CN207662828U - A kind of sample stage of linear motor driving - Google Patents
A kind of sample stage of linear motor driving Download PDFInfo
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- CN207662828U CN207662828U CN201721628200.7U CN201721628200U CN207662828U CN 207662828 U CN207662828 U CN 207662828U CN 201721628200 U CN201721628200 U CN 201721628200U CN 207662828 U CN207662828 U CN 207662828U
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Abstract
The utility model discloses a kind of sample stages of linear motor driving, including pedestal, Y-axis component, X-axis component and Z axis component are sequentially installed on pedestal from the bottom up, and X-axis component, Y-axis component and Z axis component are mutually perpendicular to lay along tri- axial directions of XYZ, and the bearing table of horizontal direction is equipped on Z axis component；It is mounted on linear motor on Y-axis component, X-axis component and Z axis component, linear motor driving X-axis component on Y-axis component is moved along Y direction, linear motor driving Z axis component on X-axis component is moved along X-direction, and the linear motor driving bearing table on Z axis component is moved along Z-direction.The power resources of each shaft assembly of the utility model are linear motor, when linear motor starts, each shaft assembly can in the same direction move at the uniform velocity with the spindle motor, it is simple in structure, positioning accuracy is high, reaction speed is fast, high sensitivity, and the end limit of each shaft assembly is all made of electric limiting and mechanical position limitation, safe and reliable, long lifespan.
Description
Technical field
The utility model belongs to scanning imaging technology field, and in particular to a kind of sample stage of linear motor driving.
Background technology
In recent years, the whole world is electrically very rapid with the development of electronics industry, and technology innovation is getting faster, electronic product update
The period of the replacement also shortens constantly, meanwhile, the composed structure of various electronic products also becomes increasingly complex.It is given in electronic product
While human lives and work bring various facilities and benefit, various electronic wastes also are brought to social environment,
Great burden is brought to global environment.
For this problem, European Union's meeting and EU Council have issued two at 2 months 2003 for electronic product
Dependent instruction is respectively《Waste and old electric electronic apparatus》Device directive (abbreviation WEEE instruction) and《RoHS is instructed》.Wherein,
RoHS is pointed out, during the manufacturing of various electronic products, need to carry out nuisance to material used in the product
The assay of matter.Currently, the detection method of harmful substance is mostly to carry out inspection using xrf analysis instrument in electronic product material
Survey work.It is therefore desirable to one carrying sample sample stage come realize sample automatically move and high-precision positioning function.Mesh
Before, most sample bearing test platform the degree of automation or the positioning accuracy of sample is not high in the market.
Invention content
For the defects in the prior art and insufficient, the utility model provides a kind of sample stage of linear motor driving,
The defect for overcoming the positioning accuracy of existing sample stage the degree of automation or sample not high.
In order to achieve the above objectives, the utility model takes the following technical solution：
A kind of sample stage of linear motor driving, including pedestal are sequentially installed with Y shaft assemblies, X on pedestal from the bottom up
Shaft assembly and Z axis component, and X-axis component, Y-axis component and Z axis component are mutually perpendicular to lay along tri- axial directions of XYZ, in Z axis group
The bearing table of horizontal direction is installed on part；Linear motor, Y-axis group are mounted on Y-axis component, X-axis component and Z axis component
Linear motor driving X-axis component on part is moved along Y direction, and the linear motor on X-axis component drives Z axis component along the axis sides X
To movement, the linear motor driving bearing table on Z axis component is moved along Z-direction；
The Y-axis component has two sets, and two sets of Y-axis member parallel settings, and Y-axis component includes Y axis pedestals, Y-axis pedestal
Lower end is fixed on the base, and Y-axis pedestal upper end is fixed with Y-axis sliding rail, and Y-axis sliding block has been slidably mounted on Y axis sliding rails, and Y-axis is slided
Block upper end is fixed with Y-axis connecting bracket, and Y axis connection pedestal upper ends are fixed with the Y-axis connecting plate of horizontal direction, and branch is connected in Y-axis
The side of frame is fixedly connected with y-axis motor link block, and y-axis motor link block lower end is connected with linear motor, straight on Y-axis component
Line motor is parallel to Y-axis pedestal and is fixed in the exterior side wall of Y-axis pedestal；
The X-axis component includes X-axis pedestal, and for X-axis pedestal perpendicular to Y-axis pedestal, the both ends of X-axis pedestal lower part are solid respectively
It is scheduled on two Y-axis connecting plates of two sets of Y-axis components, the side of X-axis pedestal is equipped with two parallel X-axis slide rails, X-axis slide rail
On be slidably mounted X-axis slide block, X-axis connecting plate is fixed in X-axis slide block, straight-line electric is fixed with outside the lower wall of X-axis pedestal
Machine, the linear motor on X-axis component are fixedly connected with one end of the X-axis connecting plate；
The Z axis component includes vertical Z axis pedestal, and Z axis pedestal is perpendicular to X-axis pedestal and Y axis pedestals, Z axis pedestal
A side-lower be fixed on X-axis connecting plate, two parallel Z axis slide rails, Z axis slide rail are installed on the other side of Z axis pedestal
On be slidably mounted Z axis sliding block, Z axis connecting plate is fixed on Z axis sliding block, straight-line electric is fixed with outside the side wall of Z axis pedestal
Machine, the linear motor on Z axis component are fixedly connected with one end of the Z axis connecting plate, and object is held described in installation on Z axis connecting plate
Platform.
