CN207600517U - Sensor - Google Patents

Abstract

The utility model proposes a kind of sensors,Including insulated substrate,On insulated substrate and positioned at the temperature sensor of one side and on insulated substrate and positioned at the humidity sensor of its opposite side,The temperature sensor includes the metal thin film resistance body being set on insulated substrate,The humidity sensor includes the lower electrode being set on insulated substrate,Sense wet resin film on lower electrode,Upper electrode on sense wet resin film,The sense wet resin film extends outwardly and covers to metal thin film resistance body,Two angle parts that the sense wet resin film corresponds to metal thin film resistance body She You not hole portion,The metal thin film resistance body corresponding aperture position has installed electrode cap,The sense wet resin film corresponds to the corner of lower electrode of humidity sensor and the angle of upper electrode is respectively equipped with perforation,The lower electrode is equipped with electrode cap with upper electrode at perforation.The sensor makes warm and humid sensor integration, convenient for the installation of particular surroundings.

Description

Sensor

Technical field

The utility model is related to a kind of sensing equipment, more particularly to a kind of sensor.

Background technology

In departments such as industrial and agricultural production, meteorology, environmental protection, national defence, scientific researches, it is often necessary to environment temperature and humidity simultaneously into Row detection and control, it is indispensable, such as the temperature and humidity observing and controlling in room, the observing and controlling of the temperature and humidity in automobile, factory Observing and controlling of temperature and humidity of working environment etc..Temperature sensor and humidity sensor point are usually respectively adopted in practical application Other to carry out observing and controlling to environment temperature and humidity, the area needed for installation is big, of high cost, especially applies this in environment measuring Size requires small occasion, and the sensor for installing split structure is highly inconvenient, to be improved.

Utility model content

The utility model proposes a kind of sensors, solve the problems such as taking up a large area in the prior art.

What the technical solution of the utility model was realized in：

A kind of sensor, including insulated substrate, on the insulated substrate and positioned at one side temperature sensor and set In on the insulated substrate and positioned at the humidity sensor of its opposite side, which includes the metal being set on insulated substrate Film resistor, the humidity sensor include the lower electrode being set on insulated substrate, the wet tree of the sense on the lower electrode Adipose membrane, the upper electrode on the sense wet resin film, the sense wet resin film extend outwardly and cover to the gold of temperature sensor Belong on film resistor, two angle parts of the metal thin film resistance body of the sense wet resin film corresponding temperature sensor She You not hole Portion, the metal thin film resistance body corresponding aperture position have installed electrode cap, which corresponds to the lower part electricity of humidity sensor The corner of pole and the angle of upper electrode are respectively equipped with perforation, which is equipped with electrode with upper electrode at perforation Cap.

Preferred embodiment is that the sense wet resin film is polyimide film.

Preferred embodiment is that the lower electrode is metallic film.

Preferred embodiment is that the insulated substrate is glass insulation plate or silicon insulation board.

Preferred embodiment is that the insulated substrate forms the silicon substrate of silicon dioxide film for its surface.

The beneficial effects of the utility model are：

The sensor of the utility model is sensed extraneous by the temperature in the temperature sensor senses external world by humidity sensor Humidity, make the integration of warm and humid sensor, convenient for the installation of particular surroundings, since temperature sensor is equipped with protective film, so as to It prevents the direct adhesive water in surface of its metal thin film resistance body and influences its accuracy.

Description of the drawings

It in order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor Under, it can also be obtained according to these attached drawings other attached drawings.

Fig. 1 is the overlooking the structure diagram of the utility model sensor；

Fig. 2 is sectional views of the Fig. 1 along line A-A.

In figure：

10th, insulated substrate；20th, temperature sensor；30th, humidity sensor；21st, metal thin film resistance body；31st, lower part electricity Pole；32nd, feel wet resin film；33rd, upper electrode；36th, hole portion；23rd, 35, electrode cap；38th, it perforates.

Specific embodiment

The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out It clearly and completely describes, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than whole Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work All other embodiments obtained shall fall within the protection scope of the present invention.

As shown in Figures 1 and 2, which includes insulated substrate 10, on the insulated substrate 10 and positioned at one side Temperature sensor 20 and on the insulated substrate 10 and positioned at its opposite side humidity sensor 30.

The insulated substrate 10 can be glass insulation plate or silicon insulation board.When it is implemented, the insulated substrate 10 is alternatively it Surface forms the silicon substrate of silicon dioxide film.

The temperature sensor 20 includes the metal thin film resistance body 21 being set on insulated substrate 10.

The humidity sensor 30 includes the lower electrode 31 being set on insulated substrate 10, the sense on the lower electrode 31 Wet resin film 32, the upper electrode 33 on the sense wet resin film 32.The lower electrode 31 is metallic film, specifically during production It can together be formed with the metal thin film resistance body 21 of temperature sensor 20.The sense wet resin film 32 extends outwardly and covers to temperature On the metal thin film resistance body 21 of sensor 20.

In the present embodiment, which is polyimide film.When it is implemented, the sense wet resin film 32 is alternatively The membrane body of other materials porous.The two corners of the metal thin film resistance body 21 of the 32 corresponding temperature sensor 20 of sense wet resin film Portion is respectively equipped with hole portion 36, which corresponds to 36 position of hole portion and be equipped with electrode cap 23.The sense wet resin film 32 The corner of lower electrode 31 of corresponding humidity sensor 30 is respectively equipped with perforation 42 with the angle of upper electrode 33, the lower electrode 31 are equipped with electrode cap 35 with upper electrode 33 at perforation 38.

During manufacture, the metal thin film resistance body of the temperature sensor and the upper electrode of humidity sensor can be by sputtering shape Into the sense wet resin film of humidity sensor to be formed by being coated with.

In use, sensing extraneous temperature by temperature sensor 20, extraneous humidity is sensed by humidity sensor 30, Make the integration of warm and humid sensor, convenient for the installation of particular surroundings, since sense wet resin film 32 is covered on temperature sensor 20, from And it prevents the direct adhesive water in surface of its metal thin film resistance body 21 and influences its accuracy.

The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model Protection domain within.

Claims (5)

1. a kind of sensor, it is characterised in that：Temperature including insulated substrate, on the insulated substrate and positioned at one side passes Sensor and on the insulated substrate and positioned at its opposite side humidity sensor, the temperature sensor include be set on insulated substrate On metal thin film resistance body, the humidity sensor include be set on insulated substrate on lower electrode, on the lower electrode Sense wet resin film, the upper electrode on the sense wet resin film, which, which extends outwardly and cover to temperature, passes On the metal thin film resistance body of sensor, two angle parts of the metal thin film resistance body of the sense wet resin film corresponding temperature sensor are other Equipped with hole portion, which has installed electrode cap, which corresponds to humidity sensor The corner of lower electrode and the angle of upper electrode are respectively equipped with perforation, which sets with upper electrode at perforation There is electrode cap.

2. sensor as described in claim 1, it is characterised in that：The sense wet resin film is polyimide film.

3. sensor as described in claim 1, it is characterised in that：The lower electrode is metallic film.

4. sensor as described in claim 1, it is characterised in that：The insulated substrate is glass insulation plate or silicon insulation board.

5. sensor as claimed in claim 4, it is characterised in that：The insulated substrate forms silicon dioxide film for its surface Silicon substrate.