CN207516241U - A kind of fixture based on small size thin-film material examination of infrared spectrum - Google Patents
A kind of fixture based on small size thin-film material examination of infrared spectrum Download PDFInfo
- Publication number
- CN207516241U CN207516241U CN201721502872.3U CN201721502872U CN207516241U CN 207516241 U CN207516241 U CN 207516241U CN 201721502872 U CN201721502872 U CN 201721502872U CN 207516241 U CN207516241 U CN 207516241U
- Authority
- CN
- China
- Prior art keywords
- sample
- small size
- film material
- infrared spectrum
- fixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000463 material Substances 0.000 title claims abstract description 22
- 239000010409 thin film Substances 0.000 title claims abstract description 22
- 238000002329 infrared spectrum Methods 0.000 title claims abstract description 17
- 229910052751 metal Inorganic materials 0.000 claims abstract description 27
- 239000002184 metal Substances 0.000 claims abstract description 27
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 239000002390 adhesive tape Substances 0.000 claims abstract description 16
- 239000005357 flat glass Substances 0.000 claims abstract description 14
- 239000010408 film Substances 0.000 abstract description 16
- 239000011521 glass Substances 0.000 abstract description 8
- 238000007747 plating Methods 0.000 abstract description 2
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 6
- 239000004411 aluminium Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 229910007746 Zr—O Inorganic materials 0.000 description 5
- 238000002310 reflectometry Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000686 essence Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The utility model belongs to thin-film material analysis field, discloses a kind of fixture based on small size thin-film material examination of infrared spectrum.The fixture is made of the double faced adhesive tape in the metal substrate and metal substrate on sheet glass, sheet glass.The utility model is with a kind of simple sample clamp, solve the problems, such as small size film sample sample for encountering in Shimadzu Fourier infrared spectrum is used to test fall, signal it is weak, and enhance the test intensity of sample by plating layer of metal film on a glass substrate, there is very strong practicability.
Description
Technical field
The utility model belongs to thin-film material analytical equipment field, and in particular to one kind is infrared based on small size thin-film material
The fixture of spectrum test.
Background technology
In modern thin-film material constituent analysis, infrared spectrum is in quantitative detection film functional group ingredient, thus it is speculated that forming thin film
It has a wide range of applications in the process.The characteristics of infra-red sepectrometry is：Quickly, sample size is few (several micrograms-several milligrams), and characteristic is strong
(various substances have its specific infrared spectrogram) can analyze the sample of various states (gas, liquid, solid) and not destroy sample.
The principle of existing Fourier infrared spectrograph is：The light that light source is sent out is divided into two beams by beam splitter (similar semi-transparent semi-reflecting lens), and one
Beam reaches index glass through transmission, and another beam reaches horizontal glass through reflection.Two-beam returns beam splitter through horizontal glass and index glass reflection respectively,
Index glass is for linear motion with a constant speed, thus the two-beam after beam splitter beam splitting forms optical path difference, generates interference.Interference
Light, by sample cell, reaches detector by the interference light containing sample message after sample, then passes through after beam splitter congregation
Fourier transform pairs signal is handled, and finally obtains transmitance or absorbance with wave number or the infrared absorpting light spectra of wavelength.
Film in reflection absorption spectrum method energy high sensitivity measuring metallic substrates, when polarizing light irradiation is in metallic substrates
On, when being reflected in metal surface, its phase can change.In the case of orthogonal polarized light, mutually become about 180 °, with
Incidence angle is unrelated, therefore the vector of reflected light offsets each other, and standing wave amplitude is almost nil, can't detect the absorption of sample.In water
In the case of flat polarised light, continuous change of phase changes to 90 ° from 0 °, and standing wave amplitude equally changes with incidence angle.Work as selection
Standing wave amplitude increase during big incidence angle, the effect enhancing of light beam and sample, so as to generate high detection sensitivity.Metallic reflection
Rate is higher, therefore this method can detect the film on metal with sensitivity.
In practical operation, (the light path principle figure of its sample test such as Fig. 1 institutes by taking Shimadzu IR series RAS8000 (A) as an example
Show, M in figure1~M6For speculum), as can be seen from Figure 1, since light source is under, sample surface should be placed downward.Actually equipment
There is sample cell with holes for placing sample, sample cell there are tri- kinds of specifications of Ф 8/15/25mm, in hollow circular hole.Preferable sample is
Film in metal substrate, and substrate dimension has to be larger than Ф 8mm, therefore too small sample will fall off, and can not test.This is to a variety of
The sample test prepared on different type substrate brings certain difficulty.
Utility model content
In place of above shortcoming and defect of the existing technology, the purpose of this utility model is to provide one kind to be based on
The fixture of small size thin-film material examination of infrared spectrum.
The utility model aim is achieved through the following technical solutions：
A kind of fixture based on small size thin-film material examination of infrared spectrum, by the metal substrate on sheet glass, sheet glass
It is formed with the double faced adhesive tape in metal substrate.
Further, the size of the sheet glass is 30mm*30mm~50mm*50mm.
