CN207503924U - A kind of METAL HEATING PROCESS pedestal degassing apparatus - Google Patents
A kind of METAL HEATING PROCESS pedestal degassing apparatus Download PDFInfo
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- CN207503924U CN207503924U CN201721321904.XU CN201721321904U CN207503924U CN 207503924 U CN207503924 U CN 207503924U CN 201721321904 U CN201721321904 U CN 201721321904U CN 207503924 U CN207503924 U CN 207503924U
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- chamber
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- connection ring
- baking
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Abstract
A kind of METAL HEATING PROCESS pedestal degassing apparatus, it is characterised in that：Including baking chamber, cold pump, connection ring, chamber cover board and bridgeware, the baking chamber is connected by connection ring with cold pump, and the baking chamber interior is provided with bridgeware, and top is provided with chamber cover board；The baking chamber includes sealing structure, peep-hole, via hole and connection structure；Sealing structure is provided with above the baking chamber, is coordinated with chamber cover board；The connection structure includes six bridgeware connection structures and connection ring connection structure, the bridgeware connection structure is uniformly arranged on baking cavity bottom and cooperation is connect with bridgeware, and the right side that connection ring connection structure is arranged on baking chamber connect cooperation with connection ring connection structure.The utility model blade apparatus is simple in structure, can significantly reduce the gas efficiency of METAL HEATING PROCESS pedestal, effectively removes the various gases that material internal is dissolved in during smelting, greatly improves production efficiency.
Description
Technical field
The utility model is related to arrive semiconductor applications, a kind of METAL HEATING PROCESS pedestal degassing apparatus is especially related to.
Background technology
METAL HEATING PROCESS pedestal is the critical component in semiconductor chip production technology, the semiconductor die in integrated circuit technique
Circle manufacture needs the temperature for reaching different stabilizations by different processing steps, while need ultrahigh vacuum, but metal material
Gas can be discharged in heating, vacuum degree is caused to decline, greatly reduces production efficiency.Vacuum technique develops to current level,
The research for increasing the pumping speed of pump has not had too big progress, and the effective pumping speed of pump is limited by conductance, even if using the pump of big pumping speed,
Big influence will not be generated to system vacuum.If the gas efficiency that can make material using special process reduces by 1 order of magnitude,
Than increase by 10 times pump than economical rationality it is more.METAL HEATING PROCESS pedestal be by stainless steel casing, heating tube, electric wire etc. combination and
Into, do not allow to be directly placed into high-temperature degassing in vacuum drying oven, using scene baking can also occupy the production time.It is therefore desirable to provide
A kind of equipment for the gas efficiency that can significantly reduce METAL HEATING PROCESS pedestal.
Utility model content
The purpose of this utility model will solve above-mentioned technical problem, provide a kind of METAL HEATING PROCESS pedestal degassing apparatus.
What the purpose of this utility model was realized in：A kind of METAL HEATING PROCESS pedestal degassing apparatus, it is characterised in that：Including
Chamber, cold pump, connection ring, chamber cover board and bridgeware are toasted, the baking chamber is connected by connection ring with cold pump, institute
The baking chamber interior stated is provided with bridgeware, and top is provided with chamber cover board；The baking chamber includes sealing structure, peeps
Window, via hole and connection structure；Sealing structure, the sealing structure and chamber are provided with above the baking chamber
Cover board coordinates；The connection structure includes six bridgeware connection structures and connection ring connection structure, and the bridgeware connects
Binding structure is uniformly arranged on baking cavity bottom, and the connection ring connection structure is arranged on the right side of baking chamber；Described
Bridgeware connection structure connect cooperation with bridgeware, and the connection ring connect cooperation with connection ring connection structure；The baking
Roasting chamber front and rear sides are provided with via hole and peep-hole.
As preferred technical solution：The connection ring includes steel pipe and flange, and the steel pipe is matched with flange welding
It closes.
As preferred technical solution：The chamber cover board is the tetragonal structure by round angle transition, described
Square opening is provided in sealing structure, the square opening size is less than chamber the size of the cover plate.
As preferred technical solution：One-to-one connecting hole is evenly equipped on the sealing structure and chamber cover board,
Fixation is bolted.
As preferred technical solution：The bridgeware connection structure and the connecting hole of bridgeware correspond, and pass through
It is bolted fixation.
As preferred technical solution：Sealing corresponding with connection ring connection structure is provided on the left of the baking chamber
Hole 14.
