CN207608619U - Evaporation source and sputtering coating equipment - Google Patents
Evaporation source and sputtering coating equipment Download PDFInfo
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- CN207608619U CN207608619U CN201721355789.8U CN201721355789U CN207608619U CN 207608619 U CN207608619 U CN 207608619U CN 201721355789 U CN201721355789 U CN 201721355789U CN 207608619 U CN207608619 U CN 207608619U
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- Prior art keywords
- evaporation
- crucible
- vacuum
- cavity
- evaporation source
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Abstract
The utility model belongs to evaporation coating technique field, more particularly to a kind of evaporation source and sputtering coating equipment, wherein, evaporation source includes the evaporation tank for having evaporation cavity, the crucible being placed in evaporation cavity, crucible offers opening up setting and the medicine-storing cavity for storing liquid, evaporation tank is opened in evaporation cavity in its side wall and is connected to the discharge port docked with vacuum film coating chamber, it is characterized in that, evaporation source further includes for driving crucible so that the driving mechanism that crucible switches between original state and evaporation state, medicine-storing cavity accent is arranged crucible upward in the initial state, and medicine-storing cavity accent is arranged towards discharge port in evaporation state.Structure design based on the utility model, the liquid for reducing gasification enter the path of vacuum film coating chamber, advantageously reduce the waste of liquid.
Description
Technical field
The utility model belongs to vacuum sputtering coating technical field more particularly to a kind of evaporation source and sputter coating
Equipment.
Background technology
Evaporation source includes the crucible for having the evaporation tank of evaporation cavity and being placed in evaporation cavity, and evaporation tank is in its side wall
It is opened in evaporation cavity and is connected to the discharge port docked with vacuum film coating chamber, crucible offers opening up setting and for storing liquid
Medicine-storing cavity, wherein in evaporation coating operation process, first, liquid is positioned over crucible, secondly, heat liquid, liquid gas
Change, and after gaseous state liquid will be moved in steaming, gets to discharge port, there are certain wastes in this way, leading to liquid.
Utility model content
The purpose of the utility model is to overcome above-mentioned the deficiencies in the prior art, provide a kind of evaporation source, purport
It is wasted solving the problems, such as that liquid exists.
The utility model is realized in this way：A kind of evaporation source, is used cooperatively with vacuum film coating chamber, including has steaming
The evaporation tank for sending out chamber, the crucible being placed in the evaporation cavity, the crucible offer opening up setting and for storing liquid
Medicine-storing cavity, the evaporation tank is opened in evaporation cavity in its side wall and is connected to the discharge port that is docked with the vacuum film coating chamber, described
Evaporation source further includes for driving the crucible so that the drive that the crucible switches between original state and evaporation state
Motivation structure, the medicine-storing cavity accent is arranged the crucible upward in the initial state, and in the evaporation state described in deposit medicine
Chamber accent is arranged towards the discharge port.
Optionally, the driving mechanism includes transmission shaft being connect with the crucible and for driving the transmission shaft with band
The motor that the crucible switches between the original state and the evaporation state is moved, the motor is fixed on the evaporation
Case.
Optionally, the transmission shaft passes through one tank wall of an evaporation tank, the motor to be located on the outside of the evaporation tank.
Optionally, one turning end of the transmission shaft is rotationally connected with another tank wall of the evaporation tank.
Optionally, the evaporation source includes the feed driver for connecting the driving mechanism and the crucible,
It is described to drive the crucible to be moved towards discharge port so that the crucible when the crucible is in the evaporation state into driver
Against the evaporation cavity cavity wall.
