CN207533614U - Silicon wafer cleaning basket - Google Patents
Silicon wafer cleaning basket Download PDFInfo
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- CN207533614U CN207533614U CN201721518121.0U CN201721518121U CN207533614U CN 207533614 U CN207533614 U CN 207533614U CN 201721518121 U CN201721518121 U CN 201721518121U CN 207533614 U CN207533614 U CN 207533614U
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- ratch
- card slot
- wafer cleaning
- silicon wafer
- type card
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Abstract
The utility model discloses a kind of silicon wafer cleaning basket, including a pair of brackets and the gaily decorated basket ratch being arranged between the pair of stent, wherein, the gaily decorated basket ratch is divided into fixed ratch and movable ratch；L-type card slot is both provided on each stent, the end set of the activity ratch has the bayonet lock of cuboid-type, and the bayonet lock can be fastened in the L-type card slot, realize the fixation of the movable ratch and a pair of stent.Overcome the fixation of existing silicon wafer cleaning basket top ratch there are the defects of, and provide a kind of silicon wafer cleaning basket, increase top movable ratch so as to avoid the occurrence of the effect that silicon chip top adhesion occurs and influences Wafer Cleaning, in addition reduce the fixed power paid between top movable ratch and stent, reduce labor intensity, improve working efficiency.
Description
Technical field
The utility model is related to silicon chip manufacturing technology fields, and in particular to a kind of silicon wafer cleaning basket.
Background technology
Silicon chip must be through strictly cleaning, because micropollution can lead to component failure, the mesh of cleaning in semiconductor devices production
Be remove surface contamination impurity, including organic matter and inorganic matter.The method for removing pollution has physical cleaning and chemical cleaning
Two kinds.
When being cleaned to silicon chip, using silicon wafer cleaning basket, chemical agent is not only due to corrosivity, Er Qieqing
The slot for washing the gaily decorated basket is conducive to uniformly separate silicon chip, does not stick together, influences the effect of cleaning.
Additionally, due in cleaning process, silicon chip top deforms upon and is sticked together in order to prevent, and existing silicon chip is clear
It washes and is provided with top ratch in the gaily decorated basket at the top of the gaily decorated basket, and for the fixation of top ratch, usually top ratch is inserted into
It is connected in the slot of two side plates and between the two using interference, so as to fulfill the fixation of top ratch and side plate, but this connects
It connects to the more demanding of operating personnel, working strength is larger.
In view of above-mentioned existing silicon wafer cleaning basket there are the defects of, the present inventor be based on be engaged in such product design system
Abundant for many years practical experience and professional knowledge are made, and coordinates the utilization of scientific principle, is actively subject to research and innovation, to found one kind
Silicon wafer cleaning basket makes it have more practicability.By constantly studying, designing, and after studying sample repeatedly and improving, eventually
In creating the utility model for having practical value.
Utility model content
It is lacked existing for the fixation of existing silicon wafer cleaning basket top ratch the main purpose of the utility model is that overcoming
It falls into, and a kind of silicon wafer cleaning basket is provided, increase top movable ratch so as to avoid the occurrence of silicon chip top and adhesion influence silicon occur
In addition the effect of piece cleaning reduces the fixed power paid between top movable ratch and stent, reduces labor intensity, improve work
Efficiency, thus more suitable for practicality, and with the utility value in industry.
The purpose of this utility model and its technical problem is solved using following technical scheme to realize.
Silicon wafer cleaning basket, including a pair of brackets and the gaily decorated basket ratch being arranged between the pair of stent, wherein,
The gaily decorated basket ratch is divided into fixed ratch and movable ratch；
L-type card slot is both provided on each stent, the end set of the activity ratch has the bayonet lock of cuboid-type,
The bayonet lock can be fastened in the L-type card slot, realize the fixation of the movable ratch and a pair of stent, and rotation is inserted into
The bayonet lock in the L-type card slot makes the bayonet lock be fastened in the L-type card slot.
As a kind of perferred technical scheme, the bayonet lock section（Perpendicular to the section in movable teeth pole length direction）For length
It is rectangular, the length of width of the rectangular length not less than the vertical edge of the L-type card slot and the horizontal edge no more than the L-type card slot,
The rectangular wide width for being not more than the L-type card slot vertical edge.
As a kind of perferred technical scheme, the junction of the vertical edge of the L-type card slot and horizontal edge is fillet, and is inserted into institute
The side for stating the bayonet lock in L-type card slot is arc surface.
As a kind of perferred technical scheme, it is provided with gear between the main part of the bayonet lock and the movable ratch
Plate, for preventing moving horizontally for the movable ratch.
