CN110567649A - Laser diode sealing cap is with lou examining device - Google Patents

Laser diode sealing cap is with lou examining device Download PDF

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Publication number
CN110567649A
CN110567649A CN201910946876.8A CN201910946876A CN110567649A CN 110567649 A CN110567649 A CN 110567649A CN 201910946876 A CN201910946876 A CN 201910946876A CN 110567649 A CN110567649 A CN 110567649A
Authority
CN
China
Prior art keywords
fixedly connected
pressure
cylinder
laser diode
resistant detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910946876.8A
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Chinese (zh)
Inventor
李喜尼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangxi Zhongjingyuan Technology Co Ltd
Original Assignee
Jiangxi Zhongjingyuan Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangxi Zhongjingyuan Technology Co Ltd filed Critical Jiangxi Zhongjingyuan Technology Co Ltd
Priority to CN201910946876.8A priority Critical patent/CN110567649A/en
Publication of CN110567649A publication Critical patent/CN110567649A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205Accessories or associated equipment; Pump constructions

Abstract

The invention discloses a leak detection device for a laser diode sealing cap, which comprises a high-pressure-resistant detection cylinder, wherein the left side and the right side of the bottom of the high-pressure-resistant detection cylinder are vertically and fixedly connected with supports, and a bottom plate is horizontally and fixedly arranged between the bottoms of the two supports; the bottom plate is fixedly provided with a vacuum pumping pump, and the tail end of an exhaust pipe of the vacuum pumping pump is fixedly penetrated in a sealing way with the middle position of the bottom of the high-pressure resistant detection cylinder. According to the invention, the vacuum pump is fixedly arranged on the bottom plate, the tail end of the exhaust pipe of the vacuum pump is hermetically and fixedly penetrated with the middle position of the bottom of the high-pressure-resistant detection cylinder, and the most important step before operation is to exhaust the air in the high-pressure-resistant detection cylinder through the vacuum pump and the exhaust pipe, so that the influence on the detection effect caused by impure helium at the later stage is avoided.

