CN207608659U - The polycrystalline ingot furnace of graphite cover board and application the graphite cover board - Google Patents

Abstract

The utility model discloses the polycrystalline ingot furnaces of a kind of graphite cover board and application the graphite cover board, polycrystalline ingot furnace includes furnace body, heat-insulation cage in furnace body, silica crucible in heat-insulation cage, graphite cover board, and it is arranged in furnace body, the graphite gas-guide tube of heat-insulation cage, graphite cover board is set to the top of silica crucible, and it is inconsistent with the gas outlet of graphite gas-guide tube, graphite cover board includes the first area inconsistent with the gas outlet of graphite gas-guide tube, and the second area set on first area periphery, the thickness of second area is more than the thickness of first area, the first threaded hole is equipped in first area, and set on the first threaded hole periphery and identical multiple second threaded holes of rotation direction, central axis annular array of each second threaded hole around the first threaded hole.Polycrystalline ingot furnace solves the problems, such as that carbon impurity content is higher in the silicon ingot that existing polycrystalline ingot furnace makes by using graphite cover board provided by the utility model in the utility model.

Description

The polycrystalline ingot furnace of graphite cover board and application the graphite cover board

Technical field

The utility model is related to technology field of polysilicon ingot equipment, more particularly to a kind of graphite cover board and apply the stone The polycrystalline ingot furnace of inky cap plate.

Background technology

The progress of Vehicles Collected from Market environment and technology, polycrystalline development come into a new stage, crystalline silicon generally use Plating diamond wire or resin diamond wire are cut, and advantage is that surface damage is few, cleanliness factor is high, mechanical fraction defective is low, silicon material Loss less, piece rate height, cutting process environmental protection etc., it is more from the needs for reducing cost, the raising market competitiveness and par online Brilliant Buddha's warrior attendant wire cutting is imperative.During Buddha's warrior attendant wire cutting polycrystalline, if encountering Hard Inclusion, the line to be rubbed can It can climb along slot side and easily lead to slice broken string, Buddha's warrior attendant wire cutting polycrystalline stria rate is high, is sliced the problems such as yield is relatively low, It is the main problem that polycrystalline cast ingot faces.

For carbon as a kind of impurity in ingot casting polysilicon, carbon is mainly derived from polycrystal raw material, growth furnace atmosphere, quartzy earthenware The thermal chemical reaction etc. of crucible and graphite heating component.When carbon content is excessively high, it is easy to cause silicon solution and grows brilliant process in directional solidification Middle formation carbon deposition, silicon carbide field trash, dislocation etc. can not only increase line-outage contingency, stria in polycrystal silicon ingot cutting technique The high risk of rate, and the problems such as cell piece leakage rate being fabricated to is high, transfer efficiency is low is also resulted in, therefore, it is necessary to subtract Carbon content in few polycrystal silicon ingot.

It is prepared by the polysilicon chip generally use directional solidification polycrystalline ingot furnace for being currently used for production polysilicon solar cell, Existing polycrystalline ingot furnace is typically directly vertically blown into silicon ingot surface by inert gas, however will after the completion of general melting silicon materials Start to cool to long brilliant temperature, the time of freely volatilizing is shorter, and most impurity is there is also in silicon liquid, and crystal growing stage is by silicon liquid Viscosity is larger, and impurity is difficult fully to be spread in silicon solution, and liquid phase ingredient is unevenly distributed, and causes in the silicon ingot after solidification There are impurity enriched areas, cause silicon ingot carbon content higher, seriously affect the quality and performance of slice yield and silicon chip itself.

Utility model content

Based on this, the purpose of this utility model is that proposing a kind of graphite cover board and the polycrystalline cast ingot using the graphite cover board Stove solves the problems, such as that carbon impurity content is higher in the silicon ingot that existing polycrystalline ingot furnace makes.

The utility model provides a kind of graphite cover board and the polycrystalline ingot furnace using the graphite cover board, and specific technical solution is such as Under：

A kind of graphite cover board is applied in polycrystalline ingot furnace, and the polycrystalline ingot furnace includes furnace body, is set in the furnace body The heat-insulation cage in portion, the silica crucible in the heat-insulation cage and the graphite air guide for being arranged in the furnace body, the heat-insulation cage Pipe, the graphite cover board are set to the top of the silica crucible, the gas outlet of the graphite gas-guide tube and the graphite cover board phase It contradicts, the graphite cover board includes the first area inconsistent with the gas outlet of the graphite gas-guide tube and set on described the The second area in one region periphery, the thickness of the second area are more than the thickness of the first area, in the first area Equipped with one first threaded hole and set on first threaded hole periphery and identical multiple second threaded holes of rotation direction, Ge Gesuo State central axis annular array of second threaded hole around first threaded hole.