Optionally, the evaporation tank includes vacuum deflation mouth, vacuum pumping opening and the feeding mouth being sent into for the liquid；
The evaporation source includes set on the discharge outlet and for blocking or being connected the evaporation cavity and described true
First vacuum valve of empty coating chamber, at the feeding mouth and for blocking or being connected the evaporation cavity and external second true
Empty valve, the vacuum deflation valve at the vacuum deflation mouth, the vacuum extraction valve at the vacuum pumping opening and with
The vacuum extraction valve connection is simultaneously used for when the vacuum deflation valve is closed, the vacuum extraction valve is opened by the evaporation cavity
The vacuum pump vacuumized.
Optionally, the evaporation source includes feeding material component, the feeding material component include a discharging nozzle material guiding tube,
For store the liquid medicine bottle, for by the liquid from the medicine bottle be evacuated to the material guiding tube and up to the liquid from
It is described discharging nozzle overflow plunger pump and for drive the material guiding tube, the medicine bottle and the plunger pump move together and
Make the discharging nozzle through the feeding mouth and reaches the feeding driver above the medicine-storing cavity.
Optionally, the vacuum deflation valve and the vacuum extraction valve are respectively positioned on the outside of the evaporation tank.
Optionally, the discharge port is the strip hole setting arranged from top to bottom, and the crucible and the driving mechanism are extremely
Be equipped with two pairs less, a driving mechanism is for driving a crucible, each crucible arranged for interval from top to bottom, it is described enter
Material mouth is at least provided with two, there are two the feeding material component is set, a feeding material component distribution by a feeding mouth come to
The one crucible feed.
The utility model also provides a kind of sputtering coating equipment, including above-mentioned evaporation source and with the evaporation source
The deposited chamber that device is used cooperatively.
In use, first, liquid is placed into the medicine-storing cavity of crucible, secondly, driving mechanism drives crucible to enter
Then evaporation state recycles heater heating crucible, so that liquid gasifies.Wherein, when the liquid medicine spill medicine-storing cavity of gasification
When, the liquid of gasification will open up direction along the accent of medicine-storing cavity and overflow, and since crucible is in evaporation state, medicine-storing cavity accent
Towards discharge port, the liquid for the gasification overflowed from medicine-storing cavity will enter directly into vacuum film coating chamber in the horizontal direction, in this way, relatively
In the prior art, the liquid for reducing gasification enters the path of vacuum film coating chamber, advantageously reduces the waste of liquid.
Description of the drawings
In order to illustrate more clearly of the technical scheme in the embodiment of the utility model, will make below to required in embodiment
Attached drawing is briefly described, it should be apparent that, the accompanying drawings in the following description is only some embodiments of the utility model,
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings
Other attached drawings.
Fig. 1 is the sectional view under a visual angle of the evaporation source that the utility model embodiment provides；
Fig. 2 is the sectional view under another viewing angle constructions for the evaporation source that the utility model embodiment provides.
Drawing reference numeral explanation：
| Label | Title | Label | Title |
| 100 | Evaporation tank | ||
| 101 | Evaporation cavity | ||
| 200 | Crucible | ||
| 300 | Driving mechanism | ||
| 310 | Transmission shaft | 320 | Motor |
| 400 | First vacuum valve | ||
| 500 | Second vacuum valve | ||
| 600 | Feeding material component | ||
| 610 | Material guiding tube | 620 | Feeding driver |
| 700 | Vacuum deflation valve | ||
| 800 | Vacuum extraction valve |
Specific implementation mode
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only explaining this
Utility model is not used to limit the utility model.
The utility model embodiment provides a kind of evaporation source, is used cooperatively with vacuum film coating chamber, can be used for being coated with
AR films and it is coated with AF films again on the basis of being coated with after AG films.
It please refers to Fig.1 and Fig. 2, the evaporation source includes the evaporation tank 100 with evaporation cavity 101 and be placed in evaporation cavity
Crucible 200 in 101, crucible 200 offer opening up setting and the medicine-storing cavity for storing liquid, in specific implementation,
Evaporation source further includes the heater for heating crucible 200, so that the liquid gasification being positioned on crucible 200.Evaporation tank
100 are opened in evaporation cavity 101 in its side wall is connected to the discharge port docked with vacuum film coating chamber, in order to which the liquid after gasifying enters
To vacuum film coating chamber.
