CN207502910U - Glue spreading apparatus - Google Patents
Glue spreading apparatus Download PDFInfo
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- CN207502910U CN207502910U CN201721643772.2U CN201721643772U CN207502910U CN 207502910 U CN207502910 U CN 207502910U CN 201721643772 U CN201721643772 U CN 201721643772U CN 207502910 U CN207502910 U CN 207502910U
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- plummer
- glue spreading
- spreading apparatus
- inflatable body
- substrate
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Abstract
The utility model provides a kind of glue spreading apparatus, the glue spreading apparatus includes plummer and inflatable body, and the plummer is used for bearing basement, during gluing, the inflatable body is moved to the top of the plummer and blows to the plummer, so that photoresist is coated on the substrate surface.The utility model by the way of plummer air blowing, improves the utilization rate of photoresist compared with prior art using inflatable body.
Description
Technical field
The utility model is related to semiconductor applications, and in particular to a kind of glue spreading apparatus.
Background technology
In semiconductor devices manufacture and advanced package technologies, photoetching is most important step.Photoetching refers in substrate
By photoresist coating, exposure, development processing on (such as semiconductor base), by designed figure on photo mask board (MASK)
Case is transferred to the process in the film layer of substrate surface.In photoresist coated technique, usually by substrate (such as semiconductor base)
It is put into special glue spreading apparatus, using spin coating glue method (spin coating) or spraying glue method (spray coating).
Spin coating glue method is that the diluted photoresist of process of specific quantity is put on substrate, and then rotary plate, is revolved by high speed
Photoresist is evenly distributed on substrate by centrifugal force when turning, and extra glue is thrown out of except substrate.It is by light to spray glue method
Photoresist is atomized into molecule, then sprays to substrate surface.
For inventor the study found that either spin coating glue method still sprays glue method, the loss late of photoresist is all higher.Separately
Outside, both methods is required for dilution photoresist, and after dilution, viscosity will reduce photoresist, the spy of photoresist in itself
Property is also changed.
Utility model content
The purpose of this utility model is to provide a kind of glue spreading apparatus and glue spreading method, to improve the utilization rate of photoresist.
The another object of the utility model is to provide a kind of glue spreading apparatus and glue spreading method, without diluting photoresist, it is ensured that
The viscosity of photoresist, avoids photoresist characteristic from changing.
To achieve these goals, the first aspect of the utility model provides a kind of glue spreading apparatus, including plummer and blows
Mechanism of qi structure, the plummer are used for bearing basement, and the inflatable body is moved to the top of the plummer after substrate dispensing
And blow to the plummer, so that photoresist is spread evenly across the substrate surface.
Optionally, the inflatable body includes air supply unit and air injection unit, the air supply unit and the jet list
Member connects and for being supplied to the air injection unit, and the air injection unit is blown towards the plummer and to the plummer.
Optionally, the air injection unit has multiple ventholes towards the side of the plummer, passes through the venthole
It blows to the plummer.
Optionally, the multiple venthole is uniformly distributed, and the aperture of the multiple venthole is less than or equal to 1mm.
Optionally, the air injection unit towards the side tool of the plummer there are one strip slot；Alternatively, the jet
Unit towards the plummer side setting there are two orthogonal strip slot.
Optionally, the substrate is circular-base, and the length diameter of the strip slot is greater than or equal to the round base
The diameter at bottom, the width of the strip slot is between 0.5mm~5mm.
Optionally, the air injection unit is made of porous media material, by the hole of the porous media material to institute
State plummer air blowing.
Optionally, the air injection unit is disc-shaped structure or cone-shaped structure.
Optionally, the substrate is circular-base, and the diameter on the air injection unit towards the surface of the plummer is more than
Or the diameter equal to the circular-base.
Optionally, the inflatable body towards the distance of the surface of the plummer and the plummer in 0.1mm~2mm
Between.
Optionally, an inflatable body driving unit is further included, the inflatable body driving unit connects with the inflatable body
It connects and is used to that the inflatable body to be driven to move.
Optionally, the plummer includes support plate, support column and plummer driving unit, the support plate and support column
It is fixedly connected, the plummer driving unit is used to drive the support column and support disc spins.