The first threaded hole and the second threaded hole in first area that graphite cover board provided by the utility model passes through setting, Brilliant rate is dissolved and grown to first threaded hole convenient for observing and measuring silicon ingot, when inert gas flows through the first threaded hole and second After threaded hole, the convection type of inert gas changes, and forms rotation outlet mode so that from the first threaded hole and the second spiral shell The inert gas that trepanning rotation sprays can drive the silicon liquid in silica crucible to be rotated, to make the carbon impurity contained in silicon liquid Fully spread in silicon solution, liquid phase ingredient made to be evenly distributed, avoid solidification after silicon ingot in there are impurity enriched area shapes It being accounted at firmly miscellaneous, can promote to volatilize as early as possible containing volatilizable impurity in silicon liquid so that the carbon impurity in silicon liquid fully segregates, and point Cloth is to the edge of silicon ingot, to reduce the carbon impurity content of silicon ingot intermediate region, can effectively reduce slice breakage ratio, solves existing There is the higher problem of carbon impurity content in the silicon ingot of polycrystalline ingot furnace making.

In addition, according to graphite cover board provided by the utility model, there can also be following additional technical characteristic：

Further, the size of the first area is identical as the size of gas outlet of graphite gas-guide tube, and described The aperture of one threaded hole is more than the aperture of second threaded hole.

Further, end face and the quartzy earthenware of second threaded hole in the gas outlet of the close graphite gas-guide tube The distance between crucible is more than end face and the quartzy earthenware of second threaded hole in the gas outlet far from the graphite gas-guide tube The distance between crucible.

Further, the second area has the radially outside annular step surface being stepped up.

Further, the thickness of the second area radially gradually increases outward.

Further, the aperture of first threaded hole is 40-60mm, and the quantity of second threaded hole is 4-10, The thickness of the graphite cover board is 5-15mm.

Another embodiment of the utility model proposes a kind of polycrystalline ingot furnace, including furnace body, is set to the furnace interior Heat-insulation cage, be set to the heat-insulation cage in heater top, side heater, silica crucible, graphite protective plate, graphite bottom plate, heat hand over Block is changed, wears the graphite gas-guide tube of the furnace body, the heat-insulation cage and the heater top successively, and is worn described heat-insulated The bottom of cage and the support leg being connect respectively with the inner wall of the furnace body and the heat exchange mass, the heat-insulation cage is respectively by being set to The bottom holding plates of bottom are kept the temperature set on the side thermal insulation board of the bottom holding plates side and set on top and with the side The top insulation board of plate connection, the polycrystalline ingot furnace further includes the graphite cover board as described in above-described embodiment, the graphite cover Plate is set in the heat-insulation cage, and set on the top of the silica crucible.

Further, the graphite protective plate is set to the lateral wall of the silica crucible, and the graphite bottom plate is set to the stone The bottom of the bottom wall of English crucible, the graphite bottom plate is equipped with the heat exchange mass, the bottom wall of the heat exchange mass and the support Leg connects, and the top on the heater top top is additionally provided with one first thermocouple, and one second heat is additionally provided in the heat exchange mass Galvanic couple, first thermocouple wear the top insulation board, the top of the furnace body and successively outside the furnace bodies First equipment connects, and second thermocouple wears the bottom holding plates, the bottom of the furnace body and successively set on the stove The second equipment connection outside body.

Further, the graphite gas-guide tube wears the roof of the furnace body, the top insulation board and described successively Heater top, and the bottom gas outlet of the graphite gas-guide tube and the graphite cover board are inconsistent, the top of the graphite gas-guide tube Control valve is equipped at portion's air inlet.

Description of the drawings

Fig. 1 is the cross-sectional view for the polycrystalline ingot furnace that the utility model first embodiment proposes.

Fig. 2 is the structural schematic diagram for the graphite cover board that the utility model first embodiment proposes.

Fig. 3 is the schematic cross-sectional view of the parts A-A in Fig. 2.