Further, the thickness of the metal substrate is 50~150nm.Aluminium, silver, copper etc. can be selected in the material of metal substrate
The high metal of reflectivity.
Further, the double faced adhesive tape is located at metal substrate center.
Further, the size of the double faced adhesive tape is less than 2mm*2mm.
A kind of method based on small size thin-film material examination of infrared spectrum, includes the following steps：
Small size thin-film material sample to be tested is pasted on the double faced adhesive tape of above-mentioned fixture, then will be pasted with sample to be tested
Fixture be inverted on the specimen holder of Shimadzu Fourier infrared spectrograph, sample to be tested is made to be placed in specimen holder trepanning middle position,
It can start to test.
Further, the size of the small size thin-film material is 2mm*2mm~20mm*20mm.
The principle of the utility model is：By sample being sticked to below the fixture with metal substrate so that small size sample
Product will not directly be fallen down from specimen holder tapping, and infrared light directly acts on sample surfaces, and fixture has metal substrate in addition, from
And there is larger reflectivity, it is ensured that sample signal intensity is sufficiently high.
The utility model has the following advantages that and advantageous effect：
The utility model solves small size film sample and is using Shimadzu Fourier red with a kind of simple sample clamp
The problem of sample encountered in external spectrum test is fallen, signal is weak, test size range is extended to not less than area of section
The sample of 2mm*2mm, and enhance the test intensity of sample by plating layer of metal film on a glass substrate, there is very strong reality
The property used.
Description of the drawings
Fig. 1 is the light path principle figure of Shimadzu IR series RAS8000 (A) sample test.
Fig. 2 is that a kind of fixture based on small size thin-film material examination of infrared spectrum in utility model embodiment 1 is pasted
The structure diagram of sample；Number is described as follows in figure：1- sheet glass, 2- metal substrates, 3- double faced adhesive tapes, 4- samples.
Fig. 3 is tests using the fixture in embodiment 1 in Shimadzu IR series RAS8000 (A) Fourier infrared spectrograph
The result figure of zirconia film sample.
Fig. 4 is tests using the fixture in comparative example 1 in Shimadzu IR series RAS8000 (A) Fourier infrared spectrograph
The result figure of zirconia film sample.
Specific embodiment
The utility model is described in further detail with reference to embodiment and attached drawing, but the implementation of the utility model
Mode is without being limited thereto.
Embodiment 1
A kind of fixture based on small size thin-film material examination of infrared spectrum of the present embodiment, the structure for pasting sample are shown
It is intended to as shown in Figure 2.It is made of the double faced adhesive tape 3 in the metal substrate 2 and metal substrate on sheet glass 1, sheet glass, double faced adhesive tape 3
On for pasting sample 4.Wherein sheet glass size is 30mm*30mm, and it is 100nm without graphical aluminium film that metal substrate, which is thickness,
Double faced adhesive tape covering surface is 1mm*1mm.The preparation method and the use fixture of the present embodiment fixture carry out small size thin-film material
The method of examination of infrared spectrum is as follows：
(1) 30mm*30mm sheet glass is cut；
(2) sheet glass obtained by step (1) is taken, one layer of 100nm is deposited without graphical aluminium film as metal substrate, by aluminium film face
It is positioned over downward on instrument sample seat and is used as background scans；
(3) in metal substrate intermediate region sticking two-faced adhesive tape, double faced adhesive tape covering surface is 1mm*1mm, is obtained described based on small
The fixture of size thin-film material examination of infrared spectrum；
(4) step (3) is taken to paste the fixture of double faced adhesive tape, 100nm aluminium is plated on the glass of 10mm*10mm cross-sectional sizes,
Then spin coating zirconia film prepares sample on aluminium, will be sticked on the double faced adhesive tape of fixture outside specimen face side；
(5) fixture that step (4) is stained with to sample to be tested is inverted in Shimadzu IR series RAS8000 (A) fourier infrared light
Specification is on the specimen holder of Ф 25mm in spectrometer, sample to be tested is made to be placed in specimen holder trepanning middle position, you can start to test.It surveys
Test result is as shown in figure 3, can be observed-Zr-O in Fig. 3 ,-O-O ,-C-O ,-OH peaks, and peak intensity is big.
Comparative example 1
Compared with Example 1, the non-deposition of aluminum film of fixture is as metal substrate.Gained fixture uses similarly to Example 1
Sample and method are tested.The results are shown in Figure 4, and it is weak that Fig. 4 can be observed sample-Zr-O characteristic peaks, illustrates substrate reflectivity
It is not high.
It can be placed and be not less than using fixture described in the utility model it can be seen from the result of embodiment 1 and comparative example 1
The sample of area of section 2mm*2mm, and the metal film enhancing reflectivity on fixture, can so that reception signal is stronger, peak position is got over
Significantly.It can be observed-Zr-O ,-O-O ,-C-O in Fig. 3 ,-OH peaks, peak intensity is big.Test result sample spy can be observed in Fig. 4
Sign peak-Zr-O is weaker, and O-O peaks are also very weak, is covered substantially by-Zr-O, leads to the not high institute of reflectivity by the non-metal-coated membrane of its substrate
It causes.