Please refer to Fig.1 and Fig. 2, evaporation source further include for drive crucible 200 so that crucible 200 in original state and
The driving mechanism 300 switched between evaporation state, medicine-storing cavity accent is arranged crucible 200 upward in the initial state, and is being deposited
Medicine-storing cavity accent is arranged towards discharge port when state.
Based on this structure design, in use, first, liquid is placed into the medicine-storing cavity of crucible 200, secondly, driven
Motivation structure 300 drives crucible 200 to enter evaporation state, then, recycles heater heating crucible 200, so that liquid gasifies.Its
In, when the liquid medicine spill medicine-storing cavity of gasification, the liquid of gasification will open up direction along the accent of medicine-storing cavity and overflow, and due to earthenware
For crucible 200 in evaporation state, for medicine-storing cavity accent towards discharge port, the liquid for the gasification overflowed from medicine-storing cavity will be straight in the horizontal direction
It connects and enters vacuum film coating chamber, in this way, compared with the existing technology, the liquid for reducing gasification enters the road of vacuum film coating chamber
Diameter advantageously reduces the waste of liquid.
In addition, the liquid for reducing gasification enters the path of vacuum film coating chamber, moreover it is possible to the medicine of gasification be allowed quickly to enter
To vacuum film coating chamber, be conducive to improve vapor deposition efficiency.
Referring to Fig. 2, driving mechanism 300 includes connecting transmission shaft 310 with crucible 200 and for driving transmission shaft 310
With the motor 320 for driving crucible 200 to switch between original state and evaporation state, motor 320 is fixed on evaporation tank 100.Base
It in this structure design, is driven using motor 320, then by transmission shaft 310 by the torque drive of motor 320 to crucible 200,
Wherein, motor 320 can use standard component, in this way, being conducive to simplify the structure of driving mechanism 300, reduce manufacturing cost.
Further, transmission shaft 310 passes through 100 1 tank wall of an evaporation tank, motor 320 to be located at 100 outside of evaporation tank.This
Sample may not need motor 320 and carry out vapor-proof processing in use.
Further, 310 1 turning end of transmission shaft is rotationally connected with 100 another tank wall of evaporation tank.In this way, avoiding transmission
There is hanging situation in 310 1 shaft end of axis, can play better supporting role.
In the utility model embodiment, evaporation source include for connect driving mechanism 300 and crucible 200 to
Into driver, crucible 200 is driven to be moved towards discharge port so that crucible 200 supports when crucible 200 is in evaporation state into driver
By 101 cavity wall of evaporation cavity.Crucible 200 can be allowed fully to lean on evaporation cavity by being fed the setting of driver based on this structure
101 cavity walls, to which the liquid for reducing gasification to be entered to the path of vacuum film coating chamber to greatest extent.In specific implementation, into drive
Dynamic device can drive crucible 200 to be moved back and forth towards discharge port when crucible 200 is in evaporation state.
In the utility model embodiment, evaporation tank 100 includes vacuum deflation mouth, vacuum pumping opening and is sent into for liquid
Feeding mouth.Evaporation source includes the set on discharge outlet and for blocking or being connected evaporation cavity 101 and vacuum film coating chamber
One vacuum valve 400, at feeding mouth and for block or be connected evaporation cavity 101 with outside the second vacuum valve 500, be set to
Vacuum deflation valve 700 at vacuum deflation mouth, the vacuum extraction valve 800 at vacuum pumping opening and and vacuum extraction valve
800 connections and the vacuum when vacuum deflation valve 700 is closed, vacuum extraction valve 800 is opened for vacuumizing evaporation cavity 101
Pump.