The utility model also has following distinguishing feature：
The both ends of the lateral wall of the Y-axis sliding block are fixed with tablet, and there are two light for installation on the lateral wall of Y-axis pedestal
Electric switch, two Y-axis optoelectronic switches are respectively arranged below two ends of Y-axis sliding rail, and the induction end of tablet can be inserted into photoelectricity
In the inductive slot of switch.
It is fixed with optoelectronic switch at the X-axis slide rail both ends, tablet, tablet are fixed in the both sides of X-axis connecting plate
Induction end can be inserted into the inductive slot of optoelectronic switch.
It is fixed with optoelectronic switch at the Z axis slide rail both ends, the Z axis connecting plate between Z axis connecting plate and Z axis pedestal
Tablet is installed, the induction end of tablet can be inserted into the inductive slot of optoelectronic switch on side wall.
The linear motor includes stator and mover, and mover can be slidably mounted on stator；
The y-axis motor link block is fixedly connected with the mover of the linear motor of Y-axis component, the outer side of Y-axis pedestal
The stator of the linear motor of Y-axis component is fixedly mounted on wall；
One end of the X-axis connecting plate is fixedly connected with the mover of the linear motor of X-axis component, the lower wall of X axis pedestals
The stator of the linear motor of outer fixed X-axis component；
One end of the Z axis connecting plate is fixedly connected with the mover of the linear motor of Z axis component, the side wall of Z axis pedestals
The stator of the linear motor of outer fixed Z axis component.
There are two Y-axis limiting bracket, two Y-axis limiting brackets to be set to the two of Y-axis sliding rail for the Y-axis pedestal upper end installation
End, is equipped with Y-axis rubber limited block between Y-axis limiting bracket and the end of Y-axis sliding block, and Y-axis rubber limited block is fixed on Y-axis limit
On the side wall of position holder.
There are two X-axis limiting brackets, X-axis limiting bracket to be set to the two of X-axis slide rail for installation on the X-axis base side wall
End is machined with X-axis Impactor on the side wall of the X-axis connecting plate between X-axis connecting plate and X-axis pedestal, X-axis limiting bracket with
X-axis rubber limited block is equipped between X-axis Impactor, X-axis rubber limited block is fixed on the side wall of X-axis limiting bracket.
Z axis limiting bracket is installed, Z axis limiting bracket is set to the both ends of Z axis slide rail, in Z on the Z axis base side wall
Z axis rubber limited block is equipped between axis limiting bracket and the side wall of Z axis connecting plate, Z axis rubber limited block is fixed on Z axis limit branch
On the side wall of frame.
The madial wall of the Y-axis pedestal is machined with the right angled triangle stiffener of multiple parallelly distribute ons；
The X-axis pedestal and Z axis pedestal is U-shaped groove structure, is machined in X-axis pedestal and Z axis pedestal multiple flat
The rectangular stiffener of row distribution.
Multiple threaded holes are offered on the horizontal plane of the bearing table, the vertical plane of bearing table is fixed on Z axis connection plates
On, it is machined with ribbed stiffener between the vertical plane and horizontal plane of bearing table.
