CN207528878U - A kind of automation chip strip test machine - Google Patents
A kind of automation chip strip test machine Download PDFInfo
- Publication number
- CN207528878U CN207528878U CN201721752796.1U CN201721752796U CN207528878U CN 207528878 U CN207528878 U CN 207528878U CN 201721752796 U CN201721752796 U CN 201721752796U CN 207528878 U CN207528878 U CN 207528878U
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- chip strip
- fixedly connected
- test machine
- installation bolt
- strip test
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Abstract
The utility model is related to automated production equipment fields, more particularly to a kind of automation chip strip test machine, including a frame, the frame upper surface is fixedly connected with a movement coupling test device by installation bolt, the movement coupling test device side is fixedly connected with multifunctional power ammeter by installation bolt, the lower portion is provided with control system, control computer, spectroanalysis instrument and electrical cabinet, control system, control computer, spectroanalysis instrument and electrical cabinet are fixedly connected by installation bolt with frame, the movement coupling test device includes a precision vibration isolation optical platform and XYZ axis material carrier platforms, the precision vibration isolation optical platform upper surface is fixedly connected with XYZ axis material carrier platforms by installation bolt.Compared with prior art, the automation chip strip test machine accurate positioning of the utility model, temperature consistency are high, production efficiency is high.
Description
【Technical field】
The utility model is related to automated production equipment field, more particularly to a kind of automation chip strip test machine.
【Background technology】
Chip testing machine currently on the market can only be tested for one chip, and production efficiency is low, can not be met
The extensive demand efficiently produced.
【Utility model content】
In order to overcome the above problem, the utility model proposes a kind of accurate positioning, temperature consistency is high, production efficiency is high
Automate chip strip test machine.
The utility model solves a kind of technical solution that above-mentioned technical problem provides：A kind of automation chip strip is provided to survey
Test-run a machine, including a frame, the frame upper surface is fixedly connected with a movement coupling test device, the movement by installation bolt
Coupling test device side is fixedly connected with multifunctional power ammeter by installation bolt, and the lower portion is provided with control system
System, control computer, spectroanalysis instrument and electrical cabinet, control system, control computer, spectroanalysis instrument and electrical cabinet pass through
Installation bolt is fixedly connected with frame, and the movement coupling test device includes a precision vibration isolation optical platform and XYZ axis material containings
Platform, the precision vibration isolation optical platform upper surface are fixedly connected with XYZ axis material carrier platforms by installation bolt.
Preferably, the movement coupling test device further comprises adjustable probe station, image system and coupling measurement
Platform, XYZ axis material carrier platforms side setting coupling measurement platform, the adjustable probe station of coupling measurement platform side setting, the adjustable spy
Needle platform side sets image system, and the adjustable probe station, image system and coupling measurement platform pass through installation bolt and essence
Close vibration isolation optical table is fixedly connected.
Preferably, the XYZ axis material carrier platform includes XYZ shaft movement mechanisms, water circulation cooling block, semiconductor cooler, heat
Quick resistance and temperature control material containing substrate, the XYZ shaft movement mechanisms top are fixedly connected with the water circulation cooling by installation bolt
Block, water circulation cooling block top one end are fixedly connected with semiconductor cooler by installation bolt, pass through above semiconductor cooler
Installation bolt is fixedly connected with temperature control material containing substrate, and thermistor is set inside temperature control material containing substrate.
Preferably, the temperature control material containing upper surface of base plate opens up fixing groove, for placing chip strip to be measured.
Preferably, multiple micro vacuum holes are uniformly opened up in the fixing groove, chip strip to be measured is fixed for vacuum suction.
Preferably, the coupling measurement platform position is corresponding with XYZ axis material carrier platforms position.
Preferably, the position of the adjustable probe station is corresponding with the position of XYZ axis material carrier platforms.
Preferably, the multiple micro vacuum hole is in "-" type linear array.
Preferably, the XYZ shaft movement mechanisms are accurate stepper motor.
Preferably, the bottom four corners of the frame are respectively arranged with supporting leg, and activity is provided on the inside of the supporting leg
Wheel.
Compared with prior art, the automation chip strip test machine of the utility model is adsorbed by accurate micro vacuum hole
Fixed core slip, multiple micro vacuum holes are in "-" type linear array, can adsorb multiple chip strips to be measured simultaneously, improve production effect
Rate；Image system determines chip strip to be measured and the relative position of adjustable probe station for visual identity, it is ensured that controls piezoelectricity position
System is accurate, quickly positions and couples maximum power, and reads chip strip character, high degree of automation automatically；Semiconductor refrigerating
Device quickly can provide test required temperature condition for chip strip, have high temperature consistency；The XYZ shaft movement mechanisms
For accurate stepper motor, position movement is accurately.