Optionally, the support disc side is provided with obliquely or the horizontal support plate air injection unit blown.
Optionally, the diameter of the support plate is less than the diameter of the substrate of carrying.
The second aspect of the utility model provides a kind of glue spreading method, including：To the substrate dispensing on plummer；With
And inflatable body is moved to the top of the plummer and blows to the plummer so that photoresist is coated on the substrate table
Face.
Optionally, the inflatable body to the plummer blow when, the plummer is static or to be less than 100 revs/min
The speed rotation of clock.
Optionally, the substrate is circular-base；Center dispensing to the substrate, alternatively, to the substrate
Multiple position dispensings and the multiple positional symmetry is distributed on the circumference concentric with the substrate.
Glue spreading apparatus provided by the utility model has an inflatable body, and the inflatable body is movable to institute during gluing
It states the top of plummer and the substrate on plummer is blown, photoresist is made to be evenly distributed in substrate with this, in this way, gluing
Shi Suoshu plummers need not carry out high speed rotation, for example light can be realized in static or low speed rotation (rotating speed is less than 100 revs/min)
The coating of photoresist can effectively reduce the waste of photoresist during gluing, improve the utilization rate of photoresist.
In addition, since the inflatable body can be blown to the substrate on plummer, air film is formed so as to make light using air-flow
Photoresist is coated in substrate, it may not be necessary to dilute photoresist, photoresist is retained in the correlation properties of photoresist in itself, light
The viscosity of photoresist is not lowered, therefore the range of choice of photoresist greatly increases, and reduces cost indirectly.
Description of the drawings
Fig. 1 is that the glue spreading apparatus of the utility model first embodiment uniformly blows the schematic diagram of glue；
Fig. 2 a are the schematic diagrames of one air knife frictioning of glue spreading apparatus of the utility model second embodiment；
Fig. 2 b are an air knife frictioning vertical views of the glue spreading apparatus of the utility model second embodiment；
Fig. 2 c are two air knife frictioning vertical views of the glue spreading apparatus of the utility model second embodiment；
Fig. 3 is the work flow diagram of the glue spreading method of the utility model 3rd embodiment.
Specific embodiment
As previously mentioned, existing gluing mode is required for dilution photoresist so that the loss late of photoresist is very high, in order to improve
The unnecessary loss of photoresist during gluing, the utility model are blown using substrate of the inflatable body on plummer, so as to
Photoresist is made uniformly to be coated in substrate, reduces photoresist loss late.Further, since the inflatable body can be to carrying
Substrate on platform is blown, and air film is formed so as to which photoresist be made to be coated in substrate using air-flow, it may not be necessary to photoresist is diluted,
That is, the undiluted photoresist of basal point that can be directly on plummer, can change, it is ensured that light to avoid the characteristic of photoresist
The viscosity of photoresist.
The glue spreading apparatus and glue spreading method of the utility model are made further specifically below in conjunction with attached drawing and specific implementation
It is bright.According to following explanation, will be become apparent from feature the advantages of the utility model, can help those skilled in the art comprehensively, have
Effect ground understands the substantive content of the utility model, reaches and repeats to realize the technology in the case where knowing the utility model content
The degree of scheme.It should be noted that attached drawing is using very simplified form and uses non-accurate ratio, only to side
Just the purpose of the utility model embodiment, is lucidly aided in illustrating.
First embodiment
Fig. 1 is that the glue spreading apparatus of the present embodiment uniformly blows the schematic diagram of glue.
As shown in Figure 1, present embodiment discloses a kind of glue spreading apparatus, described device includes a plummer 200, for carrying
Substrate 300.
