CN207537597U - A kind of ingot furnace inner furnace body structure with heat preservation and heat sinking function - Google Patents

A kind of ingot furnace inner furnace body structure with heat preservation and heat sinking function Download PDF

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Publication number
CN207537597U
CN207537597U CN201721673997.2U CN201721673997U CN207537597U CN 207537597 U CN207537597 U CN 207537597U CN 201721673997 U CN201721673997 U CN 201721673997U CN 207537597 U CN207537597 U CN 207537597U
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furnace body
heat
inner furnace
control
rod
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肖凌超
吴君立
徐秋强
马泰
王江杰
雷阳
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ZHEJIANG SUNOLOGY CO Ltd
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ZHEJIANG SUNOLOGY CO Ltd
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Abstract

The utility model provides a kind of ingot furnace inner furnace body structure with heat preservation and heat sinking function, ingot furnace includes external furnace body, inner furnace body, ceramic silica crucible and calandria, calandria is wrapped on the outer wall of ceramic silica crucible, inner furnace body is set in the outer surface of calandria, and there is gap between inner furnace body and calandria, several reflecting plates are provided on inner furnace body, multiple reflecting plates on same longitudinal straight line are driven by a control-rod, two plate faces of reflecting plate are coated with heat-reflective coating, and control-rod is longitudinally plugged on inner furnace body;The inner wall area of inner furnace body between two control-rods is referred to as coated surface, and heat-reflective coating and heat absorbing coating are coated with respectively on adjacent coated surface.The utility model has many advantages, such as that heat insulation effect is good, radiating efficiency is high.