Fig. 4 is the enlarged structure schematic diagram of first area in Fig. 3.

Fig. 5 is the enlarged structure schematic diagram of first area in the graphite cover board that the utility model second embodiment proposes.

Fig. 6 is the cross-sectional view for the graphite cover board that the utility model 3rd embodiment proposes.

Specific implementation mode

To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, below in conjunction with the accompanying drawings to this The specific implementation mode of utility model is described in detail.Elaborate many details in order to abundant in the following description Understand the utility model.But the utility model can be much to implement different from other manner described here, this field Technical staff can do similar improvement without prejudice to the utility model connotation, therefore the utility model is not by following public affairs The limitation for the specific implementation opened.

It should be noted that when element is referred to as " being fixedly arranged on " another element, it can be directly on another element Or there may also be elements placed in the middle.When an element is considered as " connection " another element, it can be directly connected to To another element or it may be simultaneously present centering elements.Term as used herein " vertical ", " horizontal ", " left side ", " right side ", "upper", "lower" and similar statement for illustrative purposes only, do not indicate or imply the indicated device or member Part must have a particular orientation, with specific azimuth configuration and operation, therefore should not be understood as limiting the present invention.

In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " Gu It is fixed " etc. terms shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can Can also be electrical connection to be mechanical connection；It can be directly connected, can also indirectly connected through an intermediary, Ke Yishi Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood as the case may be Concrete meaning in the present invention.Term " and or " used herein includes one or more relevant Listed Items Any and all combinations.

It please refers to Fig.1 to Fig.4, the polycrystalline ingot furnace 10 of the first embodiment offer of the utility model, including furnace body 20, if Heat-insulation cage 21 inside furnace body 20, heater top 22, side heater 23, silica crucible 24, the graphite being set in heat-insulation cage 21 Cover board 25, graphite protective plate 26, graphite bottom plate 27 and heat exchange mass 28 (DS blocks) wear furnace body 20, heat-insulation cage 21 and top successively The graphite gas-guide tube 29 of heater 22, and wear heat-insulation cage 21 bottom and respectively with the inner wall of furnace body 20 and heat exchange mass 28 The support leg 30 of connection.

Wherein, heat-insulation cage 21 be set to furnace body 20 inside, heat-insulation cage 21 respectively by set on bottom bottom holding plates 211, The top heat preservation being connect set on the side thermal insulation board 212 of 211 side of bottom holding plates and set on top and with side thermal insulation board 212 Plate 213 forms, and is wherein connected with the elevating lever 31 that can drive its oscilaltion on the top insulation board 213 of heat-insulation cage 21, Middle heat-insulation cage 21 is internally provided with a silica crucible 24, and the lateral wall of the silica crucible 24 is equipped with graphite protective plate 26, silica crucible 24 bottom wall is equipped with graphite bottom plate 27, the graphite bottom plate 27 while also inconsistent with graphite protective plate 26, the top of the silica crucible 24 Portion is also inconsistent with graphite protective plate 26 simultaneously equipped with graphite cover board 25, the graphite cover board 25, passes through the graphite bottom plate of setting at this time 27, graphite protective plate 26 and graphite cover board 25 can be enclosed in the outer surface of silica crucible 24.

Further, the bottom of graphite bottom plate 27 is equipped with a heat exchange mass 28, certain in the outside spacers of graphite protective plate 26 It is equipped with side heater 23 at distance, heater top 22 is equipped at a certain distance from the head clearance of graphite cover board 25, wherein should The bottom wall of heat exchange mass 28 is connect with support leg 30 so that the heat exchange mass 28 can be fixed on the furnace body 20 by the support leg 30 It is interior.Wherein, the top on 22 top of heater top is additionally provided with one first thermocouple 32 (TC1), which wears successively If the top of top insulation board 213, furnace body 20 is connect with the first equipment outside furnace body 20, wherein first thermocouple 32 There are certain interval between heater top 22, which is used to detect the environment temperature at the heater top 22. Be additionally provided with one second thermocouple 33 (TC2) in the heat exchange mass 28, second thermocouple 33 wear successively bottom holding plates 211, The bottom of furnace body 20 is connect with the second equipment outside furnace body 20, for detecting the environment temperature at the heat exchange mass 28.