The plummer 200 is, for example, to include support plate 210, support column 220 and plummer driving unit (in figure not show
Go out), the support plate 210 is fixedly connected with support column 220, and the plummer driving unit is used to drive the support column 220
It is rotated with support plate 210.Preferably, support plate 210 (being, for example, disc-shaped structure) the side setting can be obliquely or horizontal
The support plate air injection unit 213 of air blowing provides soil resistant air-flow for basad 300 lower surface 302, prevents in substrate 300
Photoresist flows to 300 lower surface 302 of substrate.The diameter of the support plate 210 is preferably less than the 300 (example of substrate of its carrying
Circular-base in this way, such as wafer) diameter.In the present embodiment, 210 diameter of support plate is 7 cun, and 300 diameter of substrate is 8 cun, branch
210 diameter of support plate is significantly less than 300 diameter of substrate, is conducive to prevent the photoresist 500 of 300 upper surface 301 of substrate from overflowing pollution
Plummer 200.
The glue spreading apparatus further includes an inflatable body 100, and the inflatable body 100 can be moved to described hold in gluing
The top of microscope carrier 200, and for blowing to the plummer 200, so that photoresist 500 is spread evenly across the substrate surface
301。
The inflatable body 100 is, for example, to include air supply unit (not shown) and air injection unit 102.The gas supply
Unit connect with the air injection unit 102 and to 102 yuan of gas supply of the jet list, and the air injection unit 102 is towards the carrying
Platform 200 is simultaneously blown on the plummer 200.
The diameter on air injection unit 100 towards the surface 102 of the plummer is preferably greater than or equal to the circular-base
300 diameter, so that 300 surface of substrate can receive air-flow.In the present embodiment, air injection unit is disc-shaped structure and diameter
It is 9 cun.
The air injection unit 102 can be that disc-shaped structure, cone-shaped structure or substantially coniform structure (are, for example,
Shower head structure), the air injection unit 102 has multiple ventholes, the air injection unit towards the side of the plummer 200
102 are blown by the venthole to the plummer 200, wherein, the aperture of the multiple venthole is, for example, to be less than or wait
In 1mm.The venthole is preferably uniformly distributed in the air injection unit 102, and uniform air-flow is provided so as to basad.
The air injection unit 102 can also be that by porous media material be, for example, the foam porous dielectric material of metallic aluminium, pottery
Porcelain porous material, carbon foams porous material etc. are made, and pass through the hole jet of porous media material.
The inflatable body 100 preferably exists towards the distance of the surface of the plummer 200 and the plummer 200
Between 0.1mm~2mm, for example, the inflatable body 100 is towards the surface (i.e. lower surface) of plummer 200 and plummer 200
Distance is 0.5mm.
The glue spreading apparatus further includes an inflatable body driving unit (not shown), the inflatable body driving unit
It is connect with the inflatable body 100 and for the inflatable body 100 to be driven to move.During gluing, the inflatable body driving is single
Member can drive the inflatable body 100 to be moved to the surface of plummer 200.After gluing, the inflatable body driving is single
Member can drive the inflatable body 100 to be moved to other positions.
The glue spreading apparatus further includes residue glue collector 400.The residue glue collector 400 prevents from anticipating for collecting residue glue
Outer excessive glue pollution.Entire coating technique process carries out in residue glue collector 400.The plummer 200 is set to residue glue receipts
400 inside of storage.
Although it is towards the surface (i.e. lower surface) of plummer and the distance of plummer using inflatable body in the present embodiment
0.5mm, as long as but actually to meet effect when distance is between 0.1mm~2mm ideal, alternatively, due to air feeder
Structure has towards the surface (i.e. lower surface) of plummer and the distance and the photoresist thickness of stream pressure, required coating of plummer
Close, such as when one timing of required thickness, pressure is bigger, and distance can be more remote, therefore inflatable body towards the surface of plummer (i.e.
Lower surface) with the distance of plummer, 2mm can also be more than.
From the above mentioned, the inflatable body 100 is movable to the top of the plummer 200 and to the plummer 200
It blows, so that photoresist 500 is coated on the substrate surface 301, so as to complete the technique of gluing.Plummer in whole process
200, without high-speed rotation, greatly reduce the damage for because centrifugal force is thrown out of upper surface of substrate with photoresist, reducing photoresist
Mistake rate.
In the present embodiment, can in the center dispensing of circular substrate 300, can also basad 300 it is multiple
Position dispensing, this multiple position can be symmetrical, and these positions are located on the circumference concentric with substrate.