Referring to Fig. 1, evaporation source includes feeding material component 600, feeding material component 600 includes the material guiding tube of a discharging nozzle
610, for storing the medicine bottle of liquid, drawing 610 pipe of material and up to liquid is overflowed from discharging nozzle for liquid to be evacuated to from medicine bottle
Plunger pump and for driving material guiding tube 610, medicine bottle and plunger pump to move together and making discharge nozzle mouth through feeding mouth and reach
Feeding driver 620 above medicine-storing cavity.
Based on said structure design, the supply of liquid can be convenient for.Specifically, in use, when on crucible 200
After use, the operating procedure for supplementing liquid is as follows for liquid：
Crucible 200 is allowed to return to original state；
First vacuum valve 400 blocks the connection between evaporation cavity 101 and vacuum film coating chamber；
Vacuum deflation valve 700 is opened, and being put into gas makes the vacuum state in evaporation cavity 101 change to atmospheric condition；
Evaporation cavity 101 and outside is connected in second vacuum valve 500, that is to say and opens feeding mouth；
Feeding material component 600 is moved by feeding mouth, until the infusion port of material guiding tube 610 reaches above crucible.Liquid is infused
Device accurately supplements liquid to crucible；
Liquid is charged, feeding material component 600 is moved out by feeding mouth exits evaporation cavity
Second vacuum valve 500 blocks evaporation cavity 101 and outside；
Vacuum deflation valve 700 is closed；
Vacuum extraction valve 800 is opened, and vacuum pump vacuumizes evaporation cavity 101, and exhausts evaporation cavity 101 in vacuum pump
After vacuum, vacuum extraction valve 800 is closed；
The connection between evaporation cavity 101 and vacuum film coating chamber is connected in first vacuum valve 400.
Specifically, feeding material component 600 is moved by feeding mouth, until the infusion port of material guiding tube 610 reaches on crucible 200
Side, charges liquid, feeding material component 600 is moved out by feeding mouth exits evaporation cavity
Referring to Fig. 1, vacuum deflation valve 700 and vacuum extraction valve 800 are respectively positioned on the outside of evaporation tank.In this way, being convenient for vacuum
The assembly of vent valve 700 and vacuum extraction valve 800.
Referring to Fig. 2, discharge port is the strip hole setting arranged from top to bottom, crucible 200 and driving mechanism 300 are at least
Equipped with a pair or more, a driving mechanism 300 is for driving a crucible 200, and feeding mouth is arranged and 200 quantity Matching of crucible, and one
The distribution of feeding material component 600 is fed by a feeding mouth to a crucible 200.
The utility model also proposes a kind of sputtering coating equipment, the sputtering coating equipment include evaporation source and with steaming
The deposited chamber that source arrangement is used cooperatively, wherein the concrete structure of evaporation source is with reference to above-described embodiment, since this sputtering is plated
Film device uses whole technical solutions of above-mentioned all embodiments, therefore the same technical solution institute band with above-described embodiment
All advantageous effects come, this is no longer going to repeat them.
The above is only the preferred embodiments of the present utility model only, is not intended to limit the utility model, all in this practicality
Any modification, equivalent replacement or improvement etc., should be included in the guarantor of the utility model made by within novel spirit and principle
Within the scope of shield.
Claims (10)
1. a kind of evaporation source, is used cooperatively with vacuum film coating chamber, includes evaporation tank with evaporation cavity, is placed in the evaporation
The crucible of intracavitary, the crucible offer opening up setting and the medicine-storing cavity for storing liquid, and the evaporation tank is in its side
Wall is opened in evaporation cavity and is connected to the discharge port docked with the vacuum film coating chamber, which is characterized in that the evaporation source also wraps
It includes for driving the crucible so that the driving mechanism that the crucible switches between original state and evaporation state, the crucible
The medicine-storing cavity accent is arranged upward in the initial state, and the medicine-storing cavity accent goes out described in the evaporation state
Material mouth is arranged.