【Description of the drawings】
Fig. 1 is a kind of three-dimensional structure diagram for automating chip strip test machine of the utility model；
Fig. 2 is a kind of movement coupling test device three-dimensional structure diagram for automating chip strip test machine of the utility model；
Fig. 3 is a kind of XYZ axis material carrier platform three-dimensional structure diagrams for automating chip strip test machine of the utility model；
Fig. 4 is enlarged drawing at A in Fig. 3.
【Specific embodiment】
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention is further described in detail.It should be appreciated that specific embodiment described herein is only used for explaining
The utility model is not used to limit the utility model.
It is to be appreciated that the directional instruction (such as up, down, left, right, before and after ...) of institute in the utility model embodiment
The relative position being only limitted in given view rather than absolute position.
In addition, it and cannot be managed in the utility model such as relating to the description of " first ", " second " etc. is only used for description purpose
It solves to indicate or implying its relative importance or the implicit quantity for indicating indicated technical characteristic.Define as a result, " the
One ", at least one this feature can be expressed or be implicitly included to the feature of " second ".It is " more in the description of the present invention,
It is a " it is meant that at least two, such as two, three etc., unless otherwise specifically defined.
Referring to Fig. 1, a kind of automation chip strip test machine of the utility model, including a frame 10, the frame 10
Upper surface is fixedly connected with a movement coupling test device 60 by installation bolt, and the movement coupling test device 60 is used to complete
The related photoelectricity test of chip strip.60 side of the movement coupling test device is fixedly connected with multifunctional power by installation bolt
Ammeter 70.The frame 10 is internally provided with control system 20, control computer 30, spectroanalysis instrument 40 and electrical cabinet 50, control
System 20 processed, control computer 30, spectroanalysis instrument 40 and electrical cabinet 50 are fixedly connected by installation bolt with frame 10.Institute
The bottom four corners for stating frame 10 are respectively arranged with supporting leg 80, and conducive to fixed test machine position, stabilization works.The support
The inside of leg 80 is provided with castor 90, is moved convenient for test machine, convenience in transport.The frame 10 using welding for steel structure and
Into intensity is high, and texture is good.
Referring to Fig. 2, the movement coupling test device 60 includes a precision vibration isolation optical platform 61, XYZ axis material carrier platforms
62nd, probe station 63, image system 64 and coupling measurement platform 65,61 upper surface of precision vibration isolation optical platform is adjusted and passes through peace
Dress bolt is fixedly connected with XYZ axis material carrier platform 62, and chip strip to be measured is delivered for fixed.The setting coupling of 62 side of XYZ axis material carrier platform
Testboard 65,65 position of coupling measurement platform is corresponding with 62 positions of XYZ axis material carrier platform, and coupling measurement platform 65 is used to carry XYZ axis
Expect that the chip strip to be measured of platform 62 carries out photoelectricity test.The adjustable probe station 63 of 65 side of coupling measurement platform setting, is adjusted probe
Platform 63 powers up for contact measured chip strip.The position of adjustable probe station 63 is corresponding with the position of XYZ axis material carrier platform 62.Institute
State adjustable 63 side of probe station setting image system 64, image system 64 determines chip strip to be measured and adjustable for visual identity
Save the relative position of probe station 63, it is ensured that the control of piezoelectricity position is accurate, quickly positions and couples maximum power, and read automatically
Chip strip character, high degree of automation.The adjustable probe station 63, image system 64 and coupling measurement platform 65 pass through installation
Bolt is fixedly connected with precision vibration isolation optical platform 61.
Please refer to Fig. 3 and Fig. 4, the XYZ axis material carrier platform 62 include XYZ shaft movement mechanisms 621, water circulation cooling block 622,
Semiconductor cooler 623, thermistor 624 and temperature control material containing substrate 625.621 top of XYZ shaft movement mechanisms passes through installation
Bolt is fixedly connected with the water circulation cooling block 622, and 622 top one end of water circulation cooling block is fixedly connected with half by installation bolt
Conductor refrigerator 623,623 top of semiconductor cooler are fixedly connected with temperature control material containing substrate 625, temperature control material containing by installation bolt
625 inside setting thermistor 624 of substrate.625 upper surface of temperature control material containing substrate opens up fixing groove 625, is treated for placing
Chip strip is surveyed, multiple micro vacuum holes 626 are uniformly opened up in the fixing groove 625, chip strip to be measured is fixed for vacuum suction.
The multiple micro vacuum hole 626 is in "-" type linear array, can adsorb multiple chip strips to be measured simultaneously, improves production efficiency.
The XYZ shaft movement mechanisms 621 are accurate stepper motor, and position movement is accurate.
During the automation chip strip test machine work of the utility model, after chip strip is positioned over temperature control material containing substrate 625,
It is adsorbed and fixed by accurate micro vacuum hole 626, by the visual identity of image system 64, moved by XYZ shaft movement mechanisms 621
Make, chip strip is sent into predicted position, adjustable probe station 63 is powered up, and coupling measurement platform 65 completes related photoelectricity test.
