CN207637751U - A kind of digging groove groove body conducive to homogeneous corrosion - Google Patents
A kind of digging groove groove body conducive to homogeneous corrosion Download PDFInfo
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- CN207637751U CN207637751U CN201721149202.8U CN201721149202U CN207637751U CN 207637751 U CN207637751 U CN 207637751U CN 201721149202 U CN201721149202 U CN 201721149202U CN 207637751 U CN207637751 U CN 207637751U
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Abstract
A kind of digging groove groove body conducive to homogeneous corrosion, including dipper, the dipper are internally provided with rotating device；The liquid trench bottom is equipped with dipper feed liquor system；Circulating cooling system is equipped with outside the dipper, the import of the circulating cooling system is connect with the dipper；The outlet of the circulating cooling system and cycle pumping connection, the cycle pumping are connect with the dipper feed liquor system；The circulating cooling system and the handpiece Water Chilling Units cooling being arranged beside the dipper connect.The advantageous effect of the application is：Outer loop by liquid and cooling ensure that the uniformity of liquor strength and the uniformity of fluid temperature；The design of silicon slice rotating device, can make to be introduced into the silicon chip that liquid is corroded and be first removed, to ensure that the consistent of each silicon slice corrosion time, etching depth evenly, reduce the very poor of etching depth.
Description
Technical field
The application belongs to silicon chip wet etching technique field, specifically, being related to a kind of digging groove conducive to homogeneous corrosion
Groove body.
Background technology
GPP is the abbreviation of Glassivation passivation parts, is the general designation of glassivation class device.The production
Product are exactly to fire one layer of glass to the tube core P/N junction surroundings of quasi- segmentation on the basis of existing product ordinary silicon rectified diffusion piece
Glass, glass have good binding characteristic with monocrystalline silicon, and P/N knots is made to obtain best protection, from the invasion of external environment, improve
The stability of device, reliability are splendid.
And semiconductor silicon dies etching technique is the important process in semiconductor devices manufacturing process.Silicon chip by photoetching,
Wet etching is carried out after the technological processes such as development.To meet product quality needs, it is desirable that the gash depth for etching formation has
Even property, gash depth in piece, between piece and between batch is differential to be controlled within 7 μm.At present influence etching depth because being known as：
1, the even concentration of etching groove corrosion liquid；2, the temperature uniformity of etching groove corrosion liquid；3, when silicon chip and liquid contact
Between uniformity.Designer is just needed to take into account 3 points of consideration or more the differential requirement of etching depth to meet semiconductor product
Factor.
The semiconductor wet etching apparatus overwhelming majority on the market increases fast mechanical shaking using static cooling bath at present
Mode performs etching technique, has the following disadvantages：
1, lack liquid cycle in stationary groove, only be difficult to keep liquid uniform with the handshaking stirring liquid of machinery；
2, cooling coil control fluid temperature is only relied on built in surrounding in stationary groove can cause the uneven of thermal field, temperature it is inclined
It is differential that difference will have a direct impact on the etching depth in piece；
3, traditional groove body equipment, silicon chip equal action without spin in dipper, causes silicon chip bottom first-in last-out, piece bottom
The trench etch depth in portion is deeper than at the top of piece, and it is differential to influence etching depth.
Invention content
In view of this, technical problems to be solved in this application are to provide a kind of digging groove groove body conducive to homogeneous corrosion,
Concentration, the temperature of liquid can be made uniform, moreover it is possible to which the silicon chip erosion time consistency for making different location is avoided because of liquor strength, temperature
Uneven and etch period the different harmful effects caused by etching homogeneity of degree.
In order to solve the above-mentioned technical problem, this application discloses a kind of digging groove groove bodies conducive to homogeneous corrosion, and use
Following technical scheme is realized.
A kind of digging groove groove body conducive to homogeneous corrosion, including dipper, the dipper are internally provided with rotating device；Institute
It states liquid trench bottom and is equipped with dipper feed liquor system；Circulating cooling system, the circulating cooling system are equipped with outside the dipper
The import of system is connect with the dipper；The outlet of the circulating cooling system and cycle pumping connection, the cycle pumping and
The dipper feed liquor system connection；The circulating cooling system and the handpiece Water Chilling Units cooling being arranged beside the dipper connect
It connects.
