal box 1 and six way pipe fittings 12, the seal box 1 that inflation is completed is removed；
（f）Seal box 1 and sealing valve 3 are put into leak detection box 2 to and are sealed leak detection box 2, then in will hunt leak box 2 and six way pipe fittings 12
Be tightly connected all the way by clip, to realize leak detection the connection with extract system and leak detector 16 respectively of box 2, keep sealing
Valve 3, pumping hand-operated valve 5, inflation reset valve 8, manually leak detection charge valve 10 and 15 Close All of manual leak detector valve；
（g）Start sliding vane rotary pump 6, open pumping hand-operated valve 5, sliding vane rotary pump 6 is evacuated leak detection box 2, the monitoring inspection in real time of vacuum meter 4
The vacuum degree in box 2 is leaked, the vacuum degree that gauge 4 monitors reaches specified 10Pa or so, closes sliding vane rotary pump 6 and pumping is manual
Valve 5 is completed leak detection box 2 and is evacuated；
（h）Leak detection charge valve 10 manually is opened, the first inflation gas cylinder 11 is filled with specified 0.15MPa-0.2MPa into leak detection box 2
Helium, close manually leak detection charge valve 10, keep 24 hours；
（i）Leak detection box 2 is opened, takes out seal box 1, then blown the helium of seal box 1 and leak detection 2 adsorption of box with drying nitrogen
It removes；
（j）Seal box 1 is put into leak detection box 2 to and is sealed leak detection box 2, is again started up sliding vane rotary pump 6, opens pumping hand-operated valve 5, rotation
Piece pumps 6 pairs of leak detection boxes 2 and is evacuated, and the vacuum degree in the box 2 of monitoring leak detection in real time of vacuum meter 4, the vacuum degree that vacuum meter 4 monitors reaches
To after specified 10Pa vacuum degrees, sliding vane rotary pump 6 and pumping hand-operated valve 5 are closed；
（k）Start leak detector 16, open manual leak detector valve 15, leak detector 16 carries out back pressure method inspection to the seal box 1 in leak detection box 2
Leakage, leak detector 16 is for detecting helium to detect the leak rate of seal box 1.Back pressure method leak detection can be carried out to seal box 1.
Specific steps include seal box air suction process step and charge operation step above, solve avalanche photodide
Surface sweating problem further includes leak detection operating procedure, effectively hunts leak to seal box 1, take reply according to their needs
Measure effectively prevents in advance.
The seal box 1 of the present invention can use extract system pumping to realize vacuum state, reduce by opening sealing valve 3
Air inside seal box 1 and vapor effectively prevent avalanche photodide surface sweating, circuit malfunction.In order to avoid
Seal box 1 is further polluted by vapor, and atmosphere protection method, gas can also be used to use High Purity Nitrogen or high-purity argon can be with,
Pressure maintains 0.11-0.13 megapascal, the seal box 1 after vacuumize process need to by inflation system full of high pure nitrogen or
High-purity argon gas can preferably prevent external vapor from entering in seal box 1, more into one at this time due to positive pressure in seal box 1
Step prevents avalanche photodide face from condensing, circuit malfunction.Can be vacuum or positive pressure in the seal box 1 of the present invention, the present invention can
To detect the practical leak rate of seal box 1.It, can be anti-through the invention in the sealing system technique prepattern of avalanche photodide
1 leak rate of repetition measurement amount seal box, and according to being vacuum state or barotropic state in practical leak rate reselection seal box 1, to more
Good prevents avalanche photodide surface sweating.Can also according to practical leak rate, find in time seal box 1 whether gas leakage, adopt
Take solution.
Protection scope of the present invention includes but not limited to embodiment of above, and protection scope of the present invention is with claims
Subject to, any replacement being readily apparent that those skilled in the art that this technology is made, deformation, improvement each fall within the present invention's
Protection domain.
