CN207600518U - Temperature Humidity Sensor - Google Patents
Temperature Humidity Sensor Download PDFInfo
- Publication number
- CN207600518U CN207600518U CN201721862307.8U CN201721862307U CN207600518U CN 207600518 U CN207600518 U CN 207600518U CN 201721862307 U CN201721862307 U CN 201721862307U CN 207600518 U CN207600518 U CN 207600518U
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- CN
- China
- Prior art keywords
- humidity sensor
- insulated substrate
- temperature
- electrode
- sensor
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The utility model proposes a kind of Temperature Humidity Sensors,Including insulated substrate,On insulated substrate and positioned at the temperature sensor of one side and on insulated substrate and positioned at the humidity sensor of its opposite side,The temperature sensor includes the metal thin film resistance body being set on insulated substrate,The humidity sensor includes the lower electrode being set on insulated substrate,Sense wet resin film on the lower electrode,Upper electrode on the sense wet resin film,The surface of the temperature sensor and humidity sensor is also covered with protective film jointly,The metal thin film resistance body of protective film corresponding temperature sensor is respectively equipped with hole portion,Metal thin film resistance body corresponding aperture position has installed electrode cap,The protective film corresponds to the corner of the lower electrode of humidity sensor and the angle of upper electrode is respectively equipped with perforation,The lower electrode is equipped with electrode cap with upper electrode at perforation.The Temperature Humidity Sensor makes warm and humid sensor integration, convenient for the installation of particular surroundings.
Description
Technical field
The utility model is related to a kind of sensing equipment, more particularly to a kind of Temperature Humidity Sensor.
Background technology
In departments such as industrial and agricultural production, meteorology, environmental protection, national defence, scientific researches, it is often necessary to environment temperature and humidity simultaneously into
Row detection and control, it is indispensable, such as the temperature and humidity observing and controlling in room, the observing and controlling of the temperature and humidity in automobile, factory
Observing and controlling of temperature and humidity of working environment etc..Temperature sensor and humidity sensor point are usually respectively adopted in practical application
Other to carry out observing and controlling to environment temperature and humidity, the area needed for installation is big, of high cost, especially applies this in environment measuring
Size requires small occasion, and the sensor for installing split structure is highly inconvenient, to be improved.
Utility model content
The utility model proposes a kind of Temperature Humidity Sensors, solve the problems such as taking up a large area in the prior art.
What the technical solution of the utility model was realized in：
A kind of Temperature Humidity Sensor, including insulated substrate, on the insulated substrate and positioned at the temperature sensing of one side
Device and on the insulated substrate and positioned at its opposite side humidity sensor, the temperature sensor include be set on insulated substrate on
Metal thin film resistance body, the humidity sensor include be set on insulated substrate on lower electrode, on the lower electrode
The surface of sense wet resin film, the upper electrode on the sense wet resin film, the temperature sensor and humidity sensor is also common
Be covered with protective film, two angle parts of the metal thin film resistance body of the protective film corresponding temperature sensor not She You hole portion, the gold
Belong to film resistor corresponding aperture position and installed electrode cap, the protective film correspond to the corner of the lower electrode of humidity sensor with it is upper
The angle of portion's electrode is respectively equipped with perforation, which is equipped with electrode cap with upper electrode at perforation.
Preferred embodiment is that the sense wet resin film is polyimide film.
Preferred embodiment is that the protective film is polyimide film.
Preferred embodiment is that the lower electrode is metallic film.
Preferred embodiment is that the insulated substrate is glass insulation plate or silicon insulation board.
Preferred embodiment is that the insulated substrate forms the silicon substrate of silicon dioxide film for its surface.
The beneficial effects of the utility model are：
The Temperature Humidity Sensor of the utility model passes through humidity sensor sense by the temperature in the temperature sensor senses external world
Extraneous humidity is answered, makes warm and humid sensor integration, convenient for the installation of particular surroundings, since temperature sensor is equipped with protection
Film influences its accuracy so as to prevent the direct adhesive water in the surface of its metal thin film resistance body.
Description of the drawings
It in order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, it can also be obtained according to these attached drawings other attached drawings.
Fig. 1 is the overlooking the structure diagram of the utility model Temperature Humidity Sensor；
Fig. 2 is sectional views of the Fig. 1 along line A-A.
In figure：
10th, insulated substrate；20th, temperature sensor；30th, humidity sensor；21st, metal thin film resistance body；31st, lower part electricity
Pole；32nd, feel wet resin film；33rd, upper electrode；40th, protective film；41st, hole portion；23rd, 35, electrode cap；42nd, it perforates.
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
It clearly and completely describes, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work
All other embodiments obtained shall fall within the protection scope of the present invention.
As shown in Figures 1 and 2, which includes insulated substrate 10, on the insulated substrate 10 and is located at
The temperature sensor 20 of one side and on the insulated substrate 10 and positioned at its opposite side humidity sensor 30.