As a kind of perferred technical scheme, the tooth and the long side in the cuboid-type section of the bayonet lock of the movable ratch
Vertically so that after the bayonet lock is fastened in the L-type card slot, the perpendicular downward state of tooth.
As a kind of perferred technical scheme, the fixed ratch includes three groups, is respectively arranged on the frame bottom
The first fixation ratch group, be arranged on the second fixation ratch group of the frame upper and be arranged on the of the stent interlude
Three fix ratch group, and the square space formed between the fixed ratch is used to place silicon chip to be cleaned.
As a kind of perferred technical scheme, the tooth of the first fixation ratch group is set up, and described second fixes tooth
Bar group is fixed in the tooth horizontal direction of ratch group with the third and is set.
Using above-mentioned technical proposal, following technique effect can be realized：
1）, the film trap that is formed by fixed ratch, silicon chip is evenly distributed in the gaily decorated basket, and the movable teeth of top setting
Bar further separates silicon chip, silicon chip top is avoided to stick together so as to influence the effect of cleaning；
2）, movable ratch and stent L-type card slot between it is easy to connect, and the power paid needed for rotation activity ratch compared with
It is firm that small, movable ratch is connect with stent.
Description of the drawings
Fig. 1 is the front view of the utility model silicon wafer cleaning basket；
Fig. 2 is the vertical view of the utility model silicon wafer cleaning basket；
Fig. 3 is the structure diagram of the utility model stent；
Fig. 4 is the structure diagram that the utility model fixes ratch；
Wherein：1- activity ratch, 2- fix ratch, 3-L type card slots, 4- stents, 5- bayonet locks.
Specific embodiment
Further to illustrate that the utility model is to reach the technological means and effect that predetermined purpose of utility model taken,
To according to the utility model proposes silicon wafer cleaning basket its specific embodiment, feature and its effect, be described in detail as after.
The utility model discloses a kind of silicon wafer cleaning baskets, including a pair of brackets 4 and are arranged between a pair of brackets 4
Gaily decorated basket ratch, wherein,
Gaily decorated basket ratch is divided into fixed ratch 2 and movable ratch 1；
L-type card slot 3 is both provided on each stent 4, L-type card slot 3 includes horizontal edge and vertical edge, and the end of movable ratch 1 is set
The bayonet lock 5 of cuboid-type is equipped with, bayonet lock 5 can be fastened in L-type card slot 3, realization activity ratch 1 and the fixation of a pair of brackets 4,
Specifically, the bayonet lock 5 in L-type card slot 3 is inserted into rotation, bayonet lock 5 is made to be fastened in the horizontal edge of L-type card slot 3 so that bayonet lock 5 can not
It moves in the vertical direction or in horizontal direction.
As a kind of perferred technical scheme, 5 section of bayonet lock（Perpendicular to the section of movable 1 length direction of ratch）It is rectangular
Shape, rectangular length is wide not less than the vertical edge of L-type card slot 3 and is not more than the length of the horizontal edge of L-type card slot 3 so that bayonet lock 5 limits
In the horizontal edge of L-type card slot 3, vertical movement, the rectangular wide width no more than 3 vertical edge of L-type card slot so that bayonet lock do not occur
5 can easily be inserted into L-type card slot 3.
As a kind of perferred technical scheme, the junction of the vertical edge of L-type card slot 3 and horizontal edge is fillet, and is inserted into L-type card
The side of bayonet lock 5 in slot 3 is arc surface.
As a kind of perferred technical scheme, baffle is provided between the main part of bayonet lock 5 and movable ratch 1, be used for
Moving horizontally for movable ratch 1 is prevented, specifically, the section of baffle is more than the section of movable ratch 1.
As a kind of perferred technical scheme, the tooth of movable ratch 1 is vertical with the long side in the cuboid-type section of bayonet lock 5,
So that after bayonet lock 5 is fastened in L-type card slot 3, the perpendicular downward state of tooth, thus after movable ratch 1 is inserted into L-type card slot 3,
The tooth of movable ratch 1 just blocks the top of silicon chip vertically downwards.
As a kind of perferred technical scheme, fixed ratch 2 includes three groups, is respectively arranged on the first of 4 bottom of stent
Fixed ratch group, the second fixation ratch group for being arranged on 4 top of stent and the third fixation ratch for being arranged on 4 interlude of stent
Group fixes the square space formed between ratch 2 and is used to place silicon chip to be cleaned.And first fixes ratch group, the second fixation tooth
Bar group, third fix the space formed between ratch group and movable ratch 1 and just accommodate silicon chip to be cleaned.
