CN207541346U - The polarization apparatus for turning modulation that a kind of silicon substrate integrates - Google Patents

The polarization apparatus for turning modulation that a kind of silicon substrate integrates Download PDF

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CN207541346U
CN207541346U CN201721741898.3U CN201721741898U CN207541346U CN 207541346 U CN207541346 U CN 207541346U CN 201721741898 U CN201721741898 U CN 201721741898U CN 207541346 U CN207541346 U CN 207541346U
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silicon substrate
polarization
phase shifter
beam splitter
bundling device
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龚攀
刘建宏
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Anhui Quantum Communication Technology Co Ltd
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Anhui Quantum Communication Technology Co Ltd
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Abstract

The utility model discloses the polarization apparatus for turning modulation that silicon substrate integrates, and including beam splitter, polarization rotation bundling device and silicon substrate phase shifter, beam splitter is connected to polarization rotation bundling device by silicon substrate phase shifter.By the beam splitter treated flashlight, polarization rotation bundling device is entered after being modulated by silicon substrate phase shifter, which can be obtained arbitrary linearly polarized light and circularly polarized light.Again by adding optical directional coupler, arbitrary ellipse polarised light can also be obtained.The utility model has the advantage of:The silicon substrate integrated polarizing Rotating Modulator can obtain arbitrary linearly polarized light and circularly polarized light, then by adding optical directional coupler, can also obtain arbitrary ellipse polarised light.And the utility model overall volume is small, at low cost, it is compatible with existing CMOS technology, and Polarization Modulation is simple, rate is high.