The insulated substrate 10 can be glass insulation plate or silicon insulation board.When it is implemented, the insulated substrate 10 is
Its surface forms the silicon substrate of silicon dioxide film.
The temperature sensor 20 includes the metal thin film resistance body 21 being set on insulated substrate 10.
The humidity sensor 30 includes the lower electrode 31 being set on insulated substrate 10, the sense on the lower electrode 31
Wet resin film 32, the upper electrode 33 on the sense wet resin film 32.The sense wet resin film 32 is polyimide film.The lower part
Electrode 31 is metallic film, and specific production is can together to be formed with the metal thin film resistance body 21 of temperature sensor 20.
The surface of the temperature sensor 20 and humidity sensor 30 is also covered with protective film 40 jointly.It, should in the present embodiment
Protective film 40 is polyimide film, i.e., is identical film with sense wet resin film 32, can be produced together when producing, so as to save life
Produce process.When it is implemented, the membrane body of the protective film 40 or other materials porous.40 corresponding temperature of protective film passes
Two angle parts of the metal thin film resistance body 21 of sensor 20 not She You hole portion 41, the metal thin film resistance body 21 correspond to hole portion 41
Electrode cap 23 is installed.The protective film 40 corresponds to the corner of the lower electrode 31 of humidity sensor 30 and the angle of upper electrode 33
Perforation 42 is respectively equipped with, which is equipped with electrode cap 35 with upper electrode 33 at perforation 42.
During manufacture, the metal thin film resistance body of the temperature sensor and the upper electrode of humidity sensor can be by sputtering shape
Into the sense wet resin film of humidity sensor and the protective film of Temperature Humidity Sensor to be formed by being coated with.
In use, sensing extraneous temperature by temperature sensor 20, extraneous humidity is sensed by humidity sensor 30,
Make warm and humid sensor integration, convenient for the installation of particular surroundings, since temperature sensor 20 is equipped with protective film 40, so as to prevent
The direct adhesive water in surface of its metal thin film resistance body and influence its accuracy.The protective film 40 of the polyimides can allow moisture
Son penetrates, and can permeate moisture to the sense wet resin film 32 of humidity sensor 30, to sense the humidity of external environment, and feel wet resin
Film 32 is identical polyimides material with protective film 40, can be manufactured together, saves equipment and material.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection domain within.
Claims (6)
1. a kind of Temperature Humidity Sensor, it is characterised in that：Including insulated substrate, on the insulated substrate and positioned at one side
Temperature sensor and on the insulated substrate and positioned at the humidity sensor of its opposite side, which includes being set on exhausted
Metal thin film resistance body on edge substrate, the humidity sensor include the lower electrode being set on insulated substrate, set on the lower part
The table of sense wet resin film, the upper electrode on the sense wet resin film on electrode, the temperature sensor and humidity sensor
Face is also covered with protective film jointly, and two angle parts of the metal thin film resistance body of the protective film corresponding temperature sensor She You not hole
Portion, the metal thin film resistance body corresponding aperture position have installed electrode cap, which corresponds to the lower electrode of humidity sensor
The angle of corner and upper electrode is respectively equipped with perforation, which is equipped with electrode cap with upper electrode at perforation.
2. Temperature Humidity Sensor as described in claim 1, it is characterised in that：The sense wet resin film is polyimide film.
3. Temperature Humidity Sensor as claimed in claim 1 or 2, it is characterised in that：The protective film is polyimide film.
4. Temperature Humidity Sensor as described in claim 1, it is characterised in that：The lower electrode is metallic film.
5. Temperature Humidity Sensor as described in claim 1, it is characterised in that：The insulated substrate is exhausted for glass insulation plate or silicon
Listrium.
6. Temperature Humidity Sensor as claimed in claim 5, it is characterised in that：The insulated substrate forms titanium dioxide for its surface
The silicon substrate of silicon fiml.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721862307.8U CN207600518U (en) | 2017-12-27 | 2017-12-27 | Temperature Humidity Sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721862307.8U CN207600518U (en) | 2017-12-27 | 2017-12-27 | Temperature Humidity Sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207600518U true CN207600518U (en) | 2018-07-10 |
Family
ID=62768943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721862307.8U Expired - Fee Related CN207600518U (en) | 2017-12-27 | 2017-12-27 | Temperature Humidity Sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207600518U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111854838A (en) * | 2020-07-23 | 2020-10-30 | 广西机电职业技术学院 | Integrated household environmental sensor |
-
2017
- 2017-12-27 CN CN201721862307.8U patent/CN207600518U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111854838A (en) * | 2020-07-23 | 2020-10-30 | 广西机电职业技术学院 | Integrated household environmental sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180710 Termination date: 20201227 |