Description

A kind of ingot furnace inner furnace body structure with heat preservation and heat sinking function
Technical field
The utility model is related to a kind of ingot furnace, more particularly to a kind of ingot furnace inner furnace body with heat preservation and heat sinking function Structure.
Background technology
What the growth of polysilicon was mainly completed by oriented growth of the silicon material in polycrystalline silicon ingot or purifying furnace.In this mistake Cheng Zhong, polycrystalline silicon raw material are undergone in ingot furnace from solid-state to fusing, then long brilliant to solid growth course.Entire production process It needs to consume a large amount of electric energy, at present, the average energy consumption index of industry is that 1 kilogram of polysilicon of every production needs 8 degree of power consumption, if flat Per stove according to 620 kilograms of dress silicon materials, one stove of production needs 4960 degree of electricity consumption.
Application No. is【CN201410107701.5】Chinese patent in, disclosing the utility model, to provide one kind more Crystal silicon ingot furnace energy saver, with solve existing polycrystalline silicon ingot or purifying furnace in process of production thermal losses greatly so as to cause power consumption Measure the technical issues of big;Including polycrystalline silicon ingot or purifying furnace upper furnace body and polycrystalline silicon ingot or purifying furnace lower furnace body, the stove on polycrystalline silicon ingot or purifying furnace The top of body is provided with heat-insulation cage lifting gear, heat-insulation cage lifting gear and the heat-insulation cage machinery set in polycrystalline silicon ingot or purifying furnace It links together, is provided with insulation quilt on the surrounding side wall of heat-insulation cage, water cooling is provided on the furnace wall of polycrystalline silicon ingot or purifying furnace Set, vertically vertical direction is provided with rectangle shutter on the madial wall of polycrystalline silicon ingot or purifying furnace upper furnace body, is cast in polysilicon Vertically vertical direction is provided with lower rectangle shutter on the madial wall of ingot stove lower furnace body, is set on upper rectangle blade of louver window There is upper rectangle blade of louver window drive shaft, rectangle hundred is fixedly installed in one end of upper rectangle blade of louver window drive shaft Leaf window blade drive gear, is provided with lower rectangle blade of louver window drive shaft, in lower rectangle on lower rectangle blade of louver window One end of blade of louver window drive shaft is fixedly installed lower rectangle blade of louver window drive gear, on the lateral wall of heat-insulation cage Rack-plate base plate is fixedly installed, vertically vertical direction has been positioned apart from driving cog under on rack-plate base plate Driving cog is provided with INTERMEDIATE TRANSMISSION GEAR, in upper between rack-plate base plate and upper rectangle blade of louver window drive gear Jie's transmission gear is engaged with upper rectangle blade of louver window drive gear, is driven in rack-plate base plate and lower rectangle blade of louver window Lower INTERMEDIATE TRANSMISSION GEAR is provided between gear, lower INTERMEDIATE TRANSMISSION GEAR is engaged with lower rectangle blade of louver window drive gear; High temperature endothermic coating is provided on the madial wall of polycrystalline silicon ingot or purifying furnace.
However, long crystalline substance process carries out successively from the bottom to top, there are not preferable synchronization structure, stove in the documents During chamber moves up, it should cool down successively to ingot furnace from the bottom to top, moreover, the louver structure provided in documents, In the presence of unreasonable, the defects of technological requirement is high is designed, in the high temperature environment, the scheme as described in documents be difficult have it is preferable Stability and durability.
Invention content
The purpose of this utility model is for the above problem existing for existing technology, is provided a kind of with heat preservation and heat dissipation The ingot furnace inner furnace body structure of function, technical problem to be solved in the utility model are how inner furnace body to be enable preferably to protect Mild quickly heat dissipation.
The purpose of this utility model can be realized by following technical proposal:A kind of ingot casting with heat preservation and heat sinking function Stove inner furnace body structure, which is characterized in that ingot furnace includes external furnace body, inner furnace body, ceramic silica crucible and calandria, the heating Body is wrapped on the outer wall of ceramic silica crucible, and the inner furnace body is set in the outer surface of calandria, and inner furnace body and calandria Between there is gap, be provided with several reflecting plates on the inner furnace body, multiple reflecting plates on same longitudinal straight line pass through A piece control-rod driving, two plate faces of the reflecting plate are coated with heat-reflective coating, and the control-rod is longitudinally plugged in inner furnace body On;The inner wall area of inner furnace body between two control-rods is referred to as coated surface, is coated with heat reflection painting on adjacent coated surface respectively Layer and heat absorbing coating.
In reflecting plate swing process, the coated surface where closing heat-reflective coating that can be selective is opened heat absorption and is applied Coated surface where layer, so as to radiate, coordinates the heat reflection of reflecting plate, heat can be made to concentrate on heat absorbing coating, carried High heat dissipation effect;Coated surface where closing heat absorbing coating that can also be selective, opens the coated surface where heat-reflective coating, Coordinate the heat reflection of reflecting plate, carry out Heat preservation, heat is avoided to scatter and disappear.