As a kind of perferred technical scheme, the tooth of the first fixation ratch group is set up, and second fixes ratch group and the
Three fix setting in the tooth horizontal direction of ratch group so that the tooth of fixed ratch 2 blocks silicon chip to be cleaned.
When in use, silicon chip to be cleaned is inserted into and fixes ratch group, the second fixation ratch group and third fixation tooth by first
In the slot that bar group is formed, after silicon chip has all been inserted, movable ratch 1 is put into the L-type card slot 3 of stent 4, and rotation activity
Ratch 1 is caught in the horizontal edge of L-type card slot 3, realizes the fixation of silicon chip, and prominent bayonet lock 5 can also be used as Wafer Cleaning to spend
The handle of basket facilitates the movement of the gaily decorated basket.
The above descriptions are merely preferred embodiments of the present invention, and not the utility model is made in any form
Limitation, although the utility model has been disclosed with preferred embodiment as above, be not limited to the utility model, it is any ripe
Professional and technical personnel is known, is not being departed from the range of technical solutions of the utility model, when in the technology using the disclosure above
Hold the equivalent embodiment made a little change or be modified to equivalent variations, as long as being without departing from technical solutions of the utility model
Hold, any simple modification, equivalent change and modification that foundation the technical essence of the utility model makees above example, still
Belong in the range of technical solutions of the utility model.
Claims (7)
1. silicon wafer cleaning basket, which is characterized in that including a pair of brackets（4）And it is arranged on the pair of stent（4）Between flower
Basket ratch, wherein,
The gaily decorated basket ratch is divided into fixed ratch（2）With movable ratch（1）；
Each stent（4）On be both provided with L-type card slot（3）, the activity ratch（1）End set have cuboid-type
Bayonet lock（5）, the bayonet lock（5）The L-type card slot can be fastened on（3）It is interior, realize the movable ratch（1）With a pair of branch
Frame（4）Fixation.
2. silicon wafer cleaning basket according to claim 1, which is characterized in that the bayonet lock（5）Section is rectangle, described
Rectangular length is not less than the L-type card slot（3）Vertical edge width and no more than the L-type card slot（3）Horizontal edge length, it is described
It is rectangular wide no more than the L-type card slot（3）The width of vertical edge.
3. silicon wafer cleaning basket according to claim 1 or 2, which is characterized in that the L-type card slot（3）Vertical edge with it is horizontal
The junction on side is fillet, and is inserted into the L-type card slot（3）The interior bayonet lock（5）Side be arc surface.
4. silicon wafer cleaning basket according to claim 1, which is characterized in that the bayonet lock（5）With the movable ratch（1）
Main part between be provided with baffle, for preventing the movable ratch（1）Move horizontally.
5. silicon wafer cleaning basket according to claim 1, which is characterized in that the activity ratch（1）Tooth and the card
Pin（5）Cuboid-type section long side it is vertical so that when the bayonet lock（5）It is fastened on the L-type card slot（3）It is described after interior
The perpendicular downward state of tooth.
6. silicon wafer cleaning basket according to claim 1, which is characterized in that the fixed ratch（2）Including three groups, respectively
To be arranged on the stent（4）First fixation ratch group of bottom is arranged on the stent（4）The second of top fixes ratch group
Be arranged on the stent（4）The third of interlude fixes ratch group, the fixed ratch（2）Between the square space that is formed use
In placement silicon chip to be cleaned.
7. silicon wafer cleaning basket according to claim 6, which is characterized in that set on the teeth directional of the first fixation ratch group
It puts, described second fixes ratch group fixes setting in the tooth horizontal direction of ratch group with the third.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721518121.0U CN207533614U (en) | 2017-11-13 | 2017-11-13 | Silicon wafer cleaning basket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721518121.0U CN207533614U (en) | 2017-11-13 | 2017-11-13 | Silicon wafer cleaning basket |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207533614U true CN207533614U (en) | 2018-06-26 |
Family
ID=62613562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721518121.0U Active CN207533614U (en) | 2017-11-13 | 2017-11-13 | Silicon wafer cleaning basket |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207533614U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107737765A (en) * | 2017-11-13 | 2018-02-27 | 常州市杰洋精密机械有限公司 | Silicon wafer cleaning basket |
-
2017
- 2017-11-13 CN CN201721518121.0U patent/CN207533614U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107737765A (en) * | 2017-11-13 | 2018-02-27 | 常州市杰洋精密机械有限公司 | Silicon wafer cleaning basket |
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