Further, which wears the roof of furnace body 20, top insulation board 213 and top heating successively Device 22, and the bottom gas outlet of the graphite gas-guide tube 29 and graphite cover board 25 are inconsistent, the top air inlet of the graphite gas-guide tube 29 Control valve 34 is equipped at mouthful, which is set to the top of furnace body 20, the output quantity for controlling inert gas argon gas Size, wherein the inert gas argon gas exported from graphite gas-guide tube 29 may pass through the through-hole opened up on graphite cover board 25 and blow into quartz Silicon ingot surface in crucible 24.

Wherein the graphite cover board 25 includes the first area 251 inconsistent with the gas outlet of graphite gas-guide tube 29, Yi Jishe In 251 periphery of first area and the second area 252 inconsistent with graphite protective plate 26, the wherein size and stone of first area 251 The size of the gas outlet of black gas-guide tube 29 is identical, wherein the center in first area 251 is equipped with one first threaded hole 2511, the periphery of first threaded hole 2511 is equipped with identical second threaded hole 2512 of multiple rotation directions, wherein each second spiral Central axis annular array of the hole 2512 around the first threaded hole 2511, wherein it should be pointed out that the graphite cover board 25 Thickness is 5-15mm, and the aperture of first threaded hole 2511 is more than the aperture of the second threaded hole 2512, first threaded hole 2511 Aperture be 40-60mm, wherein the quantity of the second threaded hole 2512 is 4-10, in the present embodiment, the graphite cover board 25 Thickness is specially 15mm, and the quantity of second threaded hole 2512 is specially 10, it is possible to understand that, in other of the utility model In embodiment, the thickness of the graphite cover board 25 can also be other sizes, and the quantity of second threaded hole 2512 can also be it His number, is not limited thereto.

The wherein casting ingot process of the prior art after usually first passing through spraying, stocking process, enters back into ingot casting process.Its In each process effect and there are the problem of be followed successively by：

Spraying process：Silicon material can react after high temperature melting with silica crucible 24, introduce impurity, and silica crucible One layer of silicon nitride powder is coated between 24 and silicon material, silicon nitride coating can play the role of that silicon material and silica crucible 24 is isolated, just It is demoulded in silicon ingot, but silicon nitride coating in silicon liquid scour process, has partial exfoliation or reacted with silicon liquid in the melting stage, Carboritride is generated, the quality of silicon ingot is influenced.

Heating process：For quickly making silicon material heating close to fusion temperature, the environment in furnace body 20 is vacuum environment at this time, It can be conducive to by the method vacuumized extract the vapor on the silicon material surface of attachment out, and be rapidly heated.

Melting process：In fusion process, needs to fill inert gas argon gas in the furnace body 20 of sealing, avoid being attached to The silicon nitride coating of 24 inner wall of silica crucible is decomposed reaction, and inert gas is filled with by the gas outlet of graphite gas-guide tube 29 In furnace body 20.After fusing starts, start to inflate in furnace body 20, after being inflated to setting pressure by process, starts dynamic and keep Pressure in furnace body 20.

Long crystalline substance process：It mainly ramps up the heat-insulation cage 21 inside furnace body 20, and liquid-state silicon radiates since bottom, bottom Liquid-state silicon become solid-state silicon, under degree of supercooling and uniform temperature gradient, slowly upwardly-directed solidification growth is up to entire mistake Journey terminates, and inert gas flow is stablized during long brilliant, it is ensured that pressure stability is in a certain range in furnace body 20.

Annealing operation：It since long brilliant process starts in bottom, and is risen with heat-insulation cage 21, until top, heat-insulated in this way Between the top insulation board 213 and bottom holding plates 211 of cage 21 because the reason of heat dissipation, it is poor to have a certain temperature, generates Internal stress.The effect of annealing is exactly temperature difference to be eliminated, in the case where ensureing isoperibol to eliminate internal stress.

Cooling process：Silicon ingot is quickly cooled down in furnace body 20 to tapping temperature.

It is not difficult to find out during from the process above, overlong time can lead to 24 inside silicon nitride of silica crucible after melting silicon materials The destruction of coating, so, it will start to cool to long brilliant temperature after the completion of general melting silicon materials, the time of freely volatilizing is shorter, greatly For partial impurity there is also in silicon liquid, crystal growing stage is larger by the viscosity of silicon liquid, and impurity is difficult fully to be expanded in silicon solution Dissipate, liquid phase ingredient is unevenly distributed, cause solidification after silicon ingot in there are impurity enriched areas, cause silicon ingot carbon content higher, sternly Ghost image rings the quality and performance of slice yield and silicon chip itself.