In a kind of above-mentioned ingot furnace inner furnace body structure with heat preservation and heat sinking function, offered on the inner furnace body With the one-to-one mounting hole of control-rod, the mounting hole has a notch, and the reflecting plate passes through the notch, the installation Hole is longitudinally opened in inner furnace body, and an axle sleeve is arranged on the control-rod, and the inner end of the reflecting plate is fixed on axle sleeve, institute It states and guide groove is offered on the inner wall of axle sleeve, the guide groove includes spiral helicine steering section, the approach section being vertically arranged and sets vertically That puts goes out slot section, and the upper end of the approach section connects the both ends for turning to section, the approach section with the lower end for going out slot section respectively Lower end perforation axle sleeve lower face, it is described go out slot section upper end perforation axle sleeve upper surface, the axle sleeve is rotatably connected on peace It fills in hole;There are one the guide pads that can be plugged in guide groove for fixed setting on the control-rod;The steering section of adjacent channels The hand of spiral is opposite.
During long crystalline substance, external furnace body moves up, and control-rod is driven to move up, so as to which the axle sleeve where reflecting plate be controlled to rotate, The direction of reflecting plate is made to change so that the state that reflecting plate is covered heating external surface by script large area changes into expansion The state of heat dissipation, so as to reach heat dissipation and external furnace body move up it is synchronous, it should be mentioned that:Longitudinally disposed multiple reflecting plates be by Under supreme one by one act.
In a kind of above-mentioned ingot furnace inner furnace body structure with heat preservation and heat sinking function, also have in the inner furnace body One waterway, the flow-stopping plate of an annular is inserted in the waterway, and the flow-stopping plate is fixed by several disc with external furnace body It is connected, coolant is filled in the waterway, coolant carries out heat exchange by a water circulation system.
It is synchronous with the reflecting plate to radiate under opening-wide state into the part waterway of cycle in radiation processes, make Heat can rapidly be absorbed by heat absorbing coating, and be taken away by water cycle, be quickly cooled down, to coordinate crystal production.
Water circulation system can be water pump water coke slurry is carried out to waterway or water pump and compressor set into heat dissipation Structure.
In the ingot furnace inner furnace body structure that there is heat preservation and heat sinking function in a kind of above-mentioned section, the flow-stopping plate and outer stove It is connected between body by the connecting plate of an annular, the control-rod is connected by bearing with connecting plate, the upper end of the control-rod It is further fixedly arranged on a control gear.
By the way that gear is controlled to rotate, thus it is possible to vary the state after the original state of reflecting plate and swing makes heat dissipation area can Control, can enable radiating efficiency and thermal requirements be controlled.
In a kind of above-mentioned ingot furnace inner furnace body structure with heat preservation and heat sinking function, the inner wall of the mounting hole is opened Equipped with several recesses one, the outer wall of the axle sleeve is uniformly provided with several recesses two, is rotatably connected in the recess one Steel ball, the steel ball can be partly caught in the recess two.
It is the structure of similar interference fit between axle sleeve and inner wall of the hole installing, fixes with inner furnace body under axle sleeve normality, also may be used To be rotated in the case where high torque acts on.
Description of the drawings
Fig. 1 is the part-structure schematic diagram of this ingot furnace.
Fig. 2 is the cross-sectional view of this ingot furnace.
Fig. 3 is that reflecting plate is in the structure diagram under radiating state in this ingot furnace.
Fig. 4 is structure diagram of the reflection under keeping warm mode in this ingot furnace.
Fig. 5 is the structure diagram between this ingot furnace bottom bracket axle and control-rod.
Fig. 6 is the dimensional structure diagram of this ingot furnace bottom bracket axle.
In figure, 11, external furnace body;12nd, inner furnace body;13rd, ceramic silica crucible;14th, calandria;21st, control-rod;22nd, it reflects Plate;23rd, heat-reflective coating;24th, heat absorbing coating;25th, mounting hole;26th, axle sleeve;3rd, guide groove;31st, section is turned to;32nd, approach section;33、 Go out slot section;4th, guide pad;51st, waterway;52nd, flow-stopping plate;53rd, connecting plate;6th, gear is controlled;71st, recess one;72nd, recess two; 73rd, steel ball.
Specific embodiment
It is specific embodiment of the utility model and with reference to attached drawing below, the technical solution of the utility model is made further Description, but the utility model is not limited to these embodiments.
As depicted in figs. 1 and 2, including external furnace body 11, inner furnace body 12, ceramic silica crucible 13 and calandria 14, external furnace body 11 lifting gears swooned about 11 with a driving external furnace body are connected, and calandria 14 is wrapped in the outer wall of ceramic silica crucible 13 On, inner furnace body 12 is set in the outer surface of calandria 14, and has gap between inner furnace body 12 and calandria 14, on inner furnace body 12 The temperature control device that 14 outer surface of calandria is radiated or kept the temperature is provided with, temperature control device includes being uniformly arranged on inner furnace body Control-rod 21 in 12 is longitudinally connected with several reflecting plates 22 on every control-rod 21, and two plate faces of reflecting plate 22 are coated with Heat-reflective coating 23,21 longitudinal direction of control-rod are plugged on inner furnace body 12, and control-rod 21 moves up can change instead one by one from the bottom to top The reflection angle of plate 22 is penetrated, control-rod 21 is fixedly linked with external furnace body 11.