Description

Laser diode sealing cap is with lou examining device
Technical Field
The invention relates to the technical field of laser diode leak detection, in particular to a leak detection device for a laser diode sealing cap.
Background
at present, the principle of a laser diode is to inject current into a semiconductor PN junction, realize population inversion distribution, generate stimulated radiation, and then realize laser oscillation generated by light amplification by utilizing positive feedback of a resonant cavity; the method is characterized in that after an LD-TO (laser diode) is subjected TO a helium pressing process for 2 hours in a helium container with the pressure of 0.5Mpa, a helium mass spectrometer leak detector is adopted TO test the leak rate of the LD-TO, so that the LD-TO leak detector is called fine leak detection.
Disclosure of Invention
the invention aims to provide a leak detection device for a laser diode sealing cap, which solves the problems in the prior art.
In order to achieve the purpose, the invention provides the following technical scheme: the leak detection device for the laser diode sealing cap comprises a high-pressure-resistant detection cylinder, wherein the left side and the right side of the bottom of the high-pressure-resistant detection cylinder are vertically and fixedly connected with supports, and a bottom plate is horizontally and fixedly arranged between the bottoms of the two supports; the bottom plate is fixedly provided with a vacuum pumping pump, the tail end of an exhaust pipe of the vacuum pumping pump is hermetically and fixedly penetrated through the middle position of the bottom of the high-pressure-resistant detection cylinder, and the most important step before operation is to pump air in the high-pressure-resistant detection cylinder out through the vacuum pumping pump and the exhaust pipe, so that the influence on the detection effect caused by impurity of helium in the later stage is avoided;
The left side of the high-pressure-resistant detection cylinder is fixedly connected with a cylinder support through three fixing bolts which are distributed at equal intervals, the upper end part of the cylinder support is vertically and downwards fixedly provided with a cylinder, and the lower end part of a piston rod of the cylinder is fixedly connected with a sealing top cover; a machine table is vertically and fixedly connected to the upper portion of the right side of the high-pressure resistant detection cylinder, a monitor is fixedly mounted on the machine table, a display screen is fixedly mounted at the front portion of the monitor, and a timer is fixedly mounted on the right side of the monitor; the timer is in data transmission connection with a processor of the monitor and transmits the data to the display screen to display the data; a gas pressure sensor and an oxygen content sensor are fixedly arranged on the right side of the inner cavity of the high pressure resistant detection cylinder;
A bearing platform is horizontally and fixedly connected to the upper portion of the right side of the support on the right side of the bottom of the high-pressure-resistant detection cylinder, a negative pressure pump is fixedly mounted on the upper portion of the bearing platform, an air inlet port of the negative pressure pump is fixedly communicated with the head end of the butt joint pipe, an air outlet port of the negative pressure pump is fixedly communicated with the head end of the air conveying pipe, the tail end of the air conveying pipe penetrates through the lower portion of the right side of the high-pressure-resistant detection cylinder in a sealing mode, a valve negative pressure pump on a helium tank is opened to work, helium is conveyed into the high-pressure-resistant detection cylinder through the butt joint pipe, the air pressure value on a display screen is observed, when the;
the support right side bottom perpendicular fixedly connected with base plate that is located high pressure resistant detection barrel bottom right side, the perpendicular fixedly connected with support column in base plate top, the concave type bracket of the horizontal fixedly connected with in support column top, the overlap joint has helium gas pitcher on the concave type bracket, is located the vertical screw hole of seting up in concave type bracket front side middle part, and the screw hole internal thread is twisted and is run through threaded lead screw.
As a preferred embodiment of the present invention, the air exhaust pipe is fixedly provided with a first electromagnetic valve, and the periphery of the bottom of the sealing top cover is fixedly bonded with a sealing rubber gasket.