Its principal element is that original inert gas air admission hole is round hole, inertia on graphite cover board 25 in the prior art When gas is entered from air admission hole blow-through in silicon liquid, airflow direction is more at random, irregularly, is unfavorable for the volatilization of impurity and divides It is solidifying.

The first threaded hole 2511 and second in the first area 251 that graphite cover board 25 provided in this embodiment passes through setting Threaded hole 2512, which dissolves and grows brilliant rate convenient for observing and measuring silicon ingot, when inert gas flows through After first threaded hole 2511 and the second threaded hole 2512, the convection type of inert gas changes, by original blow-through mode It is changed to rotation outlet mode so that the inert gas sprayed from the first threaded hole 2511 and the rotation of the second threaded hole 2512 can drive Silicon liquid in silica crucible 24 is rotated, and to make the carbon impurity contained in silicon liquid fully be spread in silicon solution, is made Liquid phase ingredient is evenly distributed, and avoids to promote to contain in silicon liquid there are impurity enriched area formation carbon impurity in the silicon ingot after solidification There is volatilizable impurity to volatilize as early as possible so that the carbon impurity in silicon liquid fully segregates, and is distributed to the edge of silicon ingot, to reduce silicon The carbon impurity content of ingot intermediate region can effectively reduce slice breakage ratio, solve the silicon ingot of the making of existing polycrystalline ingot furnace 10 The middle higher problem of carbon impurity content.

Referring to Fig. 5, the graphite cover board 25 that the second embodiment of the utility model provides, with first embodiment on the whole phase Together, the difference is that, in the present embodiment, each second threaded hole being arranged on the first area 251a of the graphite cover board 25 There are certain slanted angles between 2512a and graphite cover board 25a, and non-perpendicular to graphite cover board 25, i.e. second threaded hole 2512a is close to the distance between the end face of the gas outlet of graphite gas-guide tube 29 and silica crucible 24 compared with the second threaded hole 2512a The distance between end face and silica crucible 24 of gas outlet far from graphite gas-guide tube 29 are big, each second threaded hole 2512a has from the end face close to the gas outlet of graphite gas-guide tube 29 to the end face of the gas outlet far from graphite gas-guide tube 29 Radially offset outward.So that the inert gas that the gas outlet of graphite gas-guide tube 29 sprays is towards close to the inside of silica crucible 24 It moves in the direction of wall so that the carbon impurity in the silicon liquid can be segregated fully, and be distributed to the edge of silicon ingot as possible, when in use The edge of silicon ingot only need to be cut away, so that reducing the content of the carbon impurity of entire silicon ingot, it is disconnected can effectively to reduce slice Line rate.

Referring to Fig. 6, the graphite cover board 25b that the 3rd embodiment of the utility model provides, on the whole with first embodiment It is identical, the difference is that, in the present embodiment, the thickness of second area 252b is more than the thickness of first area 251b, wherein It should be pointed out that there are many kinds of the modes of thickness of the thickness of second area 252b more than first area 251b, for example, the The thickness of two region 252b radially gradually increase outward or second area 252b have radially it is outside gradually Increased annular step surface etc..In the present embodiment, specially the thickness of second area 252b radially gradually increases outward, can With understanding, in the other embodiment of the utility model, thickness of the thickness more than first area 251b of second area 252b Mode can also be other, be not limited thereto.

Wherein, each position thickness all same in graphite cover board 25 in the prior art, and top adds during ingot casting The heat that hot device and side heater generate at ingot top edge is higher than inside, causes to generate a convex solid liquid interface, Cause impurity segregation effect bad, corner easily forms impurity shade at the top of silicon ingot.And the graphite cover board 25b in the present embodiment by It is more than the thickness of first area 251b in the thickness of second area 252b, therefore the edge of graphite cover board 25b can hinder It keeps off more heats and enters silica crucible 24, to achieve the purpose that balance the 24 each position heat in top of silica crucible, avoid The generation of convex solid liquid interface, therefore enable to silicon crystal late growth solid liquid interface steady, the effective impurity of progress Fractional condensation reduces impurity shade at the top of silicon ingot, improves the quality of the corner crystal of the ingot casting grown.