During long crystalline substance, external furnace body 11 moves up, and control-rod 21 is driven to move up, so as to realize calandria by temperature control device The synchronous heat dissipation of 14 outer surfaces and synchronous heat preservation.
As shown in Figure 5 and Figure 6, temperature control device includes several and 21 one-to-one mounting hole 25 of control-rod, mounting hole 25 have a notch, and reflecting plate 22 passes through notch, and 25 longitudinal direction of mounting hole is opened in inner furnace body 12, and one is arranged on control-rod 21 Axle sleeve 26, the inner end of reflecting plate 22 are fixed on axle sleeve 26, and guide groove 3 is offered on the inner wall of axle sleeve 26, and guide groove 3 includes helical form Steering section 31, the approach section 32 being vertically arranged and what is be vertically arranged go out slot section 33, the upper end of approach section 32 and go out slot section 33 Lower end connects the both ends for turning to section 31 respectively, and the lower face of the lower end perforation axle sleeve 26 of approach section 32 goes out the upper of slot section 33 The upper surface of end perforation axle sleeve 26, axle sleeve 26 are rotatably connected in mounting hole 25;There are one can for fixed setting on control-rod 21 The guide pad 4 being plugged in guide groove 3;The hand of spiral of the steering section 31 of adjacent channels 3 is opposite.
During long crystalline substance, external furnace body 11 moves up, and control-rod 21 is driven to move up, so as to control the axle sleeve where reflecting plate 22 26 rotations, make the direction of reflecting plate 22 change so that reflecting plate 22 covers 14 outer surface of calandria by script large area State change into expansion heat dissipation state, so as to reach heat dissipation and external furnace body 11 move up it is synchronous, it should be mentioned that:It is longitudinally disposed Multiple reflecting plates 22 act one by one from the bottom to top.
The inner wall area of inner furnace body 12 between two control-rods 21 is referred to as coated surface, is coated with respectively on adjacent coated surface Heat-reflective coating 23 and heat absorbing coating 24;In 22 swing process of reflecting plate, can selectivity 23 institute of closing heat-reflective coating Coated surface, open the coated surface where heat absorbing coating 24, so as to radiate, coordinate the heat reflection of reflecting plate 22, can Heat is made to concentrate on heat absorbing coating 24, improves heat dissipation effect;Plated film where closing heat absorbing coating 24 that can also be selective The coated surface where heat-reflective coating 23 is opened in face, coordinates the heat reflection of reflecting plate 22, carries out Heat preservation, heat is avoided to dissipate It loses.
As depicted in figs. 1 and 2, in inner furnace body 12 also there is a waterway 51, the gear of an annular is inserted in waterway 51 Flowing plate 52, flow-stopping plate 52 are fixedly linked by several disc and external furnace body 11, and coolant is filled in waterway 51, and coolant is led to It crosses a water circulation system and carries out heat exchange.
It is same with the reflecting plate 22 that radiates under opening-wide state into the part waterway 51 of cycle in radiation processes Step, enables heat rapidly to be absorbed by heat absorbing coating 24, and is taken away by water cycle, is quickly cooled down, to coordinate crystal Production.
Water circulation system can be water pump water coke slurry is carried out to waterway 51 or water pump and compressor set into dissipate Heat structure.
It is connected between flow-stopping plate 52 and external furnace body 11 by the connecting plate 53 of an annular, control-rod 21 is by bearing with connecting Plate 53 is connected, and the upper end of control-rod 21 is further fixedly arranged on a control gear 6;By the way that gear 6 is controlled to rotate, thus it is possible to vary reflection State after the original state of plate 22 and swing makes heat dissipation area controllable, and radiating efficiency and thermal requirements can be enable to be controlled System.
As shown in figure 5, the inner wall of mounting hole 25 offers several recesses 1, if the outer wall of axle sleeve 26 is uniformly provided with A recess 2 72 is done, is rotatably connected to steel ball 73 in recess 1, steel ball 73 can be partly caught in recess 2 72;Axle sleeve 26 with It is the structure of similar interference fit between 25 inner wall of mounting hole, is fixed under 26 normality of axle sleeve with inner furnace body 12, it can also be larger Torque effect is lower to rotate.
As shown in Figure 3 and Figure 4, control-rod 21 moves straight up, can control 22 outer end of reflecting plate two-by-two against, and hide The coated surface for being coated with heat-reflective coating 23 is closed, makes to be coated with the coated surface of heat absorbing coating 24 and 14 outer wall face of calandria;Control-rod 21 move straight down, can control 22 outer end of reflecting plate two-by-two against and covering the coated surface for being coated with heat absorbing coating 24, make plating There are the coated surface of heat-reflective coating 23 and 14 outer wall face of calandria;The program is under best heat preservation and highest radiating efficiency state Scheme, the coated surface where heat absorbing coating 24 or the coated surface where heat-reflective coating 23 can be covered completely.
Heat absorbing coating 24 can be black chrome coating, and heat-reflective coating 23 can be that solar energy group company of the U.S. develops LO/MIT-1 type thermal insulating coatings.
Go out the upper end of slot section 33 and the lower end of upstream end and be respectively provided with a horn-like opening portion;So as to leading on control-rod 21 Guide groove 3 can be smoothly passed in and out to block 4.
The specific embodiments described herein are merely examples of the spirit of the present invention.The utility model institute Described specific embodiment can be done various modifications or additions or using similar by belonging to those skilled in the art Mode substitute, but without departing from the spirit of the present application or beyond the scope of the appended claims.

