CN207637752U - Groove digging groove body with liquid medicine circulating device - Google Patents
Groove digging groove body with liquid medicine circulating device Download PDFInfo
- Publication number
- CN207637752U CN207637752U CN201721152301.1U CN201721152301U CN207637752U CN 207637752 U CN207637752 U CN 207637752U CN 201721152301 U CN201721152301 U CN 201721152301U CN 207637752 U CN207637752 U CN 207637752U
- Authority
- CN
- China
- Prior art keywords
- dipper
- cooling system
- liquid
- groove
- liquid medicine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 61
- 239000003814 drug Substances 0.000 title abstract description 18
- 238000001816 cooling Methods 0.000 claims abstract description 67
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 43
- 238000005086 pumping Methods 0.000 claims description 11
- 239000000498 cooling water Substances 0.000 claims description 2
- 238000005530 etching Methods 0.000 abstract description 15
- 238000013461 design Methods 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000110 cooling liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000001988 toxicity Effects 0.000 description 2
- 231100000419 toxicity Toxicity 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- GVVPGTZRZFNKDS-JXMROGBWSA-N geranyl diphosphate Chemical compound CC(C)=CCC\C(C)=C\CO[P@](O)(=O)OP(O)(O)=O GVVPGTZRZFNKDS-JXMROGBWSA-N 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000009545 invasion Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Weting (AREA)
Abstract
A groove digging groove body with a liquid medicine circulating device comprises a liquid medicine groove, wherein a liquid medicine groove liquid inlet system is arranged at the bottom of the liquid medicine groove, a circulating cooling system is arranged outside the liquid medicine groove, and an inlet of the circulating cooling system is connected with the liquid medicine groove; the outlet of the circulating cooling system is connected with a circulating pump, and the circulating pump is connected with the liquid inlet system of the liquid medicine tank; and the circulating cooling system is in cooling connection with a water chilling unit arranged beside the liquid medicine tank. The beneficial effect of this application is: through external circulation and cooling of the liquid medicine, the uniformity of the concentration of the liquid medicine and the uniformity of the temperature of the liquid medicine are ensured, so that the uniformity of etching is facilitated, and the extreme difference of etching depth is reduced; the design of the uniform holes of the liquid inlet further enables the concentration and the temperature of the liquid medicine to be more uniform.
Description
Technical field
The application belongs to silicon chip wet etching technique field, specifically, being related to a kind of digging with liquid circulator
Groove groove body.
Background technology
GPP is the abbreviation of Glassivation passivation parts, is the general designation of glassivation class device.The production
Product are exactly to fire one layer of glass to the tube core P/N junction surroundings of quasi- segmentation on the basis of existing product ordinary silicon rectified diffusion piece
Glass, glass have good binding characteristic with monocrystalline silicon, and P/N knots is made to obtain best protection, from the invasion of external environment, improve
The stability of device, reliability are splendid.
And semiconductor silicon dies etching technique is the important process in semiconductor devices manufacturing process.Silicon chip by photoetching,
Wet etching is carried out after the technological processes such as development.To meet product quality needs, it is desirable that the gash depth for etching formation has
Even property, gash depth in piece, between piece and between batch is differential to be controlled within 7 μm.At present influence etching depth because being known as：
1, the even concentration of etching groove corrosion liquid；2, the temperature uniformity of etching groove corrosion liquid.To meet semiconductor product pair
The differential requirement of etching depth just needs designer to take into account above 2 factors of consideration.
The semiconductor wet etching apparatus overwhelming majority on the market increases fast mechanical shaking using static cooling bath at present
Mode performs etching technique, has the following disadvantages：
1, lack liquid cycle in stationary groove, only be difficult to keep liquid uniform with the handshaking stirring liquid of machinery；
2, cooling coil control fluid temperature is only relied on built in surrounding in stationary groove can cause the uneven of thermal field, temperature it is inclined
It is differential that difference will have a direct impact on the etching depth in piece.
Invention content
In view of this, technical problems to be solved in this application are to provide a kind of digging groove slot with liquid circulator
Body can carry out the circulating cooling of liquid, uniform feed liquor, avoid because liquor strength is uneven and temperature of thermal field is uneven to carving
Harmful effect caused by losing uniformity.
In order to solve the above-mentioned technical problem, this application discloses a kind of digging groove groove bodies with liquid circulator, and
It is realized using following technical scheme.
A kind of digging groove groove body with liquid circulator, including dipper, the liquid trench bottom are equipped with dipper
Feed liquor system, the dipper outside are equipped with circulating cooling system, and the import of the circulating cooling system connects with the dipper
It connects；The outlet of the circulating cooling system and cycle pumping connection, the cycle pumping are connect with the dipper feed liquor system；
The circulating cooling system and the handpiece Water Chilling Units cooling being arranged beside the dipper connect.