The utility model blade apparatus is simple in structure, will not occupy the production time, can significantly reduce METAL HEATING PROCESS pedestal
Gas efficiency, effectively remove the various gases that material internal is dissolved in during smelting, when production, which need not reproduce field baking, to be obtained
Higher end vacuum is obtained, greatly improves production efficiency.
Description of the drawings
Fig. 1 is the baking chamber structure schematic diagram of the utility model；
Fig. 2 is the connection ring structure schematic diagram of the utility model；
Fig. 3 is the bridgeware structure diagram of the utility model；
Fig. 4 is the overall structure diagram of the utility model.
In figure：1. toast chamber；2. cold pump；3. connection ring；301. steel pipe；302. flange；4. chamber cover board；5. conversion
Part；6. sealing structure；7. peep-hole；8. via hole；9. connection structure；10. bridgeware connection structure；11. connection ring connection knot
Structure；12. connecting hole；13. sealing hole.
Specific embodiment
The utility model is described in further detail below in conjunction with the accompanying drawings, but not as the limitation to the utility model：It is a kind of
METAL HEATING PROCESS pedestal degassing apparatus, it is characterised in that：Including baking chamber 1, cold pump 2, connection ring 3, chamber cover board 4 and bridgeware
5, the baking chamber 1 is connected by connection ring 3 with cold pump 2, and the baking chamber 1 is internally provided with bridgeware 5, on
Side is provided with chamber cover board 4；The baking chamber 1 includes sealing structure 6, peep-hole 7, via hole 8 and connection structure 9；Institute
The top of baking chamber 1 stated is provided with sealing structure 6, and the sealing structure 6 coordinates with chamber cover board 4；The connection
Structure 9 includes six bridgeware connection structures 10 and connection ring connection structure 11, and the bridgeware connection structure 10 is uniformly set
It puts in baking cavity bottom, the connection ring connection structure 11 is arranged on the right side of baking chamber 1；The bridgeware connection
Structure 10 connect cooperation with bridgeware 5, and the connection ring 3 connect cooperation with connection ring connection structure 11；The baking chamber
1 front and rear sides of room are provided with via hole 8 and peep-hole 7.
The connection ring 3 includes steel pipe 301 and flange 302, and the steel pipe 301 coordinates with the welding of flange 302.It is described
Chamber cover board 4 be by the tetragonal structure of round angle transition, be provided with square opening, institute in the sealing structure 6
The square opening size stated is less than chamber the size of the cover plate.One-to-one correspondence is evenly equipped on the sealing structure 6 and chamber cover board 4
Connecting hole 12, fixation is bolted.The bridgeware connection structure 10 and the connecting hole 12 1 of bridgeware 5 are a pair of
Should, fixation is bolted.1 left side of baking chamber is provided with and 11 corresponding sealing hole of connection ring connection structure
13。
During specific implementation：The baking chamber with heating function is selected, it is simple in structure；The practicality of cold pump ensure that guarantee baking
When chamber vacuum degree；It is attached between baking chamber and cold pump by connection ring, ensures closed gapless；It is cold for connecting
The connection ring of pump and baking chamber, is formed by steel pipe and CF flange weldings, and is handled by electrobrightening, and service life is had
The extension of effect, and good can keep the baking indoor vacuum degree of chamber；METAL HEATING PROCESS pedestal is uniformly fixed on by bridgeware
Toast chamber；Vacuum chamber cover board, is manufactured from aluminum alloy, surface anodization processing；And in the surrounding point of baking chamber
It is not provided with via hole and peep-hole, sealing hole；Peep-hole can help worker understand in real time chamber it is indoor heating report situations,
Facilitate the timely processing after there is accident；The effect of via hole is then that auxiliary adds in other reactants or consersion unit；Sealing hole
It is then for air inlet, help restores vacuum；Peep-hole is sealed using transparent material under normal conditions, and via hole and sealing hole are then straight
Sealing is connect, via hole is used when reaction needs, and sealing hole is used when finally breaking vacuum.Pass through bridgeware and gasket seal
METAL HEATING PROCESS pedestal is installed in baking chamber, covers chamber cover board, ensures that baking chamber is in sealing state；It vacuumizes,
METAL HEATING PROCESS pedestal and baking chamber power supply are opened, is warming up to 300 degrees Celsius, persistently toasts 15 days, is cooled to room temperature, is broken true
Sky vacuumizes packaging part.