Compared with prior art, beneficial has the technical effect that the utility model：
The X-axis component of the sample stage of the linear motor driving of the utility model, Y-axis component, the power resources of Z axis component are equal
For linear motor, each shaft assembly is connected firmly with the mover of linear motor, and when linear motor starts, each shaft assembly can be with axis electricity
The mover of machine moves at the uniform velocity in the same direction.The utility model uses linear motor as driving device, with conventionally employed stepper motor
Two dimension, three-dimensional working platform are compared, and mainly have following several features：When it is simple in structure, since linear motor need not be rotation
Movement becomes the attachment device of linear motion so that the structure of system itself is greatly simplified, weight and volume greatly under
Drop；Second is that positioning accuracy is high, in the place that needs move along a straight line, direct-drive may be implemented in linear motor, thus can eliminate
Various position errors caused by intermediate link, therefore positioning accuracy is high；Third, reaction speed is fast, high sensitivity, trackability is good, directly
Line motor is easily able to its mover and is supported with magnetic suspension so that remained between mover and stator certain air gap without
Contact, this eliminates the need for the contact frictional resistance between fixed and moving son, thus greatly increase the sensitivity of system, rapidity and
Trackability；Fourth, safe and reliable, long lifespan, non contact transmission power may be implemented in linear motor, and mechanical friction is lost almost
It is zero, so failure is few, freedom from repairs, thus safe and reliable, long lifespan.
The end limit of each shaft assembly of the utility model is all made of two kinds of electric limiting and mechanical position limitation, wherein electrical limit
Position is is incuded using optoelectronic switch, when optoelectronic switch senses object, is ceased and desisted order to electrical system transmission；When electrical
System when something goes wrong, in order to ensure that each shaft assembly will not be run to except range of operation, ensures job safety, in each shaft assembly
Two sections be provided with rubber limited block, when electrical system failure cause each axis to move to extreme position when do not stop, then respectively
Shaft assembly will collide rubber limited block, to force each axis stop motion.
Description of the drawings
Fig. 1 is the overall structure diagram of the utility model；
Fig. 2 is the front view of the utility model；
Fig. 3 is the side view of the utility model；
Fig. 4 is the vertical view of the utility model；
Fig. 5 is the Y-axis component structure diagram of the utility model；
Fig. 6 is the X-axis component structure diagram of the utility model；
Fig. 7 is the Z axis component structure diagram of the utility model；
Each label is expressed as in figure:1- pedestals, 2-Y shaft assemblies, 3-X shaft assemblies, 4-Z shaft assemblies, 5- bearing tables, 6- are straight
Line motor, 7- optoelectronic switches, 8- tablets；
21-Y axis pedestals, 211- stiffeners, 22-Y axis sliding rails, 23-Y axis sliding blocks, 24-Y axis connection holders, 25-Y axis connections
Plate, 26-Y spindle motor link blocks, 29-Y axis limiting brackets, 291-Y axis rubber limited blocks；
31-X axis pedestals, 311- stiffeners, 32-X axis sliding rails, 33-X axis sliding blocks, 34-X axis connection plates, 37-X axis limit branch
Frame, 371-X axis rubber limited blocks, 38-X axis Impactors；
41-Z axis pedestals, 42-Z axis sliding rails, 43-Z axis sliding blocks, 44-Z axis connection plates, 47-Z axis limiting brackets, 471-Z axis
Rubber limited block；
51- threaded holes, 52- ribbed stiffeners；
61- stators, 62- movers.
The utility model is illustrated below in conjunction with specification drawings and specific embodiments.
Specific implementation mode
As shown in Figure 1 and Figure 7, the sample stage of a kind of linear motor driving, including pedestal 1, on pedestal 1 from the bottom up according to
It is secondary that Y-axis component 2, X-axis component 3 and Z axis component 4 are installed, and X-axis component 3, Y-axis component 2 and Z axis component 3 are along tri- axis of XYZ
To being mutually perpendicular to lay, the bearing table 5 of horizontal direction is installed on Z axis component 3；In Y-axis component 2, X-axis component 3 and Z axis group
Linear motor 6 is mounted on part 4, the linear motor 6 on Y-axis component 2 drives X-axis component 3 to be moved along Y axis directions, X-axis group
Linear motor 6 on part 3 drives Z axis component 4 to be moved along X-direction, and the linear motor 6 on Z axis component 4 drives 5 edge of bearing table
Z-direction moves；X-axis component 3, Y shaft assemblies 2, Z axis component 4 power resources be linear motor 6, each shaft assembly with directly
The mover 62 of line motor 6 connects firmly, when linear motor 6 starts, each shaft assembly can with the axis linear motor 6 mover in the same direction etc.
Speed movement.