in a preferred embodiment of the present invention, a mesh plate is disposed at the bottom of the inner cavity of the high pressure resistant detection cylinder, and the mesh number of the mesh plate is 60.
As a preferred embodiment of the present invention, the data of the gas pressure sensor and the oxygen content sensor are transmitted to the display screen through the processor of the monitor, and the controller is fixedly installed on the right side of the bottom of the machine.
as a preferred embodiment of the invention, a second electromagnetic valve and a one-way valve are fixedly arranged on the gas transmission pipe.
In a preferred embodiment of the present invention, a rubber pad is fixedly bonded to the top surface of the concave bracket.
in a preferred embodiment of the invention, a clamping rubber block is fixedly connected to the end part of the threaded screw rod close to the helium tank, and a crank is fixedly connected to the end surface of the threaded screw rod far from the clamping rubber block.
Compared with the prior art, the invention has the following beneficial effects:
1. According to the invention, the vacuum pump is fixedly arranged on the bottom plate, the tail end of the exhaust pipe of the vacuum pump is hermetically and fixedly penetrated with the middle position of the bottom of the high-pressure-resistant detection cylinder, and the most important step before operation is to exhaust the air in the high-pressure-resistant detection cylinder through the vacuum pump and the exhaust pipe, so that the influence on the detection effect caused by impure helium at the later stage is avoided.
2. According to the invention, the concave bracket is transversely and fixedly connected to the top of the support column, the helium tank is lapped on the concave bracket, and the horizontally placed helium tank is adopted, so that the helium tank is convenient to flexibly replace at a later stage, the height of the helium tank is high, the vertically arranged helium tank is very inconvenient to replace each time, the middle part of the front side of the concave bracket is vertically provided with a threaded hole, the thread in the threaded hole is screwed and penetrated by a threaded screw rod, and the crank is directly rotated to drive the threaded screw rod to rotate and advance in the threaded hole, so that the helium tank is stably clamped through the clamping rubber block, and the problem that the safety is influenced by the shaking of the helium tank.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic view of the overall structure of a leak detection device for a laser diode cap seal according to the present invention;
FIG. 2 is a schematic diagram showing the distribution structure of helium tanks on a concave bracket of the leak detection device for the laser diode sealing cap of the present invention;
FIG. 3 is a schematic view of a monitor structure of the leak detection device for laser diode capping according to the present invention;
FIG. 4 is a schematic diagram of a side view of the connection of the sealing rubber gasket of the leak detection device for the laser diode sealing cap at the bottom of the sealing top cap.
in the figure: the device comprises a high pressure resistant detection barrel 1, a support 2, an exhaust pipe 3, a bottom plate 4, a vacuum pump 5, a first electromagnetic valve 6, a bearing platform 7, a negative pressure pump 8, a one-way valve 9, a butt joint pipe 10, a support column 11, a helium tank 12, a base plate 13, a concave bracket 14, a second electromagnetic valve 15, a gas pipe 16, a gas pressure sensor 17, a controller 18, a machine platform 19, a monitor 20, an oxygen content sensor 21, a sealing top cover 22, a cylinder 23, a piston rod 24, a screen plate 25, a fixing bolt 26, a cylinder support 27, a rubber pad 28, a clamping rubber block 29, a threaded hole 30, a threaded lead screw 31, a crank 32, a display screen 33, a timer 34 and a sealing rubber ring pad 35.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
Referring to fig. 1-4, the present invention provides a technical solution: a leak detection device for a laser diode sealing cap comprises a high-pressure-resistant detection barrel 1, wherein the left side and the right side of the bottom of the high-pressure-resistant detection barrel 1 are vertically and fixedly connected with supports 2, and a bottom plate 4 is horizontally and fixedly arranged between the bottoms of the two supports 2; a vacuum pumping pump 5 is fixedly installed on the bottom plate 4, the tail end of an air pumping pipe 3 of the vacuum pumping pump 5 is hermetically and fixedly penetrated through the middle position of the bottom of the high-pressure-resistant detection cylinder 1, and the most important step before operation is to pump air in the high-pressure-resistant detection cylinder 1 through the vacuum pumping pump 5 and the air pumping pipe 3, so that the influence on the detection effect caused by impure helium at the later stage is avoided;