Description

The polarization apparatus for turning modulation that a kind of silicon substrate integrates
Technical field
The utility model is related to a kind of silicon-based devices of integrated optics, are more particularly to a kind of silicon substrate polarization Rotating Modulator Part.
Background technology
Refering to Figure 1, being the common polarization apparatus for turning modulation structure diagram of existing one kind, existing polarization revolves Turn modulating device using materials such as discrete piezoelectric ceramics, birefringece crystals, including coupling device 2, polarization optics 3, piezoelectricity Ceramic component 4, coupling device 5 and modulation controller 7, coupling device 2, polarization optics 3, piezo ceramic element 4, coupling Device 5 is placed in order, and the central shaft of coupling device 2, polarization optics 3, piezo ceramic element 4, coupling device 5 is one On straight line, modulation controller 7 connects piezo ceramic element 4.Wherein coupling device 2 and coupling device 5 have alignment function.It is defeated Enter light 1 by after the coupling device 2 with alignment function by polarization optics 3, subsequently into the adjustable pressure of birefringence Electroceramics component 4, piezo ceramic element 4 by modulation controller 7 control, by the light of piezo ceramic element 4 finally by tool The coupling device 5 for having collimating effect exports left or right rotation circularly polarized light 6.
For existing polarization apparatus for turning modulation because using multiple independent components, volume is big, not easy of integration, and usually only obtains Circularly polarized light is obtained, random polarization light can not be obtained.
Utility model content
The technical problem to be solved by the utility model is to provide a kind of high integration, small and can be appointed The polarization apparatus for turning modulation that the silicon substrate of meaning polarised light integrates.
The utility model is to solve above-mentioned technical problem by the following technical programs:The polarization rotation that a kind of silicon substrate integrates Modulating device is connected including beam splitter, polarization rotation bundling device and silicon substrate phase shifter, beam splitter by silicon substrate phase shifter It is connected to polarization rotation bundling device.
Optimization, the output terminal of the beam splitter is connected to polarization rotation bundling device by silicon substrate phase shifter all the way, separately It is directly connected to polarization rotation bundling device all the way.
Optimization, the light path between the beam splitter, silicon substrate phase shifter, polarization rotation bundling device passes through planar optical waveguide Form light connects channel.
Optimization, the polarization apparatus for turning modulation which integrates further includes optical directional coupler, the beam splitter Output terminal is connected respectively to optical directional coupler by two-way silicon substrate phase shifter, and the output terminal of optical directional coupler passes through silicon all the way Base phase shifter is connected to polarization rotation bundling device, and another way is directly connected to polarization rotation bundling device.
Optimization, the beam splitter, optical directional coupler, polarization rotation bundling device and three tunnel silicon substrate phase shifters it Between light path pass through planar optical waveguide formed light connects channel.
Optimization, the optical directional coupler is the photo-coupler of multi-mode interferometer or the photo-coupler of X branches.
As another embodiment, the polarization apparatus for turning modulation which integrates can also include at least two tunable opticals Attenuator, the output terminal of the beam splitter pass sequentially through at least one adjustable optical attenuator, at least one silicon substrate phase shift all the way Polarization rotation bundling device is connected to after device, the another way of the output terminal of the beam splitter passes through at least one adjustable optical attenuator It is connected to polarization rotation bundling device.
Optimization, by flat between the beam splitter, adjustable optical attenuator, silicon substrate phase shifter and polarization rotation bundling device Face optical waveguide establishes light connects channel.
Optimization, above-mentioned silicon substrate phase shifter is using single driving phase shifter of line of rabbet joint GS structures or using co-planar waveguide GSG The double drive phase shifter of structure.
Optimization, above-mentioned beam splitter is the beam splitter of multi-mode interferometer or the beam splitter of Y-branch.
The utility model has the following advantages compared with prior art:The silicon substrate integrated polarizing apparatus for turning modulation can be appointed Meaning linearly polarized light and circularly polarized light.Again by adding optical directional coupler, arbitrary ellipse polarised light can also be obtained.And this reality It is small, at low cost with novel overall volume and compatible with existing CMOS technology, and Polarization Modulation is simple, rate is high.
Description of the drawings
Fig. 1 is the common polarization apparatus for turning modulation structure diagram of existing one kind;
Fig. 2 is the structure diagram of polarization apparatus for turning modulation that the silicon substrate of the utility model embodiment one integrates;
Fig. 3 is the structure diagram of polarization apparatus for turning modulation that the silicon substrate of the utility model embodiment two integrates;
Fig. 4 is the structure diagram of polarization apparatus for turning modulation that the silicon substrate of the utility model embodiment three integrates.
Specific embodiment
Elaborate below to the embodiment of the utility model, the present embodiment using technical solutions of the utility model before It puts and is implemented, give detailed embodiment and specific operating process, but the scope of protection of the utility model is unlimited In following embodiments.
Embodiment one
As shown in Fig. 2, the polarization apparatus for turning modulation that the present embodiment silicon substrate integrates includes beam splitter 100, polarization rotation Bundling device 200 and all the way silicon substrate phase shifter 300.