Above-described embodiment of the utility model is only to clearly demonstrate the citing that the utility model is done, but be not used to
The scope of protection of the utility model is limited, all equivalent technical solutions also belong to the scope of the utility model, the utility model
Scope of patent protection should be limited by every claim.
Claims (6)
1. a kind of METAL HEATING PROCESS pedestal degassing apparatus, it is characterised in that：Including toasting chamber（1）, cold pump（2）, connection ring（3）、
Chamber cover board（4）With bridgeware（5）, the baking chamber（1）Pass through connection ring（3）With cold pump（2）It is connected, the baking
Roasting chamber（1）It is internally provided with bridgeware（5）, top is provided with chamber cover board（4）；The baking chamber（1）Including sealing
Structure（6）, peep-hole（7）, via hole（8）With connection structure（9）；The baking chamber（1）Top be provided with sealing knot
Structure（6）, the sealing structure（6）With chamber cover board（4）Cooperation；The connection structure（9）It is connected including six bridgewares
Structure（10）With connection ring connection structure（11）, the bridgeware connection structure（10）Baking cavity bottom is uniformly arranged on,
The connection ring connection structure（11）It is arranged on baking chamber（1）Right side；The bridgeware connection structure（10）With turning
Change part（5）Connection cooperation, the connection ring（3）With connection ring connection structure（11）Connection cooperation；The baking chamber（1）
Front and rear sides are provided with via hole（8）With peep-hole（7）.
2. a kind of METAL HEATING PROCESS pedestal degassing apparatus according to claim 1, it is characterised in that：The connection ring（3）
Including steel pipe（301）With flange（302）, the steel pipe（301）With flange（302）Welding cooperation.
3. a kind of METAL HEATING PROCESS pedestal degassing apparatus according to claim 1, it is characterised in that：The chamber cover board
（4）For the tetragonal structure by round angle transition, the sealing structure（6）On be provided with square opening, described four
Square aperture size is less than chamber the size of the cover plate.
4. a kind of METAL HEATING PROCESS pedestal degassing apparatus according to claim 1, it is characterised in that：The sealing structure
（6）With chamber cover board（4）On be evenly equipped with one-to-one connecting hole（12）, fixation is bolted.
5. a kind of METAL HEATING PROCESS pedestal degassing apparatus according to claim 1, it is characterised in that：The bridgeware connection
Structure（10）With bridgeware（5）Connecting hole（12）It corresponds, fixation is bolted.
6. a kind of METAL HEATING PROCESS pedestal degassing apparatus according to claim 1, it is characterised in that：The baking chamber
（1）Left side is provided with and connection ring connection structure（11）Corresponding sealing hole（13）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721321904.XU CN207503924U (en) | 2017-10-14 | 2017-10-14 | A kind of METAL HEATING PROCESS pedestal degassing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721321904.XU CN207503924U (en) | 2017-10-14 | 2017-10-14 | A kind of METAL HEATING PROCESS pedestal degassing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207503924U true CN207503924U (en) | 2018-06-15 |
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ID=62500457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721321904.XU Active CN207503924U (en) | 2017-10-14 | 2017-10-14 | A kind of METAL HEATING PROCESS pedestal degassing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207503924U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109273340A (en) * | 2018-10-15 | 2019-01-25 | 靖江先锋半导体科技有限公司 | A kind of inner cavity vacuum bakeout degasification hot plate of etching machine cavity |
-
2017
- 2017-10-14 CN CN201721321904.XU patent/CN207503924U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109273340A (en) * | 2018-10-15 | 2019-01-25 | 靖江先锋半导体科技有限公司 | A kind of inner cavity vacuum bakeout degasification hot plate of etching machine cavity |
| CN109273340B (en) * | 2018-10-15 | 2024-05-14 | 江苏先锋精密科技股份有限公司 | Inner cavity vacuum baking degassing hot plate of etching machine cavity |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 214500 No. 195, Xingang Avenue, Jingjiang Economic Development Zone, Taizhou City, Jiangsu Province Patentee after: Jiangsu Xianfeng Precision Technology Co.,Ltd. Address before: 214500 No.8 Deyu Road, Chengnan Park, Jingjiang City, Taizhou City, Jiangsu Province Patentee before: JINGJIANG XIANFENG SEMICONDUCTOR TECHNOLOGY CO.,LTD. |