The left side of the high-pressure-resistant detection cylinder 1 is fixedly connected with an air cylinder support 27 through three fixing bolts 26 which are distributed at equal intervals, the upper end part of the air cylinder support 27 is vertically and downwards fixedly provided with an air cylinder 23, the lower end part of a piston rod 24 of the air cylinder 23 is fixedly connected with a sealing top cover 22, and the sealing top cover 22 is driven to descend and is tightly sealed with the upper part of the high-pressure-resistant detection cylinder 1 by operating the front air cylinder 23; a machine table 19 is vertically and fixedly connected to the upper portion of the right side of the high-pressure resistant detection barrel 1, a monitor 20 is fixedly installed on the machine table 19, a display screen 33 is fixedly installed on the front portion of the monitor 20, and a timer 34 is fixedly installed on the right side of the monitor 20; the timer 34 is in data transmission connection with a processor of the monitor 20 and transmits the data to the display screen 33 to display the data; a gas pressure sensor 17 and an oxygen content sensor 21 are fixedly arranged on the right side of the inner cavity of the high pressure resistant detection cylinder 1;
A bearing platform 7 is horizontally and fixedly connected to the upper portion of the right side of the support 2 on the right side of the bottom of the high pressure resistant detection barrel 1, a negative pressure pump 8 is fixedly mounted on the upper portion of the bearing platform 7, an air inlet port of the negative pressure pump 8 is fixedly communicated with the head end of the butt joint pipe 10, an air outlet port of the negative pressure pump 8 is fixedly communicated with the head end of the air pipe 16, the tail end of the air pipe 16 is fixedly penetrated through the lower portion of the right side of the high pressure resistant detection barrel 1 in a sealing mode, the valve negative pressure pump 8 on the helium tank 12 is opened to work, helium is conveyed into the high pressure resistant detection barrel 1 through the butt joint pipe 10, the air pressure value on the display screen 33 is observed, when the air pressure reaches;
The perpendicular fixedly connected with base plate 13 in support 2 right side bottom that is located high pressure resistant detection section of thick bamboo 1 bottom right side, the perpendicular fixedly connected with support column 11 in base plate 13 top, the concave bracket 14 of the horizontal fixedly connected with in support column 11 top, the overlap joint has helium tank 12 on concave bracket 14, adopt the helium tank 12 that the level was placed, make things convenient for the later stage to carry out nimble change, because helium tank 12's height is higher, it is all very inconvenient when changing helium tank 12 every time to erect the helium tank 12 that sets up, be located the vertical screw hole 30 of seting up in concave bracket 14 front side middle part, screw hole 30 internal thread is twisted and is run through threaded lead screw 31, thereby direct rotatory crank 32 drives threaded lead screw 31 and carries out the centre gripping through clamping rubber piece 29 to helium tank 12 in screw hole 30 internal rotation hand-over and stabilize, avoid.
In this embodiment, the first electromagnetic valve 6 is fixedly installed on the exhaust tube 3, the sealing rubber ring gasket 35 is fixedly bonded to the periphery of the bottom of the sealing top cover 22, and the sealing performance of the sealing top cover 22 and the upper portion of the high pressure resistant detection cylinder 1 can be ensured by the sealing rubber ring gasket 35.
In this embodiment, the mesh plate 25 is arranged at the bottom of the inner cavity of the high-pressure resistant detection cylinder 1, and the mesh number of the mesh plate 25 is 60, so that the laser diode sealing cap is prevented from falling into the exhaust tube 3.
In this embodiment, data of the gas pressure sensor 17 and the oxygen content sensor 21 are transmitted to the display screen 33 through the processor of the monitor 20, the display screen 33 can display the actual pressure of helium in the high pressure resistant detection cylinder 1, and display the oxygen content to facilitate the real-time observation of the air allowance when air in the high pressure resistant detection cylinder 1 is extracted, the controller 18 is fixedly installed on the right side of the bottom of the machine platform 19, and each switch button on the controller 18 is connected to the electric control with each electric product of the technical scheme.