Y-axis component 2 has two sets, and two sets of Y-axis components 2 are arranged in parallel, and Y-axis component 2 includes Y axis pedestal 21, Y-axis pedestal
21 lower ends are fixed on pedestal 1, and 21 upper end of Y-axis pedestal is fixed with Y axis sliding rail 22, and Y-axis has been slidably mounted on Y-axis sliding rail 22
Sliding block 23,23 upper end of Y-axis sliding block are fixed with Y-axis connecting bracket 24, and 24 upper end of Y-axis connecting bracket is fixed with the Y-axis of horizontal direction
Connecting plate 25 is fixedly connected with y-axis motor link block 26 in the side of Y-axis connecting bracket 24, and 26 lower end of y-axis motor link block connects
It is connected to linear motor 6, the linear motor 6 on Y-axis component 2 is parallel to Y axis pedestal 21 and is fixed on the outer side of Y-axis pedestal 21
On wall；X-axis component 3 includes X-axis pedestal 31, and X-axis pedestal 31 is distinguished perpendicular to Y-axis pedestal 21, the both ends of 31 lower part of X-axis pedestal
It is fixed on two Y-axis connecting plates 25 of two sets of Y-axis components 3, the side of X-axis pedestal 31 is equipped with two parallel X-axis slide rails
32, X-axis slide block 33 has been slidably mounted in X-axis slide rail 32, X-axis connecting plate 34 is fixed in X-axis slide block 33, in X-axis pedestal 31
Lower wall outside be fixed with linear motor 6, the linear motor 6 on X-axis component 3 is fixedly connected with the one of the X-axis connecting plate 34
End；Z axis component 4 includes vertical Z axis pedestal 41, and Z axis pedestal 41 is perpendicular to X-axis pedestal 31 and Y-axis pedestal 21, Z axis pedestal 41
A side-lower be fixed on X-axis connecting plate 34, two parallel Z axis slide rails 42, Z are installed on the other side of Z axis pedestal 41
It has been slidably mounted Z axis sliding block 43 on axis sliding rail 42, Z axis connecting plate 44 is fixed on Z axis sliding block 43, in the side of Z axis pedestal 41
It is fixed with linear motor 6 outside wall, the linear motor 6 on Z axis component 4 is fixedly connected with one end of the Z axis connecting plate 44, in Z
The bearing table 5 is installed on axis connection plate 44.The X-axis component 3 of the utility model, the power resources of Y-axis component 2, Z axis component 4
It is linear motor 6, each shaft assembly is connected firmly with the mover of linear motor 6 62, and when linear motor 6 starts, each shaft assembly can
It moves at the uniform velocity in the same direction with the mover 62 of the axis linear motor 6, the utility model is used as driving device, structure using linear motor 6
Simply, since linear motor 6 need not be in line rotation motion the attachment device of movement, so that the knot of system itself
Structure is greatly simplified, and weight and volume greatly declines；Positioning accuracy is high, and in the place that needs move along a straight line, linear motor 6 can be with
It realizes direct-drive, thus various position errors caused by intermediate link can be eliminated, therefore positioning accuracy is high.
In compliance with the above technical solution, specific embodiment of the utility model is given below, it should be noted that this practicality is new
Type is not limited to following specific examples, and it is new that all equivalent transformations made on the basis of the technical solutions of the present application each falls within this practicality
The protection domain of type.The utility model is described in further details with reference to embodiment.
Embodiment 1：
As shown in Fig. 1 to 7, a kind of sample stage of linear motor driving, including pedestal 1, the pedestal 1 in the present embodiment is back
Character form structure, it is beautiful and save material, Y-axis component 2, X-axis component 3 and Z axis component are sequentially installed on pedestal 1 from the bottom up
4, and X-axis component 3, Y-axis component 2 and Z axis component 3 are mutually perpendicular to lay along tri- axial directions of XYZ, are equipped on Z axis component 3
The bearing table 5 of horizontal direction；Linear motor 6 is mounted on Y-axis component 2, X-axis component 3 and Z axis component 4, on Y-axis component 2
Linear motor 6 drive X-axis component 3 to be moved along Y direction, the linear motor 6 on X-axis component 3 drives Z axis component 4 along X-axis side
To movement, the linear motor 6 on Z axis component 4 drives bearing table 5 to be moved along Z-direction；Y-axis component 2 has two sets, and two sets of Y
Shaft assembly 2 is arranged in parallel, and Y-axis component 2 includes Y-axis pedestal 21, and 21 lower end of Y-axis pedestal is fixed on pedestal 1, on Y-axis pedestal 21
End is fixed with Y-axis sliding rail 22, and Y-axis sliding block 23 has been slidably mounted on Y-axis sliding rail 22, and 23 upper end of Y-axis sliding block is fixed with Y-axis connection