Above-described embodiment is the preferable embodiment of the utility model, but the embodiment of the utility model is not by above-mentioned
The limitation of embodiment, the change made under other any Spirit Essences and principle without departing from the utility model are modified, are replaced
In generation, simplifies combination, should be equivalent substitute mode, is included within the scope of protection of the utility model.
Claims (5)
1. a kind of fixture based on small size thin-film material examination of infrared spectrum, it is characterised in that：By on sheet glass, sheet glass
Double faced adhesive tape in metal substrate and metal substrate is formed.
2. a kind of fixture based on small size thin-film material examination of infrared spectrum according to claim 1, it is characterised in that：
The size of the sheet glass is 30mm*30mm~50mm*50mm.
3. a kind of fixture based on small size thin-film material examination of infrared spectrum according to claim 1, it is characterised in that：
The thickness of the metal substrate is 50~150nm.
4. a kind of fixture based on small size thin-film material examination of infrared spectrum according to claim 1, it is characterised in that：
The double faced adhesive tape is located at metal substrate center.
5. a kind of fixture based on small size thin-film material examination of infrared spectrum according to claim 1, it is characterised in that：
The size of the double faced adhesive tape is less than 2mm*2mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721502872.3U CN207516241U (en) | 2017-11-13 | 2017-11-13 | A kind of fixture based on small size thin-film material examination of infrared spectrum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721502872.3U CN207516241U (en) | 2017-11-13 | 2017-11-13 | A kind of fixture based on small size thin-film material examination of infrared spectrum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207516241U true CN207516241U (en) | 2018-06-19 |
Family
ID=62537477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721502872.3U Expired - Fee Related CN207516241U (en) | 2017-11-13 | 2017-11-13 | A kind of fixture based on small size thin-film material examination of infrared spectrum |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207516241U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107741407A (en) * | 2017-11-13 | 2018-02-27 | 华南理工大学 | A kind of fixture and method of testing based on small size thin-film material examination of infrared spectrum |
-
2017
- 2017-11-13 CN CN201721502872.3U patent/CN207516241U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107741407A (en) * | 2017-11-13 | 2018-02-27 | 华南理工大学 | A kind of fixture and method of testing based on small size thin-film material examination of infrared spectrum |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107741407A (en) | A kind of fixture and method of testing based on small size thin-film material examination of infrared spectrum | |
| JP4046158B2 (en) | Coating film measuring method and apparatus | |
| CN105588516A (en) | Paint film thickness measuring method based on terahertz pulse spectrum | |
| CN106442424B (en) | Alcohol concentration measuring device and method using graphene terahertz surface plasma effect | |
| CN106248616A (en) | Terahertz full polarization state detection spectrogrph | |
| JP2011180568A (en) | Wire grid polarizing plate for terahertz band optical element, and electromagnetic wave processor | |
| CN207516241U (en) | A kind of fixture based on small size thin-film material examination of infrared spectrum | |
| KR20140122066A (en) | chromatography substrate with surface enhanced Raman scattering nano-structure and fabricating method thereof | |
| CN107462547A (en) | Mini terahertz time-domain spectroscopy test system | |
| US20150192457A1 (en) | Terahertz-Wave Detection Element, Manufacturing Method Therefor, and Observation Apparatus | |
| Zhang et al. | Ultrasensitive determination of lipid soluble antioxidants in food products using silver nano-tripod SERS substrates | |
| CN1137371C (en) | Short-pulse laser and ultrasonic method and equipment for presisely measuring thickness | |
| CN111351576B (en) | Confocal optical path system, confocal polarization measurement method and application thereof | |
| EP2899514B1 (en) | Terahertz-wave detection element, production method therefor, joined body, and observation device | |
| CN108931495A (en) | Terahertz time-domain spectroscopy synchronized measurement system and method | |
| WO2021093216A1 (en) | Sample signal amplification method using terahertz band graphene absorber | |
| CN210719643U (en) | Single-shot ultrafast response process measurement system for photovoltaic device | |
| US20170205352A1 (en) | Detection of explosives using raman spectroscopy with gold/silver nanosponge alloy | |
| Öhman et al. | A spectroelectrochemical study of metal/polymer interfaces by simultaneous in situ ATR-FTIR and EIS | |
| US2849912A (en) | Optical arrangement for determining the ratio of two light fluxes | |
| Canillas et al. | An IR phase-modulated ellipsometer using a Fourier transform spectrometer for in situ applications | |
| CN108593590A (en) | A kind of graphene phasmon liquid sensor | |
| CN106990051A (en) | Metal material sheet electron information lossless detection means and detection method | |
| Geltner et al. | Detection and electrical characterization of hidden layers using time-domain analysis of terahertz reflections | |
| CN110940644A (en) | Second-order nonlinear optical testing device and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180619 |