CN207580995U - It is a kind of can be with the device of on-line tuning film flatness - Google Patents

It is a kind of can be with the device of on-line tuning film flatness Download PDF

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Publication number
CN207580995U
CN207580995U CN201721440495.5U CN201721440495U CN207580995U CN 207580995 U CN207580995 U CN 207580995U CN 201721440495 U CN201721440495 U CN 201721440495U CN 207580995 U CN207580995 U CN 207580995U
Authority
CN
China
Prior art keywords
lantern ring
magnetite
arc shaft
installing plate
haftplatte
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201721440495.5U
Other languages
Chinese (zh)
Inventor
耿万青
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anhui Jiabao Vacuum Science & Technology Co Ltd
Original Assignee
Anhui Jiabao Vacuum Science & Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anhui Jiabao Vacuum Science & Technology Co Ltd filed Critical Anhui Jiabao Vacuum Science & Technology Co Ltd
Priority to CN201721440495.5U priority Critical patent/CN207580995U/en
Application granted granted Critical
Publication of CN207580995U publication Critical patent/CN207580995U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Cleaning In General (AREA)

Abstract

The utility model offer is a kind of can be with the device of on-line tuning film flatness,Including magnetite one,Arc shaft,Preceding lantern ring,Magnetite two,Lantern ring afterwards,Installing plate,Connecting rod,Haftplatte,Connecting plate and electric telescopic rod,Preceding lantern ring is mounted on arc shaft front end,And it extends to inside arc shaft,Lantern ring is assemblied in arc shaft rear end afterwards,And it extends to inside arc shaft,Lantern ring is internally provided with magnetite one afterwards,One front end of magnetite is equipped with preceding lantern ring,Preceding lantern ring is mounted on rear lantern ring front end,And it extends to inside rear lantern ring,The installation and dismounting of rear lantern ring and preceding lantern ring and arc shaft are convenient in the design,Electric telescopic rod upper end is equipped with connecting plate,Connecting plate lower end is provided with connecting rod,Connecting rod lower end is equipped with installing plate,Installing plate lower end is provided with haftplatte,The design can clean rear lantern ring and preceding collar face,The utility model is easy to use,It is easy to operation,Stability is good,Reliability is high,Improve using effect.