The output terminal of the beam splitter 100 is connected to polarization rotation bundling device 200 by silicon substrate phase shifter 300 all the way, Another way is directly connected to polarization rotation bundling device 200.
Light path between the beam splitter 100, silicon substrate phase shifter 300, polarization rotation bundling device 200 passes through plane light wave It leads to form light connects channel.The planar optical waveguide is corresponding with the pattern for transmitting optical signal.
After flashlight is handled by the beam splitter 100, it is divided into the polarization two-way light identical with power, wherein signal all the way Light enters polarization rotation bundling device 200 after being modulated by silicon substrate phase shifter 300, another way flashlight is directly entered polarization rotating close beam Device 200, two paths of signals light export after polarization rotation bundling device 200 closes beam, which can obtain Arbitrary linearly polarized light and circularly polarized light.Polarization rotation bundling device 200 is to wherein arbitrary all the way and only to being polarized all the way just Hand over rotation.
Embodiment two
The silicon substrate polarization apparatus for turning modulation of above-described embodiment one can not obtain elliptically polarized light, and the present embodiment is to above-mentioned reality The silicon substrate polarization apparatus for turning modulation for applying example one is further improved.
As shown in figure 3, the polarization apparatus for turning modulation that the present embodiment silicon substrate integrates includes beam splitter 102, light orientation coupling Clutch 202, polarization rotation 302 and three tunnel silicon substrate phase shifter of bundling device.
The output terminal of the beam splitter 102 is connected respectively to optical directional coupler 202, light by two-way silicon substrate phase shifter The output terminal of directional coupler 202 is connected to polarization rotation bundling device 302 by silicon substrate phase shifter all the way, and another way is directly connected to Bundling device 302 is rotated to polarization.
The beam splitter 102, optical directional coupler 202, polarization rotation 302 and three tunnel silicon substrate phase shifter of bundling device Between light path pass through planar optical waveguide formed light connects channel.The planar optical waveguide is opposite with the pattern for transmitting optical signal It should.
Polarised light is divided into two-way by the planar optical waveguide into the beam splitter 102, respectively through the silicon substrate phase shift Enter after optical directional coupler 202 is handled after device processing and obtain the first modulation light and the second modulation light two-way light, wherein first adjusts Light processed enters polarization rotation bundling device 302 after silicon substrate phase shifter processing, and the second modulation light is directly entered the polarization Bundling device 302 is rotated, two-way light can obtain arbitrary linearly polarized light, elliptical polarization after the polarization rotation bundling device 302 is handled Light, including circularly polarized light.The polarization rotation bundling device 302 is to wherein arbitrary all the way and only to carrying out polarized orthogonal rotation all the way Turn.
Usual beam splitter 102 handles obtained two-way light Amplitude Ration and is not easy to adjust, therefore uses beam splitter 102 and light Silicon substrate phase shifter between directional coupler 202 and the beam splitter 102 and optical directional coupler 202 adjusts two-way light Amplitude Ration.
Preferably, the optical directional coupler 202 is the photo-coupler of multi-mode interferometer or the photo-coupler of X branches.
The silicon substrate phase shifter is used to implement the phase shift of optical signal.
Embodiment three
As shown in figure 4, in the embodiment, the polarization apparatus for turning modulation that silicon substrate integrates includes beam splitter 104, at least two A adjustable optical attenuator 204, at least one silicon substrate phase shifter 304 and polarization rotation bundling device 404.
The output terminal of the beam splitter 104 passes sequentially through at least one adjustable optical attenuator 204, at least one silicon all the way Polarization rotation bundling device 404 is connected to after base phase shifter 304, the another way of the output terminal of the beam splitter 104 passes through at least One adjustable optical attenuator 204 is connected to polarization rotation bundling device 404.
After flashlight (single polarization, such as TE light) is handled by the beam splitter 104, obtain two-way and polarize identical first Flashlight and second signal light;First flashlight is decayed by adjustable optical attenuator 204 and is adjusted by silicon substrate phase shifter 304 It is made to the first modulation light, the second signal light obtains the second modulation light after the attenuation of adjustable optical attenuator 204, described First modulation light and the second modulation light obtain each polarization state light after closing beam by polarization rotation bundling device 404, as linear polarization, Circular polarization includes elliptically polarized light, so as to obtain different polarization states light needed for quantum key distribution agreement.
Preferably, the beam splitter 104, adjustable optical attenuator 204, silicon substrate phase shifter 304 and polarization rotation bundling device Light connects channel is established by planar optical waveguide between 404
Preferably, the pattern of optical signal of the planar optical waveguide with transmitting is corresponding.
Adjustable optical attenuator is placed on two arms of polarization apparatus for turning modulation by this programme, since the two arms upload Defeated light is single polarization, therefore can solve the problems, such as the Polarization Dependent Loss caused by variable optical attenuation.
Preferably, above-mentioned silicon substrate phase shifter is using single driving phase shifter of line of rabbet joint GS structures or using co-planar waveguide GSG The double drive phase shifter of structure.
Preferably, above-mentioned beam splitter is the beam splitter of multi-mode interferometer or the beam splitter of Y-branch.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this All any modification, equivalent and improvement made within the spirit and principle of utility model etc., should be included in the utility model Protection domain within.