Further, it is equipped with recursive filter between the cycle pumping and the dipper feed liquor system.
Further, the circulating cooling system includes a cooling bath；The cooling bath is connected with the dipper；Institute
It states and is uniformly provided with cold water pipeline in cooling bath, the inlet and outlet of the cold water pipeline is connected with the handpiece Water Chilling Units.
Further, the top of the dipper feed liquor system is equipped with uniform inlet opening.
Further, the surrounding inner wall of the dipper is equipped with dipper cooling system, the dipper cooling system
It is connected with the handpiece Water Chilling Units.
Further, the dipper cooling system includes several cooler pans, and the cooler pan is made of cooler pan pipeline,
The entrance and exit of the cooler pan pipeline is connected with the handpiece Water Chilling Units.
Further, the rotating device includes the fixed frame for being separately positioned on liquid trench bottom both ends, described solid
Determine to be equipped with turning supporting seat on the inside of frame；Be equipped with transmission mechanism on the fixed frame, the transmission mechanism with it is corresponding described
Turning supporting seat is fixedly connected；Rolling adjustable-speed motor, the rolling adjustable-speed motor are equipped with outside the side wall at the dipper both ends
It is sequentially connected with the corresponding transmission mechanism；The both ends of the turning supporting seat are respectively equipped with retaining mechanism.
Further, the fixed frame includes vertically disposed first fixed frame and the second fixed frame；Described first fixes
It is set up in the outside of second fixed frame；The liquid groove sidewall is equipped with via, and the shaft of the rolling adjustable-speed motor is worn
It is fixedly connected with motor side gear after crossing the via；First fixed frame is equipped with the first via；First via
Outside is equipped with the first transmission gear, and inside is equipped with the second transmission gear；First transmission gear and second transmission gear
It is fixedly connected by first via；First transmission gear is connect with the motor side gear by driving belt；Institute
It states the second fixed frame and is equipped with the second via；The outside of second via is equipped with bearing end tooth wheel, and inside is equipped with connecting plate；Institute
It states connecting plate to be fixedly connected by second via with the bearing end tooth wheel, the bottom end of the connecting plate and overturning branch
Seat is fixedly connected；The bearing end tooth wheel is intermeshed with second transmission gear.
Further, the retaining mechanism includes the sliding bar being slidably arranged in the turning supporting seat, the sliding bar
Lower end be equipped with sliding block；The sliding block is placed in the draw runner being arranged in the turning supporting seat；The sliding block and the draw runner it
Between be the sliding of high frictional force；The upper end of the sliding bar is connect with locking toggle；It is equipped between the sliding bar at the groove body both ends
Several check lock levers.
Further, the concrete structure of the high frictional force sliding is that the inner wall compression of the sliding block and the draw runner is set
It sets.
The only cooling of dipper surrounding and internal the case where stirring compared to the prior art, the application can be obtained including following
Technique effect：Outer loop by liquid and cooling ensure that the uniformity of liquor strength and the uniformity of fluid temperature,
To be more advantageous to the uniformity of etching, the very poor of etching depth is reduced；The design of silicon slice rotating device can make to be introduced into medicine
The silicon chip that liquid is corroded first is removed, and to ensure that the consistent of each silicon slice corrosion time, etching depth is evenly；Silicon chip
The rotational agitation groove body inner liquid medicine of rotating device, further uniform liquid.
Certainly, implementing any product of the application must be not necessarily required to reach all the above technique effect simultaneously.
Description of the drawings
Attached drawing described herein is used for providing further understanding of the present application, constitutes part of this application, this Shen
Illustrative embodiments and their description please do not constitute the improper restriction to the application for explaining the application.In the accompanying drawings：
Fig. 1 is the application digging groove trough body structure schematic diagram.
Fig. 2 is the application rotary device structure schematic diagram.
Fig. 3 is the application rotating device partial structural diagram.