Description

It is a kind of can be with the device of on-line tuning film flatness
Technical field
The utility model is a kind of can to belong to thin film processing techniques field with the device of on-line tuning film flatness.
Background technology
Film is a kind of thin and flexible transparent sheet.It is made of plastics, adhesive, rubber or other materials.Membrane science On be construed to:By atom, 2 dimension materials that molecule or ion deposition are formed in substrate surface.Film is widely used in electronics electricity Industries, the thin-film materials such as device, machinery, printing refer to thin metal or organic matter layer of the thickness between monatomic to several millimeters.Electricity Sub- semiconductor function device and optical coating are the main applications of thin film technique, during being processed to film, are needed Film flatness is adjusted using the device of adjustment film flatness.
Lantern ring on the device of existing whole film flatness is directly anchored on arc shaft, when certain on arc shaft When one lantern ring damages, the arc shaft for the lantern ring entirely installed integrally cannot all reuse, and increase cost, and replace arc The operation of shape axis is complex, inconvenient to use, in addition, cleaning mechanism is fitted without on existing adjustment film flatness device, After lantern ring and film contacts, the dust on film is liable to stick on lantern ring, make lantern ring to the flatness regulating effect of film compared with Difference, using effect are poor.
Utility model content
In view of the deficienciess of the prior art, the utility model aim be to provide one kind can be with on-line tuning film flatness Device, to solve the problems mentioned in the above background technology, the utility model is easy to use, easy to operation, and stability is good, can By property height, using effect is improved.
To achieve these goals, the utility model is to realize by the following technical solutions:One kind can be adjusted online The device of whole film flatness, including flatten unit, bearing, motor and cleaning mechanism, the cleaning mechanism is mounted on motor Upper end, the motor are assemblied in bearing right end, and the bearing is assemblied in flatten unit outer end, and the flatten unit upper end is provided with Cleaning mechanism, the flatten unit include magnetite one, arc shaft, preceding lantern ring, magnetite two and rear lantern ring, the arc shaft outer end Bearing is installed, the preceding lantern ring is mounted on arc shaft front end, and extends to inside arc shaft, and the rear lantern ring is assemblied in arc Shaft rear end, and extend to inside arc shaft, the rear lantern ring is internally provided with magnetite one, and one front end of magnetite is equipped with protheca Ring, the preceding lantern ring are mounted on rear lantern ring front end, and extend to inside rear lantern ring, the cleaning mechanism include installing plate, connecting rod, Haftplatte, connecting plate and electric telescopic rod, the electric telescopic rod are mounted on motor upper end, the electric telescopic rod upper end assembling There is connecting plate, the connecting plate lower end is provided with connecting rod, and the connecting rod lower end is equipped with installing plate, the installing plate lower end setting There is haftplatte, the haftplatte lower end is equipped with preceding lantern ring and rear lantern ring.
Further, there are two the connecting rod is set, the connecting rod is symmetrically mounted on installing plate upper end.
Further, the installing plate upper end is symmetrically assembled there are two threaded rod, and two threaded rods both pass through installing plate It is connected with haftplatte, and nut is mounted on two threaded rods, and nut is assemblied in installing plate upper end, and nut passes through screw thread It is connected with threaded rod, and two threaded rods are arranged on the outside of two connecting rods.
Further, one front end of magnetite is equipped with magnetite three, and magnetite three is mounted on preceding lantern ring rear end, the magnetite Two rear ends are equipped with magnetite four, and magnetite four is assemblied in rear lantern ring front end, and the preceding lantern ring and rear thimble structure are identical.
Further, there are two the bearing is set, the bearing is symmetrically mounted on arc shaft left and right ends.
Further, the motor is connected by fixing pin with rear lantern ring, it is described after lantern ring by fixing pin with Magnetite two is connected.
The beneficial effects of the utility model:The a kind of of the utility model can be with the device of on-line tuning film flatness, this Utility model is convenient for rear lantern ring and protheca because increasing magnetite one, arc shaft, preceding lantern ring, magnetite two and rear lantern ring, the design The installation and dismounting of ring and arc shaft, reduce cost, have saved resource, and reduce the difficulty of replacement, solve existing Whole film flatness device on lantern ring be directly anchored on arc shaft, when on arc shaft some lantern ring occur During damage, the arc shaft for the lantern ring entirely installed integrally cannot all reuse, and increase cost, and replace arc shaft operation more Complexity, it is inconvenient to use the drawbacks of.
The utility model can be to rear due to increase installing plate, connecting rod, haftplatte, connecting plate and electric telescopic rod, the design Lantern ring and preceding collar face are cleaned, and improve the regulating effect to film flatness, and using effect is good, solves existing Adjustment film flatness device on be fitted without cleaning mechanism, lantern ring with after film contacts, the dust on film easily adheres to On lantern ring, make the problem of lantern ring is poor to the flatness regulating effect of film, and using effect is poor.
The installation and dismounting of plate and haftplatte are easily installed because increasing threaded rod and nut, the design, because increasing magnetite Three and magnetite four, the design convenient for preceding lantern ring and rear lantern ring and arc shaft installation and dismounting, because increasing fixing pin, The design makes preceding lantern ring connect fastening with rear lantern ring, and rear lantern ring is fastenedly connected with magnetite two, and the utility model is easy to use, is convenient for Operation, stability is good, and reliability is high, improves using effect.
Description of the drawings
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other spies of the utility model Sign, objects and advantages will become more apparent upon:
Fig. 1 for the utility model is a kind of can be with the structure diagram of the device of on-line tuning film flatness;
Fig. 2 for the utility model is a kind of can be with the schematic diagram of flatten unit in the device of on-line tuning film flatness;