Holder 24,24 upper end of Y-axis connecting bracket are fixed with the Y-axis connecting plate 25 of horizontal direction, are fixed in the side of Y-axis connecting bracket 24
It is connected with y-axis motor link block 26,26 lower end of y-axis motor link block is connected with linear motor 6, the straight-line electric on Y-axis component 2
Machine 6 is parallel to Y-axis pedestal 21 and is fixed in the exterior side wall of Y-axis pedestal 21；X-axis component 3 includes X-axis pedestal 31, X-axis pedestal
31 are separately fixed at two Y-axis connecting plates 25 of two sets of Y-axis components 3 perpendicular to Y-axis pedestal 21, the both ends of 31 lower part of X-axis pedestal
On, the side of X-axis pedestal 31 is equipped with two parallel X-axis slide rails 32, and X-axis slide block 33 has been slidably mounted in X-axis slide rail 32,
It is fixed with X-axis connecting plate 34 in X-axis slide block 33, is fixed with linear motor 6 outside the lower wall of X-axis pedestal 31, on X-axis component 3
Linear motor 6 is fixedly connected with one end of the X-axis connecting plate 34；Z axis component 4 includes vertical Z axis pedestal 41, Z axis pedestal
41 are fixed on perpendicular to X-axis pedestal 31 and Y-axis pedestal 21, a side-lower of Z axis pedestal 41 on X axis connections plate 34, Z axis pedestal
Two parallel Z axis slide rails 42 are installed on 41 other side, Z axis sliding block 43 has been slidably mounted on Z axis sliding rail 42, Z axis is slided
It is fixed with Z axis connecting plate 44 on block 43, linear motor 6, the straight line on Z axis component 4 are fixed with outside the side wall of Z axis pedestal 41
Motor 6 is fixedly connected with one end of the Z axis connecting plate 44, and the bearing table 5 is installed on Z axis connecting plate 44.
In the present embodiment, the both ends of the lateral wall of Y-axis sliding block 23 are fixed with tablet 8, on the lateral wall of Y-axis pedestal 21
Installation is there are two optoelectronic switch 7, and two Y-axis photoelectricity are opened 7 passes and are respectively arranged below two ends of Y axis sliding rail 22, tablet 8
Induction end can be inserted into the inductive slot of optoelectronic switch 7.Optoelectronic switch 7 and tablet 8 are to be used for electric limiting, when Y-axis sliding block
23 when being moved to the end of Y-axis sliding rail 22, and the induction end of tablet 8 can be inserted into the inductive slot of optoelectronic switch 7, optoelectronic switch 7
It senses object and ceases and desist order to electrical system transmission, then Y-axis sliding block 23 is out of service, and can effectively control Y-axis component 2 will not
Except operation to range of operation, ensure job safety.
Likewise, 32 both ends of X-axis slide rail are fixed with optoelectronic switch 7, it is fixed with tablet 8 in the both sides of X-axis connecting plate 34,
The induction end of tablet 8 can be inserted into the inductive slot of optoelectronic switch 7.Optoelectronic switch 7 and tablet 8 are to be used for electric limiting, work as X
When axis connection plate 34 is moved to the end of X-axis slide rail 32, the induction end of tablet 8 can be inserted into the inductive slot of optoelectronic switch 7,
Optoelectronic switch 7 senses object and ceases and desist order to electrical system transmission that then X-axis connecting plate 34 is out of service, can effectively control
X-axis component 3 will not be run to except range of operation, ensure job safety.
It is fixed with optoelectronic switch 7 at 42 both ends of Z axis slide rail, the Z axis connection between Z axis connecting plate 44 and Z axis pedestal 41
Tablet 8 is installed, the induction end of tablet 8 can be inserted into the inductive slot of optoelectronic switch 7 on the side wall of plate 44.Optoelectronic switch 7
Equally it is to be used for electric limiting, when Z axis connecting plate 44 is moved to the end of Z axis slide rail 42, the sense of tablet 8 with tablet 8
Ying Duanneng is inserted into the inductive slot of optoelectronic switch 7, and optoelectronic switch 7 senses object and ceases and desist order to electrical system transmission, then Z
Axis connection plate 44 is out of service, and can effectively control Z axis component 4 will not run to except range of operation, ensures job safety.
In the present embodiment, linear motor 6 includes stator 61 and mover 62, and mover 62 can be slidably mounted on stator 61,
And mover 62 is supported with magnetic suspension, so that certain air gap is remained between mover 62 and stator 61 without contacting,
This eliminates the need for the contact frictional resistance between stator 61 and mover 62, greatly increase the sensitivity of system, rapidity and with
Dynamic property.