Fig. 4 is the application turning supporting seat schematic top plan view.
Wherein, in figure：
1, exhaust system；2, dipper cooling system；3, dipper inlet pipe；4, handpiece Water Chilling Units；5, recursive filter；
6, circulating cooling system；7, cycle pumping；8, removal waste fluid mouth；9, toggle is locked；10, motor side gear；11, rolling adjustable-speed horse
It reaches；12, driving belt；13, bearing end tooth wheel；14, the first transmission gear；15, turning supporting seat；16, the second transmission gear；17、
Sliding slot；18, check lock lever；19, the first fixed frame；20, the second fixed frame.
Specific implementation mode
Presently filed embodiment is described in detail below in conjunction with accompanying drawings and embodiments, thereby how the application is applied
Technological means solves technical problem and reaches the realization process of technical effect to fully understand and implement.
A kind of digging groove groove body conducive to homogeneous corrosion, including dipper, dipper are upper open container, and opening is set
There is exhaust system 1, for the medicine liquid ingredient evaporated in dipper to be discharged, when medicine liquid ingredient has corrosivity or toxicity,
Exhaust system 1 is responsible to carry out the processing such as toxicity reduction, drop corrosion to medicine liquid ingredient, and by treated, environmentally acceptable gas discharges
Into air.Dipper is internally provided with rotating device, for carrying silicon chip and rotating it in liquid.
The surrounding inner wall of dipper is equipped with dipper cooling system 2, and dipper cooling system is made of several cooler pans.
The entrance and exit of each cooler pan pipeline is connected with the handpiece Water Chilling Units 4 being arranged beside dipper.It is filled in handpiece Water Chilling Units 4
Cold water, cold water are entered by the entrance of cooler pan pipeline, flow through flowed back to from cooling coil way outlet after all pipelines of cooler pan it is cold
In water dispenser group 4.The liquid in dipper is cooled down in this process.Cooling body is equipped in handpiece Water Chilling Units 4, being used for will
The hot water for flowing back to cooling unit is cooled down, to ensure the temperature of 4 inner cold water of handpiece Water Chilling Units.
Liquid trench bottom is equipped with dipper feed liquor system 3, the top of dipper feed liquor system 3 be equipped with uniform hole be used for into
Liquid, and ensure the uniformity of feed liquor.Circulating cooling system 6 is equipped with outside dipper, circulating cooling system 6 includes a cooling
Slot.The cooling bath of circulating cooling system 6 is connected with dipper, and dipper inner liquid medicine is entered by connecting line in cooling bath.It is cold
But cold water pipeline is uniformly provided in slot, the inlet and outlet of cold water pipeline is connected with handpiece Water Chilling Units 4.It is cold in handpiece Water Chilling Units 4
Water enters cold water pipeline by cold water line entry, along cold water pipeline flow through cooling bath after cooling-water machine flowed back to by cold water tube outlet
Group 4, to achieve the purpose that cooling cooling bath inner liquid medicine.Cooling connection side between circulating cooling system 6 and handpiece Water Chilling Units 4
Formula, in addition to it is above-mentioned by cold water other than pipeline flows through by way of cooling bath reaches cooling liquid, liquid can also be passed through pipeline
The cold water area for flowing through handpiece Water Chilling Units achievees the purpose that cooling liquid.
The cooling trench bottom of circulating cooling system 6 is equipped with outlet, and outlet is connected by connecting line with recursive filter 5,
Recursive filter 5 is connected by connecting line with dipper feed liquor system 3.Between circulating cooling system 6 and recursive filter 5
Connecting line is equipped with cycle pumping 7, for providing power for the cycle of entire liquid.Recursive filter 5 is to outgoing cycle
Liquid is filtered, and ensures the pure of liquid, and then ensure the stability reacted in dipper.
Valve can be optionally designed on each connecting line, for according to the different adjustings for needing to carry out flow.