It should be noted that plummer can be stationary during gluing in the present embodiment or low speed revolves
Turn to be, for example, to use to rotate with the speed for being less than 100 revs/min.Compare the high speed rotation (rotating speed with plummer in the prior art
More than 1000 revs/min), during the low speed rotation of plummer (rotating speed is less than 100 revs/min), the loss late of photoresist can be reduced.
Second embodiment
As shown in figs. 2 a-2 c, difference lies in, the air injection units 100 towards described for the present embodiment and first embodiment
There are one the side settings of plummer 200 and two strip slots, air knife is formed by the strip slot, to the plummer
200 blow, so that photoresist 500 is coated on the substrate surface.The plummer is rotated with the speed for being less than 100 revs/min.
Specifically, as shown in Figure 2 b, the inflatable body 100 is arranged to a slit and forms an air knife 601 to carrying
Platform is blown, and the photoresist 500 of 300 upper surface of substrate, 301 center position is uniformly laid in upper surface of substrate, completes substrate
The technique of gluing.The width that inflatable body 100 is arranged to a slit in the present embodiment is 1mm.
In whole process inflatable body formed air knife frictioning, while plummer carry out low speed rotation, greatly reduce because from
Mental power function photoresist is thrown out of upper surface of substrate, reduces the loss late of photoresist.It is in addition, quiet compared to first embodiment
Only motionless, plummer low-speed running accelerates the coating technique time, frictioning process can by photoresist in substrate comprehensively on more
Uniformly it is distributed.
In addition, as shown in Figure 2 c, the side of air injection unit 102 towards the plummer 200 can also set that there are two phases
Mutually vertical strip slot, to blow on plummer 200.
Preferably, in order to increase the dynamics of air knife in order to better frictioning, supercharging group can be set in inflatable body
Part increases the jet air pressure of inflatable body.
3rd embodiment
A kind of glue spreading method is present embodiments provided, is included the following steps：
First, to the substrate dispensing on plummer；
Wherein it is possible in the dispensing of circular-base center, it can also be in based multiple position dispensings and multiple positions
It puts and is symmetrically distributed on the circumference concentric with substrate.
Secondly, inflatable body is moved to the top of the plummer and blows to the plummer, so that photoresist is coated with
In the substrate surface.
Wherein, when blowing to the plummer, the plummer it is static or, the plummer is to be less than 100 revs/min
The speed rotation of clock.
Introduce the glue spreading method of the present embodiment in more detail with reference to Fig. 3.
Step 1：System is set, can according to area of base and need coating photoresist thickness set quantitative photoresist and
Inflatable body can also set that plummer is static or running speed to the distance of plummer, can also set the air blowing side of inflatable body
The jet air pressure of formula and inflatable body can set multiple certain bits of the dispensing position in the substrate in heart position or substrate
It puts.
Step 2：Substrate is loaded, is placed the substrate above on plummer.
Step 3：Dispensing, the dispensing in substrate by point glue equipment.
Step 4：Inflatable body declines and blows.For inflatable body during decline, inflatable body air blowing makes current rate
Reach stable state, after dropping to precalculated position, inflatable body can be made to blow substrate so that the photoresist in substrate is basad
Upper surface is distributed comprehensively.
Step 5：Plummer is static or rotates.
Step 6：Plummer is blown, and the support plate air injection unit of plummer is uniformly blown obliquely, under basad
Surface provides soil resistant air-flow.
Step 7：Substrate is unloaded, gluing terminates.
It should be noted that in the present embodiment using first loading substrate again dispensing the step of, can also elder generation dispensing reload
Substrate reloads substrate after increasing dispensing station dispensing.It should also be noted that, inflatable body is blown, plummer is blown, blown
Mechanism of qi structure declines, plummer is static or the used step in the present embodiment such as rotation, can successively carry out, can also synchronize
Operation.For example, can first inflatable body blow and inflatable body declines synchronous operation, then plummer is blown, plummer is static or
Rotation synchronous operation.It is, of course, also possible to have more versions, it is numerous to list herein.