Claims (5)

1. a kind of ingot furnace inner furnace body (12) structure with heat preservation and heat sinking function, which is characterized in that ingot furnace includes outer stove Body (11), inner furnace body (12), ceramic silica crucible (13) and calandria (14), the calandria (14) are wrapped in ceramic quartzy earthenware On the outer wall of crucible (13), the inner furnace body (12) is set in the outer surface of calandria (14), and inner furnace body (12) and calandria (14) between there is gap, several reflecting plates (22) are provided on the inner furnace body (12), it is more on same longitudinal straight line A reflecting plate (22) is driven by a control-rod (21), and two plate faces of the reflecting plate (22) are coated with heat-reflective coating (23), the control-rod (21) is longitudinally plugged on inner furnace body (12);Inner furnace body (12) between two control-rods (21) it is interior Wall region is referred to as coated surface, is coated with heat-reflective coating (23) and heat absorbing coating (24) on adjacent coated surface respectively.
A kind of 2. ingot furnace inner furnace body structure with heat preservation and heat sinking function according to claim 1, which is characterized in that institute State to offer on inner furnace body (12) has one to lack with the one-to-one mounting hole (25) of control-rod (21), the mounting hole (25) Mouthful, the reflecting plate (22) is longitudinally opened in across the notch, the mounting hole (25) in inner furnace body (12), the control-rod (21) axle sleeve (26) is arranged on, the inner end of the reflecting plate (22) is fixed on axle sleeve (26), the axle sleeve (26) it is interior Guide groove (3) is offered on wall, the guide groove (3) is including spiral helicine steering section (31), the approach section (32) being vertically arranged and erects What is directly set goes out slot section (33), and the upper end of the approach section (32) connects steering section respectively with the lower end for going out slot section (33) (31) both ends, the approach section (32) lower end perforation axle sleeve (26) lower face, it is described go out slot section (33) upper end perforation The upper surface of axle sleeve (26), the axle sleeve (26) are rotatably connected in mounting hole (25);It is fixedly installed on the control-rod (21) There are one the guide pads (4) that can be plugged in guide groove (3);The hand of spiral of the steering section (31) of adjacent channels (3) is opposite.
A kind of 3. ingot furnace inner furnace body structure with heat preservation and heat sinking function according to claim 2, which is characterized in that institute Stating also has a waterway (51) in inner furnace body (12), the flow-stopping plate (52) of an annular, institute are inserted in the waterway (51) It states flow-stopping plate (52) to be fixedly linked by several disc and external furnace body (11), coolant is filled in the waterway (51), it is cold But liquid carries out heat exchange by a water circulation system.
A kind of 4. ingot furnace inner furnace body structure with heat preservation and heat sinking function according to claim 3, which is characterized in that institute It states and is connected between flow-stopping plate (52) and external furnace body (11) by the connecting plate (53) of an annular, the control-rod (21) passes through bearing It is connected with connecting plate (53), the upper end of the control-rod (21) is further fixedly arranged on a control gear (6).
A kind of 5. ingot furnace inner furnace body structure with heat preservation and heat sinking function according to claim 4, which is characterized in that institute The inner wall for stating mounting hole (25) offers several recesses one (71), and it is recessed that the outer wall of the axle sleeve (26) is uniformly provided with several Two (72) of mouth, the recess one (71) is interior to be rotatably connected to steel ball (73), and the steel ball (73) can partly be caught in the recess In two (72).
CN201721673997.2U 2017-12-05 2017-12-05 A kind of ingot furnace inner furnace body structure with heat preservation and heat sinking function Active CN207537597U (en)

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CN201721673997.2U CN207537597U (en) 2017-12-05 2017-12-05 A kind of ingot furnace inner furnace body structure with heat preservation and heat sinking function

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Application Number Priority Date Filing Date Title
CN201721673997.2U CN207537597U (en) 2017-12-05 2017-12-05 A kind of ingot furnace inner furnace body structure with heat preservation and heat sinking function

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CN207537597U true CN207537597U (en) 2018-06-26

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