In this embodiment, fixed mounting has second solenoid valve 15 and check valve 9 on the gas-supply pipe 16, and the setting of check valve 9 can avoid the gas-supply pipe 16 to take place the backward flow condition when annotating into helium in resistant high pressure detection section of thick bamboo 1.
in this embodiment, a rubber pad 28 is fixedly bonded to the top surface of the concave bracket 14, and the rubber pad 28 can buffer and prevent the helium tank 12 from being scraped.
in this embodiment, the tip fixedly connected with centre gripping rubber piece 29 that screw lead screw 31 is close to helium gas pitcher 12, and screw lead screw 31 keeps away from centre gripping rubber piece 29's terminal surface fixedly connected with crank 32, and the later stage is when helium gas pitcher 12 is placed to the level, thereby directly rotatory crank 32 drives screw lead screw 31 and carries out the centre gripping through centre gripping rubber piece 29 to helium gas pitcher 12 in that the screw hole 30 internal rotation is advanced one by one, avoids helium gas pitcher 12 to take place to rock, influences the problem of security.
When the leak detection device for the laser diode sealing cap is used, it needs to be noted that the invention is the leak detection device for the laser diode sealing cap, which comprises a high pressure resistant detection cylinder 1, a support 2, an exhaust pipe 3, a bottom plate 4, a vacuum pump 5, a first electromagnetic valve 6, a bearing platform 7, a negative pressure pump 8, a one-way valve 9, an abutting pipe 10, a support column 11, a helium tank 12, a base plate 13, a concave bracket 14, a second electromagnetic valve 15, a gas pipe 16, a gas pressure sensor 17, a controller 18, a machine platform 19, a monitor 20, an oxygen content sensor 21, a sealing top cover 22, a cylinder 23, a piston rod 24, a screen plate 25, a fixing bolt 26, a cylinder support 27, a rubber pad 28, a clamping rubber block 29, a threaded hole 30, a threaded screw rod 31, a crank 32, a display screen 33, a timer 34 and a sealing rubber ring pad 35, wherein the components are all common standard components or components known by technicians in the, the structure and principle are known to the skilled person through technical manuals or through routine experimentation.
When the device is used, the sealing cap is arranged in the high pressure resistant detection barrel 1, the air cylinder 23 works to drive the sealing top cover 22 to descend to be tightly sealed with the upper part of the high pressure resistant detection barrel 1 before operation, the vacuum pump 5 is fixedly arranged on the bottom plate 4, the tail end of the exhaust pipe 3 of the vacuum pump 5 is in sealing and fixed penetration with the middle position of the bottom of the high pressure resistant detection barrel 1, the most important step before operation is to pump out air in the high pressure resistant detection barrel 1 through the vacuum pump 5 and the exhaust pipe 3 to avoid impurity of helium gas in the later period and influence on the detection effect, the air outlet port of the negative pressure pump 8 is fixedly communicated with the head end of the air conveying pipe 16, the tail end of the air conveying pipe 16 is in sealing and fixed penetration with the lower part of the right side of the high pressure resistant detection barrel 1, the valve negative pressure pump 8 on the helium tank 12 is opened to work to convey the helium gas into the high pressure resistant detection barrel 1 through the butt, after 2 hours of helium pressing, taking out the sealing cap, and carrying out the next step of testing the leakage rate by adopting a helium mass spectrometer leak detector; because the tip fixedly connected with centre gripping rubber piece 29 that screw lead screw 31 is close to helium gas pitcher 12, the terminal surface fixedly connected with crank 32 of centre gripping rubber piece 29 is kept away from to screw lead screw 31, and the helium gas pitcher 12 is placed to the level in later stage, thereby direct rotatory crank 32 drives screw lead screw 31 and carries out the centre gripping through centre gripping rubber piece 29 to helium gas pitcher 12 in that the screw hole 30 internal rotation is advanced one by one, avoids helium gas pitcher 12 to take place to rock, influences the problem of security.
While there have been shown and described what are at present considered the fundamental principles and essential features of the invention and its advantages, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (7)