Specifically, y-axis motor link block 26 is fixedly connected with the mover 62 of the linear motor 6 of Y-axis component 2, Y-axis pedestal 21
Exterior side wall on be fixedly mounted Y-axis component 2 linear motor 6 stator 61；When linear motor 6 works, mover 62 drives Y-axis
For motor link block 26 along 61 linear running of stator, y-axis motor link block 26 drives Y-axis sliding block 23 in 22 linear running of Y-axis sliding rail,
Y-axis connecting bracket 24 on Y axis sliding block 23 drives X-axis component 3 and Z axis component 4 to be run along Y direction, finally realizes bearing table
5 drive sample to be run along Y direction.
One end of X-axis connecting plate 34 is fixedly connected with the mover 62 of the linear motor 6 of X-axis component 3, under X-axis pedestal 31
The stator 61 of the linear motor 6 of fixed X-axis component 3 outside wall；When linear motor 6 works, mover 62 is along 61 linear running band of stator
Dynamic X-axis connecting plate 34 is run by X-axis slide block 33 along X-axis slide rail 32, and X-axis connecting plate 34 drives Z axis component 4 to be transported along X-direction
Row, it is final to realize that bearing table 5 drives sample to be run along X-direction.
One end of Z axis connecting plate 44 is fixedly connected with the mover 62 of the linear motor 6 of Z axis component 4, the side of Z axis pedestal 41
The stator 61 of the linear motor 6 of fixed Z axis component 4 outside wall；When linear motor 6 works, mover 62 is along 61 linear running band of stator
Dynamic Z axis connecting plate 44 is run by Z axis sliding block 43 along Z axis slide rail 42, and Z axis connecting plate 44 drives the sample on bearing table 5 along Z
Axis direction is run.
Embodiment 2：
The present embodiment installs two Y-axis limiting brackets 29, two Y on the basis of embodiment 1, in 21 upper end of Y-axis pedestal
Axis limiting bracket 29 is set to the both ends of Y-axis sliding rail 22, and Y-axis rubber is equipped between Y-axis limiting bracket 29 and the end of Y-axis sliding block 23
Glue limited block 291, Y-axis rubber limited block 291 are fixed on the side wall of Y-axis limiting bracket 29.When electrical system when something goes wrong,
In order to ensure that Y-axis component 2 will not be run to except range of operation, ensures job safety, Y-axis is set at the both ends of Y-axis sliding rail 22
Rubber limited block 291 will collide Y-axis rubber limited block 291 when then Y-axis component 2 runs to the end of Y-axis sliding rail 22, to
Force Y-axis component 2 out of service.
Two X-axis limiting brackets 37 are installed on 31 side wall of X-axis pedestal, X-axis limiting bracket 37 is set to the two of X-axis slide rail 32
It holds, X-axis Impactor 38 is machined on the side wall of the X-axis connecting plate 34 between X-axis connecting plate 34 and X-axis pedestal 31, limited in X-axis
X-axis rubber limited block 371 is equipped between position holder 37 and X-axis Impactor 38, X-axis rubber limited block 371 is fixed on X-axis limit
On the side wall of holder 37.When electrical system when something goes wrong, in order to ensure that X-axis component 3 will not be run to except range of operation, protect
Job safety is demonstrate,proved, X-axis rubber limited block 371 is set at the both ends of X-axis slide rail 32, then X-axis component 3 runs to X-axis slide rail 32
X-axis rubber limited block 371 will be collided when end, to force X-axis component 3 out of service.
Z axis limiting bracket 47 is installed on 41 side wall of Z axis pedestal, Z axis limiting bracket 47 is set to the both ends of Z axis sliding rail 42,
Z axis rubber limited block 471, Z axis rubber limited block 471 are equipped between Z axis limiting bracket 47 and the side wall of Z axis connecting plate 44
It is fixed on the side wall of Z axis limiting bracket 47.When electrical system when something goes wrong, in order to ensure that Z axis component 4 will not be run to fortune
Except line range, ensure job safety, setting Z axis rubber limited block 471, the then operation of Z axis component 4 at the both ends of Z axis slide rail 42
To Z axis slide rail 42 end when will collide Z axis rubber limited block 471, to force Z axis component 4 out of service.
Embodiment 3：
The present embodiment is machined with multiple parallel on the basis of embodiment 1 and embodiment 2 in the madial wall of Y-axis pedestal 21
The right angled triangle stiffener 211 of distribution, to reinforce Y-axis pedestal 21.
X-axis pedestal 31 and Z axis pedestal 41 are U-shaped groove structure, are machined in X-axis pedestal 31 and Z axis pedestal 41 multiple
The rectangular stiffener 311 of parallelly distribute on, to reinforce X-axis pedestal 31 and Z axis pedestal 41.