Fig. 3 for the utility model is a kind of can be with the schematic diagram of cleaning mechanism in the device of on-line tuning film flatness;
In figure:1- flatten units, 2- bearings, 3- motors, 4- cleaning mechanisms, 11- magnetites one, 12- arc shafts, 13- prothecas Lantern ring, 41- installing plates, 42- connecting rods, 43- haftplattes, 44- connecting plates, 45- electric telescopic rods after ring, 14- magnetites two, 15-.
Specific embodiment
To be easy to understand technical means, creative features, achievable purpose and effectiveness of the utility model, below With reference to specific embodiment, the utility model is expanded on further.
- Fig. 3 is please referred to Fig.1, the utility model provides a kind of technical solution:It is a kind of can be with on-line tuning film flatness Device, including flatten unit 1, bearing 2, motor 3 and cleaning mechanism 4, cleaning mechanism 4 is mounted on 3 upper end of motor, and motor 3 fills 2 right end of bearing is fitted over, bearing 2 is assemblied in 1 outer end of flatten unit, and 1 upper end of flatten unit is provided with cleaning mechanism 4.
Flatten unit 1 includes magnetite 1, arc shaft 12, preceding lantern ring 13, magnetite 2 14 and rear lantern ring 15, arc shaft 12 Outer end is equipped with bearing 2, and preceding lantern ring 13 is mounted on 12 front end of arc shaft, and extends to inside arc shaft 12, and rear lantern ring 15 assembles It in 12 rear end of arc shaft, and extends to inside arc shaft 12, rear lantern ring 15 is internally provided with magnetite 1, one 11 front end of magnetite peace Equipped with preceding lantern ring 13, preceding lantern ring 13 is mounted on rear 15 front end of lantern ring, and extends to inside rear lantern ring 15, which is convenient for rear lantern ring 15 and the installation and dismounting of preceding lantern ring 13 and arc shaft 12, reduce cost.
Cleaning mechanism 4 includes installing plate 41, connecting rod 42, haftplatte 43, connecting plate 44 and electric telescopic rod 45, electric expansion Bar 45 is mounted on 3 upper end of motor, and 45 upper end of electric telescopic rod is equipped with connecting plate 44, and 44 lower end of connecting plate is provided with connecting rod 42, 42 lower end of connecting rod is equipped with installing plate 41, and 41 lower end of installing plate is provided with haftplatte 43, before 43 lower end of haftplatte is equipped with lantern ring 13 with And rear lantern ring 15, the design can clean rear lantern ring 15 and 13 surface of preceding lantern ring.
There are two connecting rod 42 is set, connecting rod 42 is symmetrically mounted on 41 upper end of installing plate, and 41 upper end of installing plate is symmetrically equipped with two A threaded rod, and two threaded rods both pass through installing plate 41 and are connected with haftplatte 43, and are mounted on nut on two threaded rods, And nut is assemblied in 41 upper end of installing plate, and nut is connected by screw thread with threaded rod, and two threaded rods are arranged on two 42 outside of connecting rod, one 11 front end of magnetite is equipped with magnetite three, and magnetite three is mounted on preceding 13 rear end of lantern ring, 2 14 rear end of magnetite peace Equipped with magnetite four, and magnetite four is assemblied in rear 15 front end of lantern ring, and preceding lantern ring 13 and 15 structure of rear lantern ring are identical, and bearing 2 is equipped with Two, bearing 2 is symmetrically mounted on 12 left and right ends of arc shaft, and motor 3 is connected by fixing pin with rear lantern ring 15, rear lantern ring 15 are connected by fixing pin with magnetite 2 14.
Specific embodiment:In progress in use, staff first checks the utility model, check whether and deposit In defect, it can not just carry out using if there is defect, need that maintenance personal is notified to repair at this time, if do not deposited It can be carried out using if problem, in use, staff first starts motor 3, the work band dynamic bearing 2 of motor 3 rotates, axis Holding 2 rotations drives arc shaft 12 to rotate, and lantern ring 13 and rear lantern ring 15 rotate before the rotation of arc shaft 12 drives simultaneously, preceding lantern ring 13 And rear lantern ring 15 rotates and flatness adjusting is carried out to film, while the preceding lantern ring 13 rotated and rear lantern ring 15 connect with haftplatte 43 It touches, haftplatte 43 pastes the dust that preceding lantern ring 13 and rear 15 surface of lantern ring adhere to, and realizes to preceding lantern ring 13 and rear enclosure Ring 15 is cleaned, and when needing to clean haftplatte 43, staff starts electric telescopic rod 45,45 work of electric telescopic rod Make that connecting plate 44 is driven to move up, connecting plate 44, which moves up, drives connecting rod 42 to move up, and connecting rod 42 moves up simultaneously Installing plate 41 and haftplatte 43 is driven to move up, when haftplatte 43 is moved to proper height, staff closes electric expansion Bar 45, then rotating nut, since nut is connected with threaded rod by screw thread, therefore nut rotation moves up simultaneously, realizes Locking nut is detached with threaded rod, and then staff moves down haftplatte 43, realizes that haftplatte 43 is detached with installing plate 41, Then haftplatte 43 is cleaned, which can clean preceding lantern ring 13 and rear lantern ring 15, improve flatness adjusting Effect.
When current lantern ring 13 or rear lantern ring 15 damage, lantern ring 13 before staff moves forward is realized preceding lantern ring 13 are detached with arc shaft 12 and rear lantern ring 15, are then moved backward rear lantern ring 15, are realized rear lantern ring 15 and arc shaft 12 are detached, and then replace intact preceding lantern ring 13 and rear lantern ring 15, the design are easily installed and dismantle.
The basic principle of the utility model and main feature and the advantages of the utility model has been shown and described above, for For those skilled in the art, it is clear that the utility model is not limited to the details of above-mentioned exemplary embodiment, and without departing substantially from this In the case of the spirit or essential attributes of utility model, the utility model can be realized in other specific forms.Therefore, no matter From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the utility model is by institute Attached claim rather than above description limit, it is intended that will fall within the meaning and scope of the equivalent requirements of the claims All changes are embraced therein.Any reference numeral in claim should not be considered as to the involved right of limitation It is required that.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should It considers the specification as a whole, the technical solutions in each embodiment can also be properly combined, forms those skilled in the art The other embodiment being appreciated that.