Constantly to reach liquid dense for cycle between dipper and cooling bath by liquid for the groove body of digging groove homogeneous corrosion
Degree and the uniform purpose of liquid thermal field.Keep liquid more uniform in slot using the feed liquor system uniformly punched, flow field is stablized, no
Phenomena such as will produce local liquid excessive concentration and local liquid overheat.Exhaust system 1 is in equipment performs etching reaction process
Extraction dipper acid gas in time reduces the heat that reaction rooved face generates.
As Figure 2-3, rotating device includes 19 He of the first fixed frame for being vertically disposed on liquid trench bottom both ends
Second fixed frame 20.Two fixed frames are each attached to liquid trench bottom, and the first fixed frame 19 is set to the outer of the second fixed frame 20
Side.Liquid groove sidewall, which is equipped with outside via sidewall, is equipped with rolling adjustable-speed motor 11, and the shaft of rolling adjustable-speed motor 11 passed through
Kong Houyu motor sides gear 10 is fixedly connected.First fixed frame 19 is equipped with the first via, and the both sides of the first via are respectively equipped with
Two gears, respectively the second transmission gear 16 of first transmission gear 14 and inside in outside, the first transmission gear 14 and the
The fixation of two transmission gears 16 is fixedly connected by the first via.First transmission gear 14 passes through driving belt with motor side gear 10
12 connections.Second fixed frame 20 is equipped with the second via.The outside of second via is equipped with bearing end tooth wheel 13, and inside is equipped with connection
Plate, connecting plate are fixedly connected with bearing end tooth wheel 13 by the second via, and the bottom end of connecting plate is fixedly connected with turning supporting seat 15.
Bearing end tooth wheel 13 and the second transmission gear 16 are intermeshed, and turning supporting seat 15 is horizontally disposed.
Dipper left and right ends are symmetrical structure.
When the rolling adjustable-speed motor 11 at dipper both ends acts simultaneously, motor side gear 10 is driven to rotate, driving belt
12 impart power to the first transmission gear 14, make its rotation.Due to consolidating for the first transmission gear 14 and the second transmission gear 16
Determine connection structure, the second transmission gear 16 is rotated with the first transmission gear 14.Again due to the second transmission gear 16 and bearing end
Gear 13 is intermeshed, and drives bearing end tooth wheel 13 to be rotated, to drive connecting plate and turning supporting seat 15 to be overturn.
As shown in figure 4, rotating device further includes retaining mechanism.Retaining mechanism includes being slidably arranged in turning supporting seat 15
The lower end of sliding bar, sliding bar is equipped with sliding block.The inclined outer fix of two turning supporting seats 15 is equipped with draw runner 17, is put in draw runner 17
There is above-mentioned sliding block.Sliding bar is vertically equipped on sliding block, upper end and the locking toggle 9 of sliding bar pass through the water being set on connecting plate
Flat strip-shaped hole connection.Several check lock levers are equipped between the sliding bar at both ends.The both ends of draw runner 17 are respectively equipped with a set of retaining mechanism.
When digging groove, the cuboid container for filling silicon chip is placed in the turning supporting seat 15 at rotating device both ends, is passed through
Mobile locking toggle drives check lock lever to be moved forward and backward, to clamp silicon wafer container.It is high Frictional Slipping between sliding block and draw runner,
The frictional force at both ends is more than silicon chip and container gravity and the downward power after dipper inner liquid medicine buoyancy phase separation, to ensure to overturn
Silicon chip and container are not fallen out when action.High Frictional Slipping can be arranged by the compression in structure and draw runner slider contact surface
Roughness adjust.Sliding block is close to be arranged with the inner wall of draw runner 17；The contact surface of sliding block and draw runner 17 is rough surface.
The advantageous effect of the application is：
Only dipper surrounding cooling and the case where internal stirring compared to the prior art, by the outer loop of liquid and cold
But, the uniformity of liquor strength and the uniformity of fluid temperature be ensure that, to be more advantageous to the uniformity of etching, reduce and carve
Lose the very poor of depth；
The design of inlet uniform bore, further such that liquor strength and temperature have more uniformity；
Silicon slice rotating is driven by rotating device, can not only stir the liquid in digging groove groove body, is allowed to evenly, also
Can silicon wafer turnover, bottom silicon chip and top silicon chip be subjected to position exchange, the silicon chip for being introduced into liquid is made to take out at first, to
Ensure the consistency of silicon slice corrosion time；
The uniformity coefficient and the consistency of silicon slice corrosion time of liquid are all conducive to reduce the very poor of trench etching depth, to
Improve whole digging groove quality.