Claims (8)
1. a kind of sealing leak detection system based on avalanche photodide, it is characterised in that：Including being equipped with two pole of avalanche optoelectronic
The seal box and leak detection system of pipe, the leak detection system include leak detection box, manually hunt leak charge valve, first inflation gas cylinder, manually
Leak detector valve, leak detector and extract system, the inside of the leak detection box is for placing seal box, the leak detection box and manual leak detector valve
Connection, the manual leak detector valve are connect with leak detector, and the leak detection box is connect with manual leak detection charge valve, and the manual leak detection is filled
Air valve is connect with the first inflation gas cylinder, and the extract system is used to connect with leak detection box or seal box.
2. the sealing leak detection system according to claim 1 based on avalanche photodide, it is characterised in that：The pumping
System includes that vacuum meter, pumping hand-operated valve and sliding vane rotary pump, the pumping hand-operated valve are connect with sliding vane rotary pump, the vacuum meter and pumping
Hand-operated valve is used to connect with leak detection box or connect with seal box by sealing valve.
3. the sealing leak detection system according to claim 2 based on avalanche photodide, it is characterised in that：The sealing
Box is connected with inflation system by sealing valve, and the inflation system includes pressure gauge, inflation reset valve and the second inflation gas cylinder, institute
Inflation reset valve and the second inflation gas cylinder connection are stated, the pressure gauge and inflation reset valve are connect with sealing valve.
4. the sealing leak detection system according to claim 3 based on avalanche photodide, it is characterised in that：Further include six
Way pipe fitting, several clips, bellows and gas piping are used to pass through clamp connection sealing valve all the way in six way pipe fitting
Or leak detection box, the vacuum meter pass through clip and six by clip and connecting all the way in six way pipe fittings, the pumping hand-operated valve
Connection all the way in way pipe fitting, the pumping hand-operated valve by one end of clip and bellows connect, the bellows it is another
End is connect by clip with sliding vane rotary pump, and the pressure gauge passes through clip and connecting all the way in six way pipe fittings, the inflation fine tuning
Valve is connected by clip and connecting all the way in six way pipe fittings, the inflation reset valve by gas piping and the second inflation gas cylinder
It connects, the manual leak detector valve and connecting all the way in six way pipe fittings.
5. the sealing leak detection system according to claim 4 based on avalanche photodide, it is characterised in that：Described first
Inflation gas cylinder is built-in a helium, and gas cylinder is built-in argon gas for the second inflation.
6. the sealing leak detection system according to claim 5 based on avalanche photodide, it is characterised in that：The leak detection
Instrument uses helium mass spectrometer leak detector.
7. a kind of operating method of the sealing leak detection system according to claim 5 based on avalanche photodide, special
Sign is：Include the following steps：
（1）Keep sealing valve, pumping hand-operated valve, manually leak detection charge valve and manual leak detector valve Close All；
（2）Seal box is connect by sealing valve with extract system；
（3）Start sliding vane rotary pump, opens pumping hand-operated valve and sealing valve, sliding vane rotary pump are evacuated seal box, vacuum meter is supervised in real time
The vacuum degree in seal box is surveyed, after the vacuum degree that gauge monitors reaches specified vacuum degree, closes sliding vane rotary pump, pumping hand
Dynamic valve and sealing valve complete seal box pumping；
（4）The sealing valve of seal box and extract system are disconnected；
（5）Seal box is put into leak detection box and seals leak detection box, then will leak detection box respectively with extract system, manual leak detector valve and
Leak detection charge valve connection manually keeps pumping hand-operated valve, manually leak detection charge valve and manual leak detector valve Close All；
（6）Start sliding vane rotary pump, open pumping hand-operated valve, sliding vane rotary pump is evacuated leak detection box, and vacuum meter monitors leak detection box in real time
Interior vacuum degree after the vacuum degree that gauge monitors reaches specified vacuum degree, closes sliding vane rotary pump and pumping hand-operated valve, complete
At leak detection box pumping；
（7）Leak detection charge valve manually is opened, the first inflation gas cylinder is filled with the helium of specified pressure value into leak detection box, closes manual
Leak detection charge valve, is kept for 24 hours；
（8）Open leak detection box, take out seal box, then with drying nitrogen by seal box and leak detection box adsorption helium blow-off；
（9）Seal box is put into leak detection box and seals leak detection box, is again started up sliding vane rotary pump, opens pumping hand-operated valve, sliding vane rotary pump
Leak detection box is evacuated, vacuum meter monitors the vacuum degree in leak detection box in real time, and the vacuum degree of vacuum meter monitoring reaches specified
After vacuum degree, sliding vane rotary pump and pumping hand-operated valve are closed；
（10）Start leak detector, open manual leak detector valve, leak detector carries out back pressure method leak detection, leak detection to the seal box in leak detection box
Instrument is for detecting helium to detect the leak rate of seal box.