Claims (6)

1. a kind of can be with the device of on-line tuning film flatness, including flatten unit (1), bearing (2), motor (3) and clear Clean mechanism (4), it is characterised in that:The cleaning mechanism (4) is assemblied in bearing mounted on motor (3) upper end, the motor (3) (2) right end, the bearing (2) are assemblied in flatten unit (1) outer end, and flatten unit (1) upper end is provided with cleaning mechanism (4);
The flatten unit (1) includes magnetite one (11), arc shaft (12), preceding lantern ring (13), magnetite two (14) and rear lantern ring (15), arc shaft (12) outer end is equipped with bearing (2), and the preceding lantern ring (13) is prolonged mounted on arc shaft (12) front end It is internal to extend to arc shaft (12), the rear lantern ring (15) is assemblied in arc shaft (12) rear end, and extends to arc shaft (12) inside, Lantern ring (15) is internally provided with magnetite one (11) after described, and described one (11) front end of magnetite is equipped with preceding lantern ring (13), before described Lantern ring (13) is mounted on rear lantern ring (15) front end, and it is internal to extend to rear lantern ring (15);
The cleaning mechanism (4) includes installing plate (41), connecting rod (42), haftplatte (43), connecting plate (44) and electric telescopic rod (45), the electric telescopic rod (45) is equipped with connecting plate mounted on motor (3) upper end, electric telescopic rod (45) upper end (44), connecting plate (44) lower end is provided with connecting rod (42), and connecting rod (42) lower end is equipped with installing plate (41), the peace Loading board (41) lower end is provided with haftplatte (43), and haftplatte (43) lower end is equipped with preceding lantern ring (13) and rear lantern ring (15).
2. it is according to claim 1 it is a kind of can be with the device of on-line tuning film flatness, it is characterised in that:The connecting rod (42) there are two setting, the connecting rod (42) is symmetrically mounted on installing plate (41) upper end.
3. it is according to claim 1 it is a kind of can be with the device of on-line tuning film flatness, it is characterised in that:The installation Plate (41) upper end is symmetrically assembled there are two threaded rod, and two threaded rods both pass through installing plate (41) and are connected with haftplatte (43), And nut is mounted on two threaded rods, and nut is assemblied in installing plate (41) upper end, and nut passes through screw thread and threaded rod It is connected, and two threaded rods are arranged on the outside of two connecting rods (42).
4. it is according to claim 1 it is a kind of can be with the device of on-line tuning film flatness, it is characterised in that:The magnetite One (11) front end is equipped with magnetite three, and magnetite three is mounted on preceding lantern ring (13) rear end, and described two (14) rear end of magnetite is equipped with Magnetite four, and magnetite four is assemblied in rear lantern ring (15) front end, the preceding lantern ring (13) and rear lantern ring (15) structure are identical.
5. it is according to claim 1 it is a kind of can be with the device of on-line tuning film flatness, it is characterised in that:The bearing (2) there are two setting, the bearing (2) is symmetrically mounted on arc shaft (12) left and right ends.
6. it is according to claim 1 it is a kind of can be with the device of on-line tuning film flatness, it is characterised in that:The motor (3) it is connected by fixing pin with rear lantern ring (15), the rear lantern ring (15) is connected by fixing pin with magnetite two (14) It connects.
CN201721440495.5U 2017-11-01 2017-11-01 It is a kind of can be with the device of on-line tuning film flatness Expired - Fee Related CN207580995U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721440495.5U CN207580995U (en) 2017-11-01 2017-11-01 It is a kind of can be with the device of on-line tuning film flatness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721440495.5U CN207580995U (en) 2017-11-01 2017-11-01 It is a kind of can be with the device of on-line tuning film flatness

Publications (1)

Publication Number Publication Date
CN207580995U true CN207580995U (en) 2018-07-06

Family

ID=62730484

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721440495.5U Expired - Fee Related CN207580995U (en) 2017-11-01 2017-11-01 It is a kind of can be with the device of on-line tuning film flatness

Country Status (1)

Country Link
CN (1) CN207580995U (en)

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CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180706

Termination date: 20201101