CN207749181U - Anti-suck coating apparatus - Google Patents
Anti-suck coating apparatus Download PDFInfo
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- CN207749181U CN207749181U CN201721860910.2U CN201721860910U CN207749181U CN 207749181 U CN207749181 U CN 207749181U CN 201721860910 U CN201721860910 U CN 201721860910U CN 207749181 U CN207749181 U CN 207749181U
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Abstract
A kind of anti-suck coating apparatus of technical field of vacuum plating, including：Valve member, vacuum pump, the babinet with vacuum chamber and the rotary drum being set in vacuum chamber, wherein be connected with chemical source suction channel between rotary drum and vacuum pump, chamber vacuum lead is connected between vacuum chamber and vacuum pump；The valve member includes：First valve, the second valve and synchronizing control, the first valve are set on chemical source suction channel, and the second valve is set on chamber vacuum lead, and synchronizing control connects the open and close of the first valve and two valve of the second valve synchronous control.The utility model is by chemical source suction channel and chamber vacuum lead coordinated signals, and pipeline pressure too small suck-back in side causes chemical source to pollute when avoiding vacuumizing.
Description
Technical field
The utility model relates to a kind of technology of field of vacuum coating, specifically a kind of anti-suck coating apparatus.
Background technology
Huge vacuum installations are often vacuumized using multi-pipeline to accelerate production efficiency.As shown in Figure 1, being set in vacuum coating
In standby, the technology being separately controlled using chemical source suction channel and chamber vacuum lead improves equipment flexibility.Such as
In ALD (Atomic layer deposition, atomic layer deposition) reactions, process drum passes through individual tubes with vacuum coating chamber
Road vacuumizes, while ALD equipment can be equipped with filter filtering TMA (Trimethyl Aluminum, trimethyl aluminium), TiCl4Deng
Chemical source.As shown in Fig. 2, in evacuated chamber, when process drum carries out chemical source gas switching, chemistry is individually opened
Source suction channel, vacuum pump utilization rate is high at this time, and extra chemical source can be discharged rapidly and shorten reaction time.
But in the prior art, it process drum and is connected between process drum air inlet and the channel of exhaust outlet and non-fully close
Envelope, if in the case of the valve of chemical source suction channel is asynchronous with the on off state of the valve of chamber vacuum lead, because not
It is different with the air pressure of pipeline, the situation of suck-back occurs between chemical source suction channel, vacuum chamber and chamber vacuum lead.Normally
In coating process, the valve of chemical source suction channel is that the valve of open state and chamber vacuum lead is open state, work
Skill drum is smaller with the air pressure in chemical source suction channel, and vacuum chamber and the air pressure in chamber vacuum lead are larger, in this way, not
Chemical source gas and reaction intermediate can be allowed to flow into vacuum chamber.If but the valve of chemical source suction channel be open state and
The valve of equipment vacuum lead is in off state, then at chamber vacuum lead rest position to inhaling in the Connectivity Section of vacuum chamber
In attached chemical source meeting suck-back to vacuum chamber and chemical source suction channel, lead to contamination of products；In addition, at the end of technique, respectively
The transfer sequence of pipe break valve is similarly important, if first closing chemical source suction channel, turns off chamber vacuum lead,
The reaction product being then deposited in coating process at chemical source suction channel rest position to the Connectivity Section of process drum can be chemically
Source suction channel flows to chamber vacuum lead through vacuum chamber, pollutes.
Utility model content
The utility model is directed to deficiencies of the prior art, it is proposed that a kind of anti-suck coating apparatus, passing through
Cosmogony suction channel and chamber vacuum lead synchronous control, pipeline pressure too small suck-back in side leads to chemistry when avoiding vacuumizing
It pollutes in source.
The utility model is achieved through the following technical solutions：
The utility model includes：
Babinet, with vacuum chamber；
Rotary drum is rotatably arranged in the vacuum chamber, the film product be attached to the outer surface of the rotary drum with
It is moved with the rotary drum；
Vacuum pump is set to outside babinet；
Chemical source suction channel, is connected between rotary drum and vacuum pump；
Chamber vacuum lead, is connected between vacuum chamber and vacuum pump；
Valve member comprising the first valve, the second valve and synchronizing control, wherein the first valve is set to chemistry
On the suction channel of source, in the first valve opening, plated film gas is exported through chemical source suction channel to vacuum pump from rotary drum,
When one valve is closed, plated film gas ends at the first valve；Second valve is set on chamber vacuum lead, in the second valve
When unlatching, the gas in vacuum chamber is exported through chamber vacuum lead to vacuum pump from vacuum chamber, when the second valve is closed, very
Gas in cavity ends at the second valve；Synchronizing control connects the first valve and the second valve, the synchronous control
The open and close of mechanism synchronous control the first valve and the second valve.