Obviously, those skilled in the art can carry out the utility model various modification and variations without departing from this practicality
Novel spirit and scope.If in this way, these modifications and variations of the present invention belong to the utility model claims and
Within the scope of its equivalent technologies, then the utility model is also intended to include these modifications and variations.
Claims (14)
1. a kind of glue spreading apparatus, which is characterized in that including plummer and inflatable body, the plummer is used for bearing basement, institute
It states inflatable body to be moved to the top of the plummer after substrate dispensing and blow to the plummer, so that photoresist is uniform
It is coated on the substrate surface.
2. glue spreading apparatus as described in claim 1, which is characterized in that the inflatable body includes air supply unit and jet list
Member, the air supply unit connect with the air injection unit and are used to supply to the air injection unit, and the air injection unit is towards institute
It states plummer and blows to the plummer.
3. glue spreading apparatus as claimed in claim 2, which is characterized in that the air injection unit has towards the side of the plummer
There are multiple ventholes, blown by the venthole to the plummer.
4. glue spreading apparatus as claimed in claim 3, which is characterized in that the multiple venthole is uniformly distributed, the multiple logical
The aperture of stomata is less than or equal to 1mm.
5. glue spreading apparatus as claimed in claim 2, which is characterized in that the air injection unit has towards the side of the plummer
There are one strip slots；Alternatively, the air injection unit is set towards the side of the plummer, there are two orthogonal strips
Gap.
6. glue spreading apparatus as claimed in claim 5, which is characterized in that the substrate is circular-base, the strip slot
Length is greater than or equal to the diameter of the circular-base, and the width of the strip slot is between 0.5mm~5mm.
7. glue spreading apparatus as claimed in claim 2, which is characterized in that the air injection unit is made of porous media material, leads to
The hole for crossing the porous media material is blown to the plummer.
8. glue spreading apparatus as claimed in claim 2, which is characterized in that the air injection unit is disc-shaped structure or coniform knot
Structure.
9. glue spreading apparatus as claimed in claim 8, which is characterized in that the substrate be circular-base, the air injection unit face
It is greater than or equal to the diameter of the circular-base to the diameter on the surface of the plummer.
10. glue spreading apparatus as claimed in any one of claims 1-9 wherein, which is characterized in that the inflatable body is held towards described
The distance of the surface of microscope carrier and the plummer is between 0.1mm~2mm.
11. glue spreading apparatus as claimed in any one of claims 1-9 wherein, which is characterized in that it is single to further include inflatable body driving
Member, the inflatable body driving unit connect with the inflatable body and are used to that the inflatable body to be driven to move.
12. glue spreading apparatus as described in claim 1, which is characterized in that the plummer includes support plate, support column and carrying
Platform driving unit, the support plate are fixedly connected with support column, the plummer driving unit for drive the support column and
Support disc spins.
13. glue spreading apparatus as claimed in claim 12, which is characterized in that the support disc side is provided with obliquely or horizontal
The support plate air injection unit of air blowing.
14. glue spreading apparatus as claimed in claim 12, which is characterized in that the diameter of the support plate is less than the substrate of carrying
Diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721643772.2U CN207502910U (en) | 2017-11-30 | 2017-11-30 | Glue spreading apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721643772.2U CN207502910U (en) | 2017-11-30 | 2017-11-30 | Glue spreading apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207502910U true CN207502910U (en) | 2018-06-15 |
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ID=62507669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721643772.2U Active CN207502910U (en) | 2017-11-30 | 2017-11-30 | Glue spreading apparatus |
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| CN (1) | CN207502910U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019105405A1 (en) * | 2017-11-30 | 2019-06-06 | 上海微电子装备（集团）股份有限公司 | Gluing device and method |
-
2017
- 2017-11-30 CN CN201721643772.2U patent/CN207502910U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019105405A1 (en) * | 2017-11-30 | 2019-06-06 | 上海微电子装备（集团）股份有限公司 | Gluing device and method |
| CN109856914A (en) * | 2017-11-30 | 2019-06-07 | 上海微电子装备（集团）股份有限公司 | Glue stations and method |
| CN109856914B (en) * | 2017-11-30 | 2023-11-03 | 上海微电子装备（集团）股份有限公司 | Gluing device and method |
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