Claims (10)

1. a kind of polarization apparatus for turning modulation that silicon substrate integrates, which is characterized in that bundling device is rotated including beam splitter, polarization, And silicon substrate phase shifter, beam splitter are connected to polarization rotation bundling device by silicon substrate phase shifter.
2. the polarization apparatus for turning modulation that a kind of silicon substrate according to claim 1 integrates, which is characterized in that the smooth beam splitting The output terminal of device is connected to polarization rotation bundling device by silicon substrate phase shifter all the way, and another way is directly connected to polarization rotating close beam Device.
3. the polarization apparatus for turning modulation that a kind of silicon substrate according to claim 2 integrates, which is characterized in that the smooth beam splitting Light path between device, silicon substrate phase shifter, polarization rotation bundling device forms light connects channel by planar optical waveguide.
4. the polarization apparatus for turning modulation that a kind of silicon substrate according to claim 1 integrates, which is characterized in that further include light and determine To coupler, the output terminal of the beam splitter is connected respectively to optical directional coupler, light orientation by two-way silicon substrate phase shifter The output terminal of coupler is connected to polarization rotation bundling device by silicon substrate phase shifter all the way, and another way is directly connected to polarization rotation Bundling device.
5. the polarization apparatus for turning modulation that a kind of silicon substrate according to claim 4 integrates, which is characterized in that the smooth beam splitting Light path between device, optical directional coupler, polarization rotation bundling device and three tunnel silicon substrate phase shifters is formed by planar optical waveguide Light connects channel.
6. the polarization apparatus for turning modulation that a kind of silicon substrate according to claim 4 integrates, which is characterized in that the light orientation Coupler is the photo-coupler of multi-mode interferometer or the photo-coupler of X branches.
7. the polarization apparatus for turning modulation that a kind of silicon substrate according to claim 1 integrates, which is characterized in that further include at least Two adjustable optical attenuators, the output terminal of the beam splitter pass sequentially through at least one adjustable optical attenuator, at least one all the way Be connected to polarization rotation bundling device after a silicon substrate phase shifter, the another way of the output terminal of the beam splitter by it is at least one can Optical attenuator is connected to polarization rotation bundling device.
8. the polarization apparatus for turning modulation that a kind of silicon substrate according to claim 7 integrates, which is characterized in that the smooth beam splitting Light connects channel is established by planar optical waveguide between device, adjustable optical attenuator, silicon substrate phase shifter and polarization rotation bundling device.
9. the polarization apparatus for turning modulation that a kind of silicon substrate according to claim 1 integrates, which is characterized in that the silicon substrate is moved Phase device is using single driving phase shifter of line of rabbet joint GS structures or the double drive phase shifter using co-planar waveguide GSG structures.
10. the polarization apparatus for turning modulation integrated according to a kind of silicon substrate of claim 1 to 9 any one of them, which is characterized in that The beam splitter is the beam splitter of multi-mode interferometer or the beam splitter of Y-branch.
CN201721741898.3U 2017-12-14 2017-12-14 The polarization apparatus for turning modulation that a kind of silicon substrate integrates Active CN207541346U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109960045A (en) * 2017-12-14 2019-07-02 科大国盾量子技术股份有限公司 A kind of polarization apparatus for turning modulation that silicon substrate is integrated
CN110166233A (en) * 2019-05-14 2019-08-23 中国科学院半导体研究所 A kind of on piece encoder

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109960045A (en) * 2017-12-14 2019-07-02 科大国盾量子技术股份有限公司 A kind of polarization apparatus for turning modulation that silicon substrate is integrated
CN109960045B (en) * 2017-12-14 2024-03-15 科大国盾量子技术股份有限公司 Silicon-based integrated polarization rotation modulation device
CN110166233A (en) * 2019-05-14 2019-08-23 中国科学院半导体研究所 A kind of on piece encoder
CN110166233B (en) * 2019-05-14 2020-08-04 中国科学院半导体研究所 On-chip encoder

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