In the present embodiment, multiple threaded holes 51 are offered on the horizontal plane of bearing table 5, threaded hole 51 is waited for for fixation
The vertical plane of sample, bearing table 5 is fixed on Z axis connecting plate 44, is processed between the vertical plane and horizontal plane of bearing table 5
There is ribbed stiffener 52, reinforces the bearing capacity of bearing table 5.
Claims (10)
1. a kind of sample stage of linear motor driving, which is characterized in that including pedestal (1), pedestal is pacified successively from the bottom up on (1)
Equipped with Y-axis component (2), X-axis component (3) and Z axis component (4), and X-axis component (3), Y-axis component (2) and Z axis component (3) edge
Tri- axial directions of XYZ are mutually perpendicular to lay, and the bearing table (5) of horizontal direction is equipped on Z axis component (3)；Y-axis component (2),
Linear motor (6) is mounted on X-axis component (3) and Z axis component (4), the linear motor (6) on Y-axis component (2) drives X-axis
Component (3) is moved along Y direction, and linear motor (6) the driving Z axis component (4) on X-axis component (3) is moved along X-direction, Z axis
Linear motor (6) driving bearing table (5) on component (4) is moved along Z-direction；
The Y-axis component (2) has two sets, and two sets of Y-axis components (2) are arranged in parallel, and Y-axis component (2) includes Y-axis pedestal
(21), Y-axis pedestal (21) lower end is fixed on pedestal (1), and Y-axis pedestal (21) upper end is fixed with Y-axis sliding rail (22), Y-axis sliding rail
(22) Y-axis sliding block (23) has been slidably mounted on, Y-axis sliding block (23) upper end is fixed with Y-axis connecting bracket (24), Y-axis connection branch
Frame (24) upper end is fixed with the Y-axis connecting plate (25) of horizontal direction, and Y-axis is fixedly connected in the side of Y-axis connecting bracket (24)
Motor link block (26), y-axis motor link block (26) lower end are connected with linear motor (6), the linear motor on Y-axis component (2)
(6) it is parallel to Y-axis pedestal (21) and is fixed in the exterior side wall of Y-axis pedestal (21)；
The X-axis component (3) includes X-axis pedestal (31), and X-axis pedestal (31) is perpendicular to Y-axis pedestal (21), X-axis pedestal (31)
The both ends of lower part are separately fixed on two Y-axis connecting plates (25) of two sets of Y-axis components (3), the side installation of X-axis pedestal (31)
There are two parallel X-axis slide rails (32), X-axis slide block (33) has been slidably mounted in X-axis slide rail (32), has been consolidated in X-axis slide block (33)
Surely there is X-axis connecting plate (34), linear motor (6), the straight-line electric on X-axis component (3) are fixed with outside the lower wall of X-axis pedestal (31)
Machine (6) is fixedly connected with one end of the X-axis connecting plate (34)；
The Z axis component (4) includes vertical Z axis pedestal (41), and Z axis pedestal (41) is perpendicular to X-axis pedestal (31) and Y-axis bottom
Seat (21), a side-lower of Z axis pedestal (41) are fixed on X-axis connecting plate (34), are equipped on the other side of Z axis pedestal (41)
Two parallel Z axis slide rails (42), have been slidably mounted Z axis sliding block (43) in Z axis slide rail (42), fixed on Z axis sliding block (43)
There is Z axis connecting plate (44), linear motor (6), the linear motor on Z axis component (4) are fixed with outside the side wall of Z axis pedestal (41)
(6) it is fixedly connected with one end of the Z axis connecting plate (44), the bearing table (5) is installed on Z axis connecting plate (44).
2. the sample stage of linear motor driving as described in claim 1, which is characterized in that outside the Y-axis sliding block (23)
The both ends of side wall are fixed with tablet (8), and there are two optoelectronic switch (7), two Y-axis for installation on the lateral wall of Y-axis pedestal (21)
Optoelectronic switch (7) is respectively arranged below two ends of Y-axis sliding rail (22), and the induction end of tablet (8) can be inserted into optoelectronic switch
(7) in inductive slot.
3. the sample stage of linear motor driving as described in claim 1, which is characterized in that at the X-axis slide rail (32) both ends
It is fixed with optoelectronic switch (7), is fixed with tablet (8) in the both sides of X-axis connecting plate (34), the induction end of tablet (8) can insert
In the inductive slot for entering optoelectronic switch (7).