8. the operating method of the sealing leak detection system according to claim 7 based on avalanche photodide, feature exist
In：Specifically include following steps：
（1）Keep sealing valve, pumping hand-operated valve, inflation reset valve, manually leak detection charge valve and manual leak detector valve Close All；
（2）By seal box by the sealed connection all the way in sealing valve and six way pipe fittings, to realize sealing valve respectively with pumping
The connection of system and inflation system；
（3）Start sliding vane rotary pump, opens pumping hand-operated valve and sealing valve, sliding vane rotary pump are evacuated seal box, vacuum meter is supervised in real time
The vacuum degree in seal box is surveyed, after the vacuum degree that gauge monitors reaches specified vacuum degree, closes sliding vane rotary pump and pumping
Hand-operated valve completes seal box pumping；
（4）Inflation reset valve is opened, by the argon gas in the second inflation gas cylinder by inflating reset valve and sealing valve into seal box
Inflation, pressure gauge monitor the gas pressure in seal box in real time, when the gas pressure of pressure gauge monitoring reaches specified gas pressure
After force value, inflation reset valve and sealing valve are closed, completes seal box inflation；
（5）By the disconnection all the way in the sealing valve of seal box and six way pipe fittings；
（6）Seal box and sealing valve are put into leak detection box and are sealed leak detection box, then in will hunt leak box and six way pipe fittings all the way
It is tightly connected by clip, to realize the leak detection box connection with extract system and leak detector respectively, keeps sealing valve, pumping hand
Dynamic valve, inflation reset valve, manually leak detection charge valve and manual leak detector valve Close All；
（7）Start sliding vane rotary pump, open pumping hand-operated valve, sliding vane rotary pump is evacuated leak detection box, and vacuum meter monitors leak detection box in real time
Interior vacuum degree after the vacuum degree that gauge monitors reaches specified vacuum degree, closes sliding vane rotary pump and pumping hand-operated valve, complete
At leak detection box pumping；
（8）Leak detection charge valve manually is opened, the first inflation gas cylinder is filled with the helium of specified pressure value into leak detection box, closes manual
Leak detection charge valve, is kept for 24 hours；
（9）Open leak detection box, take out seal box, then with drying nitrogen by seal box and leak detection box adsorption helium blow-off；
（10）Seal box is put into leak detection box and seals leak detection box, is again started up sliding vane rotary pump, opens pumping hand-operated valve, sliding vane rotary pump
Leak detection box is evacuated, vacuum meter monitors the vacuum degree in leak detection box in real time, and the vacuum degree of vacuum meter monitoring reaches specified
After vacuum degree, sliding vane rotary pump and pumping hand-operated valve are closed；
（11）Start leak detector, open manual leak detector valve, leak detector carries out back pressure method leak detection, leak detection to the seal box in leak detection box
Instrument is for detecting helium to detect the leak rate of seal box.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810139886.6A CN108414156A (en) | 2018-02-11 | 2018-02-11 | Sealing leak detection system based on avalanche photodide and its operating method |
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| CN201810139886.6A CN108414156A (en) | 2018-02-11 | 2018-02-11 | Sealing leak detection system based on avalanche photodide and its operating method |
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