Wherein, it should be pointed out that in the graphite cover board 25b of the present embodiment be to be more than using the thickness of second area 252b The graphite cover board 25b of the thickness of first area 251b, and each second threaded hole in the first area 251b of graphite cover board 25b 2512b is perpendicular to graphite cover board 25b, it is possible to understand that, in the other embodiment of the utility model, the graphite cover board 25 is also Can be to be more than the thickness of first area 251 using the thickness of second area 252, and the second threaded hole 2512 and graphite cover board 25 Between there are the graphite cover boards 25 of slanted angle, user can be combined use according to actual use demand, not limit herein It is fixed.

Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed, But it should not be understood as limiting the scope of the patent of the utility model.It should be pointed out that for the common of this field For technical staff, without departing from the concept of the premise utility, various modifications and improvements can be made, these all belong to In the scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.

Claims (9)

1. a kind of graphite cover board is applied in polycrystalline ingot furnace, the polycrystalline ingot furnace includes furnace body, is set to the furnace interior Heat-insulation cage, the silica crucible in the heat-insulation cage and the graphite air guide for being arranged in the furnace body, the heat-insulation cage Pipe, the graphite cover board be set to the silica crucible top, which is characterized in that the gas outlet of the graphite gas-guide tube with it is described Graphite cover board is inconsistent, the graphite cover board include the first area inconsistent with the gas outlet of the graphite gas-guide tube and Second area set on the first area periphery, the thickness of the second area is more than the thickness of the first area, described One first threaded hole is equipped in first area and set on first threaded hole periphery and identical multiple second spirals of rotation direction Hole, central axis annular array of each second threaded hole around first threaded hole.

2. graphite cover board according to claim 1, which is characterized in that the size of the first area and the graphite air guide The size of the gas outlet of pipe is identical, and the aperture of first threaded hole is more than the aperture of second threaded hole.

3. graphite cover board according to claim 1, which is characterized in that second threaded hole is close to the graphite air guide The distance between the end face of the gas outlet of pipe and the silica crucible are more than second threaded hole far from the graphite air guide The distance between the end face of the gas outlet of pipe and the silica crucible.

4. graphite cover board according to claim 1, which is characterized in that the second area have radially it is outside by Walk increased annular step surface.

5. graphite cover board according to claim 1, which is characterized in that the thickness of the second area radially outward by It is cumulative to add.

6. graphite cover board according to claim 1, which is characterized in that the aperture of first threaded hole is 40-60mm, institute The quantity for stating the second threaded hole is 4-10, and the thickness of the graphite cover board is 5-15mm.

7. a kind of polycrystalline ingot furnace, including furnace body are set to the heat-insulation cage of the furnace interior, the top in the heat-insulation cage adds Hot device, side heater, silica crucible, graphite protective plate, graphite bottom plate, heat exchange mass wear the furnace body, the heat-insulation cage successively And the graphite gas-guide tube of the heater top, and wear the heat-insulation cage bottom and respectively with the inner wall of the furnace body and The support leg of heat exchange mass connection, the heat-insulation cage respectively by set on bottom bottom holding plates, be set to the bottom and protect The side thermal insulation board of warm plate side and the top insulation board being connect set on top and with the side thermal insulation board, which is characterized in that institute State the graphite cover board that polycrystalline ingot furnace further includes as claimed in any one of claims 1 to 6, the graphite cover board be set to it is described every In hot cage, and set on the top of the silica crucible.

8. polycrystalline ingot furnace according to claim 7, which is characterized in that the graphite protective plate is set to the silica crucible Lateral wall, the graphite bottom plate are set to the bottom wall of the silica crucible, and the bottom of the graphite bottom plate is equipped with the heat exchange mass, The bottom wall of the heat exchange mass is connect with the support leg, and the top on the heater top top is additionally provided with one first thermocouple, One second thermocouple is additionally provided in the heat exchange mass, first thermocouple wears the top insulation board, the stove successively The top of body is connect with the first equipment outside the furnace body, and second thermocouple wears the bottom heat preservation successively Plate, the bottom of the furnace body are connect with the second equipment outside the furnace body.

9. polycrystalline ingot furnace according to claim 7, which is characterized in that the graphite gas-guide tube wears the furnace body successively Roof, the top insulation board and the heater top, and the bottom gas outlet of the graphite gas-guide tube and the graphite Cover board is inconsistent, and control valve is equipped at the top air inlet of the graphite gas-guide tube.