2. evaporation source as described in claim 1, which is characterized in that the driving mechanism includes connecting biography with the crucible
Moving axis and for driving the transmission shaft to drive the crucible to switch between the original state and the evaporation state
Motor, the motor is fixed on the evaporation tank.
3. evaporation source as claimed in claim 2, which is characterized in that the transmission shaft passes through one case of an evaporation tank
Wall, the motor are located on the outside of the evaporation tank.
4. evaporation source as claimed in claim 3, which is characterized in that one turning end of the transmission shaft is rotationally connected with described
Another tank wall of evaporation tank.
5. evaporation source as described in claim 1, which is characterized in that the evaporation source includes for connecting the drive
The feed driver of motivation structure and the crucible, it is described driven into driver when the crucible is in the evaporation state described in
Crucible is moved towards discharge port so that the crucible is against the evaporation cavity cavity wall.
6. such as evaporation source described in any one of claim 1 to 5, which is characterized in that the evaporation tank includes vacuum deflation
Mouth, vacuum pumping opening and the feeding mouth being sent into for the liquid；
The evaporation source includes set on the discharge outlet and for blocking or being connected the evaporation cavity and the Vacuum Deposition
First vacuum valve of film room, the second vacuum at the feeding mouth and for blocking or being connected the evaporation cavity and outside
Valve, the vacuum deflation valve at the vacuum deflation mouth, the vacuum extraction valve at the vacuum pumping opening and with institute
State vacuum extraction valve connection and when the vacuum deflation valve is closed, the vacuum extraction valve is opened for taking out the evaporation cavity
The vacuum pump of vacuum.
7. evaporation source as claimed in claim 6, which is characterized in that the evaporation source includes feeding material component, described
Feeding material component include the material guiding tube of a discharging nozzle, the medicine bottle for storing the liquid, for by the liquid from the medicine
Bottle is evacuated to the material guiding tube and until plunger pump that the liquid is overflowed from the discharging nozzle and described draws material for driving
Pipe, the medicine bottle and the plunger pump move and make the discharging nozzle through the feeding mouth and reach on the medicine-storing cavity together
The feeding driver of side.
8. evaporation source as claimed in claim 6, which is characterized in that the vacuum deflation valve and the vacuum extraction valve are equal
On the outside of the evaporation tank.
9. evaporation source as claimed in claim 7, which is characterized in that the discharge port is the strip hole arranged from top to bottom
Setting, the crucible and the driving mechanism are at least provided with two pairs, and a driving mechanism is for driving a crucible, each institute
Crucible arranged for interval from top to bottom is stated, the feeding mouth is at least provided with two, there are two the feeding material component is set, a feeding
Components distribution is fed by a feeding mouth to a crucible.
10. a kind of sputtering coating equipment, which is characterized in that including evaporation source as described in claim 1 and with it is described
The deposited chamber that evaporation source is used cooperatively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721355789.8U CN207608619U (en) | 2017-10-20 | 2017-10-20 | Evaporation source and sputtering coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721355789.8U CN207608619U (en) | 2017-10-20 | 2017-10-20 | Evaporation source and sputtering coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207608619U true CN207608619U (en) | 2018-07-13 |
Family
ID=62793590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721355789.8U Active CN207608619U (en) | 2017-10-20 | 2017-10-20 | Evaporation source and sputtering coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207608619U (en) |
-
2017
- 2017-10-20 CN CN201721355789.8U patent/CN207608619U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201216 Address after: 201100 4a, building 1, No.1000 Qishen Road, Minhang District, Shanghai Patentee after: Aifake (China) Investment Co.,Ltd. Address before: Area a, 2 / F, Howe building, No. 28, Keji North 2nd Road, Xili street, Nanshan District, Shenzhen City, Guangdong Province Patentee before: ULVAC HIVAC OPTOELECTRONIC FILMS (SHENZHEN) Co.,Ltd. |
|
| TR01 | Transfer of patent right |