CN207629838U - A kind of ceramic load plate containing RFID tag - Google Patents
A kind of ceramic load plate containing RFID tag Download PDFInfo
- Publication number
- CN207629838U CN207629838U CN201721317405.3U CN201721317405U CN207629838U CN 207629838 U CN207629838 U CN 207629838U CN 201721317405 U CN201721317405 U CN 201721317405U CN 207629838 U CN207629838 U CN 207629838U
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- China
- Prior art keywords
- rfid tag
- load plate
- filling hole
- ceramic load
- utility
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Abstract
The utility model discloses a kind of ceramic load plate containing RFID tag, it is characterised in that：The ceramics load plate includes a disk body, which includes a working face and a back side；It is built-in with a RFID tag in the filling hole, the depth in the filling hole is more than the thickness of the RFID tag；The RFID tag is sealed in by filler in the filling hole；It is equipped with a dark positioning mark in the side in the filling hole.The utility model has the advantages that:1) entire roboticized work may be implemented while can be with real-time tracing；2) reduce operating personnel and contact wafer to bring the probability of pollution or loss；3) the problem of RFID tag service life built in ceramic load plate is permanent, and there is no abrasion or failures；4) stability of production can be improved；5) production efficiency can be improved.
Description
Technical field
The utility model is related to a kind of ceramic load plate more particularly to a kind of ceramic load plates containing RFID tag.
Background technology
In the polishing process of semiconductor crystal wafer, the table that wafer is fixed on to using patch wax machine by wax ceramic load plate is needed
Face carries out polishing operation on polishing production line；In order to realize that the tracking to single-wafer, traditional method are by manually remembering
The patch location information of number information and wafer on the ceramic load plate of record, to track wafer.But this method for tracing has following
Defect:
1) manual identified ceramic disk number is relied on to increase the uncertainty of wafer tracking, artificial naked eyes identification is easy to cause
Information mistakes and omissions, to influence the accuracy of tracking；
2) manual identified cannot achieve the entire roboticized work of producing line, could only track and seek when equipment stops operation
Target wafer is looked for, production efficiency is influenced；
3) manual identified is easy to bring potential pollution；Since wafer is high to patch wax and polishing environment purity requirements, people
Work tracks the probability that wafer will increase human contact's wafer, to increase the contaminated probability of wafer；
4) mark on ceramic load plate is easy to wear to be caused to be difficult to recognize.
Utility model content
The purpose of this utility model is to solve the problems of the prior art, provides a kind of ceramics load containing RFID tag
Disk.
The technical solution of the utility model is：A kind of ceramic load plate containing RFID tag, it is characterised in that：The ceramics
Load plate includes a disk body, which includes a working face and a back side；It is built-in with a RFID tag in the filling hole, it is described to fill out
The depth for filling hole is more than the thickness of the RFID tag；The RFID tag is sealed in by filler in the filling hole；
The side in the filling hole is equipped with a dark positioning mark.
Preferably, the aperture in the filling hole is more than the length of the RFID tag.
Preferably, the filling hole is located at the back side with positioning mark.
Preferably, the positioning mark is arranged close to the edge of the disk body.
Preferably, the positioning mark is respectively positioned on the side of the disk body.
Preferably, the surface of the filler is machined to contour with the disc surfaces.
The utility model has the advantages that:
1) entire roboticized work may be implemented while can be with real-time tracing；
2) reduce operating personnel and contact wafer to bring the probability of pollution or loss；
3) the problem of RFID tag service life built in ceramic load plate is permanent, and there is no abrasion or failures；
4) stability of production can be improved；
5) production efficiency can be improved.
Description of the drawings
Fig. 1 is the front view of the utility model；
Fig. 2 is the rearview of the utility model；
Fig. 3 is the sectional view of the utility model.
Specific implementation mode
In order to make technological means, technical characteristic, purpose of utility model and technique effect of the utility model be easy to bright
It is white to understand, with reference to being specifically illustrating, the utility model is expanded on further.