A kind of digging groove groove body conducive to homogeneous corrosion provided above the embodiment of the present application, has carried out detailed Jie
It continues.The description of the example is only used to help understand the method for the present application and its core ideas；Meanwhile for this field
Those skilled in the art, according to the thought of the application, there will be changes in the specific implementation manner and application range, to sum up institute
It states, the contents of this specification should not be construed as limiting the present application.
Some vocabulary has such as been used to censure specific components in specification and claim.Those skilled in the art answer
It is understood that different vendor may call the same component with different nouns.This specification and claims are not with title
Difference be used as the mode for distinguishing component, but be used as the criterion of differentiation with the difference of component functionally.Such as in the whole text
The "comprising" of specification and claim mentioned in is an open language, therefore should be construed to " including but not limited to ".
" substantially " refer in receivable error range, those skilled in the art can solve the technology within a certain error range
Problem basically reaches the technique effect.Specification subsequent descriptions are to implement the better embodiment of the application, the right description
It is being not limited to scope of the present application for the purpose of the rule for illustrating the application.The protection domain of the application, which is worked as, to be regarded
Subject to appended claims institute defender.
It should also be noted that, the terms "include", "comprise" or its any other variant are intended to nonexcludability
Including so that commodity or system including a series of elements include not only those elements, but also include not clear
The other element listed, or further include for this commodity or the intrinsic element of system.In the feelings not limited more
Under condition, the element that is limited by sentence "including a ...", it is not excluded that including the element commodity or system in also
There are other identical elements.
Several preferred embodiments of the application have shown and described in above description, but as previously described, it should be understood that the application
Be not limited to form disclosed herein, be not to be taken as excluding other embodiments, and can be used for various other combinations,
Modification and environment, and the above teachings or related fields of technology or knowledge can be passed through in application contemplated scope described herein
It is modified.And changes and modifications made by those skilled in the art do not depart from spirit and scope, then it all should be in this Shen
It please be in the protection domain of appended claims.
Claims (10)
1. a kind of digging groove groove body conducive to homogeneous corrosion, including dipper, it is characterised in that：The dipper is internally provided with rotation
Rotary device；The liquid trench bottom is equipped with dipper feed liquor system (3)；Circulating cooling system (6) is equipped with outside the dipper,
The import of the circulating cooling system (6) is connect with the dipper；The outlet of the circulating cooling system (6) is pumped with cycle
(7) it connects, the cycle pumping (7) connect with the dipper feed liquor system (3)；The circulating cooling system (6) and setting
The cooling connection of handpiece Water Chilling Units (4) beside the dipper.
2. being conducive to the digging groove groove body of homogeneous corrosion according to claim 1, it is characterised in that：The rotating device includes point
Fixed frame at liquid trench bottom both ends is not set, turning supporting seat (15) is equipped on the inside of the fixed frame；It is described solid
Determine to be equipped with transmission mechanism on frame, the transmission mechanism is fixedly connected with the corresponding turning supporting seat (15)；The dipper
Rolling adjustable-speed motor (11), the rolling adjustable-speed motor (11) and the corresponding transmission mechanism are equipped with outside the side wall at both ends
It is sequentially connected；The both ends of the turning supporting seat (15) are respectively equipped with retaining mechanism.
3. being conducive to the digging groove groove body of homogeneous corrosion according to claim 2, it is characterised in that：Cycle pumping (7) with
Recursive filter (5) is equipped between the dipper feed liquor system (3).
4. being conducive to the digging groove groove body of homogeneous corrosion according to claim 2, it is characterised in that：The circulating cooling system
(6) include a cooling bath；The cooling bath is connected with the dipper；Cold water pipeline, institute are uniformly provided in the cooling bath
The inlet and outlet for stating cold water pipeline is connected with the handpiece Water Chilling Units (4).
