CN207792087U - Frame substrate return device - Google Patents

Frame substrate return device Download PDF

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Publication number
CN207792087U
CN207792087U CN201721805816.7U CN201721805816U CN207792087U CN 207792087 U CN207792087 U CN 207792087U CN 201721805816 U CN201721805816 U CN 201721805816U CN 207792087 U CN207792087 U CN 207792087U
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CN
China
Prior art keywords
frame substrate
lifting gear
frame
return device
transmission device
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Active
Application number
CN201721805816.7U
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Chinese (zh)
Inventor
施栓林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai zuqiang Energy Co.,Ltd.
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Beijing Apollo Ding Rong Solar Technology Co Ltd
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Application filed by Beijing Apollo Ding Rong Solar Technology Co Ltd filed Critical Beijing Apollo Ding Rong Solar Technology Co Ltd
Priority to CN201721805816.7U priority Critical patent/CN207792087U/en
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Publication of CN207792087U publication Critical patent/CN207792087U/en
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Abstract

The utility model discloses a kind of frame substrate return devices, including frame substrate transmission device and frame substrate lifting gear, the frame substrate transmission device is arranged in the bottom of filming equipment, the both ends of the frame substrate transmission device are respectively equipped with a frame substrate lifting gear, after the frame substrate lifting gear rises with the transmission band connection on the filming equipment.The utility model can realize the retransmission function of frame substrate, realize automated production, and can efficiently use existing space, effectively solve the transform measure of operation filming equipment.