As shown in Figures 1 to 3, it is a kind of ceramic load plate containing RFID tag of the utility model, it is characterised in that：It is described
Ceramic load plate includes a disk body 100, which includes a working face 200 and a back side 300.
A filling hole 400 is offered in the centre position at the back side 300, the depth in the filling hole 400 is the disk
The 1/3~3/4 of 100 height of body.In the present embodiment, the depth to fill hole 400 is illustrated as the 1/2 of tray height.
It is built-in with a RFID tag 401 in the filling hole 400, the depth in the filling hole 400 is marked more than the RFID
The thickness of label 401；The RFID tag 401 is sealed in by filler 402 in the filling hole 400；Make in the utility model
Filler is the filler of high temperature-resistant acid-resistant alkali, and after hole 400 is filled in sealing, the surface of filler is machined to
It is contour with ceramic load plate surface, with the level of back side of package 300.
It is equipped with a dark positioning mark 500 in the side in the filling hole 400.For ease of by the RFID tag 401
It installs, the aperture in the filling hole 400 in the present embodiment is more than the length of the RFID tag 401.The filling hole 400 with it is described
Positioning mark 500 is respectively positioned on the back side 300, and specific positioning mark 500 is arranged close to the edge of the disk body 100.
Positioning mark 500 can also be set to described by the positioning mark 500 in the utility model according to work on the spot needs
The side of disk body 100.
The utility model has the advantages that:
1) entire roboticized work may be implemented while can be with real-time tracing；
2) reduce operating personnel and contact wafer to bring the probability of pollution or loss；
3) the problem of RFID tag service life built in ceramic load plate is permanent, and there is no abrasion or failures；
4) stability of production can be improved；
5) production efficiency can be improved.
It is only the utility model preferred embodiment in summary, is not used for limiting the scope of the utility model.
Equivalence changes and modification made by i.e. all contents according to present utility model application the scope of the claims, should all belong to the skill of the utility model
Art scope.
Claims (6)
1. a kind of ceramic load plate containing RFID tag, it is characterised in that：The ceramics load plate includes a disk body, which includes
One working face and a back side；A filling hole is offered in the centre position at the back side；It is built-in with a RFID in the filling hole
The depth of label, the filling hole is more than the thickness of the RFID tag；The RFID tag is sealed in described by filler
It fills in hole；It is equipped with a dark positioning mark in the side in the filling hole.
2. the ceramic load plate according to claim 1 containing RFID tag, it is characterised in that：The aperture in the filling hole is big
In the length of the RFID tag.
3. the ceramic load plate according to claim 1 containing RFID tag, it is characterised in that：The filling hole with it is described fixed
Bit identification is respectively positioned on the back side.
4. the ceramic load plate according to claim 3 containing RFID tag, it is characterised in that：The positioning mark is close to institute
State the edge setting of disk body.
5. the ceramic load plate according to claim 1 containing RFID tag, it is characterised in that：The positioning mark is located at institute
State the side of disk body.
6. the ceramic load plate according to claim 1 containing RFID tag, it is characterised in that：The surface of the filler adds
Work is extremely contour with the disc surfaces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721317405.3U CN207629838U (en) | 2017-10-13 | 2017-10-13 | A kind of ceramic load plate containing RFID tag |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721317405.3U CN207629838U (en) | 2017-10-13 | 2017-10-13 | A kind of ceramic load plate containing RFID tag |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207629838U true CN207629838U (en) | 2018-07-20 |
Family
ID=62858371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721317405.3U Active CN207629838U (en) | 2017-10-13 | 2017-10-13 | A kind of ceramic load plate containing RFID tag |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207629838U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109686695A (en) * | 2018-12-25 | 2019-04-26 | 上海致领半导体科技发展有限公司 | A kind of marker recognition device and method of silicon wafer bearing disk |
-
2017
- 2017-10-13 CN CN201721317405.3U patent/CN207629838U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109686695A (en) * | 2018-12-25 | 2019-04-26 | 上海致领半导体科技发展有限公司 | A kind of marker recognition device and method of silicon wafer bearing disk |
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