5. according to the digging groove groove body for being conducive to homogeneous corrosion described in Claims 2 or 3, it is characterised in that：The dipper feed liquor
The top of system (3) is equipped with uniform inlet opening.
6. being conducive to the digging groove groove body of homogeneous corrosion according to claim 1, it is characterised in that：In the surrounding of the dipper
Wall is equipped with dipper cooling system (2), and the dipper cooling system (2) is connected with the handpiece Water Chilling Units (4).
7. being conducive to the digging groove groove body of homogeneous corrosion according to claim 6, it is characterised in that：The dipper cooling system
(2) include several cooler pans, the cooler pan is made of cooler pan pipeline, and the entrance and exit of the cooler pan pipeline is and institute
Handpiece Water Chilling Units (4) are stated to be connected.
8. being conducive to the digging groove groove body of homogeneous corrosion according to claim 2, it is characterised in that：The fixed frame includes vertical
The first fixed frame (19) and the second fixed frame (20) being arranged；First fixed frame (19) is set to second fixed frame (20)
Outside；The liquid groove sidewall is equipped with via, the shaft of the rolling adjustable-speed motor (11) pass through after the via with electricity
Generator terminal gear (10) is fixedly connected；First fixed frame (19) is equipped with the first via；The outside of first via is equipped with
First transmission gear (14), inside are equipped with the second transmission gear (16)；First transmission gear (14) and second transmission
Gear (16) is fixedly connected by first via；First transmission gear (14) passes through with the motor side gear (10)
Driving belt (12) connects；Second fixed frame (20) is equipped with the second via；The outside of second via is equipped with bearing
End tooth wheel (13), inside are equipped with connecting plate；The connecting plate is fixed with the bearing end tooth wheel (13) by second via
Connection, the bottom end of the connecting plate is fixedly connected with the turning supporting seat (15)；The bearing end tooth wheel (13) and described second
Transmission gear (16) is intermeshed.
9. being conducive to the digging groove groove body of homogeneous corrosion according to claim 2, it is characterised in that：The retaining mechanism includes sliding
The lower end of the dynamic sliding bar being arranged in the turning supporting seat (15), the sliding bar is equipped with sliding block；The sliding block is placed in setting
In draw runner (17) in the turning supporting seat (15)；It is high frictional force sliding between the sliding block and the draw runner (17)；Institute
The upper end for stating sliding bar is connect with locking toggle (9)；Several check lock levers are equipped between the sliding bar at the groove body both ends.
10. being conducive to the digging groove groove body of homogeneous corrosion according to claim 9, it is characterised in that：The high frictional force sliding
Concrete structure be that the inner wall of the sliding block and the draw runner (17) compresses and is arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721149202.8U CN207637751U (en) | 2017-09-08 | 2017-09-08 | A kind of digging groove groove body conducive to homogeneous corrosion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721149202.8U CN207637751U (en) | 2017-09-08 | 2017-09-08 | A kind of digging groove groove body conducive to homogeneous corrosion |
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| Publication Number | Publication Date |
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| CN207637751U true CN207637751U (en) | 2018-07-20 |
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ID=62861959
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| Application Number | Title | Priority Date | Filing Date |
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| CN201721149202.8U Active CN207637751U (en) | 2017-09-08 | 2017-09-08 | A kind of digging groove groove body conducive to homogeneous corrosion |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109473375A (en) * | 2017-09-08 | 2019-03-15 | 天津环鑫科技发展有限公司 | Groove digging groove body beneficial to uniform corrosion |
-
2017
- 2017-09-08 CN CN201721149202.8U patent/CN207637751U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109473375A (en) * | 2017-09-08 | 2019-03-15 | 天津环鑫科技发展有限公司 | Groove digging groove body beneficial to uniform corrosion |
| CN109473375B (en) * | 2017-09-08 | 2024-05-03 | Tcl环鑫半导体(天津)有限公司 | Grooved body beneficial to uniform corrosion |
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