Wherein, semiconductor cooler 623 quickly can provide test required temperature condition for chip strip, anti-in real time by thermistor 624
Temperature value is presented, water circulation cooling block 622 solves the high heat that 623 back side of semiconductor cooler generates during low-temperature test, to reach
Temperature control effect that is high-accuracy and stablizing.
Compared with prior art, the automation chip strip test machine of the utility model passes through accurate micro vacuum hole 626
Fixed core slip is adsorbed, multiple micro vacuum holes 626 are in "-" type linear array, can adsorb multiple chip strips to be measured simultaneously, carry
High efficiency；Image system 64 determines chip strip to be measured and the relative position of adjustable probe station 63 for visual identity, really
The control of pressurize electric position is accurate, quickly positions and couples maximum power, and reads chip strip character, the degree of automation automatically
It is high；Semiconductor cooler 623 quickly can provide test required temperature condition for chip strip, have high temperature consistency；
The XYZ shaft movement mechanisms 621 are accurate stepper motor, and position movement is accurate.
The above is only the preferred embodiment of the present invention, and it does not limit the scope of the patent of the present invention,
Every any modification made within the design of the utility model, equivalent replacement and improvement etc. should be included in the utility model
Scope of patent protection in.
Claims (10)
1. a kind of automation chip strip test machine, which is characterized in that including a frame, the frame upper surface passes through installation bolt
A movement coupling test device is fixedly connected with, the movement coupling test device side is fixedly connected multi-functional by installation bolt
Power supply ammeter, the lower portion are provided with control system, control computer, spectroanalysis instrument and electrical cabinet, control system, control
Computer processed, spectroanalysis instrument and electrical cabinet are fixedly connected by installation bolt with frame；
The movement coupling test device includes a precision vibration isolation optical platform and XYZ axis material carrier platforms, the accurate vibration isolation optics
Platform upper surface is fixedly connected with XYZ axis material carrier platforms by installation bolt.
2. automation chip strip test machine as described in claim 1, which is characterized in that the coupling test device that moves is into one
Step includes adjustable probe station, image system and coupling measurement platform, XYZ axis material carrier platforms side setting coupling measurement platform, and coupling is surveyed
The adjustable probe station of test stand side setting, the adjustable probe station side setting image system, the adjustable probe station, shadow
As system and coupling measurement platform are fixedly connected by installation bolt with precision vibration isolation optical platform.
3. automation chip strip test machine as described in claim 1, which is characterized in that the XYZ axis material carrier platform includes XYZ axis
Motion, water circulation cooling block, semiconductor cooler, thermistor and temperature control material containing substrate, the XYZ shaft movement mechanisms top
Portion is fixedly connected with the water circulation cooling block by installation bolt, and company is fixed in one end by installation bolt at the top of water circulation cooling block
Semiconductor cooler is connect, semiconductor cooler top is fixedly connected with temperature control material containing substrate, temperature control material containing substrate by installation bolt
Inside setting thermistor.
4. automation chip strip test machine as claimed in claim 3, which is characterized in that the temperature control material containing upper surface of base plate is opened
If fixing groove, for placing chip strip to be measured.
5. automation chip strip test machine as claimed in claim 4, which is characterized in that uniformly opened up in the fixing groove multiple
Chip strip to be measured is fixed in micro vacuum hole for vacuum suction.
6. automation chip strip test machine as claimed in claim 2, which is characterized in that the coupling measurement platform position and XYZ
Axis material carrier platform position is corresponding.
7. as claimed in claim 2 automation chip strip test machine, which is characterized in that the position of the adjustable probe station with
The position of XYZ axis material carrier platforms is corresponding.
8. automation chip strip test machine as claimed in claim 5, which is characterized in that the multiple micro vacuum hole is in a word
Linear arranges.
9. automation chip strip test machine as claimed in claim 3, which is characterized in that the XYZ shaft movement mechanisms are precision
Stepper motor.
10. automation chip strip test machine as described in claim 1, which is characterized in that the bottom four corners difference of the frame
Supporting leg is provided with, castor is provided on the inside of the supporting leg.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721752796.1U CN207528878U (en) | 2017-12-13 | 2017-12-13 | A kind of automation chip strip test machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721752796.1U CN207528878U (en) | 2017-12-13 | 2017-12-13 | A kind of automation chip strip test machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207528878U true CN207528878U (en) | 2018-06-22 |
Family
ID=62578479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721752796.1U Active CN207528878U (en) | 2017-12-13 | 2017-12-13 | A kind of automation chip strip test machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207528878U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107894561A (en) * | 2017-12-13 | 2018-04-10 | 镭神技术（深圳）有限公司 | One kind automation chip strip test machine |
-
2017
- 2017-12-13 CN CN201721752796.1U patent/CN207528878U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107894561A (en) * | 2017-12-13 | 2018-04-10 | 镭神技术（深圳）有限公司 | One kind automation chip strip test machine |
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