Further, it is equipped with recursive filter between the cycle pumping and the dipper feed liquor system.
Further, the circulating cooling system includes a cooling bath；The cooling bath is connected with the dipper；Institute
It states and is uniformly provided with cold water pipeline in cooling bath, the inlet and outlet of the cold water pipeline is connected with the handpiece Water Chilling Units.
Further, the top of the dipper feed liquor system is equipped with uniform inlet opening.
Further, water is filled in the handpiece Water Chilling Units；It is equipped in the handpiece Water Chilling Units and the cold of cooling is carried out to the water
But mechanism.
Further, the surrounding inner wall of the dipper is equipped with dipper cooling system, the dipper cooling system
It is connected with the handpiece Water Chilling Units.
Further, the dipper cooling system includes several cooler pans, and the cooler pan is made of cooler pan pipeline,
The entrance and exit of the cooler pan pipeline is connected with the handpiece Water Chilling Units.
Further, the dipper is upper open container, and exhaust system is equipped at the upper opening of the dipper.
Further, the connecting line between the dipper and the circulating cooling system is equipped with the valve for adjusting flow
Door；Connecting line between the circulating cooling system and the cycle pumping is equipped with the valve for adjusting flow；The cycle
Connecting line between pumping and the recursive filter is equipped with the valve for adjusting flow.
The only cooling of dipper surrounding and internal the case where stirring compared to the prior art, the application can be obtained including following
Technique effect：Outer loop by liquid and cooling ensure that the uniformity of liquor strength and the uniformity of fluid temperature,
To be more advantageous to the uniformity of etching, the very poor of etching depth is reduced；The design of inlet uniform bore, further such that liquid
Concentration and temperature have more uniformity.
Certainly, implementing any product of the application must be not necessarily required to reach all the above technique effect simultaneously.
Description of the drawings
Attached drawing described herein is used for providing further understanding of the present application, constitutes part of this application, this Shen
Illustrative embodiments and their description please do not constitute the improper restriction to the application for explaining the application.In the accompanying drawings：
Fig. 1 is the application digging groove trough body structure schematic diagram.
Wherein, in figure：
1, exhaust system；2, dipper cooling system；3, dipper inlet pipe；4, handpiece Water Chilling Units；5, recursive filter；
6, circulating cooling system；7, cycle pumping；8, removal waste fluid mouth.
Specific implementation mode
Presently filed embodiment is described in detail below in conjunction with accompanying drawings and embodiments, thereby how the application is applied
Technological means solves technical problem and reaches the realization process of technical effect to fully understand and implement.
A kind of digging groove groove body with liquid circulator, including dipper, dipper are upper open container, opening
Place is equipped with exhaust system 1, and for the medicine liquid ingredient evaporated in dipper to be discharged, medicine liquid ingredient has corrosivity or toxicity
When, exhaust system 1 is responsible for carrying out the processing such as toxicity reduction, drop corrosion to medicine liquid ingredient, will treated environmentally acceptable gas
It is discharged into air.
The surrounding inner wall of dipper is equipped with dipper cooling system 2, and dipper cooling system is made of several cooler pans.
The entrance and exit of each cooler pan pipeline is connected with the handpiece Water Chilling Units 4 being arranged beside dipper.It is filled in handpiece Water Chilling Units 4
Cold water, cold water are entered by the entrance of cooler pan pipeline, flow through flowed back to from cooling coil way outlet after all pipelines of cooler pan it is cold
In water dispenser group 4.The liquid in dipper is cooled down in this process.Cooling body is equipped in handpiece Water Chilling Units 4, being used for will
The hot water for flowing back to cooling unit is cooled down, to ensure the temperature of 4 inner cold water of handpiece Water Chilling Units.
Liquid trench bottom is equipped with dipper feed liquor system 3, the top of dipper feed liquor system 3 be equipped with uniform hole be used for into
Liquid, and ensure the uniformity of feed liquor.Circulating cooling system 6 is equipped with outside dipper, circulating cooling system 6 includes a cooling
Slot.The cooling bath of circulating cooling system 6 is connected with dipper, and dipper inner liquid medicine is entered by connecting line in cooling bath.It is cold
But cold water pipeline is uniformly provided in slot, the inlet and outlet of cold water pipeline is connected with handpiece Water Chilling Units 4.It is cold in handpiece Water Chilling Units 4
Water enters cold water pipeline by cold water line entry, along cold water pipeline flow through cooling bath after cooling-water machine flowed back to by cold water tube outlet
Group 4, to achieve the purpose that cooling cooling bath inner liquid medicine.Cooling connection side between circulating cooling system 6 and handpiece Water Chilling Units 4
Formula, in addition to it is above-mentioned by cold water other than pipeline flows through by way of cooling bath reaches cooling liquid, liquid can also be passed through pipeline
The cold water area for flowing through handpiece Water Chilling Units achievees the purpose that cooling liquid.