Preferably, first valve and the second valve are pneumatic operated valve, and synchronizing control connects including the first pneumatic control
Mouth and the second pneumatic control interface；First pneumatic control interface is connect with the first valve, and synchronizing control is carried to the first valve
For meeting the compressed air of the first valve switch；Second pneumatic control interface is connect with the second valve, and synchronizing control is to
Two valves provide the compressed air for meeting the second valve switch.
Preferably, first valve and the second valve are motor-driven valve or solenoid valve, and synchronizing control is electronic execution
Device, the open and close of synchronous control the first valve and the second valve.
The valve member further includes monitor, and the monitor connects the first valve, the second valve and synchronous control
Mechanism and the operating status for monitoring the first valve, the second valve and synchronizing control, when the operating status of three can not match
When send out alarm signal.
Technique effect
Compared with prior art, the utility model is by chemical source suction channel and chamber vacuum lead coordinated signals,
Pipeline pressure too small suck-back in side causes chemical source to pollute when avoiding vacuumizing.
Description of the drawings
Fig. 1 is the structural schematic diagram of vacuum coating equipment in the prior art；
Fig. 2 is the structural schematic diagram of embodiment 1；
Fig. 3 is the structural schematic diagram of valve member in embodiment 1；
In figure：Babinet 1, chemical source suction channel 2, chamber vacuum lead 3, vacuum pump 4, rotary drum 5, valve member 6,
One valve 61, the second valve 62, synchronizing control 63, monitor 64.
Specific implementation mode
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
Embodiment 1
As shown in Fig. 2, the present embodiment includes：
Babinet 1, with vacuum chamber；
Rotary drum 5 is rotatably arranged in the vacuum chamber, and the film product is attached to the outer surface of the rotary drum 5
To be moved with the rotary drum 5；
Vacuum pump 4 is set to outside babinet 1；
Chemical source suction channel 2 is connected between rotary drum 5 and vacuum pump 4；
Chamber vacuum lead 3 is connected between vacuum chamber and vacuum pump 4；
Valve member 6, as shown in Figures 2 and 3 comprising the first valve 61, the second valve 62 and synchronizing control 63,
Wherein, the first valve 61 is set on chemical source suction channel 2, and when the first valve 61 is opened, plated film gas is from rotary drum 5 through chemistry
Source suction channel 2 is exported to vacuum pump 4, and when the first valve 61 is closed, plated film gas ends at the first valve 61；Second valve
Door 62 is set on chamber vacuum lead 3, and when the second valve 62 is opened, the gas in vacuum chamber is taken out from vacuum chamber through chamber true
Vacant duct 3 is exported to vacuum pump 4, and when the second valve 62 is closed, the gas in vacuum chamber ends at the second valve 62；It is synchronous
Control mechanism 63 connects the first valve 61 and the second valve 62,63 the first valve of synchronous control 61 of the synchronizing control and the
The open and close of two valves 62.
Preferably, first valve, 61 and second valve 62 is motor-driven valve or solenoid valve, and synchronizing control 63 is electricity
Dynamic actuator, the open and close of synchronous control the first valve 61 and the second valve 62.
The valve member 6 further includes monitor 64, and the monitor 64 connects the first valve 61,62 and of the second valve
Synchronizing control 63 and the operating status for monitoring the first valve 61, the second valve 62 and synchronizing control 63, when three's
Operating status sends out alarm signal when can not match.
The state that the monitor 64 monitors the first valve 61 is to open, and the state of the second valve 62 is hair when closing
Go out alarm signal.
The state that the monitor 64 monitors the first valve 61 is to close, and the state of the second valve 62 is hair when opening
Go out alarm signal.
The monitor 64 monitors synchronizing control 63 and is in synchronous the first valve 61 and the second valve 62 opened
State, but when the first valve 61 or the second valve 62 are in off state, send out alarm signal.
The monitor 64 monitors synchronizing control 63 and is in close synchronously the first valve 61 and the second valve 62
State, but when the first valve 61 or the second valve 62 are open state, send out alarm signal.