1. The utility model provides a laser diode sealing cap is with lou examining device, includes high pressure resistant detection section of thick bamboo (1), its characterized in that: the left side and the right side of the bottom of the high-pressure resistant detection cylinder (1) are vertically and fixedly connected with brackets (2), and a bottom plate (4) is horizontally and fixedly arranged between the bottoms of the two brackets (2); a vacuum pumping pump (5) is fixedly arranged on the bottom plate (4), and the tail end of a pumping pipe (3) of the vacuum pumping pump (5) is hermetically and fixedly penetrated through the middle position of the bottom of the high-pressure resistant detection cylinder (1);
The left side of the high-pressure-resistant detection cylinder (1) is fixedly connected with a cylinder support (27) through three fixing bolts (26) which are distributed at equal intervals, the upper end part of the cylinder support (27) is vertically and downwards fixedly provided with a cylinder (23), and the lower end part of a piston rod (24) of the cylinder (23) is fixedly connected with a sealing top cover (22); a machine table (19) is vertically and fixedly connected to the upper portion of the right side of the high-pressure resistant detection barrel (1), a monitor (20) is fixedly installed on the machine table (19), a display screen (33) is fixedly installed on the front portion of the monitor (20), and a timer (34) is fixedly installed on the right side of the monitor (20); the timer (34) is in data transmission connection with a processor of the monitor (20) and transmits the data to the display screen (33) to display the data; a gas pressure sensor (17) and an oxygen content sensor (21) are fixedly arranged on the right side of the inner cavity of the high pressure resistant detection cylinder (1);
A bearing platform (7) is horizontally and fixedly connected to the upper portion of the right side of the support (2) on the right side of the bottom of the high-pressure-resistant detection barrel (1), a negative pressure pump (8) is fixedly mounted on the upper portion of the bearing platform (7), an air inlet port of the negative pressure pump (8) is fixedly communicated with the head end of the butt joint pipe (10), an air outlet port of the negative pressure pump (8) is fixedly communicated with the head end of the gas pipe (16), and the tail end of the gas pipe (16) is fixedly penetrated at the lower position of the right side of the high-pressure-resistant;
Be located support (2) the perpendicular fixedly connected with base plate in right side bottom (13) on high pressure resistant detection section of thick bamboo (1) bottom right side, the perpendicular fixedly connected with support column (11) in base plate (13) top, the horizontal fixedly connected with concave type bracket (14) in support column (11) top, the overlap joint has helium gas jar (12) on concave type bracket (14), is located the vertical screw hole (30) of seting up in concave type bracket (14) front side middle part, and screw hole (30) internal thread is twisted and is closed and run through threaded lead screw (31).
2. The leak detection device for the laser diode cap sealing according to claim 1, wherein: a first electromagnetic valve (6) is fixedly installed on the exhaust tube (3), and a sealing rubber ring gasket (35) is fixedly bonded on the periphery of the bottom of the sealing top cover (22).
3. The leak detection device for the laser diode cap sealing according to claim 1, wherein: the screen plate (25) is arranged at the bottom of the inner cavity of the high-pressure resistant detection cylinder (1), and the mesh number of the screen plate (25) is 60.
4. The leak detection device for the laser diode cap sealing according to claim 1, wherein: data of the gas pressure sensor (17) and the oxygen content sensor (21) are transmitted to a display screen (33) through a processor carried by a monitor (20), and a controller (18) is fixedly arranged on the right side of the bottom of the machine table (19).
5. the leak detection device for the laser diode cap sealing according to claim 1, wherein: and a second electromagnetic valve (15) and a one-way valve (9) are fixedly arranged on the gas conveying pipe (16).
6. the leak detection device for the laser diode cap sealing according to claim 1, wherein: the top surface of the concave bracket (14) is fixedly bonded with a rubber pad (28).
7. The leak detection device for the laser diode cap sealing according to claim 1, wherein: the end part of the threaded screw rod (31) close to the helium tank (12) is fixedly connected with a clamping rubber block (29), and the end surface of the threaded screw rod (31) far away from the clamping rubber block (29) is fixedly connected with a crank (32).
CN201910946876.8A 2019-10-07 2019-10-07 Laser diode sealing cap is with lou examining device Pending CN110567649A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910946876.8A CN110567649A (en) 2019-10-07 2019-10-07 Laser diode sealing cap is with lou examining device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910946876.8A CN110567649A (en) 2019-10-07 2019-10-07 Laser diode sealing cap is with lou examining device

Publications (1)

Publication Number Publication Date
CN110567649A true CN110567649A (en) 2019-12-13

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CN201910946876.8A Pending CN110567649A (en) 2019-10-07 2019-10-07 Laser diode sealing cap is with lou examining device

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112857704A (en) * 2021-02-26 2021-05-28 井冈山大学 Engine cylinder leakproofness detection device
CN113028178A (en) * 2021-03-02 2021-06-25 安徽博为光电科技有限公司 Workpiece quick joint for vacuum helium leak detection
CN117213766A (en) * 2023-11-09 2023-12-12 浙江大学 Gas leakage detection system, control method, electronic equipment and readable medium

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112857704A (en) * 2021-02-26 2021-05-28 井冈山大学 Engine cylinder leakproofness detection device
CN113028178A (en) * 2021-03-02 2021-06-25 安徽博为光电科技有限公司 Workpiece quick joint for vacuum helium leak detection
CN117213766A (en) * 2023-11-09 2023-12-12 浙江大学 Gas leakage detection system, control method, electronic equipment and readable medium

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Application publication date: 20191213

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