The cooling trench bottom of circulating cooling system 6 is equipped with outlet, and outlet is connected by connecting line with recursive filter 5,
Recursive filter 5 is connected by connecting line with dipper feed liquor system 3.Between circulating cooling system 6 and recursive filter 5
Connecting line is equipped with cycle pumping 7, for providing power for the cycle of entire liquid.Recursive filter 5 is to outgoing cycle
Liquid is filtered, and ensures the pure of liquid, and then ensure the stability reacted in dipper.
Valve can be optionally designed on each connecting line, for according to the different adjustings for needing to carry out flow.
Constantly to reach liquid dense for cycle between dipper and cooling bath by liquid for the groove body of digging groove homogeneous corrosion
Degree and the uniform purpose of liquid thermal field.Keep liquid more uniform in slot using the feed liquor system uniformly punched, flow field is stablized, no
Phenomena such as will produce local liquid excessive concentration and local liquid overheat.Exhaust system 1 is in equipment performs etching reaction process
Extraction dipper acid gas in time reduces the heat that reaction rooved face generates.
The advantageous effect of the application is：The only cooling of dipper surrounding and internal the case where stirring compared to the prior art, leads to
Outer loop and the cooling for crossing liquid ensure that the uniformity of liquor strength and the uniformity of fluid temperature, to more advantageous
In the uniformity of etching, the very poor of etching depth is reduced；The design of inlet uniform bore, further such that liquor strength and temperature
More uniformity.
A kind of digging groove groove body with liquid circulator provided above the embodiment of the present application has carried out in detail
It introduces.The description of the example is only used to help understand the method for the present application and its core ideas；Meanwhile for this field
Those skilled in the art, according to the thought of the application, there will be changes in the specific implementation manner and application range, to sum up
Described, the contents of this specification should not be construed as limiting the present application.
Some vocabulary has such as been used to censure specific components in specification and claim.Those skilled in the art answer
It is understood that different vendor may call the same component with different nouns.This specification and claims are not with title
Difference be used as the mode for distinguishing component, but be used as the criterion of differentiation with the difference of component functionally.Such as in the whole text
The "comprising" of specification and claim mentioned in is an open language, therefore should be construed to " including but not limited to ".
" substantially " refer in receivable error range, those skilled in the art can solve the technology within a certain error range
Problem basically reaches the technique effect.Specification subsequent descriptions are to implement the better embodiment of the application, the right description
It is being not limited to scope of the present application for the purpose of the rule for illustrating the application.The protection domain of the application, which is worked as, to be regarded
Subject to appended claims institute defender.
It should also be noted that, the terms "include", "comprise" or its any other variant are intended to nonexcludability
Including so that commodity or system including a series of elements include not only those elements, but also include not clear
The other element listed, or further include for this commodity or the intrinsic element of system.In the feelings not limited more
Under condition, the element that is limited by sentence "including a ...", it is not excluded that including the element commodity or system in also
There are other identical elements.
Several preferred embodiments of the application have shown and described in above description, but as previously described, it should be understood that the application
Be not limited to form disclosed herein, be not to be taken as excluding other embodiments, and can be used for various other combinations,
Modification and environment, and the above teachings or related fields of technology or knowledge can be passed through in application contemplated scope described herein
It is modified.And changes and modifications made by those skilled in the art do not depart from spirit and scope, then it all should be in this Shen
It please be in the protection domain of appended claims.
Claims (9)
1. a kind of digging groove groove body with liquid circulator, including dipper, it is characterised in that：The liquid trench bottom is set
Have a dipper feed liquor system (3), be equipped with circulating cooling system (6) outside the dipper, the circulating cooling system (6) into
Mouth is connect with the dipper；The outlet of the circulating cooling system (6) is connect with cycle pumping (7), and the cycle pumps (7)
It is connect with the dipper feed liquor system (3)；Cooling-water machine circulating cooling system (6) and be arranged beside the dipper
The cooling connection of group (4).
2. carrying the digging groove groove body of liquid circulator according to claim 1, it is characterised in that：The cycle pumping
(7) recursive filter (5) is equipped between the dipper feed liquor system (3).
3. carrying the digging groove groove body of liquid circulator according to claim 2, it is characterised in that：The circulating cooling system
System (6) includes a cooling bath；The cooling bath is connected with the dipper；Cold water pipeline is uniformly provided in the cooling bath,
The inlet and outlet of the cold water pipeline is connected with the handpiece Water Chilling Units (4).