At work, the first valve of synchronous control 61 is turned on and off the present embodiment with the second valve 62, keeps chemical source
Pressure balance in suction channel 2 and chamber vacuum lead 3；Chemical source suction channel 2 in the prior art and chamber is avoided to take out true
When 3 independent control of vacant duct, chemical source suck-back caused by one of pipeline pressure reduction.
It is emphasized that：The above is only the preferred embodiment of the present utility model, not appoints to the utility model
What formal limitation, any simple modification made by the above technical examples according to the technical essence of the present invention, etc.
With variation and modification, it is still within the scope of the technical solutions of the present invention.
Claims (8)
1. a kind of anti-suck coating apparatus, for spraying coating raw material on film product, which is characterized in that including：
Babinet, with vacuum chamber；
Rotary drum is rotatably arranged in the vacuum chamber, and the film product is attached to the outer surface of the rotary drum with institute
State rotary drum movement；
Vacuum pump is set to outside babinet；
Chemical source suction channel, is connected between rotary drum and vacuum pump；
Chamber vacuum lead, is connected between vacuum chamber and vacuum pump；
Valve member comprising the first valve, the second valve and synchronizing control, wherein the first valve is taken out set on chemical source
On suction pipe road, in the first valve opening, plated film gas is exported through chemical source suction channel to vacuum pump from rotary drum, in the first valve
When door is closed, plated film gas ends at the first valve；Second valve is set on chamber vacuum lead, in the second valve opening
When, the gas in vacuum chamber is exported through chamber vacuum lead to vacuum pump from vacuum chamber, when the second valve is closed, vacuum chamber
Interior gas ends at the second valve；Synchronizing control connects the first valve and the second valve, the synchronizing control
The open and close of synchronous control the first valve and the second valve.
2. anti-suck coating apparatus according to claim 1, characterized in that first valve and the second valve are pneumatic
Valve, synchronizing control include the first pneumatic control interface and the second pneumatic control interface；First pneumatic control interface and first
Valve connects, and synchronizing control provides the compressed air for meeting the first valve switch to the first valve；Second pneumatic control connects
Mouth is connect with the second valve, and synchronizing control provides the compressed air for meeting the second valve switch to the second valve.
3. anti-suck coating apparatus according to claim 1, characterized in that the valve member further includes monitor, institute
The monitor stated connects the first valve, the second valve and synchronizing control and the first valve of monitoring, the second valve and synchronous control
The operating status of mechanism processed sends out alarm signal when the operating status of three can not match.
4. anti-suck coating apparatus according to claim 3, characterized in that the monitor monitors the shape of the first valve
State be open, the state of the second valve is when closing, to send out alarm signal.
5. anti-suck coating apparatus according to claim 3, characterized in that the monitor monitors the shape of the first valve
State be close, the state of the second valve is when opening, to send out alarm signal.
6. anti-suck coating apparatus according to claim 3, characterized in that the monitor monitors synchronizing control
The first valve and the second valve state are opened in synchronous, but when the first valve or the second valve are in off state, sends out alarm
Signal.
7. anti-suck coating apparatus according to claim 3, characterized in that the monitor monitors synchronizing control
In the first valve of close synchronously and the second valve state, but when the first valve or the second valve are open state, alarm is sent out
Signal.
8. anti-suck coating apparatus according to claim 1, characterized in that first valve is electronic with the second valve
Valve or solenoid valve, synchronizing control are Electric Actuator, the open and close of synchronous control the first valve and the second valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721860910.2U CN207749181U (en) | 2017-12-27 | 2017-12-27 | Anti-suck coating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721860910.2U CN207749181U (en) | 2017-12-27 | 2017-12-27 | Anti-suck coating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207749181U true CN207749181U (en) | 2018-08-21 |
Family
ID=63150658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721860910.2U Active CN207749181U (en) | 2017-12-27 | 2017-12-27 | Anti-suck coating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207749181U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113694559A (en) * | 2021-08-30 | 2021-11-26 | 四川阿格瑞新材料有限公司 | Organic material purification system and use method |
-
2017
- 2017-12-27 CN CN201721860910.2U patent/CN207749181U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113694559A (en) * | 2021-08-30 | 2021-11-26 | 四川阿格瑞新材料有限公司 | Organic material purification system and use method |
| CN113694559B (en) * | 2021-08-30 | 2022-09-27 | 四川阿格瑞新材料有限公司 | Organic material purification system and use method |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PP01 | Preservation of patent right | ||
| PP01 | Preservation of patent right |
Effective date of registration: 20190121 Granted publication date: 20180821 |
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| PD01 | Discharge of preservation of patent | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20220121 Granted publication date: 20180821 |