4. the sample stage of linear motor driving as described in claim 1, which is characterized in that at the Z axis slide rail (42) both ends
It is fixed with optoelectronic switch (7), is installed on the side wall of the Z axis connecting plate (44) between Z axis connecting plate (44) and Z axis pedestal (41)
There are tablet (8), the induction end of tablet (8) that can be inserted into the inductive slot of optoelectronic switch (7).
5. the sample stage of linear motor as described in claim 1 driving, which is characterized in that the linear motor (6) includes
Stator (61) and mover (62), mover (62) can be slidably mounted on stator (61)；
The y-axis motor link block (26) is fixedly connected with the mover (62) of the linear motor (6) of Y-axis component (2), Y-axis bottom
The stator (61) of the linear motor (6) of Y-axis component (2) is fixedly mounted in the exterior side wall of seat (21)；
One end of the X-axis connecting plate (34) is fixedly connected with the mover (62) of the linear motor (6) of X-axis component (3), X-axis
The stator (61) of the linear motor (6) of fixed X-axis component (3) outside the lower wall of pedestal (31)；
One end of the Z axis connecting plate (44) is fixedly connected with the mover (62) of the linear motor (6) of Z axis component (4), Z axis
The stator (61) of the linear motor (6) of fixed Z axis component (4) outside the side wall of pedestal (41).
6. the sample stage of linear motor driving as described in claim 1, which is characterized in that described Y-axis pedestal (21) upper end
There are two Y-axis limiting bracket (29), two Y-axis limiting brackets (29) to be set to the both ends of Y-axis sliding rail (22) for installation, is limited in Y-axis
Y-axis rubber limited block (291) is equipped between holder (29) and the end of Y-axis sliding block (23), Y-axis rubber limited block (291) is fixed
On the side wall of Y-axis limiting bracket (29).
7. the sample stage of linear motor driving as described in claim 1, which is characterized in that described X-axis pedestal (31) side wall
There are two X-axis limiting brackets (37) for upper installation, and X-axis limiting bracket (37) is set to the both ends of X-axis slide rail (32), in X-axis connecting plate
(34) it is machined with X-axis Impactor (38) on the side wall of the X-axis connecting plate (34) between X-axis pedestal (31), in X-axis limiting bracket
(37) X-axis rubber limited block (371) is equipped between X-axis Impactor (38), X-axis rubber limited block (371) is fixed on X-axis limit
On the side wall of holder (37).
8. the sample stage of linear motor driving as described in claim 1, which is characterized in that described Z axis pedestal (41) side wall
On Z axis limiting bracket (47) is installed, Z axis limiting bracket (47) is set to the both ends of Z axis slide rail (42), in Z axis limiting bracket
(47) Z axis rubber limited block (471) is equipped between the side wall of Z axis connecting plate (44), Z axis rubber limited block (471) is fixed on Z
On the side wall of axis limiting bracket (47).
9. the sample stage of linear motor as described in claim 1 driving, which is characterized in that the Y-axis pedestal (21) it is interior
Side wall is machined with the right angled triangle stiffener (211) of multiple parallelly distribute ons；
The X-axis pedestal (31) and Z axis pedestal (41) is U-shaped groove structure, in X-axis pedestal (31) and Z axis pedestal (41)
It is machined with the rectangular stiffener (311) of multiple parallelly distribute ons.
10. the sample stage of linear motor driving as described in claim 1, which is characterized in that the level of the bearing table (5)
Multiple threaded holes (51) are offered on face, the vertical plane of bearing table (5) is fixed on Z axis connecting plate (44), in bearing table (5)
Ribbed stiffener (52) is machined between vertical plane and horizontal plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721628200.7U CN207662828U (en) | 2017-11-29 | 2017-11-29 | A kind of sample stage of linear motor driving |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721628200.7U CN207662828U (en) | 2017-11-29 | 2017-11-29 | A kind of sample stage of linear motor driving |
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| Publication Number | Publication Date |
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| CN207662828U true CN207662828U (en) | 2018-07-27 |
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| CN201721628200.7U Expired - Fee Related CN207662828U (en) | 2017-11-29 | 2017-11-29 | A kind of sample stage of linear motor driving |
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| Country | Link |
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| CN (1) | CN207662828U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112245814A (en) * | 2020-10-21 | 2021-01-22 | 浙江大学 | Animal sample conveying device for accurate radiotherapy research |
-
2017
- 2017-11-29 CN CN201721628200.7U patent/CN207662828U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112245814A (en) * | 2020-10-21 | 2021-01-22 | 浙江大学 | Animal sample conveying device for accurate radiotherapy research |
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