Description

Frame substrate return device
Technical field
The utility model is related to a kind of return devices, and in particular to a kind of frame substrate return device.
Background technology
Type of production magnetron sputtering deposition equipment used is broadly divided into horizontal magnetron sputtering coater and vertical in photovoltaic industry Two kinds of formula magnetron sputtering coater, wherein headed by horizontal, major advantage is that whole membrane uniformity is good, the disadvantage is that taking up an area empty Between it is big;It is directed to ceramic target, target slag-off phenomenon is inevitable during processing procedure, and glass film layers edge is susceptible to sparking Phenomenon seriously affects quality of forming film, to avoid the generation of spark phenomenon, attachment base frame is needed to be blocked to come to glass edge It is needed to add return system to realize automation control, but because plant area space is limited while solving, and add frame substrate, it can not Peripheral hardware frame substrate return system and it can realize and be melted into problem automatically.
To solve the above problems, existing processing method is, in the inlet end and an outlet end of horizontal magnetron sputtering coater Setting caching room, main return system is in the side of horizontal magnetron sputtering coater, since this design floor space is non- Chang great, it is therefore desirable to which advance reservation space, equipment cannot achieve for having gone into operation.
Utility model content
The purpose of this utility model is to provide a kind of frame substrate return device, with solve in the prior art the technical issues of, It can realize the retransmission function of frame substrate, realize automated production, and can efficiently use the bottom space of existing coating machine, Floor space is reduced, the transform measure of operation filming equipment is effectively solved.
The utility model provides a kind of frame substrate return device, including frame substrate transmission device and frame substrate lifting dress It sets, the frame substrate transmission device is arranged in the bottom of filming equipment, and the both ends of the frame substrate transmission device are respectively equipped with one A frame substrate lifting gear, after the frame substrate lifting gear rises with the transmission band connection on the filming equipment.
In a kind of optional embodiment, the frame substrate transmission device is belt feeder.
In a kind of optional embodiment, the frame substrate transmission device includes the first passback main body and support leg, described Support leg is fixed at the bottom of the first passback main body.
In a kind of optional embodiment, the support leg is folding support leg.
In a kind of optional embodiment, the frame substrate lifting gear includes the second passback main body and lifting gear, institute Lifting gear is stated to be arranged in the bottom of the second passback main body.
In a kind of optional embodiment, it is identical that the first passback main body with described second returns the structure of main body, Including frame body, transmission wheel, shaft and driving motor, the both sides of the frame body are equipped with mounting groove, are all provided in two mounting grooves There is the transmission wheel, the transmission wheel in one of them described mounting groove passes through in the shaft and another described mounting groove Transmission wheel connection, shaft described in any adjacent two connected by belt, and the driving motor is fixedly mounted on described On frame body, output shaft is connect with a wherein shaft.
In a kind of optional embodiment, the transmission wheel is sheave, and the bottom of frame substrate is equipped with two flat shapes arrangements Guide rod, two guide rods coordinate with the sheave in two mounting grooves respectively.
In a kind of optional embodiment, the lifting gear is hydraulic cylinder or cylinder.
In a kind of optional embodiment, the lifting gear is electric push rod.
Compared with prior art, the utility model provides a kind of frame substrate return device, including frame substrate transmission device With frame substrate lifting gear, frame substrate transmission device is arranged in the bottom of filming equipment, and the both ends of frame substrate transmission device are distinguished If there are one frame substrate lifting gear, after frame substrate lifting gear rises with the transmission band connection on filming equipment.
Frame substrate transmission device is arranged can efficiently use the space of plated film motor spindle in the bottom of filming equipment, be not necessarily to Independent occupied space, suitable for the filming equipment gone into operation.Transformation either to filming equipment of having gone into operation or newly-installed Filming equipment all has the small advantage of space, and by the setting of frame substrate lifting gear, frame substrate may be implemented Automatic passback, it is not necessary that frame substrate storage bag is arranged, frame substrate can be reused, and without human intervention, improve automation Degree.
Description of the drawings
Fig. 1 is the overall structure axonometric drawing of frame substrate return device;
Fig. 2 is the axonometric drawing of frame substrate transmission device;
Fig. 3 is the axonometric drawing of frame substrate lifting gear.
Reference sign:1- frame substrate transmission devices, 2- frame substrate lifting gears, 3- filming equipments, 4- conveyer belts, 5- Tensioning wheel, 6- support legs, 8- lifting gears, 9- frame bodies, 10- transmission wheels, 11- shafts, 12- driving motors, 13- mounting grooves, 14- Belt, 15- frame substrates, 16- guide rods.
Specific implementation mode
The embodiments of the present invention are described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng The embodiment for examining attached drawing description is exemplary, and is only used for explaining the utility model, and cannot be construed to the utility model Limitation.
The embodiments of the present invention:As depicted in figs. 1 and 2, a kind of frame substrate return device, including frame substrate transmission dress Set 1 and frame substrate lifting gear 2, frame substrate transmission device 1 is arranged in the bottom of filming equipment 3, and the two of frame substrate transmission device 1 End is respectively equipped with a frame substrate lifting gear 2, connects with the conveyer belt 4 on filming equipment 3 after frame substrate lifting gear 2 rises It connects.
When work, the frame substrate lifting gear 2 for being located at 3 input end of filming equipment rises with frame substrate 15, works as frame substrate Stop rising when lifting gear 2 rises to concordant with conveyer belt 4, frame substrate lifting gear 2 starts to transmit frame substrate 15, by substrate Frame 15 is sent on conveyer belt 4, and then the frame substrate lifting gear 2 declines, and is docked with frame substrate transmission device 1, then leads to It crosses artificial or machine glass substrate is placed on frame substrate 15, frame substrate 15 enters filming equipment 3 under the drive of conveyer belt 4 Plated film is carried out to glass substrate, after completing plated film, frame substrate 15 comes out with glass substrate from the outlet end of filming equipment 3, And be sent on the frame substrate lifting gear 2 of outlet end, the glass substrate after plated film is unloaded by manually or mechanically equipment After lower, frame substrate lifting gear 2 declines with frame substrate 15, and after being docked with frame substrate transmission device 1, frame substrate 15 is transmitted To frame substrate transmission device 1, then the frame substrate lifting gear 2 rises, and waiting picks up next frame substrate 15, and frame substrate passes It send device 1 that frame substrate 15 is sent on the frame substrate lifting gear 2 of 3 input end of filming equipment, completes a work at this time It recycles.
The passback work of frame substrate has been solved perfectly in the device, since the larger frame substrate transmission device 1 of floor space is set It sets in the lower section of filming equipment 3, takes full advantage of existing space, the frame substrate passback for solving the filming equipment gone into operation is asked Topic has the advantages that simple in structure and floor space is small, realizes the automatic passback of frame substrate, it is not necessary that frame substrate storage is arranged Casket, frame substrate can be reused, and without human intervention, improve the degree of automation.
It should be noted that multiple structural forms may be used in frame substrate transmission device 1, for example, by using belt feeder or transmission Band or other equipment for having transport function.The present embodiment provides a kind of preferred embodiments below, as shown in Figures 2 and 3, frame substrate Transmission device 1 is substantially the same with 2 structure of frame substrate lifting gear, wherein frame substrate transmission device 1 include first passback main body and Support leg 6, support leg 6 are fixed at the bottom of the first passback main body;Support leg 6 can be folding support leg.
Frame substrate lifting gear 2 includes the second passback main body and lifting gear 8, and the setting of lifting gear 8 is in the second passback master The bottom of body, lifting gear 8 both can be used hydraulic cylinder and cylinder or electric push rod can also be used, and the present embodiment preferably uses hydraulic pressure Cylinder;First passback main body is identical as the second passback structure of main body, includes frame body 9, transmission wheel 10, shaft 11 and driving motor 12, the both sides of frame body 9 are equipped with mounting groove 13, are equipped with transmission wheel 10 in two mounting grooves 13, in one of mounting groove 13 Transmission wheel 10 is connect by shaft 11 with the transmission wheel 10 in another mounting groove 13, width direction cloth of the shaft 11 along frame body 9 It sets, is connected by belt 14 between any adjacent two shaft 11, specifically, the end of every shaft 11 is all provided with that there are two belts Wheel, for being connect with the belt pulley in the shaft 11 in left side, another is used for and the belt in the shaft 11 on right side for one of them Wheel connection, the skidding of belt 14, can also be arranged tensioning wheel 5 between two shafts 11 in order to prevent, and the position of tensioning wheel 5 is adjustable, Realize the adjusting to 14 elasticity of belt.Driving motor 12 is fixedly mounted on frame body 9, output shaft and a wherein shaft 11 Connection.
When work, driving motor 12 drives a wherein shaft 11 to rotate, due to equal between any adjacent two shaft 11 It is connected by belt 14, therefore all shafts 11 rotate in the same direction, while transmission wheel 10 thereon being driven to rotate, passed It send wheel 10 that can be moved with frame substrate 15, realizes the transmission of frame substrate 15.
In order to ensure that frame substrate 15 can be moved according to regulation route, its sideslip is prevented, it is preferable that transmission wheel 10 uses slot Wheel, the bottom of frame substrate 15 are equipped with the guide rod 16 of two flat shapes arrangement, two guide rods 16 respectively with the slot in two mounting grooves 13 Wheel cooperation.The guide rod 16 of 15 bottom of frame substrate can be moved along the groove in transmission wheel 10 in this way, effectively prevent sideslip, and Contact area between the two increases, and increases frictional force, can also play the role of preventing from skidding.
In conjunction with the above embodiment, a kind of frame substrate retransmission method applied to aforesaid substrate frame return device, including with Lower step:
Step 1, frame substrate rises, and the frame substrate lifting gear 2 positioned at 3 input end of filming equipment lifts frame substrate 15, And it is sent on conveyer belt 4;
Step 2, frame substrate transmits, and the conveyer belt 4 transmits the frame substrate 15 from the input end of the filming equipment 3 It is sent on the frame substrate lifting gear 2 of 3 outlet end of the filming equipment to outlet end, and by the frame substrate 15; During the frame substrate 15 is transmitted, the frame substrate lifting gear 2 of 3 input end of the filming equipment drops to default Position, the predeterminated position refer to the position concordant with frame substrate transmission device 1;
Step 3, frame substrate declines, and is located at the frame substrate lifting gear 2 of 3 outlet end of the filming equipment with described Frame substrate 15 declines, and the frame substrate 15 is sent on frame substrate transmission device 1;
Step 4, frame substrate returns, and the frame substrate transmission device 1 is by the frame substrate 15 from the bottom of the filming equipment 3 Portion is back on the frame substrate lifting gear 2 of 3 input end of the filming equipment, completes a working cycles;Institute During stating the passback of frame substrate 15, the frame substrate lifting gear 2 of 3 outlet end of the filming equipment rises to default position It sets, which refers to the position concordant with conveyer belt 4.
The structure, feature and effect of the utility model are described in detail based on the embodiments shown in the drawings, with Upper described is only the preferred embodiment of the utility model, but the utility model is to limit practical range shown in drawing, it is every according to Change made by conception according to the utility model, or be revised as the equivalent embodiment of equivalent variations, still without departing from specification and figure When showing covered spirit, it should be within the protection scope of the present utility model.

Claims (9)

1. a kind of frame substrate return device, it is characterised in that:Including frame substrate transmission device (1) and frame substrate lifting gear (2), Frame substrate transmission device (1) setting is distinguished at the bottom of filming equipment (3), the both ends of the frame substrate transmission device (1) If there are one the frame substrate lifting gear (2), after the frame substrate lifting gear (2) is risen with the filming equipment (3) On conveyer belt (4) connection.
2. frame substrate return device according to claim 1, it is characterised in that:The frame substrate transmission device (1) is skin Band machine.
3. frame substrate return device according to claim 1 or 2, it is characterised in that:Frame substrate transmission device (1) packet The first passback main body and support leg (6) are included, the support leg (6) is fixed at the bottom of the first passback main body.
4. frame substrate return device according to claim 3, it is characterised in that:The support leg (6) is folding branch Support leg.
5. frame substrate return device according to claim 3, it is characterised in that:The frame substrate lifting gear (2) includes Second passback main body and lifting gear (8), the lifting gear (8) are arranged in the bottom of the second passback main body.
6. frame substrate return device according to claim 5, it is characterised in that:The first passback main body and described second The structure for returning main body is identical, includes frame body (9), transmission wheel (10), shaft (11) and driving motor (12), the frame body (9) both sides are equipped with mounting groove (13), and the transmission wheel (10) is equipped in two mounting grooves (13), described in one of them The transmission wheel (10) in mounting groove (13) passes through the biography in the shaft (11) and another described mounting groove (13) Wheel (10) is sent to connect, shaft (11) described in any adjacent two is connected by belt (14), the fixed peace of the driving motor (12) On the frame body (9), output shaft is connect with wherein one shaft (11).
7. frame substrate return device according to claim 6, it is characterised in that:The transmission wheel (10) is sheave, substrate The bottom of frame (15) be equipped with two flat shapes arrangement guide rod (16), two guide rods (16) respectively with two mounting grooves (13) sheave cooperation in.
8. frame substrate return device according to claim 3, it is characterised in that:The lifting gear (8) is hydraulic cylinder.
9. frame substrate return device according to claim 3, it is characterised in that:The lifting gear (8) is electric push-and-pull Bar.
CN201721805816.7U 2017-12-21 2017-12-21 Frame substrate return device Active CN207792087U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721805816.7U CN207792087U (en) 2017-12-21 2017-12-21 Frame substrate return device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721805816.7U CN207792087U (en) 2017-12-21 2017-12-21 Frame substrate return device

Publications (1)

Publication Number Publication Date
CN207792087U true CN207792087U (en) 2018-08-31

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ID=63281721

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721805816.7U Active CN207792087U (en) 2017-12-21 2017-12-21 Frame substrate return device

Country Status (1)

Country Link
CN (1) CN207792087U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108147128A (en) * 2017-12-21 2018-06-12 北京铂阳顶荣光伏科技有限公司 Frame substrate return device and frame substrate retransmission method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108147128A (en) * 2017-12-21 2018-06-12 北京铂阳顶荣光伏科技有限公司 Frame substrate return device and frame substrate retransmission method

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GR01 Patent grant
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CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: 100176 Beijing Daxing District Beijing economic and Technological Development Zone Rongchang East Street 7 hospital 6 Building 3001 room.

Patentee after: Beijing Dingrong Photovoltaic Technology Co.,Ltd.

Address before: 100176 Beijing Daxing District Beijing economic and Technological Development Zone Rongchang East Street 7 hospital 6 Building 3001 room.

Patentee before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd.

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20210402

Address after: Room 201, Building A, 1 Qianwan Road, Qianhai Shenzhen-Hong Kong Cooperation Zone, Shenzhen, Guangdong Province

Patentee after: Shenzhen Zhengyue development and Construction Co.,Ltd.

Address before: 100176 Beijing Daxing District Beijing economic and Technological Development Zone Rongchang East Street 7 hospital 6 Building 3001 room.

Patentee before: Beijing Dingrong Photovoltaic Technology Co.,Ltd.

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20210826

Address after: No.66210, 3rd floor, Pudong Free Trade Zone, Shanghai, China

Patentee after: Shanghai zuqiang Energy Co.,Ltd.

Address before: Room 201, Building A, 1 Qianwan Road, Qianhai Shenzhen-Hong Kong Cooperation Zone, Shenzhen, Guangdong Province

Patentee before: Shenzhen Zhengyue development and Construction Co.,Ltd.