4. according to the digging groove groove body for carrying liquid circulator described in Claims 2 or 3, it is characterised in that：The dipper
The top of feed liquor system (3) is equipped with uniform inlet opening.
5. carrying the digging groove groove body of liquid circulator according to claim 4, it is characterised in that：The handpiece Water Chilling Units
(4) water is filled in；It is equipped in the handpiece Water Chilling Units (4) and carries out cooling cooling body to the water.
6. carrying the digging groove groove body of liquid circulator according to claim 2, it is characterised in that：The four of the dipper
All inner walls are equipped with dipper cooling system (2), and the dipper cooling system (2) is connected with the handpiece Water Chilling Units (4).
7. carrying the digging groove groove body of liquid circulator according to claim 6, it is characterised in that：The dipper cooling
System (2) includes several cooler pans, and the cooler pan is made of cooler pan pipeline, and the entrance and exit of the cooler pan pipeline is equal
It is connected with the handpiece Water Chilling Units (4).
8. according to any digging groove groove body for carrying liquid circulator of claim 2-3,5-7, it is characterised in that：It is described
Dipper is upper open container, and exhaust system (1) is equipped at the upper opening of the dipper.
9. carrying the digging groove groove body of liquid circulator according to claim 8, it is characterised in that：The dipper and institute
The connecting line stated between circulating cooling system (6) is equipped with the valve for adjusting flow；The circulating cooling system (6) with it is described
Connecting line between cycle pumping (7) is equipped with the valve for adjusting flow；The cycle pumping (7) and the recursive filter
(5) connecting line between is equipped with the valve for adjusting flow.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721152301.1U CN207637752U (en) | 2017-09-08 | 2017-09-08 | Groove digging groove body with liquid medicine circulating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721152301.1U CN207637752U (en) | 2017-09-08 | 2017-09-08 | Groove digging groove body with liquid medicine circulating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207637752U true CN207637752U (en) | 2018-07-20 |
Family
ID=62861912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721152301.1U Active CN207637752U (en) | 2017-09-08 | 2017-09-08 | Groove digging groove body with liquid medicine circulating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207637752U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109473374A (en) * | 2017-09-08 | 2019-03-15 | 天津环鑫科技发展有限公司 | Groove digging groove body with liquid medicine circulating device |
-
2017
- 2017-09-08 CN CN201721152301.1U patent/CN207637752U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109473374A (en) * | 2017-09-08 | 2019-03-15 | 天津环鑫科技发展有限公司 | Groove digging groove body with liquid medicine circulating device |
| CN109473374B (en) * | 2017-09-08 | 2024-06-18 | Tcl环鑫半导体(天津)有限公司 | Grooved body with liquid medicine circulating device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109757061A (en) | Cooling machine cabinet and cooling system | |
| CN207637752U (en) | Groove digging groove body with liquid medicine circulating device | |
| CN103792790B (en) | Photoresist and the thermostatic control system of developer solution | |
| CN107052288A (en) | A kind of chill roll | |
| CN109473374A (en) | Groove digging groove body with liquid medicine circulating device | |
| CN109473375A (en) | Groove digging groove body beneficial to uniform corrosion | |
| CN207976019U (en) | A kind of cooling device for producing metal working fluid | |
| CN110099554A (en) | A kind of funneling subregion liquid cooled server cabinet | |
| CN207637751U (en) | A kind of digging groove groove body conducive to homogeneous corrosion | |
| CN110099555A (en) | A kind of funneling subregion liquid cooled server cabinet | |
| CN105457516A (en) | Adblue solution stirring device and temperature control method thereof | |
| CN109252938A (en) | A kind of fresh water cooled medicine system | |
| CN109315080A (en) | Liquid-cooling system and method | |
| CN110315042B (en) | A agitating unit for accurate cupronickel alloy pipe of horizontal continuous casting | |
| CN206655735U (en) | Cooling system of vehicle and vehicle | |
| CN110139543A (en) | A kind of funneling liquid cooled server cabinet | |
| CN106995873B (en) | It is heat-treated water temperature control system and its control method | |
| CN209652199U (en) | A kind of high temperature static sensitised emulsion explosive water phase tank temperature control equipment | |
| CN114690873A (en) | Immersed cooling liquid circulating cooling heat dissipation device | |
| CN209953345U (en) | Circulation groove structure | |
| CN207519034U (en) | Cooling machine cabinet and cooling system | |
| CN206051980U (en) | For the chiller of brewing | |
| CN207095330U (en) | A kind of petroleum product acid value measuring device | |
| CN204247158U (en) | Thinning vessel condenser pipe | |
| CN112251584A (en) | Cooling device for high-temperature instrument in annealing furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |